• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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• pp.525-528
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• 2001

ZnO:Al thin film can be used as a transparent conducting oxide(TCO) which has low electric resistivity and high optical transmittance for the front electrode of amorphous silicon solar cells and display devices. This study of electrical, crystallographic and optical properties of Al doped ZnO thin films prepared by Facing Targets Sputtering(FTS), where strong internal magnets were contained in target holders to confine the plasma between the targets, is described. Optimal transmittance and resistivity was obtained by controlling flow rate of $O_2$ gas and substrate temperature. When the $O_2$ gas rate of 0.3 and substrate temperature $200^{\circ}C$, ZnO:Al thin film had strongly oriented c-axis and lower resistivity( < $10^{-4}{\Omega}-cm$ ).

• 한국재료학회지
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• 제20권9호
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• pp.451-456
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• 2010

A promising candidate material for a $H_2$ permeable membrane is SiC due to its many unique properties. A hydrogen-selective SiC membrane was successfully fabricated on the outer surface of an intermediate multilayer $\gamma-Al_2O_3$ with a graded structure. The $\gamma-Al_2O_3$ multilayer was formed on top of a macroporous $\alpha-Al_2O_3$ support by consecutively dipping into a set of successive solutions containing boehmite sols of different particle sizes and then calcining. The boehmite sols were prepared from an aluminum isopropoxide precursor and heated to $80^{\circ}C$ with high speed stirring for 24 hrs to hydrolyze the precursor. Then the solutions were refluxed at $92^{\circ}C$ for 20 hrs to form a boehmite precipitate. The particle size of the boehmite sols was controlled according to various experimental parameters, such as acid types and acid concentrations. The topmost SiC layer was formed on top of the intermediate $\gamma-Al_2O_3$ by pyrolysis of a SiC precursor, polycarbosilane, in an Ar atmosphere. The resulting amorphous SiC-on-$Al_2O_3$ composite membrane pyrolyzed at $900^{\circ}C$ possessed a high $H_2$ permeability of $3.61\times10^{-7}$ $mol{\cdot}m^{-2}{\cdot}s^{-1}{\cdot}Pa^{-1}$ and the $H_2/CO_2$ selectivity was much higher than the theoretical value of 4.69 in all permeation temperature ranges. Gas permeabilities through a SiC membrane are affected by Knudsen diffusion and a surface diffusion mechanism, which are based on the molecular weight of gas species and movement of adsorbed gas molecules on the surface of the pores.

• Corrosion Science and Technology
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• 제6권5호
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• pp.257-260
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• 2007

In order to further improve the corrosion resistance and wear resistance of the Ni-P coatings of electroless plating, electroless Ni-P/n-$Al_2O_3$ composite deposits were prepared by adding some nano $Al_2O_3$ Particles in Ni-P plating bath. The bath composition and proproties were studied in this paper. The orthogonal test was applied in order to get the new composite solution, taking the initial stable potential as evaluation standard and considering the elements correlation at the same time. The processing parameters have been optimized by single factor experiment in which the depositing speed was chosen as the evaluation standard. The results showed that the process is stable and the composite Ni-P/n-$Al_2O_3$ deposits werebright and smooth, whose hardness and corrosion resistance are much better than simple Ni-P coatings. Furthermore the surface appearance and structure of the composite Ni-P/n-$Al_2O_3$ coating were investigated by SEM and XRD method. It was proved that the coating surface is typical cystiform cells and its structure is amorphous. All test results ofcomposite coating showed that all various physical coating properties had been improved by adding nano-particles. The hardness of optimal coating is more than 600HV and increases to 1000HV after heat-treating, and its hardness is 20~50% higher than Ni-P coating. The rust points appeared in 200 hour by immersing the coating into the 10%HCl solution and the corrosive speed is $3{\times}10^{-3}mg/(cm^2{\cdot}h)$which was obtained after 300 hour. In the same condition Ni-P coating is $5.6{\times}10^{-3}mg/(cm^2{\cdot}h)$. The salt spray resistance of the layers can exceed 600h with the thickness $20{\mu}m$.

• 한국세라믹학회지
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• 제34권5호
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• pp.491-499
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• 1997

High flexible lightweight composites containing tobermorite as a main mineral is produced using various amorphous silicates, lime, cement and fibers. Here, Mechanical properties of the composites were studied by observing microstructures of hydrates and fibers. Amorphous silicates having better hydraulicity retarded the crystallization of tobermorite due to better formation of C-S-H gel in water bath curing, but, difficult conversion from C-S-H gel to tobermorite in hydrothermal reaction. In the low molar ratio of CaO/SiO2 (0.67), faster crystalization was observed dued to more impurities such as Al2O3 alkali, resulting in improving mechanical properties due to small crystal size and many contact points. It was identified that a lot of calcium silicate hydates formed at surface of pulps increase bonding strength and the crack-resistance of matrix in the composites, but decrease hardness and compressive strength. The choice of amorpous silicates having better hydraulicity, low CaO/SiO2 adding each fibers bellow about 5% in the raw mixs and lower molding pressure should be needed at improve mechanical properties of composites.

• 한국재료학회지
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• 제15권8호
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• pp.548-553
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• 2005

Trivalent cerium$(Ce^{3+})$ activated YAG (yttrium aluminum garnet, $Y_3Al_5O_{12})$) thin films phosphor were deposited on quartz glass substrates by rf magnetron sputtering. The effects of sputtering parameters, annealing atmosphere, and substrates on growing behaviors and luminescent properties were investigated. The sputtering parameters were $O_2/(Ar+O_2)$ gas ratio, rf power, and deposition time. XRD (X-ray diffractometery) spectra exhibited that as-deposited films were amorphous, while they were transformed to the crystalline phases by post-annealing. The crystallinity and the atomic ratio strongly depended on the sputtering gas ratio $O_2/(Ar+O_2)$. High quality YAG:Ce thin films could be obtained at the gas ratio of $50\%$ oxygen. After annealing process, PL (Photoluminescence) spectra excited at 450nm showed a yellow single band at 550nm. The films deposited at the sputtering gas ratio of 50% oxygen exhibited the highest PL intensity.

• 한국표면공학회지
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• 제37권3호
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• pp.152-157
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• 2004

Ti-Al-N ($Ti_{75}$ $Al_{25}$ N) and Ti-Al-Si-N ($Ti_{69}$ $Al_{23}$ $Si_{8}$N) coatings synthesized by a DC magnetron sputtering technique were studied comparatively with respect to phase characterization and high-temperature oxidation behavior. $Ti_{69}$ $Al_{23}$ $Si_{ 8}$N coating had a nanocomposite microstructure consisting of nanosized(Ti,Al,Si)N crystallites and amorphous $Si_3$$N_4$, with smooth surface morphology. Ti-Al-N coating of which surface $Al_2$$O_3$ layer formed during oxidation suppressed further oxidation. It was sufficiently stable against oxidation up to about $700^{\circ}C$. Ti-Al-Si-N coating showed better oxidation resistance because both surface Ab03 and near-surface $SiO_2$ layers suppressed further oxidation. XRD, GDOES, XPS, and scratch tests were performed.

• 한국광물학회지
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• 제20권3호
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• pp.147-153
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• 2007

비정질 $SiO_2$과 $Al(OH)_3$를 출발물질로 이용하여 $230^{\circ}C,\;30 kg/cm^2$에서 결정성이 우수한 캐올리나이트를 수열합성하였다. 실험범위는 pH $0.3{\sim}9.5$, 화학조성($Al_2O_3/SiO_2 = 0.5{\sim}0.37$), 온도 $180{\sim}280^{\circ}C$, 압력 $10{\sim}60kg/cm^2$이었다. 비정질 $SiO_2$와 $Al(OH)_3$를 화학양론적 조성으로 혼합하면 캐올리나이트와 함께 보에마이트가 미량으로 공존하였으며 $Al_2O_3/SiO_2$ 몰비가 0.45일 때, 캐올리나이트가 단일상으로 합성되었다. $200^{\circ}C$ 이하에서는 240시간의 반응 후에도 보에마이트만 관찰되었지만 $230^{\circ}C$에서는 20시간 반응 후에 캐올리나이트가 안정상으로 합성되었다. 그리고 pH는 캐올리나이트 합성에 중요한 인자로서 pH $2{\sim}6$ 범위에서 결정성이 양호한 합성상이 관찰되었다. 합성된 캐올리나이트의 분말 X-선 회절패턴은 자연산 캐올리나이트와 일치하였고 (001) 회절선들이 잘 발달되어 있었다. 캐올리나이트는 직경 ${\sim}3{\mu}m$의 균질한 구형 결정군집 (clusters)들로 이루어져 있었다.

• 한국결정성장학회지
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• 제5권2호
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• pp.122-128
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• 1995

알루미나 입자표면에 실리카 흡착층을 갖는 복합분말로 제조된 시편을 반응소결시켜 물라이트화 과정을 고찰하였다. 물라이트화 반응은 알루미나와 cristobalite의 계면에서 낮은 알루미나 함량을 갖는 비정질 aluminosilicated 상이 중간층을 형성하면서 시작되고 이 층을 통한 알루미나의 확산에 의하여 물라이트가 성장되었다. 물라이트는 알루미나의 입자의 표면을 따라 성장하였으며 확산에 의해 성장속도가 제어되었다

• 대한전자공학회논문지
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• 제27권8호
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• pp.1250-1254
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• 1990

The cordierite (MgO, SiO2, Al2O3) is of great interest for microelectronic packaging of integrated circuits. Its main advantages are low dielectric constant and low thermal expansion. The cordierite precursor is obtained by sol-gel synthesis using organic and inorganic compounds. The obtained cordierite precursor is an amorphous state at about 900\ulcorner. Green and fired cordierite samples were studied by SEM. Microanalysis X and TEM for microscopic properties. The fired cordierite shows forte diminution of Mg in comparison with its value at volume and the deficit of Mg compensates by sugmentation of Al and Si \ulcornercordierite and \ulcornercordierite are present near the surface (< 100) and small quantities of magnesium aluminate (MgAl2O4)is presented spinnel phase.

• 한국표면공학회지
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• 제55권3호
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• pp.143-155
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• 2022

Ceramic oxide layers successfully were formed on the surface of cast Al alloys with high Si contents using plasma electrolytic oxidation (PEO) process in electrolytes containing Na₂SiO₃, NaOH, and additives. The microstructure of the oxide layers was systematically analyzed using scanning electron microscopy (SEM), cross-sectional transmission electron microscopy (TEM), X-ray diffraction patterns (XRD), and energy X-ray dispersive spectroscopy (EDS). XRD analysis indicated that the PEO untreated high-silicon Al alloys (i.e., 17.1 and 11.7 wt.% Si) consist of Al, Si and Al₂Cu phases whereas Al₂Cu phase selectively disappeared after PEO treatment. PEO process yielded an amorphous oxide layer with few second phases including γ-Al₂O₃ and Fe-rich phases. The corrosion behaviors of high-silicon Al alloys treated by PEO process were investigated using electrochemical impedance spectroscopy (EIS) and other electrochemical techniques (i.e., open circuit potential and polarization curve). Electroanalytical studies indicated that high-silicon Al alloys treated by PEO process have greater corrosion resistance than high-silicon alloys untreated by PEO process.