Behavior of Nano-patterns with PS-b-PMMA Block Copolymer by Substrates and Process Conditions (기판 및 공정조건에 따른 PS-b-PMMA 블락 공중합체의 나노패턴 형상 거동)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2010.06a
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- pp.59-59
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- 2010