• Proceedings of the Optical Society of Korea Conference
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• 2005.07a
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• pp.184-185
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• 2005

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2002.10b
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• pp.55-56
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• 2002

Nanotribological characteristics of hydrophobic surfaces were studied experimentally using an atomic force microscope (AFM). Two kinds of thiolic self-assembled monolayers (SAM) having different spacer chains and their mixture were deposited onto gold-coated mica, where the deposited SAM resulted in the hydrophobic nature. Results showed that the mixed thiolic SAMs resulted in low adhesion and friction in nano-scale contact. It was argued that the water wetting characteristics played a central role on nano-scale adhesion and friction. Also the effect of mixing the thiolic SAMs were discussed on the basis of real area on contact and the stiffness of the SAM layers.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.8
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• pp.88-95
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• 2008

Young's modulus of electroplated nickel thin film is systematically investigated using the resonance method of atomic force microscope. Thin layers of nickel to be measured are electroplated onto the surface of an AFM silicon cantilever and Young's modulus of plated nickel film is investigated as a function of process conditions such as the plating temperature and applied current density. It is found that Young's modulus of plated nickel thin film is as high as that of bulk nickel at low plating temperature or low current density, but decreases with increasing plating temperature or current density. The results imply that the plating rate increases as increasing the plating temperature or current density, therefore, slow plating rate produces a dense plating material due to the sufficient time fur nickel ions to form a dense coating.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.22 no.5
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• pp.831-836
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• 2013

This study demonstrates the process of fabricating patterns using tribonanolithography (TNL),with laboratory-made micro polycrystalline diamond (PCD) tools that are attached to an atomic force microscope (AFM). The various patterns are easily fabricated using mechanical scratching, under various normal loads, using the PCD tool on single crystal silicon, which is the master mold for replication in this study. Then, polydimethylsiloxane (PDMS) replica molds are fabricated using precise pattern transfer processes. The transferred patterns show high dimensional accuracy as compared with those of TNL-processed silicon micro molds. TNL can reduce the need for high cost and complicated apparatuses required for conventional lithography methods. TNL shows great potential in that it allows for the rapid fabrication of duplicated patterns through simple mechanical micromachining on brittle sample surfaces.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.10
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• pp.41-47
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• 2008

This study aims to obtain machining characteristics during AFM (Atomic force Microscope) machining of silicon wafers and to monitor the machining states using acoustic emission. As in micro scale machining, two distinct regimes of deformation, i. e. ploughing regime and cutting regime were observed. First, the transition between the two regimes are investigated by analyzing the "pile-up" during machining. As far as in process monitoring is concerned, in the ploughing repime, no chips have been formed and related AE RMS values are relatively low, In the mean time, in the cutting regime, the RMS values are significantly higher than the ploughing regime, with apparent chip formation. From the results, we found out that the proposed scheme can be used for the monitoring of nanomachining, especially for the characterization of nanocutting mode transition.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.552-555
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• 2004

The reliability issue of the probe tip/recording media interface is one of the most crucial concerns in the Atomic Force Microscope (AFM)-based recording technology. In this work, the tribological characteristics of the probe/media interface were investigated by performing wear tests using an AFM. The ranges of applied normal load and sliding velocity for the wear test were 10 to 50nN and 2 to 20$\mu$m/s respectively. The damage of the probe tip was quantitatively as well as qualitatively characterized by Field Emission Scanning Probe Microscope (FESEM) analysis and calculated based on Archard s wear equation. It was shown that the wear coefficient of the probe tip was in the order of 10$^{-4}$ ~ 10$^{-3}$ , and significant contamination at the end of the probe tip was observed. Thus in order to implement the AFM-based recording technology, tribological optimization of the probe/media interface must be achieved.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.20 no.4
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• pp.395-400
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• 2011

Scanning Probe Lithography is a method to localized oxidation on single crystal silicon wafer surface. This study demonstrates nanometer scale non contact lithography process on (100) silicon (p-type) wafer surface using AFM(Atomic force microscope) apparatuses and pulse controlling methods. AFM-based experimental apparatuses are connected the DC pulse generator that supplies ultra short pulses between conductive tip and single crystal silicon wafer surface maintaining constant humidity during processes. Then ultra short pulse durations are controlled according to various experimental conditions. Non contact lithography of using ultra short pulse induces electrochemical reaction between micro-scale tip and silicon wafer surface. Various growths of oxides can be created by ultra short pulse non contact lithography modification according to various pulse durations and applied constant humidity environment.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.31-35
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• 2000

A cantilever deflection measurement system for AFM(atomic force microscope) was constructed by the laser deflection method using LEP type PSD. Design process including sensitivity analysis was presented and the performance of the system was demonstrated by several experiments using a sample specimen with 50nm-step on the surface. The measured displacement-amplification-factor showed good agreement with the expected one with about 8% deviation. The step height measurement data were compared to what were acquired by commercial AFM, and the result showed that there were about 5nm-deviation between the two data. These results satisfies our expectation in the stage of system design.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2005.11a
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• pp.129-132
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• 2005

This study analyzes the behavior of adhesion and friction according to the pore size of nanohoneycomb structures in atomic force microscope (AFM). Anodic aluminum oxide (AAO) films are fabricated as nanohoneycomb structures. According to the pore diameters of the nanohoneycomb structures, the adhesive forces and the frictional coefficients arc obtained in AFM, and the behaviors are analyzed in the view of the contact area between the sphere particle and nanohoneycomb substrate. The effective Young's moduli of the nanohoneycomb structures are measured from the nanoindentation tests, and the contact areas at zero applied load are calculated by combining the porosity of the nanohoneycomb structures and the contact radius determined from JKR and DMT theory.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.1
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• pp.80-85
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• 2007

High speed cutting is a machining process which cuts materials with the fast movement and rotation of a spindle in a machine tool. High speed cutting leaves a plastically deformed layer on the machined surface. This deformed layer affects in various forms to the surface roughness of machined parts such as the dimensional instability, the micro crack. The surface roughness is called surface integrity which is very important in precision cutting. This paper aims to study on the machined surfaces characteristics of aluminum alloy and brass by AFM(Atomic force microscope) measurement. The objective is contribution to ultra- precision cutting by exhibit foundation data of surface roughness and tool wear when parts are cutting with diamond tool at the factory.