• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 하계학술대회 논문집
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• pp.204-204
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• 2010

A development of device with reduced size and improved sensitivity is highly impotant Pb(Zr,Ti)$O_3$ thin films are widely used both to make actuator and sensor due to their high sensitivity and low cost. In this study, the feasibility of a piezoelectric presssure sensors based on hybrid low-temperaute co-fired ceramic (LTCC) technology were presented. The LTCC diaphragms with thickness of $400\;{\mu}m$ were fabricated by laminating 4 green tapes which consist of alumina and glass particle in an organic binder. PZT thin films were successfully prepared on between top and bottom Au electrode with LTCC substrates using RF magnetron sputtering. In addition, The frequency response characteristics of the sensor under varing pressure has been analysed. by Network Analyser (HP-8722D). A frequency shift range has been obseved from 1.7GHz to 1.8GHz with a good linearity for applied pressure from 0 psi up to 25 psi.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 하계학술대회 논문집
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• pp.205-205
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• 2010

Recently, low temperature co-fired ceramic (LTCC) technology is widely used in sensors, actuators and microsystem fields because of its very good electrical and mechanical properties, high stability as well as possibility of making 3D micro structures. In this study, we investigated the effects of on $O_2$ annealing treatment on the electrical properties of Pb(ZrTi)$O_3$ (PZT) thin films deposited on LTCC substrate. The LTCC substrates with thickness of $400\;{\mu}m$ were fabricated by laminating 4 green tapes which consist of alumina and glass particle in an organic binder. The PZT thin films were deposited on Au / LTCC substrates by RF magnetron sputtering method. The change of the crystallization of the films were investigated under various atmosphere. The structural variation of the films were analyzed by using X-Ray diffraction (XRD) and field emission scanning electron microscopy (FESEM) and secondary ion mass spectrometry (SIMS).

• 열처리공학회지
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• 제19권4호
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• pp.219-224
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• 2006

Silver paste with low sintered temperature has been developed in order to apply electronic parts, such as bus electrode, address electrode in PDP (Plasma Display Panel) with large screen area. In this study, nano-sized silver particles with 10-30 nm were synthesized from silver nitrate ($AgNO_3$) solution by chemical reduction method and silver paste with low sintered temperature was prepared by mixing silver nanoparticles, conventional silver powder with the particle size 1.6 um and Pb-free frit. Conductive thick film from silver paste was fabricated by screen printing on alumina substrate. After firing at $540^{\circ}C$, the cross section and surface morphology of the thick films were analyzed by FE-SEM. Also, the sheet resistivity of the fired thick films was measured using the four-point technique.

• 한국콘크리트학회:학술대회논문집
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• 한국콘크리트학회 2003년도 봄 학술발표회 논문집
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• pp.737-740
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• 2003

In this study, the influence of cement factor on the early strength gain and the other properties of concrete is discussed. According to the result, the setting time is faster in order of alumina cement(AC), high-early-strength cement(HSC) and ordinary Portland cement(OPC), and when OPC are replaced with HSC and AC, the final setting time is faster than when only OPC is used. At 10% replacement of AC, the instant setting happens. As the particle of cement is minute, setting time is shortened. As the properties of hardened concrete, the time when compressive strength of 5㎫, which the form can be removed, is gained is about 18 and 16 hours in the case of OPC and HSC respectively, and in the case of AC, it is about 5 hours. It also shows 16 hours at the replacing ratio of HSC of 50%, and 26 and 72 hours at the replacing ratio of AC of 5 and 10% respectively. And it shows 21, 16 and 12 hours with variation of fineness of cement, so early strength gain is fast with an increase of fineness. The coefficient of correlation between compressive strength and the rebound value is over 0.97, is very favorable. Therefore, if the rebound value of P type Schmidt hammer is more than 25, it is thought that the side forms can be removed.

• 한국세라믹학회지
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• 제22권5호
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• pp.76-84
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• 1985

Mechanical property enhancing mechanisms of $Al_2O_3-ZrO_2$ two phase ceramic composites were studied for several compositions of different $ZrO_2$/$Al_2O_3$ ratio. Microstructural analysis of $Al_2O_3-ZrO_3$(pure) composites indicated that pre-existing microcrack due to larger $ZrO_2$ particle at grain boundary extended along alumina grain boundaries within process zone. Microcracks also nucleated when very small $ZrO_2$ particles at the grain boundaries transformed to monoclinic phase at near of main crack tip. These types of microcracks could contribute to the toughening achieved by creating additional crack surface area during crack propagation. Microstructural analyses also showed that the average grain size and abnormal grain size of $Al_2O_3$ were decreased with increasing $ZrO_2$ vol% in $Al_2O_3$ matrix. As a result it could be concluded as follows In TEX>$Al_2O_3-ZrO_3$(pure) system 1. Microcrack nucleation (stress-induced microcracking) and extension was effective mechanism for absorpiton of fracture energy 2, More narrow distribution and smaller grain size of $Al_2O_3$ due to $ZrO_2$particles mainly contributed to main-tatin the strength and hardness.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.155.2-155.2
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• 2014

Plasma Enhanced Atomic Layer Deposition(PEALD)와 Atomic Layer Deposition(ALD) Techniques는 '정확한 두께 조절' 및 '우수한 균일도'를 가지는 신뢰할 수 있는 진공 기술이다. 본 연구에서는 다공성 구조를 가지는 기판을 대상으로 PEALD와 ALD Techniques을 이용한 $Al_2O_3$ 형성 공정의 증착 특성을 비교하였다. 각 공정은 공통적으로 Tris-Methyl-Aluminium(TMA)을 첫번째 전구체로 사용하였고 purge gas로는 Nitrogen를 사용하였다. 그리고 두번째 전구체로 PEALD 공정에서는 Oxygen Plasma를 사용하였고 ALD 공정에서는 Water를 사용하였다. 복잡한 다공성 구조를 가지는 기판은 $TiO_2$ Nano-Particle paste과 colloidal Silver paste를 소결시켜 제작하여 사용하였다. 각 공정의 차이점을 비교하기 위해서 배기단에 Capacitor Diaphram Gauge(CDG)와 Residual Gas Analyzer(RGA)를 통해서 압력과 잔류 가스를 모니터하였다. 그리고 각 공정을 통해서 porous한 Nano-Particles Network에 형성된 $Al_2O_3$막의 특성을 비교하기 위해서 FE-SEM과 EDX를 통해서 관찰하였다. 또한 좀 더 자세한 비교 분석을 위해서 $Al_2O_3$ 막이 형성된 porous한 Nano-Particles Networks의 각 각의 particles들을 분산시켜 TEM과 AFM를 통해서 관찰하였다. 나아가 전기적 물성의 차이점을 비교하기 위해서 IV 및 CV를 측정하였다. 위의 일련의 비교 실험을 통해서 'PEALD과 ALD을 이용한 다공성 기판의 증착 특성'에 대하여 고찰하였다.

• 한국세라믹학회지
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• 제43권4호
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• pp.242-246
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• 2006

[ ${\alpha}-Al_2O_3$ ] nanopowders were fabricated by the thermal decomposition and synthetic of Ammonium Aluminum Carbonate Hydroxide (AACH). Crystallite size of 5 to 8 nm were fabricated when reaction temperature of AACH was low, $8^{\circ}C$, and the highest $[NH_4{^+}][AlO(OH)_n{(SO_4){^-}}_{3-n/2}][HCO_3]$ ionic concentration to pH of the Ammonium Hydrogen Carbonate (AHC) aqueous solution was 10. The phase transformation fem $NH_4Al(SO_4)_2$, rhombohedral $(Al_2(SO_4)_3)$, amorphous-, ${\theta}-,\;{\alpha}-Al_2O_3$ was examined at each temperature according to the AACH. A Time-Temperature-Transformation (TTT) diagram for thermal decomposition in air was determined. Homogeneous, spherical nanopowders with a particle size of 70 nm were obtained by firing the 5 to 8 m crystallites, which had been synthesized from AACH at pH 10 and $8^{\circ}C,\;at\;1150^{\circ}C$ for 3 h in air.

• Bulletin of the Korean Chemical Society
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• 제31권1호
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• pp.120-124
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• 2010

Monometallic, bimetallic and trimetallic particles consisting of different weight compositions of Pt-Pd-Rh over pure alumina wash coats have been synthesized and their catalytic performance on methane conversion was studied from 150 to $600^{\circ}C$. Different catalyst formulations with variable Pt, Pd and Rh contents for bimetallic and trimetallic systems were tried and $Pt_{(1.5)}Rh_{(0.3)}/Al_2O_3$ and $Pt_{(1.0)}Pd_{(1.0)}Rh_{(0.3)}/Al_2O_3$ shows low $T_{50}$ and $T_{90}$ temperatures. Bimetallic and trimetallic particle synergism acts as three way catalysts and therefore, all the catalysts show 100% methane conversion. The effect of supports such as $ZrO_2$ and $TiO_2$ on methane combustion was investigated; from $T_{50}$ and $T_{90}$ results both $Al_2O_3$ and $ZrO_2$ are suitable supports for low temperature methane combustion.

• 한국재료학회지
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• 제11권9호
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• pp.797-801
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• 2001

In this study, the solution combustion method was employed to synthesize stoichiometric mullite, and hence the attrition process was employed to prepare ultrafine mullite particles with nano size. The thermal decomposition behavior and partial pressure of equilibrium species of both oxidizer and fuel were considered during solution combustion process. The synthesized product was mullite phase with 40 nm crystalline size, and the alumina contents of the product by TEM/EDS quantity analysis was 3.12$\pm$04 mole. The result showed that the synthesized mullite was almost close to the it's stoichiometric composition. For attrition process, the dispersion behavior of the mullite suspension was controlled and was comminuted with the condition of 800 rpm for 4 hours using 0.3 mm zirconia ball media. As a result of comminution, the mean particle size was 80 nm.

• 한국재료학회지
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• 제18권8호
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• pp.417-421
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• 2008

$Al_2O_3$ sol with long-term stability was prepared by mechanical milling. Thin films were evaluated and created for use as coating materials. The particle size of the manufactured sol was 98 nm when 2 wt% of nitric acid was added. This indicates that the viscosity of the sol is 12 cps and that it has long-term stability. The thickness of the thin films, which varied from 100 nm to 500 nm, could be managed by adjusting the draw rate and the amount of an organic additive. A thin film heated to $500^{\circ}C$ indicated a hydrophilic property against water and excellent permeability against a visible ray.