• 한국산학기술학회:학술대회논문집
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• 한국산학기술학회 2001년도 춘계학술대회 발표논문집
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• pp.124-128
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• 2001

A present semiconductor cleaning technology is based upon RCA cleaning technology which consumes vast amounts of chemicals and ultra pure water(UPW) and is the high temperature Process. Therefore, this technology gives rise to the many environmental issues, and some alternatives such as functional water cleaning are being studied. The electrolyzed water was generated by an electrolysis system which consists of anode, cathode, and middle chambers. Oxidative water and reductive water were obtained in anode and cathode chambers, respectively. In case of NH$_4$Cl electrolyte, the oxidation-reduction potential and pH for anode water(AW) and cathode water(CW) were measured to be +1050mV and 4.8, and -750mV and 10.0, respectively. AW and CW were deteriorated after electrolyzed, but maintained their characteristics for more than 40 minutes sufficiently enough for cleaning. Their deterioration was correlated with CO$_2$ concentration changes dissolved from air. It was known that AW was effective for Cu removal, while CW was more effective for Fe removal. The particle distributions after various particle removal processes maintained the same pattern. In this work, RCA consumed about 9$\ell$chemicals, while EW did only 400$m\ell$ HCI electrolyte or 600$m\ell$ NH$_4$Cl electrolyte. It was hence concluded that EW cleaning technology would be very effective for eliminating environment, safety, and health(ESH) issues in the next generation semiconductor manufacturing.

• 상하수도학회지
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• 제27권4호
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• pp.503-509
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• 2013

Electrochemical redox capacity of a microbial fuel cell (MFC) electrode is an important factor in the power density. This study was conducted to investigate the redox capacity of surface modified anode and cathode electrodes by measuring their conductivities. An anode electrode was modified with nitric acid and a cathode electrode was modified with heat treatment. The anode electrode modified with 20 % of the nitric acid concentration showed the highest conductivity of $6.2{\mu}S/cm/g$ and the maximum power density of $306.0mW/m^2$ when used in a MFC. The cathode electrode modified at $472^{\circ}C$ for 18 min showed the highest conductivity of $5.2{\mu}S/cm/g$ and the maximum power density of $276.20mW/m^2$ when used in a MFC. On the other hand, an MFC using both the electrodes showed the highest maximum power density of $408.2mW/m^2$. Meanwhile, a control MFC without modified electrodes generated very small voltage (0.014 mV), so the power density could not be measured.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.2250-2254
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• 2007

Comprehensive analytical models focusing on the anode water loss, the cathode flooding, water equilibrium, and water management strategy are developed for polymer electrolyte fuel cells. Analytical solutions presented in this study are compared with two-dimensional computational results and shows a good agreement in predicting those critical characteristics of water. General features of water concentration profile as a function of membrane thickness and current density are presented to illustrate the net effect of the back-diffusion of water from the cathode to anode and the water production by the cathode catalytic reaction on water transport over a fuel cell domain. As one of practical applications, the required humidity level of feed streams for full saturation at the channel outlets are investigated as a function of the physical operating condition. These analytical models can provide good understanding on the characteristic water

• 한국수소및신에너지학회논문집
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• 제27권4호
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• pp.341-348
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• 2016

The experiments related on structure and water electrolysis performance of HALE UAV stack were conducted in this study. Anode catalyst $IrRuO_2$ was prepared by Adam's fusion methods as 2~3 nm nano sized particles, and the cathode catalyst was used as commercial product of Premetek. The MEA (membrane electrode assembly) was manufactured by decal methods, anode and anode catalytic layers were prepared by electro-spray. HALE stack was composed of 5 multi-cells as $0.2Nm^3/hr$ hydrogen production rate with hydrogen pressure as 10 bar. The water electrolysis performance was investigated at atmospheric pressure and temperature of $55^{\circ}C$. Best performance of HALE UAV stack was recorded as cell voltage efficiency as 86%.

• 한국해양공학회지
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• 제22권3호
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• pp.76-81
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• 2008

There are two cases when the life of a sacrificial anode is shortened from the designed life: one case results from self-corrosion of the anode due to contamination by sea water in the other case, however, electrical current to protect some given steel piles overflows to protect other, adjacent non-protected steel piles. In this study, the variation of polarization potential of nine steel piles, being protected cathodically and with anode-producing current between anode and steel piles, was investigated. Parameters were varied, such as the eighth and ninth steel piles either connected electrically or not, and whether the ninth steel pile was protected by another sacrificial anode or not. The current produced by the sacrificial anode decreased when the ninth steel pile was cathodically protected by the anode of another pile. However, produced current increased when the ninth steel pile was not connected to another anode. The study concludes that the life of a sacrificial anode can be prolonged or shortened depending on whether adjacent steel piles are cathodically protected or not.

• 한국안전학회지
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• 제32권6호
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• pp.54-60
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• 2017

A railway rail will be corroded by the repetitive sea wind and fog in the splash and tidal zone such as Youngjong grand bridge. And these rusts of rail could be increased by increasing service period, and it frequently occurred the safety accidents or disorders in electrical problem. In this study, the sacrificial anode cathodic protection method was proposed as a measures for reducing the corrosion of the railway rails in the oceanic climate conditions. As the results of immersion test using the salt water during four months, the sacrificial anode cathodic protection method using the aluminum anode(Al-anode) was evaluated that a distinct effect on corrosion reduction in the rails. Therefore the sacrificial anode cathodic protection method was experimentally proven that a disorders in aspects electric and signal of railway operation condition such as direct fixation track system in Youngjong grand bridge could be prevented by reducing rust falling from the rail. In addition, the installation conditions of the anodes directly affect the transmission range of corrosion potential, the sectional loss of anode, and the corrosion reduction effect. Therefore, to expect the corrosion reduction effect of rails under the oceanic climate conditions for railway track, it was important to adopted the appropriate spacing of anode installation by considering the actual field conditions.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 제36회 하계학술대회 논문집 전기설비
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• pp.115-117
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• 2005

The electrolytic protection is classified according to the current supplied. And there are the Sacrificial Anode System, the Impressed Current System, the Polarized Drainage System, the Forced Drainage System. This study is intended to design and analyze the electrolytic protection at water transmission pipes which is occurred the corrosion, and to show the methods protecting corrosions at water transmission pipes.

• 한국표면공학회지
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• 제32권3호
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• pp.452-455
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• 1999

ORV which vaporizes LNG to NG is consisted of tube and header whose substrate is aluminum alloy. The corrosion of the tube is very severe because of sea water being used as the heating source. In this research to protect ORV substrate material, the corrosion behavior of aluminum alloys was investigated for the sacrificial role of Al-Zn alloy for ORV tubes. The electrochemical behavior of aluminum alloys in sea water was investigated. The corrosion behavior of thermally-sprayed and cladded samples were compared through salt spray tests. Al-Zn alloy can act as a sacrificial anode and cladded Al-Zn alloy has a better corrosion resistance than that of thermally sprayed one. The galvanic effect of Al-Zn to substrate material was conformed from scratched sample tests.

• 수산해양기술연구
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• 제37권2호
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• pp.147-152
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• 2001

본 연구에서는 수도수 중에서 Mg합금유전양극에 의한 연강재 온수보일러의 음극방식특성을 연구한 결과 다음과 같은 결론을 얻었다. 1) 온수보일러 관체의 개로전위에서나 전위가 높은 구간에서 모재의 부식전류밀도가 용접부위의 부식전류밀도보다 더 적게 배류된다. 2) 주조된 표면 그대로의 Mg합금 유전양극의 전류밀도는 주조된 표면을 연마한 상태의 Mg합금 유전양극의 전류밀도보다 더 많이 배류된다. 3) Mg합금 유전양극으로부터 거리가 멀어질수록 연강재 온수보일러의 음극방식전위는 높게 나타나고, 음극방식시간이 경과하면서 방식전위는 높게 나타나다가 6-10일 이후부터 방식전위는 안정되고 있다.

• 청정기술
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• 제7권3호
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• pp.215-223
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• 2001

A present semiconductor cleaning technology is based upon RCA cleaning technology which consumes vast amounts of chemicals and ultra pure water(UPW) and is the high temperature process. Therefore, this technology gives rise to the many environmental issues, and some alternatives such as electrolyzed water(EW) are being studied. In this work, intentionally contaminated Si wafers were cleaned using the electrolyzed water. The electrolyzed water was generated by an electrolysis system which consists of three anode, cathode, and middle chambers. Oxidative water and reductive water were obtained in anode and cathode chambers, respectively. In case of NH4Cl electrolyte, the oxidation-reduction potential and pH for anode water(AW) and cathode water(CW) were measured to be +1050mV and 4.8, and -750mV and 10.0, respectively. AW and CW were deteriorated after electrolyzed, but maintained their characteristics for more than 40 minutes sufficiently enough for cleaning. Their deterioration was correlated with CO2 concentration changes dissolved from air. Contact angles of UPW, AW, and CW on DHF treated Si wafer surfaces were measured to be $65.9^{\circ}$, $66.5^{\circ}$ and $56.8^{\circ}$, respectively, which characterizes clearly the eletrolyzed water. To analyze the amount of metallic impurities on Si wafer surface, ICP-MS was introduced. It was known that AW was effective for Cu removal, while CW was more effective for Fe removal. To analyze the number of particles on Si wafer surfaces, Tencor 6220 were introduced. The particle distributions after various particle removal processes maintained the same pattern. In this work, RCA consumed about $9{\ell}$ chemicals, while EW did only $400m{\ell}$ HCl electrolyte or $600m{\ell}$ NH4Cl electrolyte. It was hence concluded that EW cleaning technology would be very effective for promoting environment, safety, and health(ESH) issues in the next generation semiconductor manufacturing.