• Journal of the Semiconductor & Display Technology
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• v.9 no.4
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• pp.13-18
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• 2010

Extreme ultraviolet (EUV) lithography using 13.5 nm wavelengths is expected to be adopted as a mass production technology for 32 nm half pitch and below. One of the new issues introduced by EUV lithography is the shadowing effect. Mask shadowing is a unique phenomenon caused by using mirror-based mask with an oblique incident angle of light. This results in a horizontal-vertical (H-V) biasing effect and ellipticity in the contact hole pattern. To minimize the shadowing effect, a refilled mask is an available option. The concept of refilled mask structure can be implemented by partial etching into the multilayer and then refilling the trench with an absorber material. The simulations were carried out to confirm the possibility of application of refilled mask in 32 nm line-and-space pattern under the condition of preproduction tool. The effect of sidewall angle in refilled mask is evaluated on image contrast and critical dimension (CD) on the wafer. We also simulated the effect of refilled absorber thickness on aerial image, H-V CD bias, and overlapping process window. Finally, we concluded that the refilled absorber thickness for minimizing shadowing effect should be thinner than etched depth.

• Korean Journal of Remote Sensing
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• v.25 no.6
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• pp.487-499
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• 2009

Atmospheric correction of satellite measurements is a major step to estimate accurate surface reflectance of solar spectrum channels. In this study, Simplified Method for the Atmospheric Correction (SMAC) radiative transfer model used to retrieve surface reflectance from MODIS (MODerate resolution Imaging Spectrometer) top of atmosphere (TOA) reflectance. It is fast and simple atmospheric correction method, so it uses for work site operation in various satellite. This study attempts a test of accuracy of SMAC through a sensitivity test to detected error sources and to improve accuracy of surface reflectance using SMAC. The results of SMAC as compared with MODIS surface reflectance (MOD09) was represented that low accuracy ($R^2\;=\;0.6196$, Root Means Square Error (RMSE) = 0.00031, bias = - 0.0859). Thus sensitivity analysis of input parameters and coefficients was conducted to searching error sources. Among the input parameters, Aerosol Optical Depth (AOD) is the most influence input parameter. In order to modify AOD term in SMAC code, Stepwise multiple regression was performed with testing and remove variable in three stages with independent variables of AOD at 550nm, solar zenith angle, viewing zenith angle. Surface reflectance estimation by using Newly proposed AOD term in the study showed that improve accuracy ($R^2\;=\;0.827$, RMSE = 0.00672, bias = - 0.000762).

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.48 no.11
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• pp.881-888
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• 2020

In this paper, research on estimation of states of a target of interest using Line Of Sight(LOS) angle measurement is performed. Target's position, velocity, and acceleration are chosen to be the states of interests. The LOS measurement is known to be highly non-linear, making target dynamic modeling hard to be implemented into a filter. To solve this issue, the Pseudomeasurement equation was applied to the LOS measurement equation. With the help of this equation, 3D variable turn target dynamic model is applied to the filter model. For better performance, Kinematic Constraint is also implemented into the filter model. As for the filter, Bias Compensation Pseudomeasurement Filter (BCPMF) is used which is known for its robustness to initial conditions. Moreover, Two-Stage Kalman Filter (TSKF) form was also implemented to benefit from the parallel computation. As a result, TBCPMF 3DVT-KC is proposed and simulated to assess performance.

• Journal of the Korean Ceramic Society
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• v.42 no.4
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• pp.232-236
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• 2005

The etching characteristics of a $LiNbO_{3}$ optical waveguide structure have been investigated using neutral loop discharge plasma with the mixture of $C_{3}F_{8}$ and Ar and the bias power parameters. The etching rate and profile angle of optical waveguide with etching parameters were evaluated by scanning electron microscopy. Also, the etching RMS roughness was evaluated by atomic force microscopy. From the results of optimum etching conditions are the $C_{3}F_{8}$ gas flow ratio of 0.2 and the bias power of 300 W.

• Journal of the Society of Naval Architects of Korea
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• v.30 no.4
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• pp.8-16
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• 1993

Auto-Pilot System uses heading angle information via the position sensor and the rudder device to control the ship direction. Most of the control logics are composed of the state estimation and control algorithms assuming that the measurement device and the actuator have no fault except the measurement noise. But such asumptions could bring the danger in real situation. For example, if the heading angle measuring device is out of order the control action based on those false position information could bring serious safety problem. In this study, the control system including improved method for processing the position information is applied to the Auto-Pilot System. To show the difference between general state estimator and F.D.F., BJDFs for the sensor and the actuator failure detection are designed and the performance are tested. And it is shown that bias error in sensor could be detected by state-augmented estimator. So the residual confined in the 2-dim in the presence of the sensor failure could be unidirectional in output space and bias sensor error is much easier to be detected.

• Asia-pacific Journal of Multimedia Services Convergent with Art, Humanities, and Sociology
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• v.7 no.1
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• pp.177-186
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• 2017

Recently, Autonomous vehicles are getting hot attention. Amazon, the biggest online shopping service provider is developing a delivery system that uses drones. This kinds of platforms are need accurate attitude information for navigation. In this paper, a structure design of AHRS using low-cost inertia sensor is proposed. To estimate attitudes a Kalman filter which uses a quaternion based dynamic model, bias-removed measurements from MEMS Gyro, raw measurements from MEMS accelerometer and magnetometer, is designed. To remove bias from MEMS Gyro, an additional Kalman filter which uses raw Gyro measurements and attitude estimates, is designed. The performance of implemented AHRS is compared with high price off-the-shelf 3DM-GX3-25 AHRS from Microstrain. The Gyro bias was estimated within 0.0001[deg/s]. And from the estimated attitude, roll and pitch angle error is smaller than 0.2 and 0.3 degree. Yaw angle error is smaller than 6 degree.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.1211-1215
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• 2003

Accurate mathematical models of spacecraft components are an essential of spacecraft attitude control system design, analysis and simulation. Gyro is one of the most important spacecraft components used for attitude propagation and control. Gyro errors may seriously degrade the accuracy of the calculated spacecraft angular rate and of attitude estimates due to inherent drift and bias errors. In order to validate this model, nominal case simulation has been performed and compared for the low range mode and high range mode, respectively. In this paper, a mathematical model of gyro containing the relationships for predicting spacecraft angular rate and disturbances is proposed.

• Journal of Electrical Engineering and Technology
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• v.9 no.3
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• pp.964-969
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• 2014

In Super Junction MOSFET, Charge Balance is the most important issue of the trench filling Super Junction fabrication process. In order to achieve the best electrical characteristics, the N type and P type drift regions must be fully depleted when the drain bias approaches the breakdown voltage, called Charge Balance Condition. In this paper, two methods from the fabrication process were used at the Charge Balance condition: Trench angle decreasing process and Bottom implantation process. A lower on-resistance could be achieved using a lower trench angle. And a higher breakdown voltage could be achieved using the bottom implantation process. The electrical characteristics of manufactured discrete device chips are compared with those of the devices which are designed of TCAD simulation.

• Proceedings of the KIEE Conference
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• 2011.07a
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• pp.1736-1737
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• 2011

This paper deals with the problem of precise impact angle control of an actual homing missile guided by biased proportional navigation (BPN). To do this, the BPN guidance loop including dynamic lag is modeled as the confluent hyper-geometric differential equation and its analytic solution is derived. Based on the solution, a systematic way to determine the bias constant is newly devised. Different from the existing BPN solution obtained by ignoring the dynamic lag, the proposed one can exactly describe the behavior missile before target interception. hence it is drastically improved the angle constrained terminal guidance performance.

• The Journal of Korea Robotics Society
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• v.6 no.4
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• pp.334-343
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• 2011

This paper presents a new approach for mobile robot heading detection using MEMS Gyro north finding method in the indoor environment. Based on this, the robot heading angle measurement scheme is proposed; improved north finding theory and algorithm are also explained. Several approaches are applied to confirm system's precision and effectiveness. In order to find out the heading angle, a single axis MEMS gyroscope to sense the angle between the robot heading direction and the north is used. To reach enough estimation accuracy and reduce detection time, the least square method (LSM) for the signal fitting and parameter estimation is applied. Through a turn-table, we setup a carouseling system to decrease the substantial bias effect on gyroscope's heading angle. For the evaluation of the proposed method, this system is implemented to the Pioneer robot platform. The performance and heading error are analyzed after the test. From the simulation and experimental results, system's accuracy, usefulness and adaptability are shown.