• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.207-207
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• 2016

plasma group velocities of neon with oxygen admixture (ug) are obtained by intensified charge coupled device (ICCD) camera images at fixed gate width time of 5 ns. The propagation velocities outside interelectrode region are in the order of 104 m/s.The plasma ambipolar diffusion velocities are calculated to be in the order of 102 m/s. Plasma jet is generated by all fixed sinusoidal power supply, total gas flow and repetition frequency at 3 kV, 800 sccm and 40 kHz, respectively. The amount of oxygen admixture is varied from 0 to 2.75 %. By employing one dimensional convective wave packet model, the electron temperatures in non-thermal atmospheric-pressure plasma jet are estimated to be in a range from 1.65 to 1.95 eV.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.156.1-156.1
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• 2015

Neon and argon plasma group velocities (ug) are obtained by intensified charge coupled device (ICCD) camera images at fixed gate width time of 5 ns. The propagation velocities in upstream and downstream region are in the order of 104-105 m/s. The plasma ambipolar diffusion velocities are calculated to be in the order of 101-102 m/s. Plasma jet is generated by sinusoidal power supply in varying voltages from 1 to 4 kV at repetition frequency of 40 kHz. By employing one dimensional convective wave packet model, the neon and argon electron temperatures in non-thermal atmospheric-pressure plasma jet are estimated to be 1.95 and 1.18 eV, respectively.

• 한국표면공학회지
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• 제36권1호
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• pp.69-73
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• 2003

The atmospheric pressure plasma is regarded as an effective method for surface treatments because it can reduce the period of process and doesn't need expensive vacuum apparatus. The performance of non-transferred plasma torches is significantly depended on jet flow characteristics out of the nozzle. In order to produce the high performance of a torch, the maximum discharge velocity near an annular gap in the torch should be maintained. Also, the compulsory swirl is being produced to gain the shape that can concentrate the plasma at the center of gas flow. In this work, the distribution of gas flow that goes out to atmosphere through a plenum chamber and nozzle is analyzed to evaluate the performance of atmospheric pressure plasma torch which can present the optimum design of the torch. Numerical analysis is carried out with various angles of an inlet flow velocity. Especially, three-dimensional model of the torch is investigated to estimate swirl effect. We also investigate the stabilization of plasma distribution. For analyzing the swirl in the plenum chamber and the flow distribution, FVM (finite volume method) and SIMPLE algorithm are used for solving the governing equations. The standard k-model is used for simulating the turbulence.

• 접착 및 계면
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• 제4권4호
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• pp.1-6
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• 2003

대기압 플라즈마를 이용하여 폴리프로필렌 필름의 표면을 처리한 후 각각 극성 용매(water)와 비극성 용매(diiodomethane)를 사용한 접촉각 측정기로 필름 표면의 접촉각을 측정하였다. 측정된 접촉각을 이용해 표면 자유에너지 변화를 계산한 후 대기압 플라즈마 처리 전후의 폴리프로필렌 필름의 접촉각과 표면 자유에너지 상태를 비교, 분석하였다. 또한 대기압 플라즈마의 처리 조건을 바꿔가며 폴리프로필렌 필름 표면을 처리함으로써 접촉각과 표면 자유에너지가 각각의 처리 조건에 따라 어떠한 영향을 받는지 연구하였다. 대기압 플라즈마 처리 조건에 따라 접촉각 및 표면 자유에너지는 최적값을 보여주거나 일정한 값에 도달하는 경향을 보여 주었다.

• 반도체디스플레이기술학회지
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• 제17권2호
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• pp.16-19
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• 2018

The development speed of semiconductor and display device manufacturing technology is growing faster than the development speed of process equipment. So, there is a growing need for process diagnostic technology that can measure process conditions in real time and directly. In this study, a plasma diagnosis was carried out using impedance variation due to the plasma discharge. Variation of the measurement impedance appears as a voltage change at the reference impedance, and the plasma density is calculated using this. The above experiment was conducted by integrating the plasma diagnosis system and the linear atmospheric pressure DBD plasma source. It was confirmed that plasma density varies depending on various parameters (gas flow rate, $Ar/O_2$ mixture ratio, Input power).

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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• pp.1444-1446
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• 2009

The atmospheric pressure plasma polymerization of acrylate monomers was carried out to have dielectrics with easy preparation and high performance. The effects of discharge power, monomer concentration and deposition time on film properties were investigated using various characterization tools. With proper conditions, smooth dielectric layer of 100nm thickness was obtained. Dielectric property as organic dielectric layer has been studied for future applications in organic thin film transistors(OTFT).

• Bulletin of the Korean Chemical Society
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• 제31권2호
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• pp.335-338
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• 2010

In this study, the atmospheric plasma treatment with $He/O_2$ was conducted to modify the surface chemistry of carbon fibers. The effects of plasma treatment parameters on the surface energetics of carbon fibers were experimentally investigated with respect to gas flow ratio, power intensity, and treatment time. Surface characteristics of the carbon fibers were determined by X-ray photoelectron spectroscopy (XPS), scanning electron microscope (SEM), Fourier transform infrared (FT-IR), Zeta-potential, and contact angle measurements. The results indicated that oxygen plasma treatment led to a large amount of reactive functional groups onto the fiber surface, and these groups can form together as physical intermolecular bonding to improve the surface wettability with a hydrophilic polymer matrix.

• 펄프종이기술
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• 제43권5호
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• pp.55-59
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• 2011

Atmospheric plasma technology was utilized in order to modify surface characteristics of base paper for coating. Argon(Ar) and oxygen(O2) gases were used. It was found that contact angle of a water droplet was decreased with increasing voltage during plasma treatment, meaning that the hydrophilicity of paper surface was increased. On the other hand, the physical properties like roughness and optical properties such as gloss, brightness and opacity were not influenced by the plasma treatment. In conclusion, atmospheric plasma technology can be utilized to control hydrophilicity of paper surface without affecting physical properties of the paper.

• 한국연소학회:학술대회논문집
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• 한국연소학회 2005년도 제31회 KOSCO SYMPOSIUM 논문집
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• pp.64-68
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• 2005

Methane reforming processes to obtain hydrogen were investigated experimentally by using atmospheric plasma source. Among possible reforming processes, such as a $CO_2$ reforming(dry reforming), a partial oxidation (POx), a steam reforming(SR), and a steam reforming with oxygen(SRO or auto-thermal reforming), partial oxidation and the steam reforming with oxygen were considered. We choose a rotating arc plasma as an atmospheric plasma source, since it shows the best performances in our preliminary tests in terms of a methane conversion, a hydrogen production, and a power consumption. Then, the effects of a feeding flow-rate, an electrical power input to a plasma reaction, an $O_2/C$ ratio and a steam to carbon ratio in the case of SRO on the reforming characteristics were observed systematically. As results, at a certain condition almost 100% of methane conversion was obtained and we could achieve the same hydrogen production rate by consuming a half of electrical power which was used by the best results for other researchers.

• 전기학회논문지
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• 제58권12호
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• pp.2474-2479
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• 2009

This paper presents an atmospheric microplasma-jet device for bio~medical application. The microplasma-jet device consists of four components; a thin Ni anode, porous alumina insulator, a stainless steel cathode and an aluminum case. The anode has 8 holes, and hole diameter and depth are $200 {\mu}m$ and $60 {\mu}m$, respectively. The discharge test was performed in atmospheric pressure using nitrogen gas and AC voltage at the optimum gas flow rate of 4 Vmin. The plasma-jet is ejected stably for the input voltage ranging from 5.5 to $9.5 kV_{p-p}$. The plasma becomes dense as the input voltage increases, which was verified by the hydrophilicity change of PMMA surface treated by the plasma. The temperature increasement of the aluminum film exposed to plasma-jet illustrates that the micro plasma-jet device is feasible for bio-medical application.