• Journal of Institute of Convergence Technology
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• v.3 no.2
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• pp.11-15
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• 2013

These days, the quality of goods is required to improve in the process of manufacturing the semiconductor through the short working hours and clean transportation. The non-contact transport device using magnetic levitation can be a solution in the manufacturing process. The non-contact transport device, using electromagnetic actuation, is the system that can actually transport them by only using attraction force from the electromagnetic source without authentic contact. Moreover, the system using electromagnetic force has a substantial number of benefits ranging from unrestricted design to unlimited expansion. Especially, the price is competitive. The non-contact transport device, using electromagnetic force, has another merits in controlling by giving the same amount of attraction force to ferromagnetic body. By controlling the currents given to coil, the operator is able to decide the direction of the transportation. In order to design the optimal system, we implemented five different things such as the presence of the links below the electromagnetic, the electromagnet changes due to coupling method, the change according to the thickness of the links below electromagnet, due to changes in between electromagnetic distance direction, and the size of the current. Through simulations and the optimum design, it seems to control easily and figure out the exact size of power. It might definitely be the non-contact transport that can sharply reduce tiny scratches and particles in the process of manufacturing the semiconductor.

• Journal of Advanced Navigation Technology
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• v.5 no.1
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• pp.85-96
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• 2001

Recent development of a smart structures module and its successful integration with a multidisciplinary design optimization software $ASTROS^*$ and an Aeroservoelasticity module is presented. A modeled F-16 wing using piezoelectric actuators is used as an example to demonstrate the integrated software capability to design a flutter suppression system. For an active control design, neural network based controller is used for this study. A smart structures module is developed by modifying the existing thermal loads module in $ASTROS^*$ in order to include the effects of the induced strain due to piezoelectric actuation. The control surface/piezoelectric equivalence model principle is developed, which ensures the interchangeability between the control surface force input and the piezoelectric force input to the Aeroservoelasticity modules in $ASTROS^*$. The results show that the developed controller can increase the flutter speed.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.12
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• pp.153-159
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• 1997

A thermally-driven polysilicon microactuator has been fabricated using surface micromachining techniques. It consists of P-doped polysilicon as a structural layer and TEOS(tetraethylorthosilicate) oxide as a sacrificial layer. The polysilicon was annealed for the relaxation of residual stress which is the main cause to its deformation such as bending and buckling. And newly developed HF GPE(gas-phase etching) process was also employed to eliminate the troublesome stiction problem using anhydrous HF gas and CH$_{3}$OH vapor, and successfully fabricated the microactuators. The actuation is incurred by the thermal expansion due to the current flow in the active polysilicon cantilever, which motion is amplified by lever mechanism. The moving distance of polysilicon microactuator was experimentally conformed as large as 21 .mu. m at the input voltage level of 10V and 50Hz square wave. The actuating characteris- tics are also compared with the simulalted results considering heat transfer and thermal expansion in the polysilicon layer. This microactuator technology can be utilized for the fabrication of MEMS (microelectromechanical system) such as microrelay, which requires large displacement or contact force but relatively slow response.

• Journal of the Korean Society of Safety
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• v.35 no.2
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• pp.94-99
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• 2020

Bikers can be subjected to injuries from unexpected accidents even if they wear basic helmets. A properly designed airbag can efficiently protect the critical areas of the human body. This study introduces a wearable smart airbag system using machine learning techniques to protect human neck and shoulders. When a bicycle accident happens, a microprocessor analyzes the biker's motion data to recognize if it is a critical accident by comparing with accident classification models. These models are trained by a variety of possible accidents through machine learning techniques, like k-means and SVM methods. When the microprocessor decides it is a critical accident, it issues an actuation signal for the gas inflater to inflate the airbag. A protype of the wearable smart airbag with the machine learning techniques is developed and its performance is tested using a human dummy mounted on a moving cart.

• Smart Structures and Systems
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• v.3 no.2
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• pp.147-172
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• 2007

The present paper is concerned with the design of distributed sensors and actuators. Strain type sensors and actuators are considered with their intensity continuously distributed throughout a continuous structure. The sensors measure a weighted average of the strain tensor. As a starting point for their design we introduce the concept of collocated sensors and actuators as well as the so-called natural output. Then we utilize the principle of virtual work for an auxiliary quasi-static problem to assign a mechanical interpretation to the natural output of the sensors to be designed. Therefore, we take the virtual displacements in the principle of virtual work as that part of the displacement in the original problem, which characterizes the deviation from a desired one. We introduce different kinds of distributed sensors, each of them with a mechanical interpretation other than a weighted average of the strain tensor. Additionally, we assign a mechanical interpretation to the collocated actuators as well; for that purpose we use an extended body force analogy. The sensors and actuators are applied to solve the displacement tracking problem for continuous structures; i.e., the problem of enforcing a desired displacement field. We discuss feed forward and feed back control. In the case of feed back control we show that a PD controller can stabilize the continuous system. Finally, a numerical example is presented. A desired deflection of a clamped-clamped beam is tracked by means of feed forward control, feed back control and a combination of the two.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07b
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• pp.1107-1112
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• 2002

An easy elevator originated is an opened system to compare an existing equipment, and learning efficient is high as a wiring that the sequence control circuit is on and off. The structure of an equipment to be controled from the first floor to the fifth floor is constructed by a lamp to express the function of the open-close of the door according to the cage moving, to express the mechanical actuation of the forward-reverse break and motor of load and of hand-worked control component of Push-Button S/W, L/S and Relay. In order to act of the elevator function that these components connected, designed the auto program and the sequence control circuit. Consequently the process that these(1~5steps) operated the cage with an auto program of the elevator and the sequence control circuit is controled by the step of forward and reverse that the L/S1~L/S5 of sensor adjust function let posit, by the adjustable S/W1~S/W5 of PLC testing panel and the S/W1~S/W5 which installed on the transparent acryl plate of a frame. In here, improved apparatus is the learning equipment of combined use to study the principle and the technique of the originated sequence control circuit and the auto program of PLC.

• Journal of ILASS-Korea
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• v.18 no.2
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• pp.87-93
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• 2013

In this paper, high-pressure injection characteristic of servo hydraulic injector as the key component of diesel CRDi system, which is driven by solenoid and piezo-actuator were examined by experimental analysis. High-pressure injection characteristic of standard diesel fuel injected at high pressure up to 160 MPa was investigated at high-pressure chamber by using a high-speed camera for spray visualization and quantitative analysis. By this study, we found that the piezo-driven injector has better performances in controlling the fuel injection with the high pressure, including fuel quantity, spray penetration length and spray velocity, than that of a solenoid-driven injector. In particular, the needle response time for start of injection in piezo-driven injector was faster of about $125{\mu}s$ than that of solenoid-driven injector. Consequently, it is known that the piezo-driven injector has more degrees of freedom in controlling the fuel injection with the high pressure than solenoid-driven injector.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.20 no.5
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• pp.1419-1425
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• 1996

In this work, a precies actuator which is capable of high positioning accuracy is developed. For estimation the dynamic behavior of the actuator, system modeling is performed by employing a stick-slip frection law. Dynamic characteristics over various types of driving input signals and vibraiton loci of the driving tip are examined by experiments. Phase differences between the input signals are applied, and the dynamic behavior of slider is investigated. From the simulation and experimental results, it is observed that the dynamic behaviors from the simulation results agree fairly well to those of the experimental results. Thisindicates that the model developed in this work is applicable to other precision mechanisms in which a friction farce is as improtant factor for actuation.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.04a
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• pp.146-150
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• 1996

A thermal micro actualtor has been fabricated using surface micromachining techniques. It consists of doped ploysilicon as a moving part and TEOS(Tetra Ethyl Ortho Silicate) as a sacrificial layer. The polysilicon was annealed for the reduction of residual stress which is the main cause to its deformation such as bending and buckling. And the newly developed HF VPE(vapor phase etching)process was also used as an effective release method for the elimination of sacrificaial layer. With noliquid involved during any of the steps for relasing, unlike other reported relase techniques, the HF VPE pocess has produced polysilicon microstructures with virtually no process-induced stiction problem. The actuation is incured by the thermal expasion due to current flow in active polysilicon cantilever, which motion is amplified bylever mechanism. The thickness of pllysilicon is 2 .mu. m and the length of active and passive polysilicon cantilever are 500 .mu. m, respectively. The moving distance of polysilicon actuator was experimentally conformed as large as 21 .mu. m at the input voltage level of 10 V and 50Hz square wave. These micro actuator technology can be utilized for the fabrication of MEMS (microlectromechanical system) such as microrelay, which requires large displacement or contact force but relatively slow response.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.33 no.11
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• pp.1300-1305
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• 2009

The various electromagnetic based actuation(EMA) methods have been proposed for actuating microrobot. The advantage of EMA is that it can provide wireless driving to microrobot. In this reason a lot of researchers have been focusing on the EMA driven microrobot. This paper proposed a swimming microrobot driven by external alternating magnet field which is generated by two pairs of Helmholtz coils. The microrobot has a fish-like shape and consists of a buoyant robot body, a permanent magnet, and a fin. The fin is directly linked to the permanent magnet and the magnet is swung by the alternating magnet field, which makes the propulsion and steering power of the robot. In this paper, firstly, we designed the locomotive mechanism of the microrobot boy EMA. Secondly, we set up the control system. Finally, we demonstrated the swimming robot and evaluated the performance of the microrobot by the experiments.