A Study on the etching mechanism of $CeO_2$ thin film by high density plasma
(고밀도 플라즈마에 의한 $CeO_2$ 박막의 식각 메커니즘 연구)
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- Journal of the Institute of Electronics Engineers of Korea SD
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- v.38 no.12
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- pp.8-13
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- 2001