• ETRI Journal
• /
• 제25권6호
• /
• pp.503-509
• /
• 2003

Selective epitaxial growth (SEG) of silicon has attracted considerable attention for its good electrical properties and advantages in building microstructures in high-density devices. However, SEG problems, such as an unclear process window, selectivity loss, and nonuniformity have often made application difficult. In our study, we derived processing diagrams for SEG from thermodynamics on gas-phase reactions so that we could predict the SEG process zone for low pressure chemical vapor deposition. In addition, with the help of both the concept of the effective supersaturation ratio and three kinds of E-beam patterns, we evaluated and controlled selectivity loss and non-uniformity in SEG, which is affected by the loading effect. To optimize the SEG process, we propose two practical methods: One deals with cleaning the wafer, and the other involves inserting dummy active patterns into the wide insulator to prevent the silicon from nucleating.

• ETRI Journal
• /
• 제27권3호
• /
• pp.243-249
• /
• 2005

A mobile antenna for multimedia communications with Ku-band geostationary satellite KOREASAT-3 and JSAT-2A is presented. The forward link of the satellite communication is 11.7 to 12.75 GHz, and the return link is 14.0 to 14.5 GHz. The mobile antenna is designed to be a stair structure using 24 active phased array elements in order to provide a low profile, and to be at a non-periodic array distance using the genetic algorithm. Also, the designed antenna uses the double beam forming method for stable satellite tracking. The fabricated mobile antenna is examined using various experiments to confirm its capability for practical application. From the measured results, the fabricated mobile antenna system is confirmed to have a good performance.

• ETRI Journal
• /
• 제27권1호
• /
• pp.95-101
• /
• 2005

Waveguide structures of the stand-alone electroabsorption (EA) modulator and the electroabsorption modulated laser (EML) are investigated using the 3D beam propagation method. The EA waveguide structures with InP-based passivation layers show saturation in the extinction ratio (ER) due to the stray light traveling through the passivation layers. This paper demonstrates that narrower passivation layers suppress stray-light excitation in the EA waveguide, increasing the ER. A taper structure in the isolation section of the EML waveguide can reduce the mode mismatch and suppress the excitation of the stray light, increasing the ER further. Low-index-polymer passivation layers can confine the mode more tightly in the active waveguide, yielding an even higher ER.

• 제어로봇시스템학회:학술대회논문집
• /
• 제어로봇시스템학회 1996년도 Proceedings of the Korea Automatic Control Conference, 11th (KACC); Pohang, Korea; 24-26 Oct. 1996
• /
• pp.24.2-27
• /
• 1996

This paper is a study on the fuzzy force control of a miniature gripper driven by piezoelectric bimorph actuator. The system is composed of two flexible cantilevers, a stepping motor, a laser displacement transducer and two semiconductor force sensors attached to the beams. Obtained results show that the present artificial finger system works well as a miniature gripper, which produces approximately 0.06N force in the maximum. Further, the fuzzy position/force control algorithm is applied to the soft-handing gripper for stable grasping of a object. It revealed that the fuzzy rule-based controller be efficient controller for the stable drive of the flexible miniature gripper. It also showed that two semiconductor strain gauges located in the flexible beam play an important roles for force control, position control and vibration suppression control.

• 제어로봇시스템학회:학술대회논문집
• /
• 제어로봇시스템학회 1997년도 한국자동제어학술회의논문집; 한국전력공사 서울연수원; 17-18 Oct. 1997
• /
• pp.40-43
• /
• 1997

This paper presents a 3D object recognition method for generation of 3D environmental map or obstacle recognition of mobile robots. An active light source projects a stripe pattern of light onto the object surface, while the camera observes the projected pattern from its offset point. The system consists of a laser unit and a camera on a pan/tilt device. The line segment in 2D camera image implies an object surface plane. The scaling, filtering, edge extraction, object extraction and line thinning are used for the enhancement of the light stripe image. We can get faithful depth informations of the object surface from the line segment interpretation. The performance of the proposed method has demonstrated in detail through the experiments for varies type objects. Experimental results show that the method has a good position accuracy, effectively eliminates optical noises in the image, greatly reduces memory requirement, and also greatly cut down the image processing time for the 3D object recognition compared to the conventional object recognition.

• 대한전자공학회:학술대회논문집
• /
• 대한전자공학회 2002년도 ITC-CSCC -1
• /
• pp.184-187
• /
• 2002

Two-dimensional (2-D) X-ray computerized tomography (CT) equipments are widely used in industrial and medical fields, and nowadays studies on reconstruction algorithm for 3-D cone-beam acquisition systems are active for better utilization. The authors recent-By have proposed a fast reconstruction aigorithm using tree-structured filter bank for 2-D C1, and shown the algorithm is applicable to an approximate reconstruction of 3-D CT. For exact 3-D CT reconstruction, however, we have to backproject 1-D signal into 3-D space. This paper proposes a fast implementation method for this back-projection by use of tree-structured filter bank. and shows the proposed method works approximately 700 times faster than the direct one with almost same reconstruction image quality.

• ETRI Journal
• /
• 제30권3호
• /
• pp.480-482
• /
• 2008

A novel InGaAsP/InP buried-ridge waveguide laser diode structure is proposed and demonstrated for use as a single-mode laser. The lateral mode of the proposed device can be controlled by adjusting the composition and thickness of the InGaAsP layer grown over the active region. Stable single-mode operation without kinks or beam-steering is achieved successfully with lateral and transverse in the junction plane even for the device with the ridge width of 9 ${\mu}m$ up to an injection current of 500 mA.

• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2004년도 추계학술대회
• /
• pp.637-642
• /
• 2004

This paper presents a new shape design method for the multi-mode sensor that can detect selected multiple modes for the active vibration control of mechanical structures. The structure used for this study is an isotropic cantilever beam type with a PVDF(polyvinylidene fluoride) which is bonded onto the structure as a sensor. Characteristic behaviors of the sensor are related with the electrode shapes of PVDF. The shape optimization problem is solved by defining a new multi-objective function and using the genetic algorithm. Resulting electrode shape functions have good performances to detect the multiple vibration modes. The results of analytical simulations are compared with those of experiment works. The results agree well each other. Hence, the obtained experimental results give evidence for the validity of the presented theoretical analysis of the electrode shape design problem.

• 한국소음진동공학회논문집
• /
• 제13권8호
• /
• pp.612-618
• /
• 2003

A hybrid vibration control scheme using ER fluid and PZT patches is proposed. Dynamic characteristics of the beam embedded with the ER fluid can be controled by changing the strength of the electric field applied on the ER fluid, thus provides a mean to avoid the resonance. It was found that active vibration control of the structure embedded with ER fluid failed to suppress the vibration excited with broad band frequency due to the limited change of the dynamic characteristics of the structure. To compensate this limited effect of the control scheme with ER fluid alone, PPF control using PZT patches as sensors and actuators is added to construct a hybrid controller. Experimental results suggests that proposed hybrid controller is effective to suppress the additional resonance vibration that appears when each controller is used alone.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2002년도 춘계학술대회 논문집
• /
• pp.207-210
• /
• 2002

This paper is concerned with the experiments on the active vibration control of a plate with piezoceramic sensors and actuators. The natural frequencies of the composite plate featured by a piezo-film sensor and piezo-ceramic actuator are calculated by using the modal analysis method. Modal coordinates are introduced to obtain the state equations of the structural system. Six natural frequencies were considered in the modelling, because robust control theory which has inherent robustness to structured uncertainty is adopted to suppress the transients vibrations of a glass fiber reinforced(GFR) composite beam. A robust controller satisfying the nominal performance and robust performance is designed using robust theory based on the structured singular value. Simulations were carried out with the designed controller and effectiveness of the robust control strategy was verified by results.