• 제목/요약/키워드: beam spot

검색결과 285건 처리시간 0.03초

UV 레이저 마이크로머시닝을 이용한 마이크로 채널 제작기술 (Micro Channel Fabrication Technology Using UV Laser Micromachining)

  • 양성빈;장원석;김재구;신보성;전병희
    • 소성∙가공
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    • 제13권3호
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    • pp.216-224
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    • 2004
  • In this study, we have developed a new UV$({\lambda}=355nm)$ laser micromachining technology by direct ablation method without masks. This technology allows that 3D micro parts can be fabricated rapidly and efficiently with a low price. And it has a benefit of reducing fabricating process simply. Due to micro parts' fabrication, such technologies need the control of XYZ stages with high precision, the design of optical devices to maintain micron spot sizes of laser beam and the control technology of laser focus. The developed laser manufacturing process for laser micromachining is that, after extracting coordinates of shape data from CAD model data, a beam path considering manufacturing features of laser beam is created by using genetic algorithm. This generated manufacturing process is sent to stage controller. In order to improve the surface quality of micro parts, we have carried out experiments on iteration manufacturing and beam step-over by using a minimum focus size. Moreover, we have fabricated a micro-channel through the developed laser micromachining technology and verified it through the results.

Effect of Laser Beam Trajectory on Donor Plate in Laser Induced Thermal Printing Process

  • Lee, Kwang-Won;Lee, Si-Jin;Kwon, Jin-Hyuk;Yi, Jong-Hoon;Park, Lee-Soon
    • Journal of the Optical Society of Korea
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    • 제15권4호
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    • pp.362-367
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    • 2011
  • Organic ($Alq_3$) film, which was coated on a donor plate, was transferred to an organic light emitting diode (OLED) substrate with help of heat generated by a dithering laser beam. The laser beam was diffracted in an acousto-optic modulator (AOM), then focused on the laser-to-heat converting layer of the donor plate; the focused spot followed trajectories guided by rotation of a Galvano-mirror. Three different functional waveforms, sine wave, square wave, and saw tooth wave were applied to the AOM as modulation signal to generate the dithering beam. The fluorescence microscope images of the donor plate showed that the patterns of removed $Alq_3$ film were affected considerably by the modulation waveforms and the phase difference between adjacent dithering beams. Further, the printed images of Alq3 film on the OLED substrate were different from the patterns of removed Alq3 film. Atomic force microscope images indicated that not only direct transfer but also deposition by sublimated vapor of Alq3 contributed to the pattern formation. Printed patterns affected considerably the electricity-to-light conversion characteristics of OLEDs. For uniform transfer, not only the phase relation of dithering beam lines but also adequate waveform were important.

New algorithm to estimate proton beam range for multi-slit prompt-gamma camera

  • Ku, Youngmo;Jung, Jaerin;Kim, Chan Hyeong
    • Nuclear Engineering and Technology
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    • 제54권9호
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    • pp.3422-3428
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    • 2022
  • The prompt gamma imaging (PGI) technique is considered as one of the most promising approaches to estimate the range of proton beam in the patient and unlock the full potential of proton therapy. In the PGI technique, a dedicated algorithm is required to estimate the range of the proton beam from the prompt gamma (PG) distribution acquired by a PGI system. In the present study, a new range estimation algorithm was developed for a multi-slit prompt-gamma camera, one of PGI systems, to estimate the range of proton beam with high accuracy. The performance of the developed algorithm was evaluated by Monte Carlo simulations for various beam/phantom combinations. Our results generally show that the developed algorithm is very robust, showing very high accuracy and precision for all the cases considered in the present study. The range estimation accuracy of the developed algorithm was 0.5-1.7 mm, which is approximately 1% of beam range, for 1×109 protons. Even for the typical number of protons for a spot (1×108), the range estimation accuracy of the developed algorithm was 2.1-4.6 mm and smaller than the range uncertainties and typical safety margin, while that of the existing algorithm was 2.5-9.6 mm.

미소면적 광학이방성 정밀 측정을 위한 수직반사형 타원계의 광소자 편광특성 및 측정정밀도 향상 연구 (Study on Polarization Characteristics of Optical Device and Improvement of Measurement Precision of Normal Incidence Ellipsometer for Measuring Optical Anisotropy of a Micro Spot)

  • 염경훈;박상욱;서영진;이민호;김웅기;김상열
    • 한국광학회지
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    • 제23권6호
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    • pp.274-280
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    • 2012
  • 기존의 반사형 타원계에 광분할기와 프리즘 등의 광학소자를 추가하여 $8.0{\mu}m$ 보다 작은 면적에서 시료의 광학이방성을 측정할 수 있는 수직반사형 타원계를 제작하였다. 수직반사 구조를 구현하기 위해 사용된 광학소자들의 편광작용을 보정하여 광학이방성 측정의 정확도를 향상시켰다. 비편광 광분할기를 사용하고 사분파장 위상지연자를 장착하며 광섬유를 제거하고 파장영역을 최적화하여 광학이방성인자 측정값의 표준편차를 0.00083 으로 줄이고 방위각 변화에 따른 rutile 시료의 광학이방성인자의 변동폭을 0.015 이하로 줄일 수 있었다.

InP계 리지 도파로 구조에서 활성층-수동층 버트 조인트의 광결합 효율 최적화 연구 (Optimization of Optical Coupling Properties of Active-Passive Butt Joint Structure in InP-Based Ridge Waveguide)

  • 송연수;명기환;김인;유준상;류상완
    • 마이크로전자및패키징학회지
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    • 제27권4호
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    • pp.47-54
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    • 2020
  • 활성 도파로와 수동 도파로의 집적은 광집적 회로의 구성에서 필수적인 요소이다. 이를 구현하기 위한 여러 기술 중 버트 조인트는 상당한 장점을 가지고 있다. 그러나 버트 조인트 접합은 높은 광손실을 야기하며, 두 도파로 간의 정렬에 있어서 정확한 공정 제어가 요구되는 구조이다. 본 논문에서는 레이저 다이오드와 spot size converter (SSC)로 구성된 집적 소자를 시뮬레이션하기 위해 beam propagation method을 이용하였다. 상이한 모드 특성을 갖는 두 SSC를 레이저 도파로와 연결하고, 광결합 효율을 시뮬레이션 하였다. 큰 근접장 모드를 가지는 SSC는 낮은 광결합 효율을 보여주나, 원거리 발산각 패턴이 좁고 더 대칭적이다. 테이퍼 구조의 수동 도파로는 원거리 발산각 패턴을 열화시키지 않고 버트 조인트에서 도파로 오프셋의 무의존성과 광결합 효율을 향상시키기 위해 이용되었다. 이를 바탕으로 89.6%의 높은 광결합 효율과 16°×16°의 좁은 원거리장 발산각을 얻을 수 있었다.

Genetic Algorithm을 이용한 멀티 피크 빔의 최적방향탐색 (Sweet spot search of multi peak beam using Genetic Algorithm)

  • 황종우;임성진;엄기환
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 2004년도 하계종합학술대회 논문집(1)
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    • pp.301-304
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    • 2004
  • In this paper, we propose a method to find the optimal direction of the multi beam between each station on the point-to-point link by genetic algorithm. In the proposed method, maximum value in optimal direction on each station is used as a fitness function. The beam of millimeter wave generates a lot of multi-peak because of much influence of noise. About each gene, we simulated this method using 16bit, 32bit, and 32bit split algorithm. 32bit split uses 16bit gene information. Each antenna makes 32bit gene information by adding gene information of two antennas having 16bit gene. Through the proposed method, we could have gotten a good output without 32bit gene information.

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초소형 전자컬럼에서 제어용 전압의 잡음 분석

  • 노영섭;김흥태;김진배;오태식;김대욱;김호섭
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
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    • pp.473-474
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    • 2009
  • A miniaturized electrostatic column consists of a set of scan-deflector and lens components. Electrical noises of scan-deflectors have been classified by the applied voltage, and analyzed the noise effects of electron beam passing through the deflectors.

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레이저빔을 이용한 표면거칠기 및 파상도의 in-process 검출 (In-process Detection of Surface Roughness and Waviness Using Laser Beam)

  • 김희남
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 1997년도 추계학술대회 논문집
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    • pp.254-259
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    • 1997
  • The measurement of surface roughness and waviness by means of noncontact method is an important area to be developed for GAC(Geometrical Adaptive Control) system. This paper deal with the design of noncontact in-process measurement system which measures the surface roughness and waviness during cylindrical grinding. This measuring system is simple and the apparatus proposed is composed of a laser unit, photodetector and optical system. During operation, the surface of a workpiece is continuously scanned by a laser beam. This method makes it possible to detect the surface roughness and waviness along the feed direction by control the spot diameter of laser beam. The experimental results show that the presence of chattering, loading and glazing can be detected sensitively along the feed directions.

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Transverse spatial laser beam patterns spontaneously formed in the feedback system with a liquid crystal

  • Park, Young-Shin;Noh, Young-Chul;Lee, Won-Kyu;Lee, Jin-Ho;Lee, Jai-Hyung;Chang, Joon-Sung
    • Journal of the Optical Society of Korea
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    • 제3권1호
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    • pp.15-19
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    • 1999
  • The formation of spontaneous transverse optical patterns was investigated in a single feedback mirror system using nematic liquid crystals as nonlinear optical media. By varying the size of an input beam and the feedback distance, we obtained various interesting transverse optical patterns as well as the hexagonal pattern which are predicted theoretically assuming plane wave input. We can explain theoretically these characteristics of various pattern by introducing a ratio of the beam half width and spatial wavelength of the patterns. We have observed that as this ratio increased, the number of spot constituting the patterns also increased. Finally the patte군 evolved into the sucessive hexagon in the transverse plane.

치과용 Scanning 머신 개발 (Development of Dental Scanning Machine)

  • 차영엽;동진근;오상천;이해형;송기창
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2002년도 추계학술대회 논문집
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    • pp.562-565
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    • 2002
  • Recent technologic innovations have created possibilities for restorative dentistry, such as computer-aided design and computer-aided manufacturing. This article presents a CAD process that has been developed for the fabrication of dental restorations. This process uses a 4-axes driving mechanism and an improved optical displacement sensor, successfully applied in other industries. In optical displacement sensor, the light beam emitted from the LED is converged through the light source lenses and thrown on the object to be detected. When the light beam is reflected from the object, however, it is diffused. The diffused light beam is converged again by the receiver lenses and cast on the optical position detector element as a small spot.

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