• Title/Summary/Keyword: bilayer film

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Effects of the thin $SiO_2$ film on the formation of $TiN/TiSi_2$ bilayer formed by rapid thermal annealing (급속열처리에 의한 $TiN/TiSi_2$ 이중구조막 혈성에 대한 Ti-Si 계면의 얇은 산화막의 영향)

  • Lee, Cheol-Jin;Sung, Han-Young;Sung, Yung-Kwon
    • Proceedings of the KIEE Conference
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    • 1994.07b
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    • pp.1223-1225
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    • 1994
  • The properties of $TiN/TiSi_2$ bilayer formed by a rapid thermal anneal ing is investigated when thin $SiO_2$ film exists at the Ti-Si interface. The competitive reaction for the $TiN/TiSi_2$ bilayer occurs above $600^{\circ}C$. The thickness of the $TiSi_2$ layer decreases with increasing $SiO_2$ film thickness while the TiN layer increases at the competitive reaction. The composition of TiN layer is changed to the $TiN_xO_y$ film due to the thin $SiO_2$ layer at the Ti-Si interface while the structure of the TiN and $TiSi_2$ layers was not changed.

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Ordered Micropatterns by Confined Dewetting of an Imprinted Polymer Thin Film and Their Microlens Application

  • Lee, Geun-Tak;Yoon, Bo-Kyung;Acharya, Himadri;Park, Cheol-Min;Huh, June
    • Macromolecular Research
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    • v.17 no.3
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    • pp.181-186
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    • 2009
  • We fabricated ordered micro/nano patterns induced by controlled dewetting on the topographically patterned PS/P4VP bilayer thin film. The method is based on utilizing microimprinting lithography to induce a topographically heterogeneous bilayer film that allows the controlled dewetting upon subsequent thermal annealing. The dewetting that was initiated strictly at the boundary of the thicker and thinner regions was guided by the presence of the topographic structure. The dewetting front velocity of the microdomains in the confined regions was linearly proportional to the measurement time, which enabled us to control the size of the dewet domain with annealing time. In particular, the submicron sized dot arrays between lines were generated with ease when the dewetting was confined into geometry with a few microns in size. The kinetically driven, non-lithographical pattern structures accompanied the pattern reduction to 400%. The pattern arrays on a transparent glass substrate were especially useful for non-circular microlens arrays where the focal length of the lens was easily tunable by controlling the thermal annealing.

A Study on the Silicidation of Thick Co/Ti Bilayer (두꺼운 이중층 Co/Ti 막의 실리사이드화에 관한 연구)

  • 이병욱;권영재;이종무;김영욱
    • Journal of the Korean Ceramic Society
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    • v.33 no.9
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    • pp.1012-1018
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    • 1996
  • To investigate the final structures and reactions of silicides a somewhat thick Ti monolayer Co monolayer and Co/Ti bilayer films were deposited on single Si(100) wafer by electron beam evaporation followed by heat treatment using RTA system in N2 ambient. TiO2 film formed between Ti and TiSi2 layers due to oxgen or moisture in the Ti monolayer sample. The final layer structure obtained after the silicidation heat-treatment of the Co/Ti bilayer sample turned out to be TiSi2/CoSi2/Ti-Co-Si alloy/CoSi2/Si sbustrate. This implies that imperfect layer inversion occurred due to the formation of Ti-Co-Si intermediate phase.

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Preparation and Characterization of Polypyrrole Electroactive Actuators (Polypyrrole를 이용한 전기활성 구동기의 제조 및 특성)

  • 박정태;최혁렬;김훈모;전재욱;남재도
    • Polymer(Korea)
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    • v.25 no.6
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    • pp.826-832
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    • 2001
  • In this study, PPy/gold/mylar type electroactive bi-layer actuator was prepared by the electrochemical polymerization of pyrrole onto the gold/mylar film and the actuation characteristics were studied using bending beam method. Conducting polymer-based actuators undergo volumetric changes due to the movement of dopant ions into the film during the electrical oxidation process. The bilayer films exhibited different actuation characteristics depending on dopant ion size. It was observed that the relatively small dopant ion (i.e. toluene sulfonate) moved into the PPy film at oxidized state, so volume expanded to result in bending motion. In case of the film having large dopant ion (i.e. dodecylbenzenesulfonate), volume expansion was observed at reduced state. This is due to the incorporation of $Na^+$ counterion with water molecules, while the large dopant ion was fixed in the film due to the limited mobility during tile redox process.

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Investigation of bias illumination stress in solution-processed bilayer metal-oxide thin-film transistors

  • Lee, Woobin;Eom, Jimi;Kim, Yong-Hoon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.302.1-302.1
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    • 2016
  • Solution-processed amorphous metal-oxide thin-film transistors (TFTs) are considered as promising candidates for the upcoming transparent and flexible electronics due to their transparent property, good performance uniformity and possibility to fabricate at a low-temperature. In addition, solution processing metal oxide TFTs may allow non-vacuum fabrication of flexible electronic which can be more utilizable for easy and low-cost fabrication. Recently, for high-mobility oxide TFTs, multi-layered oxide channel devices have been introduced such as superlattice channel structure and heterojunction structure. However, only a few studies have been mentioned on the bias illumination stress in the multi- layered oxide TFTs. Therefore, in this research, we investigated the effects of bias illumination stress in solution-processed bilayer oxide TFTs which are fabricated by the deep ultraviolet photochemical activation process. For studying the electrical and stability characteristics, we implemented positive bias stress (PBS) and negative bias illumination stress (NBIS). Also, we studied the electrical properties such as field-effect mobility, threshold voltage ($V_T$) and subthreshold slop (SS) to understand effects of the bilayer channel structure.

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A Study on Diffusion Behavior in NiFe/Ag Bilayer Films deposited by ion Beam Sputtering Methods (이온빔 스퍼터링 방법으로 증착한 NiFe/Ag 박막의 확산 거동)

  • 지재범;이성래;문대원
    • Journal of the Korean institute of surface engineering
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    • v.35 no.2
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    • pp.107-112
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    • 2002
  • We have studied diffusion behavior of NiFe/Ag bilayer deposited by on silicon Ion Beam Sputtering methods. The diffusion behavior of NiFe and Ag in NiFe/Ag thin film is analyzed by Medium Energy Ion Scattering Spectroscopy. For samples without Ta underlayer, silicides such as Ni-Si or Fe-Si were formed at Si substrate and NiFe interface. In contrast, Ag predominantly diffused into the NiFe layer probably through their grain boundaries for Ta underlayered samples.

Control of Surface Energy using Bilayer Metallic Film Heterostructures

  • Kim, Chang-Lae;Kim, Dae-Eun;Kim, Hae-Jin
    • Tribology and Lubricants
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    • v.35 no.6
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    • pp.350-355
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    • 2019
  • Surface energy is an important factor in determining the performance of application components in terms of preventing adhesion failure between thin films. In this regard, numerous attempts have been made to acquire the desired surface energy through chemical treatment or by using micro/nanostructures. However, such approaches are expected to provide extreme values of surface energy, which may not be suitable in achieving the enhanced performance of applications. In this study, we propose a method to control surface energy by using bilayer metallic film heterostructures. We measure the water contact angle of incompatible (Ni/Ag) and compatible (Zn/Ag) metal pairs under several experimental factors, including thickness, time, and temperature. Furthermore, we conduct Auger electron spectroscopy measurements to investigate the atomic concentration with respect to depth after the change in the water contact angle. The experimental results reveal that three parameters, namely, compatibility, film thickness, and environmental temperature, are major factors in controlling the water contact angle. Thus, we experimentally demonstrate that controlling these three parameters can provide the approximate desired water contact angle. This result is expected to aid in the performance enhancement of a wide range of application components, where control of surface energy is required.

Organic thin film transistors with an organic/high-k inorganic bilayer gate dielectric layer

  • Seol, Y.G.;Lee, N.E.;Lee, S.S.;Ahn, J.H.
    • 한국정보디스플레이학회:학술대회논문집
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    • 2006.08a
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    • pp.1185-1188
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    • 2006
  • Pentacene thin film transistors (OTFTs) on flexible polyimide substrate using electroplated gate electrode and organic/high-k inorganic bilayer gate dielectric layer. Incorporation of thin atomic-layer deposited $HfO_2$ layer on the PVP organic gate dielectric layer reduced the gate leakage and as a result enhanced the current on/off ratio.

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Metal Oxide/Metal Bi-layer for Low-Cost Source/Drain Contact of Pentacene OTFT

  • Moon, Han-Ul;Yoo, Seung-Hyup
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.571-574
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    • 2009
  • Metal oxide/metal bilayer structures are explored as contacts with a low injection barrier in organic thin-film transistors (OTFTs) in an effort to realize their true potential for low-cost electronics. OTFTs with a bilayer electrode of $WO_3$ (10nm) and Al shows a saturation mobility as large as 0.97 $cm^2$/Vsec which are comparable to those of Au-based control samples (~0.90 $cm^2$/Vsec). Scaling of contact resistance with respect to the thickness of $WO_3$ layer is also discussed.

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Study on Reflectance Improvement of Al-Ti Based Oxide Thin Films for Semitransparent Solar Cell Applications (반투명 태양전지용 Al-Ti계 산화물 박막의 반사율 특성 개선에 관한 연구)

  • Lee, Eun Kyu;Jeong, So Un;Bang, Ki Su;Lee, Seung-Yun
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.31 no.7
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    • pp.437-442
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    • 2018
  • This work reports the preparation of Al-Ti based oxide thin films and their optical properties. Although the transmittance of a $TiO_2/Al2O_3$ bilayer structure was as high as 90% at wavelengths of 600 nm or larger, the reflectance of the bilayer reached its minimum at wavelengths of around 360 nm. The transmittance of an 89-nm-thick $TiO_2$ thin film rapidly increased and then decreased at a critical wavelength because of destructive interference. The wavelength corresponding to the reflectance minimum increased after an increase in $TiO_2$ film thickness. The smooth surface morphology of the AlTiO thin film was retained up to a film thickness of 65 nm, and the transmittance of the film was inversely proportional to film thickness, in accordance with the general tendency for optical films. The reflectance of the AlTiO film at visible light wavelengths was lower than that of the $TiO_2$ film, which implies that the AlTiO film is suitable for applications as an optical thin film layer in semitransparent solar cells.