• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.338-338
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• 2009

To date, rubbing has been widely used to align LC molecules uniformly. Although rubbing can be simple, it has fundamental problems such as the generation of defects by dust and static electricity, and difficulty in achieving a uniform LC alignment on a large substrate. Therefore, noncontact alignment has been investigated. Ion beam induced alignment method, which provides controllability, nonstop process, and high resolution display. We investigated the high pretilt angle effects on electro-optical properties of ion beam (IB)-irradiated liquid crystal cells. on a blended polymer surface. High pretilt angle of liquid crystals IB-irradiated on a blended polymer surface including such as 5% and 10% of homeotropic polymer contents can' be achieved. The threshold voltages of IB-irradiated twisted nematic (TN) cells on a blended polymer surface decrease with increasing the pretilt angle. Also, the rising time of IB-irradiated TN cells decreases with increasing the pretilt angle. However the decay time of IB-irradiated TN cells increases with increasing the pretilt angle. Consequently, the electro-optical properties of IB-irradiated TN cells depend strongly on the pretilt angle in a blended polymer surface.

• 한국진공학회지
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• 제8권1호
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• pp.43-50
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• 1999

이온빔보조증착법으로 h-BN을 증착하여 이온에너지 및 기판온도에 따른 hexagonal ring의 배열 및 결정성의 변화를 연구하였다. 보론은 전자빔으로 1.5 $\AA$/sec 의 속도로 증발시켰으며, 질소는 둥-hall 형 이온건으로 60, 80, 100eV의 에너지로 공급하였다. 기판의 온도는 상온(no heating), 200, 400, 500, $800^{\circ}C$로 변화시켰다. 질소이온에너지가 증가할수록 hexagonal ring의 c축은 기판에 평행하게 배열하여 100 eV의 질소이온에너지에서 가장 좋은 배열을 나타내었다. 이는 이온에너지가 높을수록 합성 막에 큰 압축응력이 발생하기 때문으로 생각된다. 기판온도에 따라서는 온도가 증가함에 따라 배열이 증가하다가 약 $400^{\circ}C$에서 최대가 되고 그 보다 높은 온도에서는 배열이 감소하였다. 그리고 결정도는 온도가 증가할수록 향상되었다. 이러한 경향들은 온도가 증가함에 따라 원자 이동도는 증가하고 응력발생은 어려워지는 경향으로부터 잘 설명된다. 또한 nano-indentor로 측정한 h-BN막의 경도는 c-축의 배열정도와 같은 경향을 보였다. 이온빔보조증착법은 hexagonal ring의 배열을 통해 h-BN막 성질의 최적화에 효과적인 방법으로 판단된다.

• 한국정밀공학회지
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• 제11권1호
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• pp.150-156
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• 1994

To meet the process requirement of semiconductor device manufacturing, it is necessary to improve the alignment accuracy in exposure equipments. We developed the excimer laser stepper and will describe the methodology for alignment measurement and experimental results. Our wafer alignment system consists of off-axis optics, TTL(Through The Lens) optics and high precision stage. Off-axis alignment utilizes the image processing and /or diffraction from thealign marks of off-centered chip area. On the other hand, TTL alignment can be used for the die-by-die alignment using dual beam interferometry. When only off-axis alignment was used, the experimental alignment error(lml+3 .sigma. ) was 0.26-0.29 .mu. m, and will be reduced down to 0.15 .mu. m by adding TTL alignment.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.300-300
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• 2008

In this study, the advanced DuoPIGatron-type ion beam (IB) system was applied to inorganic thin film for aligning liquid crystal (LC). LC alignment on $Ta_2O_5$ via IB irradiation was embodied. As a result of IB irradiation, the homogeneously aligned liquid crystal display (LCD) on $Ta_2O_5$ was observed with low pretilt angles. The $Ta_2O_5$ were deposited on indium-tin-oxide coated Coming 1737 glass substrates by rf magnetron sputtering at $200^{\circ}C$. The deposition process resulted in forming very uniform thin film on glass substrates without any defects. To confirm the application of the inorganic alignment on modem display optical devices, we fabricated twisted nematic LCD and measured optical property and response time. As a result of the experiment, the electro optical characteristics of the LCD fabricated by using IB irradiation on $Ta_2O_5$ alignment layer were similar with the other LCD fabricated by using rubbing process.

• International Journal of Precision Engineering and Manufacturing
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• 제8권2호
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• pp.54-58
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• 2007

This paper describes an atomic force microscope (AFM)-based instrument for measuring the nanoscale cutting edge profiles of diamond cutting tools. The instrument consists of a combined AFM unit and an optical sensor to align the AFM tip with the top of the diamond cutting tool edge over a submicron range. In the optical sensor, a aser beam is emitted from a laser diode along the Y-axis and focused to a small beam spot with a diameter of approximately $10{\mu}m$ at the beam waist, which is then received by a photodiode. The top of the tool edge is first brought into the center of the beam waist by adjusting it in the X-Z-plane while monitoring the variation in the photodiode output. The cutting tool is then withdrawn and its top edge position at the beam center is recorded. The AFM tip can also be positioned at the beam center in a similar manner to align it with the top of the cutting edge. To reduce electronic noise interference on the photodiode output and thereby enhance the alignment accuracy, a technique is applied that can modulate the photodiode output to an AC signal by driving the laser diode with a sinusoidal current. Alignment experiments and edge profile measurements of a diamond cutting tool were carried out to verify the performance of the proposed system.

• Transactions on Electrical and Electronic Materials
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• 제17권2호
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• pp.109-112
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• 2016

We demonstrated an alternative electrically controlled birefringence liquid crystal (ECB-LC) system with ion beam (IB)-irradiated yttrium gallium oxide (YGaO) alignment films using a sol-gel process. The surface roughness of the films was dependent on the annealing temperature; aggregated particles on surface were observed at lower annealing temperatures, whereas a smooth surface could be obtained with higher annealing temperatures. Higher transmittance in the visible region was observed at higher annealing temperatures. The film had an amorphous crystallographic state irrespective of the annealing temperature. Furthermore, ECB-LC cell with our IB-irradiated YGaO film yielded faster response time when compared to ECB-LC cell with rubbed polyimide. Considering the fast response time and high transmittance, the IB-irradiated YGaO-base LC system is a powerful alternative application for the liquid crystal display industry.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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• pp.1605-1608
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• 2006

The contrast ratio, brightness, and uniformity of S-IPS panel, whose alignment process was employed by ion-beam-alignment (IBA) technology, were improved significantly compared with the convention rubbing's panel, because the light leakage has been reduced in dark state effectively. The IBA technology could generate a panel whose pretilt angle was stable and low after post-treatment process.

• 한국전기전자재료학회논문지
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• 제32권4호
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• pp.302-306
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• 2019

We investigated a solution-derived $Y_2O_3$ film treated by ion beam (IB) irradiation as a liquid crystal (LC) alignment layer. With IB irradiation, homogeneous LC alignment was achieved irrespective of the annealing temperature. To verify the effect of IB irradiation, we conducted surface analyses such as X-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM). As $Y_2O_3$ is a high-k material, the electro-optical properties of the twisted nematic (TN) cells were superior to those of conventional TN cells based on a rubbed polymer, with an LC rising time of 4.1ms and falling time of 2.9ms. The IB-irradiated $Y_2O_3$ is a good alternative as an alignment layer for fast-switching TN LC displays.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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• pp.409-412
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• 2002

We found that polyimide surfaces bombarded by a low energy argon ion beam align liquid crystals. The pretilt angle of the liquid crystals is controlled by ion beam parameters, such as the energy of the incident ions, the angle of incidence, exposure time and current density. The alignment direction of liquid crystal on substrates corresponded to ion beam direction. By argon ion beam the pretilt angle of the liquid crystals was controlled between $0.5^{\circ}$ and $4^{\circ}$for SE-3140 under the proper conditons. By the atomic force microscope (AFM), polyimide surfaces before and after bombarded by ion beam are compared.

• 한국위성정보통신학회논문지
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• 제7권3호
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• pp.54-57
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• 2012

최근 비접촉식 액정배향방법에 대한 요구가 산업계 전반으로 확산되면서, 기존의 UV 광배향을 비롯하여, 여러 가지 비접촉식 액정 배향방법이 활발히 연구되고 있다. 본 연구에서는 이러한 비접촉식 액정배향방법 중에서 SiOF 무기막에 이온빔을 정량적으로 조사하는 방법을 사용하여 액정을 배향하고, 이 기술을 사용하여, 상용화 수준의 IPS(In-Plane Switching) 방식의 액정 셀을 제작함으로써 전기광학 특성을 평가하였다. 특히 이러한 무기막 배향의 경우 배향안정성에 많은 문제를 가지고 있는 것이 보통이나, 본 연구에서 제안한 방법으로 제조된 평가셀은 $200^{\circ}C$의 높은 온도로 열처리를 하여도 배향성을 잃지 않고 균일한 배향을 지속하는 것을 관찰할 수 있었다.