• Korean Journal of Optics and Photonics
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• v.16 no.4
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• pp.354-360
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• 2005

A high performance LWIR(long wavelength infra red) zoom thermal imaging sensor using $480{\times}6$ HgCdTe(MCT) linear detector has been developed by ADD Korea. The optical system consists of zoom telescope having large objective about 190 mm diameter and optically well corrected scanning system. The zoom ratio of the telescope is 3: 1 and its magnification change is performed by moving two lens groups. And also these moving groups are used for athermalization of the system. It is certain that the zoom sensor can be used in wide operating temperature range without any degradation of the system performance. Especially, the sensor image can be displayed with the HDTV(high definition television) format of which aspect ratio is 16:9. In case of HDTV format, the scanning system is able to display 620,000 pixels. This function can make wider horizontal field of view without any loss of performance than the normal TV format image. The MRTD(minimum resolvable temperature difference) of the LWIR thermal imaging sensor shows good results below 0.04 K at spatial frequency 2 cycles/mrad and 0.23 K at spatial frequency 8 cycles/mrad at the narrow field of view.

• Korean Journal of Optics and Photonics
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• v.30 no.2
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• pp.37-47
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• 2019

A reflecting omnidirectional optical system with four spherical and aspherical mirrors, for use with long-wavelength infrared light (LWIR) for night surveillance, is proposed. It is designed to include a collecting pseudo-Cassegrain reflector and an imaging inverse pseudo-Cassegrain reflector, and the design process and performance analysis is reported in detail. The half-field of view (HFOV) and F-number of this optical system are $40-110^{\circ}$ and 1.56, respectively. To use the LWIR imaging, the size of the image must be similar to that of the microbolometer sensor for LWIR. As a result, the size of the image must be $5.9mm{\times}5.9mm$ if possible. The image size ratio for an HFOV range of $40^{\circ}$ to $110^{\circ}$ after optimizing the design is 48.86%. At a spatial frequency of 20 lp/mm when the HFOV is $110^{\circ}$, the modulation transfer function (MTF) for LWIR is 0.381. Additionally, the cumulative probability of tolerance for the LWIR at a spatial frequency of 20 lp/mm is 99.75%. As a result of athermalization analysis in the temperature range of $-32^{\circ}C$ to $+55^{\circ}C$, we find that the secondary mirror of the inverse pseudo-Cassegrain reflector can function as a compensator, to alleviate MTF degradation with rising temperature.

• Korean Journal of Optics and Photonics
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• v.34 no.2
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• pp.53-60
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• 2023

We designed a catadioptric objective lens with a 0.6 numerical aperture (NA) for semiconductor inspection at 193 nm. The objective lens meets major requirements such as a spatial resolution of 200 nm and a field of view (FOV) of 0.15 mm or more. We selected a wavelength of 266 nm for autofocus based on the availability of the light source. First, we built the objective lenses of three lens groups: a focusing lens group, a field-lens group, and an NA conversion group. In particular, the NA conversion group is a group of catadioptric lenses that convert the numerical aperture of the beam focused by the prior groups to the required value, i.e., 0.6. The last design comprises 11 optical elements with root-mean-squared (RMS) wavefront aberrations less than λ/80 over the entire field of view. We also achieved the athermalization of the objective lens with focus-shift alone satisfying the performance of RMS wavefront aberration below λ/30 at a temperature range of 20 ± 1.2 ℃.