• Journal of Magnetics
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• v.18 no.2
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• pp.155-158
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• 2013

FeCoB films were being prepared on a Ru underlayer by using the oblique incidence of sputtered and back-scattered particles which have a high in-plane magnetic anisotropy field $H_k$ above 400 Oe. It is suitable to attain such deposition condition when facing targets sputtering system. The in-plane X-ray diffraction analysis clarified that there is anisotropic residual stress which is the origin of the high in-plane magnetic anisotropy. The directional crystalline alignment and inclination of crystallite growth were also observed. Such anisotropic crystalline structures may affect the anisotropic residual stress in the films. The B content of 5.6 at.% was appropriate to induce such anisotropic residual stress and $H_k$ of 410 Oe in this experiment. The film with B content of 6 at.% possessed large saturation magnetization of 22 kG and high $H_k$ of 500 Oe. The film exhibited high ferromagnetic resonance frequency of 9.2 GHz.

• Corrosion Science and Technology
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• v.20 no.6
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• pp.484-490
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• 2021

Instrumented indentation testing has been widely used for residual stress measurement. The Knoop indentation is mainly selected for determining anisotropic mechanical properties and non-equibiaxial residual stress. However, the measurement of equibiaxial stress state and compressive residual stress on a specimen surface using Knoop indentation is neither fully comprehended nor unavailable. In this study, we investigated stress conversion factors for measuring Knoop indentation on equibiaxial stress state through indentation depth using finite element analysis. Knoop indentation was conducted for specimens to determine tensile and compressive equibiaxial residual stress. Both were found to be increased proportionally according to indentation depth. The stress field beneath the indenter during each indentation test was also analyzed. Compressive residual stress suppressed the in-plane expansion of stress field during indentation. In contrast, stress fields beneath the indenter developed diagonally downward for tensile residual stress. Furthermore, differences between trends of stress fields at long and short axes of Knoop indenter were observed due to difference in indenting angles and the projected area of plastic zone that was exposed to residual stress.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.48 no.6
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• pp.494-502
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• 1999

This paper represents an electrostatic micro plate resonator which consists of a rigid plate suspended with four bridges and a counter electrode. The bridges of the resonator are designed corrugated so that the residual stress are released. The FEM simulation results confirmed that the deflection characteristic of the corrugated bridge is hardly affected by the initial residual tensile stress. One resonator with the corrugated bridges and the other with the flat bridges were fabricated by the boron diffusion process and the anisotropic etch process. The vertical deflection of the fabricated electrostatic resonator was measured with a laser vibrometer, and the data were compared with the calculation results. The deflection of the resonator with the flat bridges is smaller than the deflection of that with the corrugated ones because of the residual stress. The residual stress release effect was confirmed by the fact that the measured deflection of the resonator with the corrugated bridges in close to the calculated deflection of the resonator with the flat ones with the initial stress neglected.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.24 no.8 s.179
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• pp.1968-1799
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• 2000

A warpage analysis program has been developed for fiber-reinforced injection molded parts. The warpage is predicted from the residual stress and anisotropic thermo-mechanical properties coupled with fiber orientation in the integrated injection molding simulation. A simple elastic model is used for the calculation of thermally and pressure-induced residual stresses which are employed as the initial conditions in the structural analysis. To improve the reliability of warpage analysis, a new triangular flat shell element superimposing well-known efficient plate bending and membrane element is presented. The numerical examples address the necessity to use anisotropic models for fiber-reinforced materials and show that predicted warpage is in good agreement with experimentally measured one.

• Proceedings of the KSME Conference
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• 2000.04a
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• pp.745-750
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• 2000

A warpage analysis program has been developed for fiber-reinforced injection molded parts. The warpage is Predicted from the residual stress and anisotropic thermo-mechanical properties coupled with fiber orientation in the integrated injection molding simulation. A simple elastic model is used for the calculation of thermally and pressure-induced residual stresses which are employed as the initial conditions in the structural analysis. To improve the reliability of warpage analysis, a new triangular flat shell element superimposing well-known efficient plate bending and membrane element is presented. The numerical examples address the neccesity to use anisotropic models for fiber-reinforced materials and show that predicted warpage is in good agreement with experimentally measured one.

• Journal of Sensor Science and Technology
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• v.14 no.5
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• pp.357-361
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• 2005

Low-stress silicon nitride (LSN) thin films with embedded metal line have been developed as free standing structures to keep microspheres in proper locations and localized heat source for application to a chip-based sensor array for the simultaneous and near-real-time detection of multiple analytes in solution. The LSN film has been utilized as a structural material as well as a hard mask layer for wet anisotropic etching of silicon. The LSN was deposited by LPCVD (Low Pressure Chemical Vapor Deposition) process by varing the ratio of source gas flows. The residual stress of the LSN film was measured by laser curvature method. The residual stress of the LSN film is 6 times lower than that of the stoichiometric silicon nitride film. The test results showed that not only the LSN film but also the stack of LSN layers with embedded metal line could stand without notable deflection.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.99-100
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• 2006

Cold gas dynamic spray or cold-spray is a deposition process, which causes deformation of a thin substrate. The deformation is usually convex to the deposited side. In this research, the main cause of the deformation was investigated using 6061-T6 aluminum alloy. The effects or anisotropic coefficient or thermal expansion (CTE) or the deposited layer by cold-spray and residual stress were studied by experiments and finite element analysis. The Hole Drilling method was applied to measure residual stress in the cold-spray layer and substrate. The data obtained by the experiments were used for the analysis of substrate deformation. From the result of the analysis, it was concluded that compressive residual stress was the main reason of substrate deformation while CTE had little effect.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.50 no.5
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• pp.249-252
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• 2001

The paper represents the design and fabrication of an electrostatic micro actuator with $p^+$,/TEX> Si cantilevers. The micro actuator consists of a plate suspended by four $p^+$,/TEX> silicon cantilevers and an electrode on a glass substrate. The $p^+$,/TEX> Si structure is fabricated by the boron diffusion process and the anisotropic wet etch process. The cantilevers of the micro actuator curl down because of the residual stress gradient in $p^+$,/TEX> silicon. When the electrostatic forec is applied to the $p^+$,/TEX> cantilevers, the vertical displacement of the plate can be achieved. The deflection of the cantilever due to the residual stress gradient and the vertical displacement by electrostatic force were calculated. The displacement of the plate was measured with a laser displacement meter for various input voltages and frequencies. The feasibility of the proposed micro actuator for the applications to optical pickup devices or optical communication devices was confirmed by the experiments.

• Structural Engineering and Mechanics
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• v.5 no.6
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• pp.755-765
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• 1997

Within the framework of anisotropic combined viscoplastic hardening formulation, accounting macroscopically for residual stress as well as texture development at finite deformations of metals, simple shear analyses for the simulation of fixed-end torsion experiments for ${\alpha}$-Fe, Al and Cu at different strain rates are reviewed with an emphasis on the role of constitutive spins. Complicated responses of the axial stresses with monotonically increasing shear deformations can be successfully described by the capacity of orthotropic hardening part, featuring tensile axial stresses either smooth or oscillatory. Temperature effect on the responses of axial stresses for Cu is investigated in relation to the distortion and orientation of yield surface. The flexibility of this combined hardening model in the simulation of finite inelastic strains is discussed with reference to the variations of constitutive spins depending upon strain rates and temperatures.

• Structural Engineering and Mechanics
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• v.45 no.4
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• pp.471-494
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• 2013

In this paper, identification of isotropic and orthotropic linear elastic material constitutive parameters has been demonstrated by a FEA-free energy-based inverse analysis method. An important feature of the proposed method is that it requires no finite element (FE) simulation of the tested material. Full-field displacements calculated using digital image correlation (DIC) are used to compute DIC stress fields enforcing the equilibrium condition and DIC strain fields using interpolation functions. Boundary tractions and displacements are implicitly recast into an objective function that measures the energy residual of external work and internal elastic strain energy. The energy conservation principle states that the residual should be zero, and so minimizing this objective function inversely identifies the constitutive parameters. Synthetic data from simulated testing of isotropic materials and orthotropic composite materials under 2D plane stress conditions are used for verification of the proposed method. When identifying the constitutive parameters, it is beneficial to apply loadings in multiple directions, and in ways that create non-uniform stress distributions. The sensitivity of the parameter identification method to noise in both the measured full-field DIC displacements and loadings has been investigated.