• Proceedings of the Korean Radioactive Waste Society Conference
• /
• 2006.11a
• /
• pp.280-281
• /
• 2006

• Proceedings of the Korean Society of Life Science Conference
• /
• 2007.10a
• /
• pp.100.1-100.1
• /
• 2007

See Full Text

• Proceedings of the Korean Radioactive Waste Society Conference
• /
• 2006.06a
• /
• pp.185-186
• /
• 2006

• Proceedings of the Korean Nuclear Society Conference
• /
• 2005.10a
• /
• pp.211-212
• /
• 2005

• Proceedings of the Korean Vacuum Society Conference
• /
• 2015.08a
• /
• pp.177.1-177.1
• /
• 2015

플라즈마 건식 식각공정은 반도체 공정에 있어 증착 및 세정 공정과 함께 중요한 공정중 하나이다. 기존 연구에서는 높은 식각 속도, 종횡비, 대면적에 대한 균일도 증가를 위하여 플라즈마 이온 밀도의 증가와 전자 온도를 감소시키기 위한 노력을 하고 있으며 플라즈마 식각분석 연구에서는 분광학 분석 기법을 활용하여 플라즈마에 의하여 활성화된 식각 가스와 박막 표면의 반응 메커니즘 연구가 진행 중에 있다. 그러나 지금까지의 플라즈마 식각연구에서는 플라즈마 식각 공정에서 발생되는 박막의 damage에 대한 연구는 전무하다. 본 연구에서는 플라즈마 식각과정에서 발생되는 박막 표면의 damage 연구를 위하여 Nano-indenter에 의한 분석 기법을 제시하였다. Nano-indentation 기법은 박막 표면을 indenter tip으로 직접 인가하여 박막 표면의 기계적 특성을 분석하고 이를 통하여 플라즈마에 의한 박막 표면의 물성 변화를 정량적으로 측정한다. 실험에서 플라즈마 소스는 Adaptively Coupled Plasma (ACP)를 사용하였고 식각 가스로는 HBr 가스를 주로 사용하였으며, 플라즈마 소스 파워는 1000 W로 고정 하였다. 연구 결과에 의하면 식각공정 챔버 내 압력이 5, 10, 15 및 20 mTorr로 증가함에 따라 TEOS SiO2 박막의 강도가 7.76, 8.55, 8.88 및 6.29 GPa로 변화되는 것을 측정하였고 bias power에 따라서도 다르게 측정됨을 확인하였다. 이 결과를 통하여 Nano-indentation 분석 기법을 활용하여 TEOS SiO2 박막의 식각공정의 변화에 따른 강도변화를 측정함으로써 플라즈마에 의한 박막 표면의 damage를 정량적으로 측정 가능함을 확인하였다.

• Applied Microscopy
• /
• v.24 no.3
• /
• pp.10-22
• /
• 1994

To investigate the morphology of the synovial lining cells, synovitis was induced by carrageenin injection into the rat knee joint cavities. Synovial membranes were excised at 1, 3, 5, 7 and 14 days, and histologic, electron microscopic, histochemical (periodic acid Schiff: PAS, toluidine blue), and enzyme histochemical (acid phosphatase: ACP, nonspecific esterase: NSE and endogenous peroxidase) studies were performed. The results are as follows: Carrageenin induced synovial membrane hypertrophy with synovial cell proliferation and granuloma formation. The proliferated synovial lining cells and macrophages in the granulomatous lesion had round to oval nuclei and large, plump cytoplasm with many phagocytotic materials and vacuoles. Electron microscopically, these cells had small number of granular endoplasmic reticulum and many lysosomes, phagosomes and vaculoes. Mitotic figures were observed at early stage of experiment. PAS and toluidine blue stains showed strongly positive reaction in the cytoplasm of the proliferated lining cells and macrophages in granulomatous lesion. ACP and NSE activities were strong positive in the cytoplasm of the proliferated synovial lining cells and macrophages in the granulomatous lesion. But endogenous peroxidase stains were negative in all prolifeative lining cells and macrophages in granulomatous lesion. Conclusively, carrageenin-induced synovitis showed proliferation of synovial lining cells and granuloma formation in deep layer. The macrophages, which consisted of the lesions and have active phagocytic function, were speculated to proliferate by mitosis of superficial synovial A cells and histiocytes in the deep layer of the synovial membrane.

• Korean Journal of Fisheries and Aquatic Sciences
• /
• v.27 no.3
• /
• pp.306-313
• /
• 1994

In order to estimate the degree of genetic divergence between the two types of finespotted flounder, Pleuronichthys cornutus which is important commercially in Japan, isozyme analysis was carried out by starch gel electrophoresis. Twenty two loci coding for fourteen enzymes were scored in two types of finespotted flounder and three completely divergent loci (Acp, Idh-2 and Mdh-2), with no common alleles, were observed between these two types. Nei's genetic distance between two types was 0.46592. However, the expected average heterozygosity was 0.120 in type A (Hon meitagarei) and 0.095 in type B (Bake meitagarei) These results mean that the existence of two types of finespotted flounder was established in this study which may have had genetic divergence and the divergence time of these two types may have been about $2.3{\times}10^6$ years ago.

• Journal of the Institute of Electronics Engineers of Korea TE
• /
• v.42 no.3
• /
• pp.45-50
• /
• 2005

A UV camera is being used in various application regions such as industry, medical science, military, and environment monitoring. A ROIC(ReadOut IC) is developed and can read the responses from UV photodiode sensors which are made with III-V nitride semiconductors of GaN series haying high resolution and high efficiency. To design FPA(Focal Plane Array) UV $8{\times}8$ ROIC, the photodiode type sensor devices are modeled as the capacitor type ones. The ROIC reads out signals from the detector at)d outputs sequentially pixel signals after amplifying and noise filtering of them. The ROIC is fabricated using the $0.5{\mu}m$ 2Poly 3Metal N-well CMOS process. And then, it and photodiode array are hybrid bonded by gold stud bumping process using ACP(Anisotropic Conductive Paste). After the packaging, UV images appearing on PC verified the operations of the ROIC.

• Journal of Sensor Science and Technology
• /
• v.29 no.1
• /
• pp.59-62
• /
• 2020

Currently, increasing attention is being paid to relaxor-based ferroelectric single crystals in photoacoustic images, especially for high-end applications. Among the crystals are (1-x)Pb(Mg_1/3Nb_2/3)O₃-xPbTiO₃ (PMN-100xPT) single crystals located near their morphotropic phase boundary (x = 0.30-0.35) because of their ultrahigh piezoelectric and electromechanical coupling properties. The alternating current poling (ACP) treatment, rather than the conventional direct current poling treatment, has recently been spotlighted due to its effectiveness in enhancing the piezoelectric properties. So far, it has been suggested that the enhanced piezoelectricity originates from either a domain miniaturization to nanodomains or from an electric-field-induced monoclinic symmetry. In this study, we demonstrate by thermally stimulated depolarization current measurements that the effect of ACP is too complex to be explained using a single mechanism and that the proposed electric-field-induced monoclinic symmetry is unlikely to exist.

• The Korean Journal of Physiology and Pharmacology
• /
• v.14 no.5
• /
• pp.265-272
• /
• 2010

Follicular cystic ovary (FCO) is one of the most frequently diagnosed ovarian diseases and is a major cause of reproductive failure in mammalian species. However, the mechanism by which FCO is induced remains unclear. Genetic alterations which affect the functioning of many kinds of cells and/or tissues could be present in cystic ovaries. In this study, we performed a comparison analysis of gene expression in order to identify new molecules useful in discrimination of bovine FCO with follicular cystic follicles (FCFs). Normal follicles and FCFs were classified based on their sizes (5 to 10 mm and $\geq25mm$). These follicles had granulosa cell layer and theca interna and the hormone $17{\beta}$-estradiol ($E_2$)/ progesterone ($P_4$) ratio in follicles was greater than one. Perifollicular regions including follicles were used for the preparation of RNA or protein. Differentially expressed genes (DEG) that showed greater than a 2-fold change in expression were screened by the annealing control primer (ACP)-based PCR method using $GeneFishing^{TM}$ DEG kits in bovine normal follicles and FCFs. We identified two DEGs in the FCFs: ribosomal protein L15 (RPL15) and microtubule-associated protein 1B (MAP1B) based on BLAST searches of the NCBI GenBank. Consistent with the ACP analysis, semi-quantitative PCR data and Western blot analyses revealed an up-regulation of RPL15 and a down-regulation of MAP1B in FCFs. These results suggest that RPL15 and MAP1B may be involved in the regulation of pathological processes in bovine FCOs and may help to establish a bovine gene data-base for the discrimination of FCOs from normal ovaries.