The Optimization of Semiconductor Processes for MMIC Fabrication - Si$_3$ N$_4$ deposition, GaAs via-hole dry etching, Airbridge process
(MMIC 제작을 위한 반도체 공정 조건들의 최적화 - Si$_3$ N$_4$ 증착, GaAs via-hole건식식각, Airbridge공정)
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- Proceedings of the IEEK Conference
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- 1999.06a
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- pp.934-937
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- 1999