• Journal of the Semiconductor & Display Technology
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• v.22 no.4
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• pp.66-71
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• 2023

This paper describes a hybrid cleaning method of silicon wafer combining nano-bubble and ultrasound to remove sub-micron particles and contaminants with minimal damage to the wafer surface. In the megasonic cleaning process of semiconductor manufacturing, the cavitation induced by ultrasound can oscillate and collapse violently often with re-entrant jet formation leading to surface damage. The smaller size of cavitation bubbles leads to more stable oscillations with more thermal and viscous damping, thus to less erosive surface cleaning. In this study, ultrasonic energy was applied to the wafer surface in the DI water to excite nano-bubbles at resonance to remove contaminant particles from the surface. A patented nano-bubble generator was developed for the generation of nano-bubbles with concentration of 1×10⁹ bubbles/ml and nominal nano-bubble diameter of 150 nm. Ultrasonic nano-bubble technology improved a contaminant removal efficiency more than 97% for artificial nano-sized particles of alumina and Latex with significant reduction in cleaning time without damage to the wafer surface.

• Journal of the Korean Society of Visualization
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• v.21 no.3
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• pp.75-84
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• 2023

In this study, we conducted analysis of bubble dynamics and flow of liquid phase change material(PCM) using shadowgraphy and particle image velocimetry(PIV). Characteristics of internal flow varied depending on locations of injection when solid PCM was liquefied from heated vertical wall. When bubbles rose immediately, they exhibited elliptical shape and zigzag trajectory. In contrast, when bubbles rose after merging at the bottom of solid PCM, with equivalent diameter for the inter-wall distance of 0.64 or greater, they showed a jellyfish shape and strong rocking behavior. It was observed by the PIV that the small ellipse bubbles made most strong flow inside the liquid PCM. Furthermore, the flow velocity was highest in the case of front injection, as the directions of temperature gradients and bubble-driven flow were aligned. The results underscore the significant influence of injection location on various characteristics, including bubble size, shape, rising path of bubbles, and internal flow.

• Proceedings of the KIEE Conference
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• 2002.07b
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• pp.796-798
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• 2002

In these days, the interruption capability of some circuit breakers, which are installed in the transmission systems, is getting lower than the magnitude of the fault current because of continuous increase of power demand and relatively short power line which was installed in forms of mesh network As a result of these situations, fault current limiters (FCLs) are strongly necessary. There are various types which is investigated around the world, and new power apparatuses that have been newly considered and developed by many manufactures. In this paper, we considered resistive superconducting fault current limiters with YBCO thin films. The resistive limiters utilize a transition of YBCO films from superconducting to normal state caused by exceeding the critical current. By means of newly occurred impedance, the fault current will be limited effectively. Generally, a few current path patterns are available for YBCO films to enhance the current limiting performance of YBCO films. In this paper. the meander-type and the bi-spiral-type were used for current paths of YBCO flims. When YBCO films are quenched into the normal state, bubbles could be observed on the surface of YBCO films. Using our high-speed camera, the number of bubbles and the size of bubbles could be visualized and the relation between bubbles and current density was analyzed. By means of moving pictures of bubbles, we observed how the quench extended or how the heat was conducted in films.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.3 no.2
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• pp.142-151
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• 1991

In the present investigation, it has been proposed to utilize a direct contact heat exchanger as an evaporator to solve the difficulties such as scaling, corrosion and law thermal efficiencies, associated with the conventional evaporator. Liquified nitrozen was utilized as a working fluid to investigate basic natures of bubble dynamics in the evaporator, and spray nozzles were adopted to inject liquified nitrozen into the spray column with varying flow rates of dispersed phase fluids. Experimentations were carried out in the range of $6.54{\times}10^{-4}kg/s$ - 0.030 kg/s for dispersed phase flow rates with one, three and five nozzle holes. Observing the bubble dynamics for the evaporator the feasibility of utilizing a direct contact heat exchanger as a LNG evaporator has been evaluated. The results show that no eruption phenomena was observed in the present investigation with $LN_2$ and the interface between $N_2$ bubbles and water was fully turbulent. It is believed that the high injection velocity of $LN_2$ through the spray nozzles provide good mixing effects for both heat and mass transfers between water and $N_2$ bubbles. Ice was formed on the surface of the spray nozzle for higher $LN_2$ flow rates. However, even in this case, it is observed that the ice was detached as soon as it was formed. Under the present experimental conditions, the shapes of $LN_2$ bubbles were in the spherical-cap region according to the Clift, Grace and Weber Graphs. The height of foam region caused by the breakup of larger bubbles keeps increasing with high injection velocities until it reaches it's maximum height.

• Journal of Korean society of Dental Hygiene
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• v.10 no.3
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• pp.531-540
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• 2010

Objectives : In this study, following the cavity restorations with low copper conventional alloy, high copper admixed one and high copper unicompositional one, which are used the most frequently in a clinical setting at the present, to experiment the time-dependent changes of strength, bubbles were examined. Besides, to examine the detrimental effects of mercury contained in dental amalgam, the amount of mercury release was evaluated. Methods : As dental amalgams which were used herein, [BESTALOY], [Hi-Aristaloy 21] and [Sybraloy] were selected for a low-copper conventional amalgam, a high-copper admixed one and a high-copper unicompositional one in the corresponding order. The formation of bubbles and the weight ratio of mercury release were evaluated using a field emission scanning electron microscope (FE-SEM). Thus, the following results were obtained: Results : 1. The time-dependent amount of mercury release reached a statistical significance in three types of alloys, which was shown in such a descending order as [BESTALOY], [Hi-Aristaloy 21] and [Sybraloy]. 2. A low-copper conventional type, BESTALOY is a cutting type and it was found to have an increased formation of fine bubbles. In the remaining two types, [Hi-Aristaloy 21] (a high-copper admixed alloy) and [Sybraloy] (a high-copper unicompositional alloy), the time-dependent changes in the formation of bubbles was negligible. Conclusions : Accordingly, this type of mercury release from amalgam alloy denotes the difference in the weight ratio of total constituents between after 24 hours and after two weeks. But further studies are warranted to examine the amount of mercury release which is detrimental to human bodies. Besides, a low-copper conventional alloy is a cutting type and it was characterized by the abundant formation of bubbles in a time-dependent manner. This implies that the strength of amalgam is impaired, which should be considered in selecting the appropriate amalgam alloy in a clinical setting.

• Journal of the Society of Naval Architects of Korea
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• v.39 no.1
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• pp.16-27
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• 2002

A level-set method is used for analyzing the behaviors of gas bubbles in two fluids incompressible viscous flow domain. The governing equations are solved by using a finite volume method. The numerical results are verified by comparing with the experimental and other computational results. Computations for the deformations and motions of one or multi-bubbles in the flow domain with the initial undisturbed free interface are conducted. It can be seen that numerical results for different surface tension and density ratio arise very different behaviors of bubbles. When bubbles rise near the free interface, the free interface gives some great influence on the behaviors of bubbles. The present results computed by a level-set method give useful information about the properties of bubble motions and deformations.

• Proceedings of the KSME Conference
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• 2002.08a
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• pp.393-396
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• 2002

Submerged gas-injected system can be applied to various industrial field such as metallurgical and chemical processes, So this study aims at presenting the relevant relationship between gas phase and liquid phase in a gas-injected bath. In a cylinderical bath, local gas volume fraction and bubble frequency were measured by electroconductivity probe and oscilloscope. The temperature of each phase was measured using thermocouple and data acquisition system. In vertical gas injection system, gas-liquid two phase plume was formed, being symmetry to the axial direction of injection nozzle and in a shape of con. Lacal gas-liquid flow becomes irregular around the injection nozzle due to kinetic energy of gas and the flow variables show radical change at the vicinity of gas(air) injection nozzle As most of the kinetic energy of gas was transferred to liquid in this region, liquid started to circulate. In this reason, this region was defined as 'developing flow region' The Bubble was taking a form of churn flow at the vicinity of nozzle. Sometimes smaller bubbles formed by the collapse of bubbles were observed. The gas injected into liquid bath lost its kinetic energy and then was governed by the effect of buoyancy. In this region the bubbles which lost their kinetic energy move upward with relatively uniform velocity and separate. Near the gas nozzle, gas concentration was the highest. But it started to decrease as the axial distance increased, showing a Gaussian distribution.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.10 no.7
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• pp.1446-1452
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• 2009

The behavior of bubbles in a centrifugal fluidized bed with a 340mm inner diameter, 195mm high was observed by photographs using 10.5${\mu}m$and 21.5${\mu}m$mean diameter of $Al_2O_3$particles as bed materials at each of 400rpm, 600rpm, 800rpm, and 1000rpm number of rotations of the rotor. At these experimental ranges, the experimental results clearly proved the effect of number of rotations of the rotor on the behavior of bubbles in the centrifugal fluidized bed. As the number of rotations of the rotor increased, the gas velocity at which bubbles begin to be formed also increased but diameter of bubbles decreased. And sizes of the bubbles were relatively small.

• The Journal of the Acoustical Society of Korea
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• v.25 no.8
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• pp.395-402
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• 2006

When an active SONAR works in the subsurface. its detection Performance is limited by the reverberation. The winds Play a primary role in the Production of bubbles in the ocean. And the bubbles as efficient scatters contribute to the reverberant field. In this Paper the effects of wind-generated bubbles on sound propagation in the subsurface are investigated as a mid-frequency Hull-mounted SONAR works. The active signal excess is calculated at source depths 3. 5. and 10m considering bubble layer for frequencies 5. 7.5, and 10kHz. The change of the near-surface sound speed tend to increase surface reverberation levels and change the active signal excess. In the 10m/s winds. the maximum detection range reduces over 3km through the near-surface . The reason is the upper refraction due to the wind-generated bubbles.

• Journal of Electrical Engineering and Technology
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• v.10 no.1
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• pp.295-298
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• 2015

Ozone micro-bubble cleaning system was designed, and made to develop a unique technique to clean wafers by using ozone micro-bubbles. The ozone micro-bubble cleaning system consisted of loading, cleaning, rinsing, drying and un-loading zones, respectively. In case of the cleaning the silicon wafers of a solar cell, more than 99 % of cleaning efficiency was obtained by dipping the wafers at 10 ppm of ozone for 10 minutes. Both of long cleaning time and high ozone concentration in the wet-solution with ozone micro-bubbles reduced cleaning efficiency because of the re-sorption of debris. The cleaning technique by ozone micro-bubbles can be also applied to various wafers for an ingot and LED as an eco-friendly method.