• 제목/요약/키워드: bonding surface

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High Speed Direct Bonding of Silicon Wafer Using Atmospheric Pressure Plasma (상압 플라즈마를 이용한 고속 실리콘 웨이퍼 직접접합 공정)

  • Cha, Yong-Won;Park, Sang-Su;Shin, Ho-Jun;Kim, Yong Taek;Lee, Jung Hoon;Suh, Il Woong;Choa, Sung-Hoon
    • Journal of the Microelectronics and Packaging Society
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    • v.22 no.3
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    • pp.31-38
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    • 2015
  • In order to achieve a high speed and high quality silicon wafer bonding, the room-temperature direct bonding using atmospheric pressure plasma and sprayed water vapor was developed. Effects of different plasma fabrication parameters, such as flow rate of $N_2$ gas, flow rate of CDA (clear dry air), gap between the plasma head and wafer surface, and plasma applied voltage, on plasma activation were investigated using the measurements of the contact angle. Influences of the annealing temperature and the annealing time on bonding strength were also investigated. The bonding strength of the bonded wafers was measured using a crack opening method. The optimized condition for the highest bonding strength was an annealing temperature of $400^{\circ}C$ and an annealing time of 2 hours. For the plasma activation conditions, the highest bonding strength was achieved at the plasma scan speed of 30 mm/sec and the number of plasma treatment of 4 times. After optimization of the plasma activation conditions and annealing conditions, the direct bonding of the silicon wafers was performed. The infrared transmission image and the cross sectional image of bonded interface indicated that there is no void and defects on the bonded wafers. The bonded wafer exhibited a bonding strength of average $2.3J/m^2$.

SHEAR BOND STRENGTH OF REPAIRED COMPOSITE RESIN RESTORATIONS (수리된 복합레진 수복물의 전단결합강도 연구)

  • Choi, Soo-young;Jeong, Sun-Wa;Hwang, Yun-Chan;Kim, Sun-Ho;Yun, Chang;Oh, Won-Mann;Hwang, In-Nam
    • Restorative Dentistry and Endodontics
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    • v.27 no.6
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    • pp.569-576
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    • 2002
  • This study was peformed to evaluate the interfacial shear bond strength of base (direct and indirect) and repair composites with aging and surface treatment methods. Direct composite resin specimens ($Charisma^{\circledR}$, Heraeus Kulzer, Germany) were aged for 5 min, 1 hour, 24 hours, and 1 week in $37^{\circ}C$ distilled water before surface treatment, and then divided into five groups Group 1, grinding; Group 2, grinding and application of bonding agent, Group 3, grinding, etching with 37% phosphoric acid for 30sec, and application of bonding agent, Group 4, grinding, etching with 37% phosphoric acid for 30sec, silane treatment, and application of bonding agent ; Group 5, grinding, etching with 4% hydrofluoric acid for 30sec. silane treatment, and application of bonding agent. Indirect composite resin specimens ($Artglass^{\circledR}$, Heraeus Kulzer, Germany) were aged for 1 week in $37^{\circ}C$ distilled water and divided into seven groups Group 1 - Group 5, equal to Charisma specimens; Group 6, grinding, etching with 37% phosphoric acid for 60sec, silane treatment, and application of bonding agent; Group7, grinding, etching with 4% hydrofluoric acid for 60 sec, silane treatment, and application of bond-ing agent. The repair material($Charisma^{\circledR}$) was then added on the center of the surface (5 mm in diameter. 5 mm in height). The shear bond strength was tested and the data was analyzed using one-way ANOVA and the Student- Newman-Keuls test. The following conclusions were drawn. 1 The shear bond strength of $Charisma^{\circledR}$ specimens aged for 1 hour was significantly higher in Group 2 and Group 5 than in Group 1 (p<0.05), and that of $Charisma^{\circledR}$ specimens aged for 1 week was signifi-cantly higher in Group 3 and Group 5 than in Group 1 (p<0.05). No significant difference was found in the bond strength of specimens aged for 5 min and 24 hours. 2. In Group 2 of the $Charisma^{\circledR}$ specimens, there was significant difference between the bond strength of 24 hours and that of 1 week (p<0.05). 3. In Group 4 of the $Charisma^{\circledR}$ specimens, the shear bond strength of specimens aged for 24 hours was significantly higher than the others(p<0.05) 4. There was no significant difference between the shear bond strength of the $Artglass^{\circledR}$ specimens, 5. Most of the $Charisma^{\circledR}$ specimens showed cohesive fractures. Artglass^{\circledR}$ specimens that were etched with acid (phosphoric or hydrofluoric) for 30 sec showed more cohesive fractures.

Study on Surface-defect Passivation of InP System Quantum Dots by Photochemical Method (광화학적 방법을 통한 InP계 양자점 표면결함 부동태화 연구)

  • Kim, Doyeon;Park, Hyun-Su;Cho, Hye Mi;Kim, Bum-Sung;Kim, Woo-Byoung
    • Journal of Powder Materials
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    • v.24 no.6
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    • pp.489-493
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    • 2017
  • In this study, the surface passivation process for InP-based quantum dots (QDs) is investigated. Surface coating is performed with poly(methylmethacrylate) (PMMA) and thioglycolic acid. The quantum yield (QY) of a PMMA-coated sample slightly increases by approximately 1.3% relative to that of the as-synthesized InP/ZnS QDs. The QYs of the uncoated and PMMA-coated samples drastically decrease after 16 days because of the high defect state density of the InP-based QDs. PMMA does not have a significant effect on the defect passivation. Thioglycolic acid is investigated in this study for the effective surface passivation of InP-based QDs. Surface passivation with thioglycolic acid is more effective than that with the PMMA coating, and the QY increases from 1.7% to 11.3%. ZnS formed on the surface of the InP QDs and S in thioglycolic acid show strong bonding property. Additionally, the QY is further increased up to 21.0% by the photochemical reaction. Electron-hole pairs are formed by light irradiation and lead to strong bonding between the inorganic and thioglycolic acid sulfur. The surface of the InP core QDs, which does not emit light, is passivated by the irradiated light and emits green light after the photochemical reaction.

A Study on Fabrication of Ti Matrix Composites by Liquid Phase Diffusion Bonding (액상확산접합법을 이용한 Ti 금속기복합재료 제조에 관한 연구)

  • Kim, Gyeong-Mi;U, In-Su;Gang, Jeong-Yun;Lee, Sang-Rae
    • Korean Journal of Materials Research
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    • v.6 no.2
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    • pp.210-220
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    • 1996
  • The purpose of this study is to develop the processing techniques of Fiber Reinforced Metal by Liquid Phase Diffusion Bonding method with SiC fiber as a reinforcing material and CP Ti(Commercial Pure) as a matrix. The microstructure and the distribution of elements in reaction and CP Ti(Commercial Pure) as a matrix. The microstructure and the distribution of elements is reaction zone among CP Ti/Ti-15wt%Cu-20wt%Ni(TCN20)/SiC long fiber were investigated by Optical Microscope, SEM/EDX, EPMA, X-ray and AES. The results obtained in this study are as follows. 1) When Ti matrix composite materials are fabricated under the bonding condition of 1273Kx1200sec, the SiC long fiber was the most suitable reinforcing material for Ti matrix composite materials. 2) With SiC long fiber under same condition, a TiC layer(1.0-1.6$\mu\textrm{m}$) was observed on the surface of SiC long fiber. 3) Liquid Phase Diffusion Bonding has shown the feasibility of production of Ti matrix composite materials.

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BONDING BETWEEN RESIN AND CERAMICS (레진과 치과용 도재의 접착)

  • Kim, Sun-Jai;Lee, Keun-Woo;Han, Chong-Hyun
    • The Journal of Korean Academy of Prosthodontics
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    • v.45 no.2
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    • pp.159-168
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    • 2007
  • Statement of problem: Literature showed different results on the durability of bonded ceramic restoration. Purpose: The purpose of this article is to review the effect of surface treatment of ceramics in resin-ceramic bond to get predictable results. Material and method: PubMed data base was utilized to search the articles which were written in English and published in 1986 and 2006. Some electronic published articles which are forthcoming to publish in paper were also included for this review. This review article focused on the effect of acid etching and silane application on the silica based ceramics. The durability of resin-ceramic bonding, the methodology for bond strength test and resin bonding to alumina or zirconia based ceramics were compared in brief at the end of the review. Results and Conclusion: the effect of silane application can be influenced by the contaminations of saliva or solutions. Micromechanical retention by acid etching as well as silane application plays an important role in initial and durable bond strength between resin and ceramic. The use of phosphate modified resin cement following tribochemical silica coating and silane application produced best bond strength for alumina or zirconia based ceramics.

Influences of Casting Conditions and Constituent Materials on the Production of Duo-castings (이중복합 주조체의 제조에 미치는 구성 재질과 주조 조건의 영향)

  • Jung, Jae-Young
    • Journal of Korea Foundry Society
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    • v.38 no.1
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    • pp.16-26
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    • 2018
  • In this study, the effects of the pouring temperature, preheating temperature, surface condition and fraction of the wear resistant part on the production of duo-castings were investigated using a high Cr white cast iron with excellent abrasion resistance and a low Cr alloy steel with good toughness. The constituent materials of the duo-castings were designed to have high hardness, fracture toughness and abrasive wear resistance for the replacement of high Mn alloy steels with low abrasive wear resistance. In particular, the amount of abrasive wear of 17% Cr white cast iron was about 1/20 of that of high Mn alloy steel. There was an intermediate area of about 3mm due to local melting at the bonding interface of the duo-castings. These intermediate regions were different from those of the constituent materials in chemical composition and microstructure. This region led to fracture within the wear resistant part rather than at the bonding interface in the bending strength test. The bending fracture strengths were 516-824 MPa, which were equivalent to the bending proof strength of high Mn steel. The effects of various casting conditions on the duo-cast behavior were studied by simple pouring of low Cr alloy steel melt, but the results proved practically impossible to manufacture duo-castings with a sound bonding interface. However, the external heating method was suitable for the production of duo-castings with a sound bonding interface.

Effects of the Glass Fiber Characteristics on the Mechanical Properties of Thermoplastic Composite (유리섬유의 특성이 열가소성 복합재료의 기계적 성질에 미치는 영향)

  • Lee, Jung-Hui;Lee, Jeong-Gwon;Lee, Gyeong-Yeop
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.24 no.7 s.178
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    • pp.1697-1702
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    • 2000
  • This study has been performed to investigate the effects of glass fiber characteristics on the mechanical properties of thermoplastic composite. The surface of glass fiber was coated with the silan e to enhance the bonding strength between fiber and matrix. A micro-droplet pull-off test was performed to investigate the influence of the silane concentration on the bonding strength. The maximum bonding strength was observed around 10.8% silane concentration. In order to examine the influence of the fiber length and fiber content on the properties of the composite, the composite materials involving tile fiber lengths of 5mm, 10mm, 15mm 20mm, and 25mm were tested. The composites used contain 20%, 30%, and 40% by weight of glass fibers. Tension and flexural tests were performed to investigate their mechanical properties of the composites. The tensile strength and tensile modulus of the composite increase with increasing the glass fiber content. The tensile modulus increases slightly with increasing the fiber length. The maximum tensile strength is observed around the fiber length of 15-20mm. The flexural modulus and strength also increase slightly with increasing the fiber length.

Experimental Study on the Interface Bonding Characteristics of a Pin-bushing Bearing (핀부시 베어링 소재의 계면접합특성에 관한 실험적 연구)

  • Kim, Chung-Kyun;Kim, Do-Hyun
    • Tribology and Lubricants
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    • v.24 no.6
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    • pp.315-319
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    • 2008
  • This paper presents the interface bonding characteristics between a phosphor bronze and a steel plate for pin-bush bearings. The pin-bush bearing is an important component in which is used to reduce a friction loss and a wear against the piston pin. The pin-bush bearing is manufactured by hot-pressing a phosphor bronze and a back metal of a steel plate. This paper investigated the bonding interface characteristics in which is manufactured by melting a copper based bronze and a steel plate. The hardness from the inner surface of a bronze to the outer one of steel has been measured using a Vickers hardness tester. The experimental results show that the hardness of a bronze is superior to that of the conventional bronze and the transient hardness of pin-bush bearings is gradually increasing to the hardness of the steel back metal. This means that the bonding interface zone of pin-bush bearings may be fabricated by defusing a bronze to the steel plate due to a density difference between two materials.

Fabrication of Al2O3 SOI with direct bonding (직접 접합에 의한 Al2O3 SOI 구조 제작)

  • Kong, Dae-Young;Eun, Duk-Soo;Bae, Young-Ho;Lee, Jong-Hyun
    • Journal of Sensor Science and Technology
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    • v.14 no.3
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    • pp.206-210
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    • 2005
  • The SOI structure with buried alumina was fabricated by ALD followed by bonding and etchback process. The interface of alumina and silicon was analyzed by CV measurements and cross section was investigated by SEM analysis. The density of interface state of alumina and silicon was 2.5E11/$cm^{2}$-eV after high temperature annealing for wafer bonding. It was confirmed that the surface silicon layer was completely isolated from substrate by cross section SEM and AES depth profile. The device on this alumina SOI structure would have better thermal properties than that on conventional SOI due to higher thermal conductivity of alumina than that of silicon dioxide.