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Atomic layer chemical vapor deposition of Zr $O_2$-based dielectric films: Nanostructure and nanochemistry

  • Dey, S.K.
    • Electrical & Electronic Materials
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    • v.16 no.9
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    • pp.64.2-65
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    • 2003
  • A 4 nm layer of ZrOx (targeted x-2) was deposited on an interfacial layer(IL) of native oxide (SiO, t∼1.2 nm) surface on 200 mm Si wafers by a manufacturable atomic layer chemical vapor deposition technique at 30$0^{\circ}C$. Some as-deposited layers were subjected to a post-deposition, rapid thermal annealing at $700^{\circ}C$ for 5 min in flowing oxygen at atmospheric pressure. The experimental x-ray diffraction, x-ray photoelectron spectroscopy, high-resolution transmission electron microscopy, and high-resolution parallel electron energy loss spectroscopy results showed that a multiphase and heterogeneous structure evolved, which we call the Zr-O/IL/Si stack. The as-deposited Zr-O layer was amorphous $ZrO_2$-rich Zr silicate containing about 15% by volume of embedded $ZrO_2$ nanocrystals, which transformed to a glass nanoceramic (with over 90% by volume of predominantly tetragonal-$ZrO_2$(t-$ZrO_2$) and monoclinic-$ZrO_2$(m-$ZrO_2$) nanocrystals) upon annealing. The formation of disordered amorphous regions within some of the nanocrystals, as well as crystalline regions with defects, probably gave rise to lattice strains and deformations. The interfacial layer (IL) was partitioned into an upper Si $o_2$-rich Zr silicate and the lower $SiO_{x}$. The latter was sub-toichiometric and the average oxidation state increased from Si0.86$^{+}$ in $SiO_{0.43}$ (as-deposited) to Si1.32$^{+}$ in $SiO_{0.66}$ (annealed). This high oxygen deficiency in $SiO_{x}$ indicative of the low mobility of oxidizing specie in the Zr-O layer. The stacks were characterized for their dielectric properties in the Pt/{Zr-O/IL}/Si metal oxide-semiconductor capacitor(MOSCAP) configuration. The measured equivalent oxide thickness (EOT) was not consistent with the calculated EOT using a bilayer model of $ZrO_2$ and $SiO_2$, and the capacitance in accumulation (and therefore, EOT and kZr-O) was frequency dispersive, trends well documented in literature. This behavior is qualitatively explained in terms of the multi-layer nanostructure and nanochemistry that evolves.ves.ves.

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The Formation of Holographic Data Grating on Amorphous Chalcogenide $Ag/As_{40}Ge_{10}Se_{15}S_{35}$ Thin Films with Various Thickness (두께에 따른 비정질 칼코게나이드 $Ag/As_{40}Ge_{10}Se_{15}S_{35}$ 박막의 홀로그래피 데이터 격자형성)

  • Yea, Chul-Ho;Chung, Hong-Bay
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.55 no.8
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    • pp.387-391
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    • 2006
  • The Ag photodoping effect in amorphous $As_{40}Ge_{10}Se_{15}S_{35}$ chalcogenide thin films for holographic recording has been investigated using a He-Ne laser (${\lambda}$=632.8 nm). The chalcogenide films thickness prepared in the present work were thinner in comparison with the penetration depth of recording light ($d_p=1.66{\mu}m$). It exhibits a tendency of the variation of the diffraction efficiency (${\eta}$) in amorphous chalcogende films, independently of the Ag photodoping. That is, ${\eta}$ increases rapidly at the beginning of the recording process and reaches the maximum (${\eta}_{max}$) and slowly decreases slowly with the exposed time. In addition, the value of ${\eta}_{max}$ depends strongly on chalcogenide film thickness(d) and its maximum peak among the films with d = 40, 80, 150, 300, and 633 nm is observed 0.083% at d = 150 nm (approximately 1/2 ${\Delta}n$), where ${\Delta}$n is the refractive index of chalcogenide thin film (${\Delta}n=2.0$). The ${\eta}$ is largely enhanced by Ag photodoping into the chakogenides. In particular, the value of ${\eta}_{max}$ in a bilayer of 10-nm-thick Ag/150-nm-thick $As_{40}Ge_{10}Se_{15}S_{35}$ film is about 1.6%, which corresponds to ${\sim}20$ times larger than that of the single-layer $As_{40}Ge_{10}Se_{15}S_{35}$ thin film (without Ag). And we obtained the diffraction pattern according to the formation of (P:P) polarization holographic grating using Mask pattern and SLM.

Comparative study of two collagen membranes for guided tissue regeneration therapy in periodontal intrabony defects: a randomized clinical trial

  • Chung, Young-Mi;Lee, Jue-Yeon;Jeong, Seong-Nyum
    • Journal of Periodontal and Implant Science
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    • v.44 no.4
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    • pp.194-200
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    • 2014
  • Purpose: The purpose of this study was to assess and compare the clinical and radiographic outcomes of guided tissue regeneration therapy for human periodontal intrabony defects using two different collagen membranes: a porous nonchemical cross-linking collagen membrane (NC) and a bilayer collagen membrane (BC). Methods: Thirty subjects were randomly assigned and divided into the following 3 groups: a test group (NC+BM), in which a NC was used with xenograft bone mineral (BM), a positive control group (BC+BM), in which a BC was used with xenograft BM, and a negative control group (BM), in which only xenograft BM was used. The following clinical measurements were taken at baseline and 3 months after surgery: plaque index, gingival index, probing pocket depth, gingival recession, and clinical attachment level. Radiographic analysis was performed at baseline, 1 week and 3 months after surgery. Results: Membrane exposure was not observed in any cases. Significant probing depth reduction, attachment-level gain and bone fill were observed for both test and control groups compared to baseline at 3 months after surgery (P<0.05). However, there were no statistically significant differences in clinical improvement and radiographic bone fill between treatment protocols (P>0.05). Conclusions: Within the limitations of this study, the results suggest that both NC and BC were comparable in terms of clinical and radiographic outcomes for the treatment of periodontal intrabony defects in human subjects.

Photoelectrochemical Properties of a Cu2O Film/ZnO Nanorods Oxide p-n Heterojunction Photoelectrode for Solar-Driven Water Splitting (물분해용 Cu2O 박막/ZnO 나노막대 산화물 p-n 이종접합 광전극의 광전기화학적 특성)

  • Park, Junghwan;Kim, Hyojin;Kim, Dojin
    • Korean Journal of Materials Research
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    • v.28 no.4
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    • pp.214-220
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    • 2018
  • We report on the fabrication and photoelectrochemical(PEC) properties of a $Cu_2O$ thin film/ZnO nanorod array oxide p-n heterojunction structure with ZnO nanorods embedded in $Cu_2O$ thin film as an efficient photoelectrode for solar-driven water splitting. A vertically oriented n-type ZnO nanorod array was first prepared on an indium-tin-oxide-coated glass substrate via a seed-mediated hydrothermal synthesis method and then a p-type $Cu_2O$ thin film was directly electrodeposited onto the vertically oriented ZnO nanorods array to form an oxide semiconductor heterostructure. The crystalline phases and morphologies of the heterojunction materials were characterized using X-ray diffraction and scanning electron microscopy as well as Raman scattering. The PEC properties of the fabricated $Cu_2O/ZnO$ p-n heterojunction photoelectrode were evaluated by photocurrent conversion efficiency measurements under white light illumination. From the observed PEC current density versus voltage (J-V) behavior, the $Cu_2O/ZnO$ photoelectrode was found to exhibit a negligible dark current and high photocurrent density, e.g., $0.77mA/cm^2$ at 0.5 V vs $Hg/HgCl_2$ in a $1mM\;Na_2SO_4$ electrolyte, revealing an effective operation of the oxide heterostructure. In particular, a significant PEC performance was observed even at an applied bias of 0 V vs $Hg/HgCl_2$, which made the device self-powered. The observed PEC performance was attributed to some synergistic effect of the p-n bilayer heterostructure on the formation of a built-in potential, including the light absorption and separation processes of photoinduced charge carriers.

Development of Target-Specific Drug Delivery Systems Using Glycosylated Proliposome I-Binding of Asialofetuin-Labeled Liposomes to Lectin RCA- (표면수식된 프로리포솜에 의한 표적부위 지향성 약물수송체의 개발 I-갈락토스 당쇄로 표면수식된 리포솜의 간세포 렉틴 결합성-)

  • Shim, Chang-Koo;Lee, Chang-Yong;Kim, Chong-Kook
    • Journal of Pharmaceutical Investigation
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    • v.22 no.2
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    • pp.155-161
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    • 1992
  • Although glycosylated liposomes have attracted much attention as targeting delivery systems (DDS) of drugs to specific organs which have glycoside receptors, physical instability of liposomes greatly limits their practical application. In this case, proliposomes might be a potential answer to solve this problem. Utilizing the proliposomes as tageting DDS has been a goal of our series of works; we have tried to develop DDS which form liposomes uppon adding water and can deliver drugs to specific target organs/cells such as hepatocytes. In this paper, preparation of glycosylated liposomes and binding of the liposomes with lectin (agglutinin RCA 120) was studied. Asialoletuin (AF) was selected as a model compound which has galactose terminal and is favorable for binding with galactose receptor on the surface of hepatocytes. AF was obtained by splitting the terminal N-acetylneuraminic acid (NANA) of fetuin. Small unilamellar AF-liposomes were prepared by mixing aqueous solution of AF-palmitate with thin film of phosphatidyl choline and cholesterol (30:10 w/w) formed on the innersurface of the round bottomed flask. They were successively extruded through polycarbonate membranes (0.45 mm). Palmitoyl-AF not incorporated into the liposomal bilayer was separated from liposomes by a Sepharose 4B column equilibrated with 10 mM Tris-HCI buffered saline. Lectin (agglutinin RCA 120) was added to the suspension of AF-liposomes and incubated at $37^{\circ}C$ for 2 hr. After centrifugation, the unbound lectin in the supernatant was assayed for protein. The binding of the lectin to AF-liposomes (AF content 2.8 nmole) at $37^{\circ}C$ was linear at least upto 35 mg of lectin indicating high affinity association of the lectin to AF molecules of the liposomes.

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Curcumin-Induced Apoptosis of A-431 Cells Involves Caspase-3 Activation

  • Shim, Joong-Sup;Lee, Hyung-Joo;Park, Sang-shin;Cha, Bong-Gee;Chang, Hae-Ryong
    • BMB Reports
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    • v.34 no.3
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    • pp.189-193
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    • 2001
  • Curcumin a yellow pigment from Curcuma Tonga, has been known to possess antioxidative and anticarcinogenic properties, as well as to induce apoptosis in some cancer cells. There have been, however, several contradictory reports that hypothesized curcumin (a hydrophobic molecule) can bind a membrane Gpid bilayer and induce nonspecific cytotoxicity in some cell lines. Why curcumin shows these contradictory effects is unknown. In A-431 cells, growth inhibition by curcumin is due mostly to the specific inhibition of the intrinsic tyrosine kinase activity of the epidermal growth factor receptor, as reported earlier by Korutla et al. Thus, we assumed that the cell death of A-431 by curcumin might be due to the specific induction of apoptosis. In this paper we clearly show that curcumin induces apoptosis in A-431 cells. The cureumin-induced cell death of A-431 exhibited various apoptotic features, including DNA fragmentation and nuclear condensation. Furthermore, the curcumin-induced apoptosis of A-431 cells involved activation of caspase-3-like cysteine protease. Involvement of caspase-3 was further confirmed by using a caspase-3 specific inhibitor, DEVD-CHO. In another study, decreased nitric oxide (NO) production was also shown in A-431 cells treated with curcumin, which seems to be the result of the inhibition of the iNOS expression by curcumin, as in other cell lines. However, 24 h after treatment of curcumin there was increased NO production in A-431 cells. This observation has not yet been clearly explained. We assumed that the increased NO production may be related to denitrosylation of the enzyme catalytic site in caspase-3 when activated. Taken together, this study shows that the cell death of A-431 by curcumin is due to the induction of apoptosis, which involves caspase-3 activation.

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Electrical and structural properties of back reflecting layer with AZO-Ag bilayer structure on a stainless steel substrate for thin film Si based solar cell applications (Flexible 박막 Si태양전지 응용을 위한 SUS기판 위의 AZO-Ag 이중구조 배면전극의 전기/구조적 특성)

  • Hong, ChangWoo;Choi, YoungSung;Park, Jaecheol;Lee, JongHo;Kim, TaeWon
    • 한국신재생에너지학회:학술대회논문집
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    • 2011.05a
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    • pp.125.1-125.1
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    • 2011
  • 빛 에너지를 전기에너지로 변환하는 발전소자인 태양전지는 청정 재생 에너지원으로 최근 Si 박막 태양전지의 고 효율화를 위해 여러 기술적인 면에서 개발되어지고 있다. 현재 박막형 태양전지는 실리콘계가 주류를 이루고 있으며, 유리 혹은 유연성기판(금속 or 고분자)에 비정질 실리콘 박막을 형성시킨 태양전지와 실리콘웨이퍼의 양면에 태양전지를 형성함으로써 효율을 극대화시킨 이종접합태양전지 등이 연구되고 있다. 특히 flexible 태양전지는 hard 기판에 비해 비교적 저가인 플라스틱 필름과 금속 foil을 기판으로 이용함으로서 저가화가 용이하며, 가볍고 유연성을 갖추고 있어 휴대와 시공에 있어 매우 우수한 장점을 가지고 있다. 본 연구에서는 flexible 기판(stainless steel)을 이용하여 태양전지 내 반사막 층이 미치는 영향을 알아보기 위하여 AZO/Ag 이중구조 박막의 특성을 연구하였다. RF magnetron sputtering system을 이용하였으며, 상온에서 Ag/AZO 이중구조 박막을 제조하였다. stainless steel 기판 위에 Ag층을 25nm 두께로 증착하였으며 연속공정으로 AZO 박막을 100~500nm의 두께경사를 가지도록 성장시켰다. 이 때의 AZO/Ag 이중구조 박막의 표면 morphology는 AFM 분석결과 7nm~3nm의 값을 나타내었으며, AZO 박막의 두께가 증가할수록 rms 값이 감소하는 경향을 보여주었다. 본 발표에서는 flexible 기판 상에 성장된 AZO/Ag 이중구조 박막의 전기적, 광학적 특성 등에 관하여 추가적으로 토론한 후 태양전지 효율 중 흡수층 내 반사막 층이 미치는 역할을 알아보겠다.

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The Region of Distribution of Barbiturates in Synaptosomal Plasma Membrane Vesicles Isolated from Rat Brain as Studied by Fluorescence Quenching (Barbiturates가 생체세포막 외측 단층의 소수성 부위와 친수성 부위에 분포되는 상대적 비율)

  • Yun, Il;Lee, Byung-Woo
    • The Korean Journal of Pharmacology
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    • v.31 no.3
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    • pp.271-278
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    • 1995
  • The relative distribution ratio of barbiturates between hyarocarbon interior and surface region of outer monolayer of synaptosomal plasma membrane vesicles (RSPMV) isolated from rat whole brain was determined by employing the fluorescent probe technique. The two fluorescent probes N- octadecylnaphthyl-2-amine-6-sulfonic acid (ONS) and 12-(9-anthroyloxy) stearic acid (AS) were utilized as probes for hydrocarbon interior and surface of outer monolayer of RSPMV. respectively. The Stern-Volmer equation for fluorescent quenching was modified to calculate the relative distribution ratio. The analysis of preferential quenching of these probes by barbiturates indicates that pentobarbital, hexobarbital, amobarbital and phenobarbital are predominantly distributed on the surface region. whereas thiopental sodium has an accessibility to the hydrocarbon interior of the outer monolayer of the RSPMV. From these results, it is strongly suggested that the more effective penetration into the hydrocarbon interior of the outer monolayer of the membrane lipid bilayer could result in higher general anesthetic activity.

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Intracellular delivery and anti-tumor activity of polyethyleneglycol liposomes containing cationic lipid (양이온성 지질이 포함된 PEG 리포솜의 세포내 이입 및 항암효력 평가)

  • Jung, Soon-Hwa;Kim, Sung-Kyu;Jung, Suk-Hyun;Seong, Ha-Soo;Cho, Sun-Hang;Shin, Byung-Cheol
    • Journal of Pharmaceutical Investigation
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    • v.38 no.3
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    • pp.163-169
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    • 2008
  • Liposomes are spherical vesicles composed of lipid bilayer membranes. However, the conventional liposomes have been found to be plagued by rapid opsonization and taken up by the reticuloendothelial system (RES), resulting in shortened circulation time and limited intracellular uptake to target cell. In this study, polyethyleneglycol-cationic liposomes (PCL) containing cationic lipid and DSPE-mPEG were prepared by thin film cast-hydration method. The PEG liposomes had approximately $97.0{\pm}1.3\;nm$ of mean particle diameter and $-21.7{\pm}1.2\;mV$ of zeta potential value. PCL had $96.4{\pm}1.8\;nm$ of mean particle diameter and $-8.7{\pm}1.1\;mV$ of zeta potential value with a decrease of about 10 mV compared to the PEG liposomes. Loading of model drug, doxorubicin (DOX), in liposomes were carried out by using remote loading method and the loading efficiency of DOX in liposomes was about $95.0{\pm}1.9%$. Intracellular uptake and cytotoxicity of PCL were higher than that of PEG liposomes to murine B16F10 melanoma cells. In addition, anti-tumor activity of PCL was similar to that of PEG liposomes on growth of A549 human lung carcinoma in BALB/c mice. Consequently, PCL modified with cationic lipid may be applicable as anticancer drug carriers that can increase intracellular uptake and therapeutic efficacy.

Different Effects of Dopamine on Differential Rotational Mobility between Inner and Outer Monolayer of Synaptosomal Plasma Membrane Vesicles Isolated from Bovine Brain

  • Kim, Hyun-Gang;Choi, Chang-Hwa;Kim, Inn-Se;Chung, In-Kyo;Cho, Goon-Jae;Jang, Hye-Ock;Yun, Il
    • The Korean Journal of Physiology and Pharmacology
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    • v.4 no.5
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    • pp.409-415
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    • 2000
  • Fluorescence polarization of 1,6-diphenyl-1,3,5-hexatriene (DPH) was used to evaluate the effects of dopamine HCl on the range of the rotatioanl mobility of bulk bilayer structure of the synaptosomal plasma membrane vesicles (SPMV) isolated from whole bovine brain. In a dose-dependent manner, dopamine decreased the anisotropy $({\gamma}),$ limiting anisotropy $({\gamma}{infty})$ and order parameter (S) of DPH in the membranes. These indicate that dopamine increased the rotational mobility of the probe in the neuronal membranes. Cationic 1-[4-(trimethylammonio)-phenyl]-6-phenylhexa-1,3,5-hexatriene (TMA-DPH) and anionic 3-[p-(6-phenyl)-1,3,5-hexatrienyl]-phenylpropionic acid (PRO-DPH) were utilized to examine the range of transbilayer asymmetric rotational mobility of the neuronal membranes. Dopamine had a greater increasing effect on the mobility of the inner monolayer as compared to the outer monolayer of the neuronal membranes. It has been proven that dopamine exhibits a selective rather than nonselective fluidizing effect within the transbilayer domains of the SPMV.

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