• Title/Summary/Keyword: c-Axis orientation

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Structural Properties of KLN Thin Film Deposited on Pt Coated Si Substrate (Pt 코팅된 Si 기판에 제조한 KLN 박막의 구조적 특성)

  • 박성근;이기직;백민수;전병억;김진수;남기홍
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.5
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    • pp.410-416
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    • 2001
  • KLN thin films were fabricated on Pt coated Si(100) wafer using an rf-magnetron sputtering method. The grown KLN thin film consists of 4-fold grains. In this experiment, the structure of 4-fold grained thin film was investigated using XRD and SEM measurements. Pt layer was also deposited using the rf-magnetron sputtering method,. XRD measurement showed that he Pt thin film has Gaussian distribution form with strong (111) direction orientation. The KLN thin film has preferred-orientation of (001) direction, and the peak consists of 2 separate peaks; one with broad FWHM and the other with narrow FWHM. The sharp peak is due to single crystal, and combining with Em results, the 4-fold grain consists of singel crystals with c-axis normal to substrate.

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Magnetic Properties of Electrodeposited Co-Ni-P Alloys (Co-Ni-P합금도금층의 자기적 성질에 관한 연구)

  • Paik, M. S.;Kim, Y. K.;Kang, T.;Sohn, H. J.
    • Journal of the Korean institute of surface engineering
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    • v.24 no.2
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    • pp.96-102
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    • 1991
  • Co-Ni-P alloys were electrodeposited from NH4Cl-sulfate-hypophosphite baths under various plating conditions. Their effective anisotropic magnetic field which is one of the important properties for magnetic recording materials were investigated as the function of alloy compositions and c-axis orientation. The preferred orientation and the contents of Ni and P depend on the pH of solutions and also on the current density. It was found that the alloy films deposited from the solutions of pH4 at high current density had c-axis orientation parallel to the growth direction and the effective anisotropic fields sufficient for perpendicular magnetic recording application.

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Influences of Complexing Agents on the Formation of the Perpendicular Magnetic Film by the Electroless Plating (무전해 도금에 의한 수직자기 박막제조시의 착화제의 영향)

  • Kim, Yeong-U;Park, Jeong-Il;Park, Gwang-Ja;Kim, Jo-Ung;Ham, Yong-Muk;Lee, Ju-Seong
    • Journal of the Korean institute of surface engineering
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    • v.20 no.4
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    • pp.135-143
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    • 1987
  • Various complexing agents were investigated to see the effects on the normal orientation of HCP structure of Co-alloy to the film plane in ammoniacal electroless plating bath. To obtain the optimum condition, several complexing agents were investigated to compare the C-axis perpendicular orientation. Results were that succinate - citrate, malonate - succinate, malonate bath were useful for that purpose. Among these complexing agents, succinate - citrate system was obtained as the best one. X-ray diffraction patterns were used to compare the film properties with C-axis perpendicular orientation.

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CL-data Optimization of 5-axis Face-milling Via C-space and Effective-radius Map (C-space 및 유효반경-맵을 이용한 5축 페이스 밀링의 공구자세 최적화에 관한 연구)

  • 박정환;이정근
    • Korean Journal of Computational Design and Engineering
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    • v.7 no.1
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    • pp.34-41
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    • 2002
  • Five-axis NC machining, in general, is utilized in fabricating impellers, turbine blades, marine propellers that can be machined more effectively rather than three-axis machining. There have been many researches concerning tool interference avoidance, optimization of tool orientation. The C-space or Configuration-space was originated from the robotics area, which depicts interference-free joint-values in motion planning. In the paper we propose an optimizing scheme by which the maximum effective-radius of a face-milling cutter can be achieved for each CC(cutter-contact) point. Also the concept of a C-space for a CC point, the effective-radius map for 5-axis face-milling, and some illustrative examples of marine propeller machining, are presented.

Fabrication of MgO(100)/$Si_3N_4/SiO_2/Si_3N_4$/Si Substrate for Pyroelectric IR Sensor (초전형 적외선 센서를 위한 MgO(100)/$Si_3N_4/SiO_2/Si_3N_4$/Si 기판 제작)

  • Kim, Sung-Woo;Sung, Se-Kyoung;Ryu, Jee-Youl;Choi, Woo-Chang;Choi, Hyek-Hwan;Lee, Myoung-Kyo;Kwon, Tae-Ha
    • Journal of Sensor Science and Technology
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    • v.9 no.2
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    • pp.90-95
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    • 2000
  • The substrate for pyroelectric IR sensor which has orientation similar to MgO single crystal was fabricated by depositing the MgO thin film on $Si_3N_4/SiO_2/Si_3N_4$/Si. The MgO thin film was deposited by RF magnetron sputtering. The c-axis orientation of PLT thin film deposited on Pt/MgO(100)/$Si_3N_4/SiO_2/Si_3N_4$/Si substrate was investigated. The MgO thin film deposited at $500^{\circ}C$ at a gas pressure of 30 mTorr with RF power of 160 W exhibited a good a-axis orientation. The PLT thin films deposited on these substrates also exhibited c-axis orientation similar to the PLT thin films deposited on MgO single crystal substrate.

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Thickness and Orientation Effect on the YBCO Thin Films For Microwave Device Applications (마이크로파 소자응용을 위한 YBCO 박막의 두께 및 증착온도에 관한 특성연구)

  • 이상렬;전희석;허창회;한경보;전창훈
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.15 no.6
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    • pp.539-542
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    • 2002
  • The effect of the superconducting film thickness on the surface resistance has been investigated. Superconducting YBCO thin films have been grown on MgO substrates by pulsed laser deposition. The dependence of the orientation of YBCO film on thickness has been investigated by X-ray diffraction technique. X-ray diffraction indicated that the film orientation was changed by increasing the film thickness and by changing the substrate temperature. The microwave properties of the films with mixed orientations of a-axis and c-axis will be reported for the applications of microwave devices.

Thickness dependence of grain growth orientation in MgB2 films fabricated by hybrid physical-chemical vapor deposition

  • Ranot, Mahipal;Kang, W.N.
    • Progress in Superconductivity and Cryogenics
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    • v.15 no.2
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    • pp.9-11
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    • 2013
  • We have investigated the effect of thickness of the MgB2 film on the grain growth direction as well as on their superconducting properties. $MgB_2$ films of various thicknesses were fabricated on c-cut $Al_2O_3$ substrates at a temperature of $540^{\circ}C$ by using hybrid physical-chemical vapor deposition (HPCVD) technique. The superconducting transition temperature ($T_c$) was found to increase with increase in the thickness of the $MgB_2$ film. X-ray diffraction analysis revealed that the orientation of grains changed from c-axis to a-axis upon increasing the thickness of the $MgB_2$ film from 0.6 to 2.0 ${\mu}m$. $MgB_2$ grains of various orientations were observed in the microstructures of the films examined by scanning electron microscopy. It is observed that at high magnetic fields the 2.0-${\mu}m$-thick film exhibit considerably larger critical current density ($J_c$) as compared to 0.6-${\mu}m$-thick film. The results are discussed in terms of an intrinsic-pinning in $MgB_2$ similarly as intrinsic-pinning occurring in high-Tc cuprate superconductors with layered structure.

Frequency Characteristics of Li Doped ZnO Thin Film Resonator by Annealing Temperatures (열처리 온도에 따른 Li 도펀트 ZnO 박막형 공진기의 주파수 특성)

  • Kim, Eung-Kwon;Kim, Young-Sung
    • Journal of the Korean Ceramic Society
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    • v.43 no.9 s.292
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    • pp.527-531
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    • 2006
  • In order to study the influence of post-annealing treatment on the frequency characteristics of the Li doped ZnO(Li:ZnO) FBAR(Film Bulk Acoustic Resonator) device, we investigated the material and electrical properties of Li:ZnO films in the annealing temperature range from 300 to $500^{\circ}C$. In our samples, as annealing temperature was increased, Li:ZnO films showed the improvement of high c-axis orientation and resistance value with relieved stress and low surface roughness. In addition to, the return loss in the frequency property of fabricated FBAR was improved by annealing treatment from 24.9 to 29.8dB. From experimental results, the optimum post-annealing temperature for FBAR is $500^{\circ}C$ and it can obtain excellent Li:ZnO FBAR performance with stronger c-axis orientation, smoother surface, relieved stress, and lower loss factor.

A Study on Preferred Orientation of ZnO Piezoelectric Thin Film Using Helped Seed Layer (보조씨드층을 이용한 ZnO 압전박막의 우선배향성에 관한 연구)

  • Park, In-Chul;Kim, Hong-Bae
    • Journal of the Korean Vacuum Society
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    • v.15 no.6
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    • pp.619-623
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    • 2006
  • The most important factor which determines resonance characteristics of FBAR(Film Bulk Acoustic Resonator) is the piezoelectricity of piezoelectric film. The piezoelectric properties of ZnO thin films which is strong as FBAR piezoelectric film is determined by the degree of c-axis preferred orientation with (002) plan. Therefore, many researchers have been interested in the study on the preferred orientation of the piezoelectric thin film. This paper has studied the preferred orientation of ZnO piezoelectric thin films using the helped seed layer of ZnO. The result shows that the c-axis ZnO thin films with columnar grains that the value of standard $deviation(\sigma)$ of XRD rocking curve is of $\sigma=1.15^{\circ}$ have the excellent piezoelectric property.