• 한국정밀공학회지
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• 제21권8호
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• pp.34-42
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• 2004

A new polishing technique for three dimensional micro/meso-scale parts is suggested using a micro quill and a magnetic chain structure. The principle of this method is to polish the target surface with the collected magnetic brushes at a micro tool by the non-uniform magnetic field generated around the tool. In a typical magnetic abrasive finishing process magnetic particles and abrasive particles are unbonded each other. But, to finish the three dimensional small parts bonded magnetic abrasive have to be used. Bonded magnetic abrasives are made from direct bonding, and their polishing characteristics are also examined. Alumina, silicon carbide and diamond micro powders are used as abrasives. Base metal matrix is carbonyl iron powder. It is found that bonded magnetic abrasives are superior to unbonded one by experiment. finally, the polished surface roughness is evaluated by atomic force microscope.

• 대한기계학회논문집A
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• 제33권10호
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• pp.1023-1028
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• 2009

Cleaning is required following CMP (chemical mechanical planarization) to remove particles. The minimization of particle residue is required with each successive technology generation, and the cleaning of wafers becomes more complicated. In copper damascene process for interconnection structure, it utilizes 2-step CMP consists of Cu and barrier CMP. Such a 2-steps CMP process leaves a lot of abrasive particles on the wafer surface, cleaning is required to remove abrasive particles. In this study, the chemical mechanical cleaning(CMC) is performed various conditions as a cleaning process. The CMC process combined mechanical cleaning by friction between a wafer and a pad and chemical cleaning by CMC solution consists of tetramethyl ammonium hydroxide (TMAH) / benzotriazole (BTA). This paper studies the removal of abrasive on the Cu wafer and the cleaning efficiency of CMC process.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 춘계학술대회 논문집
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• pp.8-13
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• 1996

A relatively new non-traditional finishing process called Abrasive Flow Machining(AFM) is being used to deburr, polish and radius workpiece or produce compressive residual stresses by flowing an abrasive-laden viscoelastic compound across the surface to be machined. This paper presents the effects of AFM on surfaces of tool steel produced by EDM and W-EDM. Using AFM, white layer produced by EDM is erased almost equally and the amount of metal removal is significantly affected the initally machined surface condition of workpiece. The dimension of workiece is enlarged and its surface roughness is improved as AFM time is increased. The optimal AFM time can be established from the experimental results. It is considered that the grinding method lide AFM is useful to grind complex or slim geometry of workpiece even. Scanning Electron Microscopy(SEM) was used to study the surface characteristics of the workpiece before and after AFM.

• 한국자동차공학회논문집
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• 제13권2호
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• pp.118-126
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• 2005

Abrasive waterjet (AWJ) cutting is an emerging technology for precision cutting of difficult-to-machining materials with the distinct advantages of no thermal effect, high machinability, high flexibility and small cutting forces. This paper investigated theoretical and experimental cutting characteristics associated with abrasive waterjet cutting of quartz GE214. It is shown that the proper variations of several cutting parameters such as waterjet cutting pressure, cutting speed and cutting depth improve the roughness on workpiece surfaces produced by AWJ cutting. From the experimental results by AWJ cutting of quartz GE214, the optimal cutting conditions to improve the surface roughness and precision were proposed and discussed.

• 한국기계가공학회지
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• 제10권6호
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• pp.95-101
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• 2011

Micro-abrasive jet machining(${\mu}AJM$) using mask is a fine machining technology which can carve a figure on a material. The mask should have holes exactly same as the required figure. Abrasive particles are jetted into the holes of the mask and it collide with the material. The collision break off small portion of the material. And the ${\mu}AJM$ nozzle should move all over the machining area. However, in general the carving shape is modeled as in a bitmap figure, because it often contains characters. And the mask model is also often modeled from the bitmap image. Therefore, the machining path of the ${\mu}AJM$ also efficient if it can be generated from the bitmap image. This paper suggest an algorithm which can generate ${\mu}AJM$ tool path directly from the bitmap image of the carving figure. And shows some test results and applications.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 추계학술대회
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• pp.922-927
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• 2004

Abrasive waterjet (AWJ) cutting is an emerging technology for precision cutting of difficult-to-machining materials with the distinct advantages of no thermal effect, high machinability, high flexibility and small cutting forces. This paper investigated theoretical and experimental cutting characteristics associated with abrasive waterjet cutting of quartz GE214. It is shown that the proper variations of several cutting parameters such as waterjet pressure, cutting speed and cutting depth improve the roughness on workpiece surfaces produced by AWJ cutting. From the experimental results by AWJ cutting of quartz GE214, the optimal cutting conditions to improve the surface roughness were proposed and discussed.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1996년도 추계학술대회 논문
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• pp.138-143
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• 1996

The 3-dimensional complex parts which construct automobile and aerospace parts are very difficult to polish by traditional polishing method. Abrasive flow machining is useful to polish an internal or external surface of the 3-dimensional shape part. In this paper media flow between workpiece and tooling part has been simulated and the charateristics of abrasive flow machining process have been analyzed according to various machining conditions by calculating the material removal and surface roughness.

• 한국기계가공학회지
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• 제4권1호
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• pp.7-12
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• 2005

An internal finishing process by the application of magnetic abrasive finishing has been developed as a new technology to obtain a fine inner surface of pipe. In this paper, another method of magnetic abrasive machining in which the N and S magnetic poles are vibrated and a workpiece is rotated only is tried in a non-ferromagnetic pipe(SUS304), and its finishing characteristics is experimently investigated by various effective factors such as vibrating frequency and amplitude. From the experimental results, it is found that the vibration effects of magnetic poles on the finishing characteristics are large in internal finishing.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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• pp.23-26
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• 2002

In this paper, We have studied the CMP (chemical mechanical polishing) characteristics of diluted slurry by adding of raw alumina abrasive and annealed alumina abrasive. As a experimental results, we obtained the comparable slurry characteristics compared with original silica slurry in the view point of high removal rate and low non-uniformity. Therefore, we can reduce the cost of consumables(COC) of CMP process for ULSI applications.

• 한국생산제조학회지
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• 제19권4호
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• pp.455-461
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• 2010

Automated magnetic abrasive polishing which can be applied after machining of the mold on a machine tool without unloading is very effective for finishing a complicated injection mold surface. This study aims to realize one step polishing of free form surface with the same machine tool. For this purpose, magnetic flux density according to the change of curvature radii was simulated for selecting polishing conditions and experimental verification was performed with a complicated mold of aluminum alloy. As a result, it was seen by the simulation that the magnetic flux density at a gradual curvature of the mold was higher than at a steep curvature and the higher magnetic flux density produced the better surface roughness in the experimentation. The deviation for the surface roughness of the mold decreased on the whole and the uniform mold surface was obtained after the automated magnetic abrasive polishing.