• Title/Summary/Keyword: alumina particle

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Hydrolysis of Aluminum Nitride Powder (AlN 분말의 가수분해 특성)

  • 최상욱;정홍식;황진명
    • Journal of the Korean Ceramic Society
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    • v.31 no.1
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    • pp.79-87
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    • 1994
  • Aluminum nitride was hydrolyzed in contact with water, evolving the reaction heat of 172 cal/g within 12 hours to form alumina trihydrates. At 4$0^{\circ}C$ >, amorphous alumina hydrate was easily produced by the spontaneous breaks of AlN particle at the beginning of the hydrolysis process, while bayerite was formed by the dissolution-recrystallization processes of amorphous alumina hydrate at the temperature between 4$0^{\circ}C$ and 6$0^{\circ}C$, and pseudo-boehmite was generated on the surface of AlN particle by the condensation process of the corresponding phase at 6$0^{\circ}C$ <. The longer the hydrolysis timje or the higher the value of pH in solution, the more the bayerite phase was produced. However, pseudo-boehmite was easily generated under the following favorable conditions; when the hydrolysis reaction occured rapidly at the beginning and when the absorption of OH radical on the surface of AlN particle was disturbed by ethyl alcohol in a solution. However, aluminum nitride was hardly hydrolyzed in a solution of pH 2.0.

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Application of Hydrogen Peroxide for Alumina Slurry Stability in Cu CMP (구리CMP공정시 알루미나 슬러리 안정성을 위한 Hydrogen peroxide의 적용)

  • Lee, Do-Won;Kim, Nam-Hoon;Kim, In-Pyo;Kim, Sang-Yong;Kim, Tae-Hyoung;Seo, Yong-Jin;Chang, Eui-Goo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.11a
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    • pp.136-139
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    • 2003
  • Copper has attractive properties as a multi-level interconnection material due to lower resistivity and higher electromigration resistance as compared with Alumina and its alloy with Copper(0.5%). Among a variety of agents in Copper CMP slurry, $H_2O_2$ has commonly been used as the oxidizer However. $H_2O_2$ is so unstable that it requires stabilization to use as oxidizer Hence, stabilization of $H_2O_2$ is a vital process to get better yield in practical CMP process. In this article the stability of Hydrogen Peroxide as oxidizer of Copper CMP slurry has been investigated. When alumina abrasive was used, $\gamma$-particle Alumina C had a better stability than $\alpha$-particle abrasive. As adding KOH as pH buffering agent, $H_2O_2$ stability in slurry decreased. Urea hydrogen peroxide was used as oxidizer, an enhanced stability was gotten. When $H_3PO_4$ as $H_2O_2$ stabilizer was added, the decrease of $H_2O_2$ concentration in slurry became slower. Even though adding $H_2O_2$ in slurry after bead milling lead to better stability than in advance of bead milling, it had a lower dispersibility.

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Development of Ultraprecision Finishing Technique using Bonded Magnetic Abrasives (결합된 자성연마입자를 이용한 초정밀 피니싱 기술 개발)

  • 윤종학;박성준;안병운
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.12 no.5
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    • pp.59-66
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    • 2003
  • This study suggests the new ultraprecision finishing techniques for micro die and mold parts using magnetic field-assisted polishing. Conventional magnetic abrasives have several disadvantages, which are missing of abrasive particle and inequal mixture between magnetic particle and abrasive particle. Therefore, bonded magnetic abrasive particles are fabricated by several method. For example, plasma melting and direct bonding. Carbonyl iron powder is used as magnetic particle there silicon carbide and alumina are abrasive particles. Developed magnetic abrasives are analyzed using SEM. Feasibility of magnetic abrasive and polishing performance of this magnetic abrasive particles also have been investigated. After polishing, surface roughness of workpiece is reduced from 85.4 ㎚ Ra to 9 ㎚ RA.

Rheology of alumina suspensions stabilized with Tiron

  • Gulicovski, J.J.;Cerovic, Lj.S.;Milonjic, S.K.
    • Korea-Australia Rheology Journal
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    • v.20 no.2
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    • pp.65-71
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    • 2008
  • Pressure filtration technique was used to obtain defect-free microstructure of green cast ceramic bodies. Stable alumina suspensions of desired rheology (<5 Pa s at $1\;s^{-1}$) containing 60-80 mass. % solid loading were prepared in the alkaline region (at $pH{\approx}9$) with an optimum amount of 0.5 dmb % of Tiron added. Acidic region (at $pH{\approx}4$) enabled the preparation of 60 mass. % suspensions with addition of 1.5 dmb % of Tiron. The best quality slip was processed from an 80 mass.% suspension with 63% of theoretical density. The homogeneity of particle packing and the absence of defects in microstructure were proven by narrow pore size distribution (ranging from 32 to 64 nm, with up to 85% abundance), confirming advantages of the wet consolidation route.

Mo-Mn Metallizing on Sintered Alumina and It합s Bond Strength (소결 알루미나의 금속접합 및 접합강도에 관한 연구)

  • Lee, Joon;Kim, Young-Tai;Jang, Sung-Do;Son, Yong-Bae
    • Journal of the Korean Ceramic Society
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    • v.22 no.6
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    • pp.58-70
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    • 1985
  • The bond strength of metal to ceramic sealing in Mo-Mn metallizing was investigated by examining the effects of flux composition in alumina ceramics particle size of molybdenum metal powder wet hydrogen atmosphere and temperature in metallizing. The maximum bond strength was obtained when the glass phase filled almost all the microstructural cavities around the interfacial area with few micropores. Such a favorable microstrcutre waas formed and maximum bond strength was observed between 130$0^{\circ}C$. Also the metal to ceramic bond strength was increased using finer molybdenum metal powder than coarse powder. When content of $SiO_2$ in the flux of alumina ceramics was constant metal to ceramic bond strength was improved with increasing the ratio of CaO to MgO in the flux.

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ANALYSIS OF RADIOACTIVE IMPURITIES IN ALUMINA AND SILICA USED FOR ELECTRONIC MATERIALS

  • Lee Kil-Yong;Yoon Yoon-Yeol;Cho Soo-Young;Kim Yong-Je;Chung Yong-Sam
    • Nuclear Engineering and Technology
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    • v.38 no.5
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    • pp.423-426
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    • 2006
  • A developed neutron activation analysis(NAA) and gamma-spectrometry were applied to improve the analytical sensitivity and precision of impurities in electronic-circuit raw materials. It is well known that soft errors in high precision electronic circuits can be induced by alpha particles emitted from naturally occurring radioactive impurities such as U and Th. As electronic circuits have recently become smaller in dimension and higher in density, these alpha-particle emitting radioactive impurities must be strictly controlled. Therefore, new NAA methods have been established using a HTS(Hydraulic Transfer System) irradiation facility and a background reduction method. For eliminating or stabilizing fluctuated background caused by Rn-222 and its progeny nuclides in air, a nitrogen purging system is used. Using the developed NAA and gamma-spectrometry, ultra trace amounts of U(0.1ng/g) and Th(0.01ng/g) in an alumina ball and high purity silica used for an epoxy molding compound (EMC) could be determined.

fabrication of Ceramic Tape By Ultrasonic Spray (초음파 분무를 이용한 세라믹 테이프의 성형)

  • 윤정한;박양수;심수만;이해원
    • Journal of the Korean Ceramic Society
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    • v.36 no.6
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    • pp.625-631
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    • 1999
  • Ceramic tapes were fabricated by ultrasonically spraying slurries of monodispersed spherical and alumina powders. Effects of slurry compositions on tape forming were investigated. A relatively fast rate of solvent evaporation caused pores and cracks to be formed. A good chemical affinity between solvent and binder gave rise to binder separation resulting in inhomogeneous distribution of binder. Defect-free silica tapes with uniform distribution of particle packing and the binder were obtained from the solvent having a low chemical affinity and a slow evaporation rate and containing appropriate amounts of the binder and the plasticizer. Tape thickness could be controlled by adjusting solids loadings and slurry feed rates. It was possible to fabricate a tape in 15 $\mu\textrm{m}$ thickness from 7 vol% alumina slurry.

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Formation of Ni layer onto alumina powders by hydrogen reduction technique (가압수소환원법에 의한 알루미나 분말상의 니켈 코팅층 형성에 관한 연구)

  • 김동진;정헌생;유케닝
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.6 no.3
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    • pp.415-423
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    • 1996
  • Hydrogen reduction technique was used to form the nickel layer onto alumina powders in nickel sulfate solutions. The reduction rate and precipitation states of nickel ions were investigated at various experimental conditions such as hydrogen pressure, temperature, $PdCl_{2}$ addition, particle size, and so on. Uniformly nickel coated alumina composite powders were obtained at such condition as reduction temperature of $165^{\circ}C$, hydrogen pressure of 300 psi, and $PdCl_{2}$ amount of $2\;mg/\ell$.

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Thermal Spalling and Resistance to Slag Attack in Porous High Alumina Ceramic (According to Pore Size) (고Alumina질 다공성 세라믹스의 내열충격성 및 내Slag성 (기공크기에 따른))

  • 김병훈;나용한
    • Journal of the Korean Ceramic Society
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    • v.30 no.9
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    • pp.747-753
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    • 1993
  • The investigation was carried out to study the behaviors of the pore size and porosity, the mechanical strength, the resistance to thermal spallings and slag attacks according to particle sizes of starting raw materials in porous high Alumina ceramics. This porous ceramics have been used in processing of the clean steel by the blowing of the inert gas. The required properties in the practice are the suitable pores size, the sharp pores distribution for a uniform blowing of the gas, the strong corrosion resistance to slags and molten metals and the resistance to thermal spalling. The optimized properties in porous high alumina ceramics of the specimen No. 3 was found to be the very low slag intrusion and the superior resistance to thermal spalling because of the suitable pore size of 2.5${\mu}{\textrm}{m}$, the porosity of 30% and the high sinterability.

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On the Wear Properties of the Alumina Short Fiber and Particle Reinforced Aluminium Bronze Alloy Composite (알루미나 단섬유 및 입자강화 알루미늄 청동기지 복합재의 마모특성)

  • 이상로;허무영
    • Tribology and Lubricants
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    • v.10 no.3
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    • pp.39-46
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    • 1994
  • In order to investigate the effect of the ceramic reinforcements on the wear properties of aluminum bronze composites, Cu-8wt%Al aluminum bronze alloys reinforced with the Saffil alumina short fiber were produced by the powder metallurgical method and tested by a pin-ondisc wear testing machine. The wear surfaces of the pin specimens and discs, wear debris, and the cross sections of the wear specimens were observed by SEM. The wear mechanism according to various wear conditions and the change of microstructure in the composites were also discussed. In the results, the reinforcement of the composites with alumina short fiber was very effective at the higher applied load over 10N. The material transportation to the counter disc was observed in the alloy specimens without reinforcements. However, the composites reinforced with ceramic particles and fibers showed the resistance against the material transportation.