• Title/Summary/Keyword: backscattering

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Formation of $CoSi_2$ Film and Double Heteroepitaxial Growth of $Si/epi-CoSi_2/Si$(111) by Solid Phase Epitaxy (고상 에피택시에 의한 초박막 $CoSi_2$ 형성과 $Si/epi-CoSi_2/Si$(111)의 이중헤테로 에피택셜 성장)

  • Choi, Chi-Kyu;Kang, Min-Sung;Moon, Jong;Hyun, Dong-Geul;Kim, Kun-Ho;Lee, Jeong-Yong
    • Korean Journal of Materials Research
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    • v.8 no.2
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    • pp.165-172
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    • 1998
  • Epitaxial ultrathin films of $CoSi_2$ and double heteroepitaxial structure of Si/$CoSi_2$/Si(lll) were prepared on Si(111)-$7\times{7}$ substrate by in situ solid-phase epitaxy in a ultrahigh vacuum(LHV). The phase, chemical composition, crystallinity, and the microsructure of the Si/$CoSi_2$/Si(lll) interface were investigated by 2-MeV $^4He^{++}$ ion backscattering spectrometry, X-ray diffraction, and high-resolution transmission electron microscopy. The growth mode of the Co film was the Stransky-Krastanov type with texture when the substrate temperature was room temperature. A-type $CoSi_2$ ultrathin film was grown by deposition of about 50A Co on Si(ll1)-$7\times{7}$ substrate followed by in situ annealing at $700^{\circ}C$ for 10 min. The matching face relationships were $CoSi_2$[110]//Si[110] and $CoSi_2$(002)//Si(002) with no misorientation angle. The A-type $CoSi_2$/Si(lll) interface was abrupt and coherent. The best epi-Si/epi-$CoSi_2$2(A-type)/Si(lll) structure was obtained by deposition of Si film on the CoSii at $500^{\circ}C$ followed by in situ annealing at $700^{\circ}C$ for 10 min in UHV.

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The Changes of UV-B Radiation at the Surface due to Stratospheric Aerosols (성층권 에어로졸에 의한 지표면 UV-B 복사량 변동)

  • Jai-Ho Oh;Joon-Hee Jung;Jeong-Woo Kim
    • International Union of Geodesy and Geophysics Korean Journal of Geophysical Research
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    • v.21 no.1
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    • pp.31-46
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    • 1993
  • A radiative transfer model with two-stream/delta-Eddington approximation has been developed to calculate the vertical distributions of atmospheric heating rates and radiative fluxes. The performance of the model has been evaluated by comparison with the results of ICRCCM (Intercomparison of radiative codes in climate models). It has been demonstrated that the presented model has a capability to calculate the solar radiation not only accurately but also economically. The characteristics of ultraviolet-B radiation (UV-B; 280-320nm) are examined by comparison of relation between the flux at the top of atmosphere and that at the surface. The relation of UV-B is quadratic due to the strong ozone absorption in this band. Also, the dependence of the UV-B radiation on the stratospheric ozone depletion and stratospheric aerosol haze due to volcanic eruption on the stratospheric ozone depletion and stratospheric aerosol haze due to volcanic eruption has been tested with various solar zenith angles. The surface UV-B increases as the solar zenith angle increases. The existence of stratospheric aerosols causes an increase in the planetary albedo due to the aerosols' backscattering. The planetary albedo with aerosol's effect has been increases as the solar zenith angle is not sensitive. It may be caused by the fact that the aerosols' scattering effect becomes saturated with the relatively long path length in a large solar zenith angle. Finally, the regional impact of stratospheric aerosols due to volcanic eruption on the intensity of UV-B radiation at the surface has been estimated. A direct effect is that the flux is diminished at the low latitudes, while it is enhanced in the high latitudes by the aerosols' photon trap or twilight effect. In the high latitudes, both aerosols' scattering and ozone absorption have strong and opposite impacts to the surface UV-B radiation is located at the mid-latitudes during spring season in both hemispheres.

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ECR-PECVD 방법으로 제작된 DLC 박막의 기판 Bias 전압 효과

  • 손영호;정우철;강종석;정재인;황도원;김인수;배인호
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.188-188
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    • 2000
  • DLC (Diamond-Like Carbon) 박막은 높은 경도와 가시광선 및 적외선 영역에서의 광 투과도, 전기적 절연성, 화학적 안정성 및 저마찰.내마모 특성 등의 우수한 물리.화학적인 물성을 갖고 있기 때문에 여러 분야의 응용연구가 이루어지고 있다. 이러한 DLC 박막을 제작하는 과정에는 여러 가지가 있으나, 본 연구에서는 ECR-PECVD electron cyclotron resonance plasma enhanced chemical vapor deposition) 방법을 사용하였다. 이것은 최근에 많이 이용되고 있는 방법으로, 이온화률이 높을뿐만 아니라 상온에서도 성막이 가능하고 넓은 진공도 영역에서 플라즈마 공정이 가능한 장점이 있다. 기판으로는 4" 크기의 S(100)를 사용하였고, 박막을 제작하기 전에 진공 중에서 플라즈마 전처리를 하였다. 플라즈마 전처리는 Ar 가스를 150SCCM 주입시켜 5$\times$10-1 torr 의 진공도를 유지시키면서, ECR power를 700W로 고정하고, 기판 bias 전압을 -300 V로 하여 5분 동안 기판을 청정하였다. DLC 박막은 ECR power를 700W. 가스혼합비와 유량을 CH4/H2 : 10/100 SCCM, 증착시간을 2시간으로 고정하고, 기판 bias 전압을 0, -50, -75, -100, -150, -200V로 변화시켜가면서 제작하였다. 이때 ECR 소스로부터 기판까지의 거리는 150mm로 하였고, 진공도는 2$\times$10-2torr 였으며, 기판 bias 전압은 기판에 13.56 MHz의 RF power를 연결하여 RF power에 의해서 유도되는 negative DC self bias 전압을 이용하였다. 제작된 박막을 Auger electron spectroscopy, elastic recoil detection, Rutherford backscattering spectroscopy, X-ray diffraction, secondary electron microscopy, atomic force microscoy, $\alpha$-step, Raman scattering spectroscopu, Fourier transform infrared spectroscopy 및 micro hardness tester를 이용하여 기판 bias 전압이 DLC 박막의 특성에 미치는 영향을 조사하였다. 분석결과 본 연구에서 제작된 DLC 박막은 탄소와 수소만으로 구성되어 있으며, 비정질 상태임을 알 수 있었다. 기판 bias 전압의 증가에 따라 박막의 두께가 감소됨을 알 수 있었고, -150V에서는 박막이 거의 만들어지지 않았으며, -200V에서는 기판 표면이 식각되었다. 이것은 기판 bias 전압과 ECR 플라즈마에 의한 이온충돌 효과 때문으로 판단되며, 150V 이하에서는 증착되는 양보다 re-sputtering 되는 양이 더 많을 것으로 생각된다. 기판 bias 전압을 증가시킬수록 플라즈마에 의한 이온충돌 현상이 두드러져 탄소와 결합하고 있던 수소원자들이 떨어져 나가는 탈수소화 (dehydrogenation) 현상을 확인할 수 있었으며, 이것은 C-H 결합에너지가 C-C 결합이나 C=C 결합보다 약하여 수소 원자가 비교적 해리가 잘되므로 이러한 현상이 일어난다고 판단된다. 결합이 끊어진 탄소 원자들은 다른 탄소원자들과 결합하여 3차원적 cross-link를 형성시켜 나가면서 내부 압축응력을 증가시키는 것으로 알려져 있으며, hardness 시험 결과로 이것을 확인할 수 있었다. 그리고 표면거칠기는 기판 bias 전압을 증가시킬수록 더 smooth 해짐을 확인하였다.인하였다.

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자장 강화된 유도결합형 플라즈마를 이용한 TFT-LCD용 Al-Nd 박막의 식각 특성 개선에 관한 연구

  • 한혜리;이영준;오경희;홍문표;염근영
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.195-195
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    • 2000
  • TFT-LCD의 제조공정은 박막층의 식각 공정에 대해 기존의 습식 공정을 대치하는 건식식각이 선호되고 있다. 건식 식각 공정은 반도체 공저에 응용되면서 소자의 최소 선폰(CD)이 감소함에 따라 유도결합셩 프라즈마를 비롯한 고밀도 플라즈마 이용한 플라즈마 장비 사용이 증가하는 추세이다. 여기에 평판디스플레이의 공정을 위해서는 대면적과 사각형 기판에 대한 균일도를 보장할 수 있는 고밀도의 균일한 플라즈마 유지가 중요하다. 본 실험에서는 자장강화된 유도결합형 플라즈마의 플라즈마 밀도 및 균일도를 살펴보고 TFT-LCD에 gate 전극으로 사용되는 Al-Nd 박막의 식각을 통하여 식각균일도와 식각속도 및 식각 선택도 등의 건식 식각 특성을 보고자 한다. 영구자석 및 전자석의 설치는 사각형의 유도결합형 플라즈마는 소형 영구자석을 배열하여 부착하였으며, 외부에는 chamber와 같이 사각형태의 전자석을 500mm$\times$500mm의 크기를 갖는 z축 방향의 Helmholtz형으로 제작하였다. 더. 영구자석 배열에 대해서는 자석간의 거리와 세기 변화를 조합하여 magnetic cusping의 변화를 주었으며 전자석의 세기는 전류값을 기준으로 변화시켜 보았다. 실험을 통하여 플라즈마 균일도를 5% 이하로 개선하고 이러한 균일도를 유지하며 플라즈마 밀도를 높일 수 있는 조건을 찾을 수 있었다. 이러한 적합화된 조건에서 저장강화된 유도결합형 프라즈마를 Al-Nd 박막 식각에 응용한 결과, Al-Nd의 식각속도 및 식각 선택도는 유도결합형 프라즈마에 비해 크게 증가하였으며, 식각균일도가 개선되는 것을 관찰하였다. 또한 electrostatic probe(Hiden, Analytical)를 이용하여 Al-Nd 식각에 사용된 반응성 식각가스에 대한 저장강화된 유도결합형 플라즈마의 특성 분석을 수행하였다.c recoil detection, Rutherford backscattering spectroscopy, X-ray diffraction, secondary electron microscopy, atomic force microscoy, $\alpha$-step, Raman scattering spectroscopu, Fourier transform infrared spectroscopy 및 micro hardness tester를 이용하여 기판 bias 전압이 DLC 박막의 특성에 미치는 영향을 조사하였다. 분석결과 본 연구에서 제작된 DLC 박막은 탄소와 수소만으로 구성되어 있으며, 비정질 상태임을 알 수 있었다. 기판 bias 전압의 증가에 따라 박막의 두께가 감소됨을 알 수 있었고, -150V에서는 박막이 거의 만들어지지 않았으며, -200V에서는 기판 표면이 식각되었다. 이것은 기판 bias 전압과 ECR 플라즈마에 의한 이온충돌 효과 때문으로 판단되며, 150V 이하에서는 증착되는 양보다 re-sputtering 되는 양이 더 많을 것으로 생각된다. 기판 bias 전압을 증가시킬수록 플라즈마에 의한 이온충돌 현상이 두드러져 탄소와 결합하고 있던 수소원자들이 떨어져 나가는 탈수소화 (dehydrogenation) 현상을 확인할 수 있었으며, 이것은 C-H 결합에너지가 C-C 결합이나 C=C 결합보다 약하여 수소 원자가 비교적 해리가 잘되므로 이러한 현상이 일어난다고 판단된다. 결합이 끊어진 탄소 원자들은 다른 탄소원자들과 결합하여 3차원적 cross-link를 형성시켜 나가면서 내부 압축응력을 증가시키는 것으로 알려져 있으며, hardness 시험 결과로 이것을 확인할 수 있었다. 그리고 표면거칠기는 기판 bias 전압을 증가시킬수록 더 smooth 해짐을 확인하였다.인하였다.을 알 수 있

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Study of Tungsten Nitride Diffusion Barrier for Various Nitrogen Gas Flow Rate by Employing Nano-Mechanical Analysis (Nano-Mechanics 분석을 통한 질화 텅스텐 확산방지막의 질소 유량에 따른 연구)

  • Kwon, Ku Eun;Kim, Sung Joon;Kim, Soo In;Lee, Chang Woo
    • Journal of the Korean Vacuum Society
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    • v.22 no.4
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    • pp.188-192
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    • 2013
  • Many studies have been conducted for preventing from diffusion between silicon wafer and metallic thin film due to a decrease of line-width and multi-layer thin film for miniaturization and high integration of semiconductor. This paper has focused on the nano-mechanical property of diffusion barrier which sample is prepared for various gas flow rate of nitrogen with tungsten (W) base from 2.5 to 10 sccm. The deposition rate, resistivity and crystallographic properties were measured by a ${\beta}$-ray back-scattering spectroscopy, 4-point probe and x-ray diffraction (XRD), respectively. We also has investigated the nano-mechanical property using the nano-indenter. As a result, the surface hardness of W-N thin film was increased rapidly from 10.07 to 15.55 GPa when the nitrogen gas flow was increased from 2.5 to 5 sccm. And the surface hardness of W-N thin film had 12.65 and 12.77 GPa at the nitrogen gas flow of 7.5 and 10 sccm respectively. These results were decreased by the comparison with the W-N thin film at nitrogen gas flow of 5 sccm. It was inferred that these severe changes were caused by the stoichiometric difference between the crystalline and amorphous state in W-N thin film. In addition, these results were caused by increased compressive stress.

Waveform Decomposition of Airborne Bathymetric LiDAR by Estimating Potential Peaks (잠재적 피크 추정을 통한 항공수심라이다 웨이브폼 분해)

  • Kim, Hyejin;Lee, Jaebin;Kim, Yongil;Wie, Gwangjae
    • Korean Journal of Remote Sensing
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    • v.37 no.6_1
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    • pp.1709-1718
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    • 2021
  • The waveform data of the Airborne Bathymetric LiDAR (ABL; LiDAR: Light Detection And Ranging) system provides data with improved accuracy, resolution, and reliability compared to the discrete-return data, and increases the user's control over data processing. Furthermore, we are able to extract additional information about the return signal. Waveform decomposition is a technique that separates each echo from the received waveform with a mixture of water surface and seabed reflections, waterbody backscattering, and various noises. In this study, a new waveform decomposition technique based on a Gaussian model was developed to improve the point extraction performance from the ABL waveform data. In the existing waveform decomposition techniques, the number of decomposed echoes and decomposition performance depend on the peak detection results because they use waveform peaks as initial values. However, in the study, we improved the approximation accuracy of the decomposition model by adding the estimated potential peak candidates to the initial peaks. As a result of an experiment using waveform data obtained from the East Coast from the Seahawk system, the precision of the decomposition model was improved by about 37% based on evaluating RMSE compared to the Gaussian decomposition method.

A Study on the Microstructure Formation of Sn Solder Bumps by Organic Additives and Current Density (유기첨가제 및 전류밀도에 의한 Sn 솔더 범프의 미세조직 형성 연구)

  • Kim, Sang-Hyeok;Kim, Seong-Jin;Shin, Han-Kyun;Heo, Cheol-Ho;Moon, Seongjae;Lee, Hyo-Jong
    • Journal of the Microelectronics and Packaging Society
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    • v.28 no.1
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    • pp.47-54
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    • 2021
  • For the bonding of smaller PCB solder bumps of less than 100 microns, an experiment was performed to make up a tin plating solution and find plating conditions in order to produce a bump pattern through tin electroplating, replacing the previous PCB solder bumps process by microballs. After SR patterning, a Cu seed layer was formed, and then, through DFR patterning, a pattern in which Sn can be selectively plated only within the SR pattern was formed on the PCB substrate. The tin plating solution was made based on methanesulfonic acid, and hydroquinone was used as an antioxidant to prevent oxidation of divalent tin ions. Triton X-100 was used as a surfactant, and gelatin was used as a grain refiner. By measuring the electrochemical polarization curve, the characteristics of organic additives in Triton X-100 and gelatin were compared. It was confirmed that the addition of Triton X-100 suppressed hydrogen generation up to -1 V vs. NHE, whereas gelatin inhibited hydrogen generation up to -0.7 V vs. NHE. As the current density increased, there was a general tendency that the grain size became finer, and it was observed that it became finer when gelatin was added.

Assessment of Stand-alone Utilization of Sentinel-1 SAR for High Resolution Soil Moisture Retrieval Using Machine Learning (기계학습 기반 고해상도 토양수분 복원을 위한 Sentinel-1 SAR의 자립형 활용성 평가)

  • Jeong, Jaehwan;Cho, Seongkeun;Jeon, Hyunho;Lee, Seulchan;Choi, Minha
    • Korean Journal of Remote Sensing
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    • v.38 no.5_1
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    • pp.571-585
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    • 2022
  • As the threat of natural disasters such as droughts, floods, forest fires, and landslides increases due to climate change, social demand for high-resolution soil moisture retrieval, such as Synthetic Aperture Radar (SAR), is also increasing. However, the domestic environment has a high proportion of mountainous topography, making it challenging to retrieve soil moisture from SAR data. This study evaluated the usability of Sentinel-1 SAR, which is applied with the Artificial Neural Network (ANN) technique, to retrieve soil moisture. It was confirmed that the backscattering coefficient obtained from Sentinel-1 significantly correlated with soil moisture behavior, and the possibility of stand-alone use to correct vegetation effects without using auxiliary data observed from other satellites or observatories. However, there was a large difference in the characteristics of each site and topographic group. In particular, when the model learned on the mountain and at flat land cross-applied, the soil moisture could not be properly simulated. In addition, when the number of learning points was increased to solve this problem, the soil moisture retrieval model was smoothed. As a result, the overall correlation coefficient of all sites improved, but errors at individual sites gradually increased. Therefore, systematic research must be conducted in order to widely apply high-resolution SAR soil moisture data. It is expected that it can be effectively used in various fields if the scope of learning sites and application targets are specifically limited.

A pilot study on the application of environmental DNA to the estimation of the biomass of dominant species in the northwestern waters of Jeju Island (제주도 서북 해역에서의 우점종 생물량 추정에 환경 유전자의 적용에 관한 시범 연구)

  • KANG, Myounghee;PARK, Kyeong-Dong;MIN, Eunbi;LEE, Changheon;KANG, Taejong;OH, Taegeon;LIM, Byeonggwon;HWANG, Doojin;KIM, Byung-Yeob
    • Journal of the Korean Society of Fisheries and Ocean Technology
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    • v.58 no.1
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    • pp.39-48
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    • 2022
  • Using environmental DNA (eDNA) in the fisheries and oceanography fields, research on the diversity of biological species, the presence or absence of specific species and quantitative evaluation of species has considerably been performed. Up to date, no study on eDNA has been tried in the area of fisheries acoustics in Korea. In this study, the biomass of a dominant species in the northwestern waters of Jeju Island was examined using 1) the catch ratio of the species from trawl survey results and 2) the ranking ratio of the species from the eDNA results. The dominant species was Zoarces gillii, and its trawl catch ratio was 68.2% and its eDNA ratio was 81.3%. The Zoarces gillii biomass from the two methods was 7199.4 tons (trawl) and 8584.6 tons (eDNA), respectively. The mean and standard deviation of the acoustic backscattering strength values (120 kHz) from the entire survey area were 135.5 and 157.7 m2/nm2, respectively. The strongest echo signal occurred at latitude 34° and longitude 126°15' (northwest of Jeju Island). High echo signals were observed in a specific oceanographic feature (salinity range of 32-33 psu and the water temperature range of 19-20℃). This study was a pilot study on evaluating quantitatively aquatic resources by applying the eDNA technique into acoustic-trawl survey method. Points to be considered for high-quality quantitative estimation using the eDNA to fisheries acosutics were discussed.

Quantitative analysis of hydrogen in thin film by scattering-recoil co-measurement technique (산란-되튐 동시 측정 방법에 의한 박막 중 수소 정량법)

  • Lee, Hwa-Ryun;Eum, Chul Hun;Choi, Han-Woo;Kim, Joonkon
    • Analytical Science and Technology
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    • v.19 no.5
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    • pp.400-406
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    • 2006
  • Hydrogen analysis by elastic recoil detection has been performed utilizing polyimide film as a reference sample of known hydrogen content assuming the soundness of ion beam current integration. However beam current integration at higher incidence angle is not reliable. Scattering yield per unit fluence by current integration which is normalized per unit path length decreases as the sample tilt angle is getting higher. Moreover because beam current integration at high tilt angle is incomplete, hydrogen evaluation is very risky by direct comparison of sequentially collected recoil spectra between reference and target sample. In this study, primary ion beam dose is determined by backscattering spectrum that is collected simultaneously with recoil spectrum instead of ion beam current integration in order to reduce uncertainty arising in the process of current integration and to enhance the reliability of quantitative analysis. Three test samples are selected $-7.6{\mu}m$ polyimide film, hydrogen implanted silicondioxide and Au deposited carbon wafer- and analyzed by two methods and compared.