• Title/Summary/Keyword: bottom step

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Humidity Induced Defect Generation and Its Control during Organic Bottom Anti-reflective Coating in the Photo Lithography Process of Semiconductors

  • Mun, Seong-Yeol;Kang, Seong-Jun;Joung, Yang-Hee
    • Journal of information and communication convergence engineering
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    • v.10 no.3
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    • pp.295-299
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    • 2012
  • Defect generation during organic bottom anti-reflective coating (BARC) in the photo lithography process is closely related to humidity control in the BARC coating unit. Defects are related to the water component due to the humidity and act as a blocking material for the etching process, resulting in an extreme pattern bridging in the subsequent BARC etching process of the poly etch step. In this paper, the lower limit for the humidity that should be stringently controlled for to prevent defect generation during BARC coating is proposed. Various images of defects are inspected using various inspection tools utilizing optical and electron beams. The mechanism for defect generation only in the specific BARC coating step is analyzed and explained. The BARC defect-induced gate pattern bridging mechanism in the lithography process is also well explained in this paper.

An analysis of ground supported farm silo with variable thickness (I) -Part I mechanical characteristics of shell with Variable thickness- (지반과 구조물사이의 상호작용을 고려한 변단면 도통형쉘의 해석 (I) -변단면 쉘의 역학적 특성 (I)-)

  • 조진구;조현영
    • Magazine of the Korean Society of Agricultural Engineers
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    • v.31 no.4
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    • pp.58-71
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    • 1989
  • This study aims to develop a computerized program for analysis of the ground-supported cylindrical shell structure with step varied section and to find out its mechanical characteri- stics through application of the developed program to the analysis of a ensiled farm silo as a model structure. The thickness of wall and bottom-plate of farm silo is assumed to be step-varied and its detailed structural dimensions are presented in Tab. 1 and 2. Several numerical case studies show that sectional stresses of the sample structures are largely reduced by adopting "varied section" design technique. And, other major results ob- tained from this study are summarize4 as follows ; 1. The variation of wall-thickness has a great influence on bending stresses of wall. Ho- wever, the larger the relative thickness of bottom-plate is, the smaller the influence is. 2. The magnitude of thickness of projecting toe of bottom-plate has negligible effect on sectional stresses 3. The conventional design methodology, which assumes the bottom edge of wall as clam- ped on ground, is proved to be discarded through the numerical analysis. 4. It is found that the "varied section" design technique should get similar effects as in the case of thick bott6m-plate having uniform thickness. 5. The variation of wall-thickness has a considerable effect on the bending stresses of bo- ttom-plate. Especially, this phenomenon is very remarkable in its projecting toe. In some cases. the negative bending moment may be acted on.

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A Mathematical Structure and Formulation of Bottom-up Model based on Linear Programming (온실가스감축정책 평가를 위한 LP기반 상향식 모형의 수리 구조 및 정식화에 대한 연구)

  • Kim, Hu Gon
    • Journal of Energy Engineering
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    • v.23 no.4
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    • pp.150-159
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    • 2014
  • Since the release of mid-term domestic GHG goals until 2020, in 2009, some various GHG reduction policies have been proposed. There are two types of modeling approaches for identifying options required to meet greenhouse gas (GHG) abatement targets and assessing their economic impacts: top-down and bottom-up models. Examples of the bottom-up optimization models include MARKAL, MESSAGE, LEAP, and AIM, all of which are developed based on linear programming (LP) with a few differences in user interface and database utilization. In this paper, we suggest a simplified LP formulation and how can build it through step-by-step procedures.

A Study on the Grouting Characteristics of Top-down Multi-step Pressure Grouting Method (하향식 다단 압력 그라우팅 방법의 주입특성에 대한 연구)

  • Lee, Hongsung;Lee, Seungho
    • The Journal of Engineering Geology
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    • v.29 no.3
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    • pp.201-209
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    • 2019
  • Bottom-up multi-stage pressure grouting is widely applied to domestic slopes and tunnels. It involves injecting earth from the ground to the surface after drilling. Various reports of construction performance have demonstrated its wide applicability. However, little research has studied top-down multi-step pressure grouting in Korea, which involves injection from the surface. This paper compares the grouting effect of both the established bottom-up method and the top-down method in soil box and field tests. The soil box test showed that the bulb volume of the top-down method is ~24% less than that of the bottom-up method. The field test confirmed that the top-down method has a wider grouting range and a higher injection density per area than the bottom-up method.

A Study on the Development of Soil Neutrailizing-agent using Waste Materials (Waste-lime, Oyster, Bottom-ash) (폐자원(폐석회, 굴패각, 바닥재)을 이용한 토양 중화제 개발 연구)

  • Oh, SeungJin;Cho, Mihyeon;Park, Chan-O;Jung, Moon-Ho;Lee, Jai-Young
    • Journal of Soil and Groundwater Environment
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    • v.17 no.6
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    • pp.92-101
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    • 2012
  • Korea shows the soil pH is 5.8 ~ 6.2 by many factors including the geological structure and climate condition. There is known as the cause for soil acidification by weathering of the mineral, excessive use of the chemical fertilizer, and extensively diffused acid rain. The purpose of research is environmentally-friendly material neutralization technology development utilizing the waste resources against by acid soil. The experiment analyze the physico-chemical property of the acid soil and waste resource materials (waste lime, oyster shell, bottom ash). The Batch-Test was performed under 3 stage. As a result, the acid soil showed up acid soil about 3.19. And waste lime, oyster, bottom ash showed the alkalinity with 9.62, 10.08, 9.17. In case of 1 batch-test experimental result, waste lime and oyster shell, the alkalinity was shown over 7.5 and the good efficiency was showed, on the other hands, the bottom ash showed the pH 4 the neutralization efficiency which is low. waste resource materials to be applied to 2 steps was chosen as the waste lime except the bottom ash and oyster. In 2 step batch-test experiment, it was exposed to be the most appropriate in case of doing the combination ratio of the waste lime and oyster shell with 9 : 1. It was exposed to be efficient most in the effeciency and aspect of economical efficiency combination ratio of the soil and materials was 9.6 : 0.6 with 3 step batch-test experimental result.

A Study on Constructing Bottom-up Model for Electric Sector (전력부문 온실가스 감축정책 평가를 위한 상향식 모형화 방안)

  • Kim, Hugon;Paik, Chunhyun;Chung, Yongjoo;Ahn, Younghwan
    • Journal of Energy Engineering
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    • v.25 no.3
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    • pp.114-129
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    • 2016
  • Since the release of mid-term domestic GHG goals until 2020, in 2009, some various GHG reduction policies have been proposed to reduce the emission rate about 30% compared to BAU scenario. There are two types of modeling approaches for identifying options required to meet greenhouse gas (GHG) abatement targets and assessing their economic impacts: top-down and bottom-up models. Examples of the bottom-up optimization models include MARKAL, MESSAGE, LEAP, and AIM, all of which are developed based on linear programming (LP) with a few differences in user interface and database utilization. The bottom-up model for electric sector requires demand management, regeneration energy mix, fuel conversation, etc., thus it has a very complex aspect to estimate some various policies. In this paper, we suggest a bottom-up BAU model for electric sector and how we can build it through step-by-step procedures such that includes load region, hydro-dam and pumping storage.

The Durability of the Concrete Using Bottom Ash as Fine Aggregate (바텀애시를 잔골재로 사용한 콘크리트의 내구성능에 관한 연구)

  • Park, Seung-Ho;Lee, Jeong-Bae;Kim, Seong-Soo
    • Journal of the Korean Recycled Construction Resources Institute
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    • v.4 no.4
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    • pp.349-355
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    • 2016
  • This study is about the reuse of bottom ash, which is released as a necessity in thermal power plant. In general, coal-ash are classified as fly-ash, bottom-ash, cinder-ash. Of these, a large amount of fly ash is being recycled as cement substitutes. While, recycling rates of bottom ash are the lowest due to its porosity and high absorption. In this study, the durability of the concrete using bottom ash as a concrete fine aggregate was evaluated. The using level of the bottom ash ranges to step-by-step from 0% to 30%. According to the result of the durability test, regardless of the presence of the bottom ash, freeze-thaw durability could be secured by air entrainment. In case of the resistance to chloride ions penetration, the length change, and the effects on heavy metals, the replacement of bottom ash as fine aggregate was not critical. Although carbonation penetration was higher as the replacement level of bottom ash increased, the experiment showed that it could be possible to use bottom ash as concrete fine aggregate with proper mix design.

Hydrodynamic forces on blocks and vertical wall on a step bottom

  • Mondal, Ramnarayan;Alam, Md. Mahbub
    • Wind and Structures
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    • v.30 no.5
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    • pp.485-497
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    • 2020
  • A study, using potential water wave theory, is conducted on the oblique water wave motion over two fixed submerged rectangular blocks (breakwaters) placed over a finite step bottom. We have considered infinite and semi-infinite fluid domains. In both domains, the Fourier expansion method is employed to obtain the velocity potentials explicitly in terms of the infinite Fourier series. The unknown coefficients appearing in the velocity potentials are determined by the eigenfunction expansion matching method at the interfaces. The derived velocity potentials are used to compute the hydrodynamic horizontal and vertical forces acting on the submerged blocks for different values of block thickness, gap spacing between the two blocks, and submergence depth of the upper block from the mean free surface. In addition, the wave load on the vertical wall is computed in the case of the semi-infinite fluid domain for different values of blocks width and the incident wave angle. It is observed that the amplitudes of hydrodynamic forces are negligible for larger values of the wavenumber. Furthermore, the upper block experiences a higher hydrodynamic force than the lower block, regardless of the gap spacing, submergence depth, and block thickness.

Extraction of Military Ontology Using Six-Step Bottom-up Approach (6단계 상향식 방법에 의한 국방 온톨로지 추출)

  • Ra, Min-Young;Yang, Kyung-Yong
    • Journal of the Korea Society of Computer and Information
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    • v.14 no.6
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    • pp.17-26
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    • 2009
  • In national defense, established information systems are mainly based on simple information processing, such as mass data query. They have thus lacked intelligent ability of information and knowledge representation ability. We therefore need the research about the construction of military ontology which is the main topic for knowledge construction. Military ontology can help us develop the intelligent national defense information system which can search and manage information efficiently. In this paper, we present the six-step bottom-up approach for military ontology extraction, then we apply this approach to one of military domain, called national defense educational training, and finally implement it using $Prot\acute{e}g\acute{e}$ which is one of the most useful ontology development tool.

Cu Plating Thickness Optimization by Bottom-up Gap-fill Mechanism in Dual Damascene Process (Dual Damascene 공정에서 Bottom-up Gap-fill 메커니즘을 이용한 Cu Plating 두께 최적화)

  • Yoo, Hae-Young;Kim, Nam-Hoon;Kim, Sang-Yong;Chang, Eui-Goo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.07a
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    • pp.93-94
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    • 2005
  • Cu metallization using electrochemical plating(ECP) has played an important role in back end of line(BEOL) interconnect formation. In this work, we studied the optimized copper thickness using Bottom-up Gap-fill in Cu ECP, which is closely related with the pattern dependencies in Cu ECP and Cu dual damascene process at 0.13 ${\mu}m$ technology node. In order to select an optimized Cu ECP thickness, we examined Cu ECP bulge, Cu CMP dishing and electrical properties of via hole and line trench over dual damascene patterned wafers split into different ECP Cu thickness.

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