• Title/Summary/Keyword: abrasive wear

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Characteristics of Friction Affecting CMP Results (CMP 결과에 영향을 미치는 마찰 특성에 관한 연구)

  • Park, Boumyoung;Lee, Hyunseop;Kim, Hyoungjae;Seo, Heondeok;Kim, Gooyoun;Jeong, Haedo
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.17 no.10
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    • pp.1041-1048
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    • 2004
  • Chemical mechanical polishing (CMP) process was studied in terms of tribology in this paper. CMP performed by the down force and the relative motion of pad and wafer with slurry is typically tribological system composed of friction, wear and lubrication. The piezoelectric quartz sensor for friction force measurement was installed and the friction force was detected during CMP process. Various friction signals were attained and analyzed with the kind of pad, abrasive and abrasive concentration. As a result of experiment, the lubrication regime is classified with ηv/p(η, v and p; the viscosity, relative velocity and pressure). The characteristics of friction and material removal mechanism is also different as a function of the kind of abrasive and the abrasive concentration in slurry. Especially, the material removal per unit distance is directly proportional to the friction force and the non~uniformity has relation to the coefficient of friction.

The effect of particle size on tool wear of SiCp-reinforced metal matrix composite

  • Sahin, Y.;Sur, G.
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2002.10b
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    • pp.237-239
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    • 2002
  • The effect of particle sizes of the metal matrix composites containing 10 wt.%SiCp was investigated with using various tools. The results showed that tool life decreased considerably with increasing particle size and cutting speed. The wear resistance of TiC-coated tools was considerably higher than that of the other tools. It was observed that abrasive wear was the main responsible mechanism for wear of the tool thermal cracks were at high speed while a built-edge formation was also evident at lower speed.

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Micro-drilling of alumina green body with diamond abrasive drills (다이아몬드 입자 전착 드릴에 의한 알루미나 성형제의 미소구멍가공)

  • 이학구;방경근;김포진;이대길
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2002.05a
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    • pp.926-931
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    • 2002
  • Although ceramic plates with many micro-hales are used as MCP (Micro-channel plate) for electron amplification, catalytic converters, filters, electrical insulators and thermal conductors in integrated circuits, the drilling of micro-hales in the ceramics is difficult because of their low thermal conductivity, high hardness and brittleness. Therefore, in this work, the machining of ceramic green body fellowed by sintering of green body was employed fur fabricating ceramic plates with many micro-holes. The micro-drilling of alumina green body was performed with diamond abrasive WC drills, and the cutting force w.r.t. drilling times was measured for the determination of toot life. From the investigation of the wear of micro-drill tip w.r.t. drilling times, the wear mechanism of tip during micro-drilling of ceramic green body was suggested.

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Effect of Volume Fraction of Cr Carbide Phase on the Abrasive Wear Behavior of the High Cr White Iron Harcfacing Weld Deposits (고크롬 철계 오버레이용접층의 긁힘마모거동에 미치는 크롬탄화물 양의 영향)

  • 백응률
    • Journal of Welding and Joining
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    • v.16 no.1
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    • pp.125-133
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    • 1998
  • The effect of volume fraction of Cr carbide phase (Cr CVF) on the low stress abrasion resistance in the chromium-carbide-type high Cr white iron hardfacing weld deposits has been investigated. In order to examine Cr CVF, a series of alloys with varying Cr CVF by changing chromium and carbon contents and the ratio of Cr/C were employed. The alloys were deposited once or twice on a mild steel plate using the self-shielding flux cored arc welding process. The low stress abrasion resistance of the alloys against sands was measured by the Dry Sand/Rubber Wheel Abrasion Test (RWAT). It was shown that hardness and abrasion resistance increased with increasing Cr CVF within the whole test range (Cr CVF : 0.23-0.64). Both primary Cr carbide and eutectic Cr carbide were particularly effective in resisting wear due to their high hardness.

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Tribology Performance Analysis by Surface Patterns of PLA Printing Samples Using 3-body Abrasion Tester (모래 3체 마모시험 장비(3-body abrasion tester)를 이용한 PLA프린팅 표면의 형상별 트라이볼로지 성능 분석)

  • Yong Seok Choi;Kyeongryeol Park;Seongmin Kang;Unseong Kim;Kyungeun Jeong;Young Jin Park;Kyungjun Lee
    • Tribology and Lubricants
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    • v.39 no.6
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    • pp.250-255
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    • 2023
  • This study applies various surface patterns to minimize material loss in construction equipment that is subject to severe wear due to sand, such as the wear-resistant steel plates of dump trucks or the teeth of excavators. The relationship between surface morphology and wear behavior is investigated using PLA+ polymer to observe the effect of the surface pattern. Five types of samples - smooth, concave, convex, wavy concave, and wavy convex designs - are created using a 3D printer. A wear experiment is conducted for a duration of 3 h using 6.5 kg of abrasive particles. The mass loss of the samples after the experiment is measured to assess the extent of wear. Additionally, the surface morphology of the samples before and after the experiment is analyzed using SEM and confocal microscopy. The study results reveal that the smooth design exhibits the highest wear loss, whereas the concave and wavy concave designs show relatively lower wear loss. The convex and wavy convex designs exhibit varying contact areas with the abrasive particles depending on the surface pattern, resulting in different levels of wear. Furthermore, a comparison between the experimental results and DEM simulations confirms the observed wear trends. This study reveals the relationship between wear damage according to surface pattern shape and is expected to be of substantial help in the analysis of wear and tear on agricultural and heavy equipment.

Indentation and Sliding Contact Analysis between a Rigid Ball and DLC-Coated Steel Surface: Influence of Supporting Layer Thickness (강체인 구와 DLC 코팅면 사이의 압입 및 미끄럼 접촉해석: 지지층 두께의 영향)

  • Lee, JunHyuk;Park, TaeJo
    • Tribology and Lubricants
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    • v.30 no.4
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    • pp.199-204
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    • 2014
  • Various heat-treated and surface coating methods are used to mitigate abrasion in sliding machine parts. The most cost effective of these methods involves hard coatings such as diamond-like carbon (DLC). DLC has various advantages, including a high level of hardness, low coefficient of friction, and low wear rate. In practice, a supporting layer is generally inserted between the DLC layer and the steel substrate to improve the load carrying capacity. In this study, an indentation and sliding contact problem involving a small, hard, spherical particle and a DLC-coated steel surface is modeled and analyzed using a nonlinear finite element code, MARC, to investigate the influence of the supporting layer thickness on the coating characteristics and the related coating failure mechanisms. The results show that the amount of plastic deformation and the maximum principal stress decrease with an increase in the supporting layer thickness. However, the probability of the high tensile stress within the coating layer causing a crack is greatly increased. Therefore, in the case of DLC coating with a supporting layer, fatigue wear can be another important cause of coating layer failure, together with the generally well-known abrasive wear.

Characteristics of Cut Surface by Abrasive Waterjet Cutting of Titanium Alloy (티타늄 합금의 연마제 워터 제트 절단에 의한 절단표면 특성)

  • Chung Nam-Yong;Jin Yun-Ho
    • Journal of Welding and Joining
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    • v.23 no.1
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    • pp.86-93
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    • 2005
  • Abrasive waterjet (AWJ) can provide a more effective means for precision of difficult -to-machining materials such as ceramics and titanium alloys. The present study is focused on the surface roughness of abrasive waterjet cut surfaces. This paper investigated theoretical and experimental surface characteristics associated with abrasive waterjet cutting of titanium alloy Gr2. It is shown that the proper variations of several cutting parameters such as waterjet cutting pressure, cutting speed and cutting depth improve the roughness and characteristics on specimen surfaces produced by AWJ cutting. From the experimental results by AWJ cutting of titanium alloy Gr2, the optimal cutting conditions to improve the surface roughness and precision were proposed and discussed.

Magnetic Abrasive Polishing Technology with Ceramic Particles (세라믹 입자를 이용한 자기연마가공 기술 사례)

  • Kwak, Tae-Soo;Kwak, Jae-Seob
    • Journal of the Korean Society for Precision Engineering
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    • v.30 no.12
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    • pp.1253-1258
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    • 2013
  • Ceramic particles as polishing abrasives are often used in a magnetic abrasive polishing process because they have strong wear resistance. Non-ferromagnetic ceramic abrasives should be mixed with ferromagnetic iron particles for controlling the mixture within a magnetic brush during the polishing process. This study describes the application of the ceramic particles for the magnetic abrasive polishing. The distribution of the magnetic abrasives attached on a tool varies with magnetic flux density and tool rotational speed. From the correlation between abrasive adhesion ratio in the tool and surface roughness produced on a workpiece, practical polishing conditions can be determined. A step-over for polishing a large sized workpiece is able to be selected by a S curve, and an ultrasonic vibration assisted MAP produces a better surface roughness and increases a polishing efficiency.

Micro Grooving of Glass Using Micro Abrasive Jet Machining (Micro Abrasive Jet Machining을 이용한 유리의 미세 홈 가공)

  • Choi, Jong-Soon;Park, Keong-Ho;Park, Dong-Sam
    • Journal of the Korean Society for Precision Engineering
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    • v.18 no.10
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    • pp.178-183
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    • 2001
  • Abrasive jet machining(AJM) process is similar to the sand blasting and effectively removes hard and brittle materials. AJM has applied to rough working such as debarring and rough finishing. As the need for machining of ceramics, semiconductor, electronic devices and LCD are increasing, micro AJM is developed, and has become the inevitable technique to micromachining. This paper describes the performance of the micro AJM in micro grooving of glass. Diameter of hole and width of line in grooving is 80${\mu}{\textrm}{m}$. Experimental results showed good performance in micro grooving of glass, but the size of machined groove increased about 2~4${\mu}{\textrm}{m}$. With the fine tuning of masking process and compensation of film wear. this micro AJM could be effectively applied to the micro machining of semiconductor, electronic devices and LCD.

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Manufacture and Application of Diamond Orifices in Abrasive Suspension Jet for Micro Machining (습식 워터 젯 정밀 절삭 가공용 다이아몬드 오리피스 제조 및 응용)

  • Kim, Youn-Chul;Park, Hee-Dong;Jho, Jae-Han;Kang, Suk-Joong L
    • Journal of Powder Materials
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    • v.15 no.6
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    • pp.509-513
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    • 2008
  • High-pressure abrasive entrained jet have rapidly become important machining technology over the last two decades. However, suspension jet by high-pressure has been recently developed for packaging sawing. Ideally, diamond materials should be used for components in abrasive water-jet systems that are subject to high erosive conditions. Using the diamond orifices improve maintenance and extend wear part life. This paper gives insights to using an abrasive suspension jet with diamond orifice. The influences of orifice material and orifice design are evaluated.