• Title/Summary/Keyword: c.p.Ti

Search Result 887, Processing Time 0.022 seconds

Effect of Surface Treatment of Ti on Oxidative Thin Film of Electronic Materials (전자재료 산화박막에 대한 Ti표면처리 효과)

  • Lee, Won-Kyu;Cho, Dae-Chul
    • Journal of the Korea Academia-Industrial cooperation Society
    • /
    • v.6 no.3
    • /
    • pp.270-272
    • /
    • 2005
  • The behavior of surface oxidation on cobalt silicide layer was investigated under rapid thermal oxidation (RTO) conditions. The cobalt silicide layer was prepared on p-type silicon substrates. We used Ti thin film as a capping layer in order to measure the degree of oxidation of the layer. Oxide grew faster on the cobalt silicide prepared with the Ti capping layer to reach ca $500{\AA}$ at $700^{\circ}C$ in thickness. The oxide film kept growing under $550^{\circ}C\~700^{\circ}C$ of the RTO condition, resulting in a saturated state above $500{\AA}$.

  • PDF

Low resistivity ohmic Pt/Si/Ti contacts to p-type 4H-SiC (Pt/Si/Ti P형 4H-SiC 오옴성 접합에서 낮은 접촉 저항에 관한 연구)

  • 양성준;이주헌;노일호;김창교;조남인;정경화;김은동;김남균
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2001.11a
    • /
    • pp.521-524
    • /
    • 2001
  • In this letter, we report on the investigation of Ti, Pt/Si/Ti Ohmic contacts to p-type 4H-SiC. The contacts were formed by a 2-step vacuum annealing at 500$^{\circ}C$ for 1h, 950$^{\circ}C$ for 10 min respectively. The contact resistances were measured using the transmission line model method, which resulted in specific contact resistivities in the 3.5x10$\^$-3/ and 6.2x10$\^$-4/ ohm/$\textrm{cm}^2$, and the physical properties of the contacts were examined using x-ray diffraction, microscopy, AES(auger electron spectroscopy). AES analysis has shown that, at this anneal temperature, there was a intermixing of the Ti and Si, migration of into SiC. Overlayer of Pt had the effect of decreasing the specific contact resistivity and improving the surface morphology of the annealed contact.

  • PDF

Piezoelectric and Dielectric Properties of NaNbO3-LiNbO3 Ceramics according to the BaTiO3 Substitution (BaTiO3 치환에 따른 NaNbO3-LiNbO3 세라믹스의 압전 및 유전특성)

  • Lee, Sang-Ho;Yoo, Ju-Hyun;Mah, Suk-Burm;Kim, Seang-Goo
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.22 no.3
    • /
    • pp.205-209
    • /
    • 2009
  • In this study, in order to develop the composition ceramics for lead-free ultrasonic motor, (1-x-0.09)$NaNbO_{3-x}BaTiO_3-0,09LiNbO_3$ ceramics were fabricated using a conventional mixed oxide process and their piezoelectric and dielectric characteristics were investigated according to the $BaTiO_3$ substitution. All the specimens showed orthorhombic phase structure without secondary phase, $BaTiO_3$ substitution enhanced density, dielectric constant(${\epsilon}_r$) and electromechanical coupling factor($k_p$), However, mechanical quality factor was deteriorated. Curie temperature of specimens was observed as about $380^{\circ}C$. At the $BaTiO_3$ substitution of 4 mol%, density, electromechanical coupling factor($k_p$), dielectric constant(${\epsilon}_r$) and piezoelectric constant($d_{33}$) of specimen showed the optimum value of $4.493g/cm^3$, 0.236, 175, 70 pC/N, respectively.

Formation of TiO(OH)$_2$ Ultrafine Particles by Reverse Micelle (역마이셀에 의한 TiO(OH)$_2$ 미세분말 제조)

  • 장화익;강석원;이광래
    • Journal of the Korean Ceramic Society
    • /
    • v.35 no.6
    • /
    • pp.594-602
    • /
    • 1998
  • Titanium hydroxide (TiO({{{{ {OH }_{2 } }})) fine particles were produced by the reverse micelle technique. For the formation of titanium hydroxide (TiO({{{{ {OH }_{2 } }})) particles with the technique reversed micellar solution was prepared by solubilizing water into organic solvent (isooctane) with a surfactant and titanium alkoxide (tetraisopropyl orthotitanate) diluted with isopropyl alcohol was added to the reversed micellar solution. The hdrolyzed species (TiO({{{{ {OH }_{2 } }})) was formed by the hydrolysis of titanium alkoxide and titanium dioxide is then formed by the condensation of the hydrolyzed species. There are several process variables such as surfactants concentration of surface cosurfactant hydrolysis temperature and pH. In this work the ef-fects of process variables on paticle shapes particle size distribution and paticle agglomeration were bi-nodal for an anionic surfactant(AOT) in the whole range of temperature pH and surfactant concentration of this experiment. The addition of ethanol as a cosurfactant resulted in narrow particle size distribution of the experiment. The additiono of ethanol as a cosurfactant resulted in narrow particle size distribution and 0.12${\mu}{\textrm}{m}$ of smaller average particle diameter. FT-IR spectrum of particles shows the absorption peak of Ti-OH bonding and Ti-O bonding. An exothermic peak around 41$0^{\circ}C$ in TGA-DTA curve shows that crys- tallized anatase phase appears and completely transits to anatase around 45$0^{\circ}C$.

  • PDF

Effect of Post Heat Treatment on Bonding Interfaces in Ti/STS409L/Ti Cold Rolled Clad Materials (Ti/STS409L/Ti 냉연 클래드재의 접합계면특성에 미치는 후열처리의 영향)

  • Bae, D.S.;Kim, W.J.;Eom, S.C.;Park, J.H.;Lee, S.P.;Kim, M.J.;Kang, C.Y.
    • Transactions of Materials Processing
    • /
    • v.20 no.2
    • /
    • pp.140-145
    • /
    • 2011
  • The aim of the present study is to derive optimized post heat treatment temperatures to get a proper formability for Ti/STS409L/Ti clad materials. These clad materials were fabricated by cold rolling followed by a post heat treatment process for 10 minutes at temperatures ranging from $500^{\circ}C$ to $850^{\circ}C$. The microstructure of the interface was observed using a Scanning Electron Microscope(SEM) and an Energy Dispersive X-ray Analyser(EDX) in order to investigate the effects of post heat treatment on the bonding properties of the Ti/STS409L/Ti clad materials. Diffusion bonding was observed at the interfaces with a diffusion layer thickness increasing with the post heat treatment temperature. The diffusion layer was composed of a type of(${\varepsilon}+{\zeta}$) intermetallic compound containing additional elements, namely, Fe, Ti and Ni. The micro Knoop hardness of the Ti/STS409L interfaces was found to increase with heat treatment up to $800^{\circ}C$ and then decrease for temperatures rising up to $850^{\circ}C$. The tensile strength was shown to decrease for heat treatment temperature increasing to $750^{\circ}C$ and then increase rapidly for temperature rising up to $850^{\circ}C$. A post heat treatment temperature range of $700{\sim}750^{\circ}C$ was found to optimize the formability of Ti/STS409L/Ti clad materials.

Effect of Rapid Thermal Annealing and Orientation of Si Substrate on Structural and Electrical Properties of MOCVD-grown TiO2 Thin Films (급속 후 열처리 및 실리콘기판 배향에 따른 MOCVD-TiO2박막의 구조적.전기적 특성)

  • 왕채현;최두진
    • Journal of the Korean Ceramic Society
    • /
    • v.35 no.1
    • /
    • pp.88-96
    • /
    • 1998
  • The structural and electrical properties of titanium dioxide(TiO2) thin films deposited on p-type (100) si and 4$^{\circ}$off(100) Si substartes by metalorganic chemical vapor deposition (MOCVD) have been studied with post rapid thermal annealing. TiO2 thin films of anatase phase were grown at 300-500$^{\circ}C$ using titanium post rapid thermal annealing at a temperature of 800$^{\circ}C$ for 30sec. rutile phase was observed in the condition of the deposition temperature over 350$^{\circ}C$ in the ambient air atmosphere and at 500$^{\circ}C$ in cacuu,. SEM and AFM study show-ed surface roughness were increased slightly from 40${\AA}$to 55${\AA}$ after annealing due to grain growth and phase transformation. From capacitane-voltage measurement of Al/TiO2./p-Si structure after annealing we obtained ideal capacitance-voltage characteristics of MOS structure with dielectric constant of 16-22 in case of (100) Si and about 30- in case of 4$^{\circ}$off(100) Si but showed the higher leakage current.

  • PDF

Preparation of Submicron Barium Titanate Powders. (초미립 $BaTiO_3$의 합성)

  • 안영필;김복희;황재석;유경섭
    • Journal of the Korean Ceramic Society
    • /
    • v.21 no.3
    • /
    • pp.278-282
    • /
    • 1984
  • Barium titanate powder was made by firing the complex hydroxide which had been synthesized with chemical wet process by the medium of $H_2O_2$. This experiment was done as following A mixed solution of $BaCl_2$, $TiCl_4$ and $H_2O_2$ with 1:1:10 mol ratio was prepared. Ammonium hydroxide was added into the mixed solution. In the range of pH 8-10 $BaTiO_3$ complex hydroxide was obtained and treated at room temperature 11$0^{\circ}C$, 20$0^{\circ}C$, 40$0^{\circ}C$ and $600^{\circ}C$. The results obtaiined from this experiment were as follows. At room temperature $BaTiO_3$ complex hydroxide was amorphous. Above 10$0^{\circ}C$ crystalline $BaTiO_3$ was obtained and particle size of $BaTiO_3$ was increased with elevated temperature. So the particle size of BaTiO3 could be controlled by the firing temperature. After treating $BaTiO_3$ complex hydroxide at 10$0^{\circ}C$ the average particle size of $BaTiO_3$ was 0.22$\mu\textrm{m}$.

  • PDF

Characteristics and Photocatalytic Properties of TiO2 Nanoparticles Synthesized by Thermal Decomposition Process (기상 합성 TiO2 나노입자의 특성 및 광촉매 특성)

  • Lee, Myung-Hwoon;Kim, Min-Su;Jurng, Jong-Soo;Chin, Sung-Min;Park, Eun-Seuk;Lee, Gyo-Woo
    • Journal of Environmental Science International
    • /
    • v.19 no.5
    • /
    • pp.577-584
    • /
    • 2010
  • The generation of $TiO_2$ nanoparticles by a thermal decomposition of titanium tetraisopropoxide (TTIP) was carried out experimentally using a tubular electric furnace at various synthesis temperatures (700, 900, 1100 and $1300^{\circ}C$) and precursor heating temperatures (80, 95 and $110^{\circ}C$). Effects of degree of crystallinity, surface area and anatase mass fraction of those $TiO_2$ nanoparticles on photocatalytic properties such as decomposition of methylene blue was investigated. Results show that the primary particle diameter obtained from thermal decomposition of TTIP was considerably smaller than the commercial photocatalyst (Degussa, P25). Also, those specific surface areas were more than 134.4 $m^2$/g. Resultant $TiO_2$ nanoparticles showed improved photocatalytic activity compared with Deggusa P25. This is contributed to the higher degree of crystallinity, surface area and anatase mass fraction of $TiO_2$ nanoparticles compared with P25.

Electrical Properties of (Ba,Ca)(Ti,Zr)O3 Ceramics for Bimorph-type Piezoelectric Actuator

  • Shin, Sang-Hoon;Yoo, Ju-Hyun
    • Transactions on Electrical and Electronic Materials
    • /
    • v.15 no.4
    • /
    • pp.226-229
    • /
    • 2014
  • In this study, lead-free $(Ba_{0.85}Ca_{0.15})(Ti_{1-x}Zr_x)O_3$ ceramics and a bimorph-type piezoelectric actuator were fabricated using the normal oxide-mixed sintering method, and their dielectric properties, microstructure, and displacement properties were investigated. From the results of X-ray diffraction, the pattern of the specimen has a pure perovskite structure. In addition, no secondary impurity phases were found. The excellent piezoelectric coefficient of $d_{33}=454pC/N$, the electromechanical coupling factor $k_p=0.51$, the dielectric constant ${\varepsilon}_r=3,657$, the mechanical quality factor $Q_m=239$, and $T_c$(Tetragonal-Cubic) =$90^{\circ}C$ were shown at x= 0.085. ${\Delta}k_p/k_p20^{\circ}C$ and ${\Delta}f_r/f_r20^{\circ}C$ showed the maximum value of -0.255 and 0.111 at $-20^{\circ}C$ and $80^{\circ}C$, respectively. The maximum total-displacement was $60{\mu}m$ under the input voltage of 50 V. As a result, it is considered that lead-free $(Ba_{0.85}Ca_{0.15})(Ti_{1-x}Zr_x)O_3$ ceramics is a promising candidate for piezoelectric actuator application for x= 0.085.

Study on the Powder Synthesis of $BaTiO_3$ and its Dielectric Properties (초소형 캐패시터용 $BaTiO_3$분말합성 및 소결특성에 관한 연구)

  • 문흥수;박병규;이태근;김철긴;이석근
    • Korean Journal of Crystallography
    • /
    • v.10 no.1
    • /
    • pp.56-65
    • /
    • 1999
  • 수열법을 이용하여 미세한 BaTiO3 분말을 합성하였다. Ti원으로 두 종류의 TiO2 gel을 사용하였으며 그 크기와 모양을 BaTiO3 합성에 주는 영향을 고찰하였다. 구형의 단분산 TiO2 gel을 사용하여 Ba(NO3)2 수용액에서 수열 합성한 BaTiO3 분말은 입자크기도 균일하였으며 응집이 일어나지 않아않았다. 비교적 낮은 pH에서 구형 TiO2 gel을 사용하여 합성한 BaTiO3 분말은 구형을 그대로 유지하였지만 높은 pH에서 합성한 BaTiO3 분말은 그 구형이 분해되었다. KOH양이 많아지고, 합성시간이 길어짐에 따라 합성된 BaTiO3 분말의 크기는 커졌으며 그 c/a 값도 증가하였다.

  • PDF