• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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• pp.787-790
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• 2003

A rf triode magnetron sputtering system is designed and installed its construction in vacuum chamber. In order to calibrate the rf triode magnetron sputtering for thin films deposition processes, the effects of different glow discharge conditions were investigated in terms of the deposition rate measurements. The basic parameters for calibrating experiment in this sputtering system are rf power input, gas pressure, plasma current, and target-to-substrate distance. Because a knowledge of the deposition rate is necessary to control film thickness and to evaluate optimal conditions which are an important consideration in preparing better thin films, the deposition rates of copper as a testing material under the various sputtering conditions are investigated. Furthermore, a triode sputtering system designed in our team is simulated by the SIMION program. As a result, it is sure that the simulation of electron trajectories in the sputtering system is confined directly above the target surface by the force of $E{\times}B$ field. Finally, some teats with the above 4 different sputtering conditions demonstrate that the deposition rate of rf triode magnetron sputtering is relatively higher than that of the conventional sputtering system. This means that the higher deposition rate is probably caused by a high ion density in the triode and magnetron system. The erosion area of target surface bombarded by Ar ion is sputtered widely on the whole target except on both magnet sides. Therefore, the designed rf triode magnetron sputtering is a powerful deposition system.

• 한국세라믹학회지
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• 제52권4호
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• pp.279-283
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• 2015

Ni (100 nm thick) was deposited onto synthesized diamonds to fabricate etched diamonds. Next, those diamonds were annealed at varying temperatures ($400{\sim}1200^{\circ}C$) for 30 minutes and then immersed in 30 wt% $HNO_3$ to remove the Ni layers. The etched properties of the diamonds were examined with FE-SEM, micro-Raman, and VSM. The FE-SEM results showed that the Ni agglomerated at a low annealing temperature (${\sim}400^{\circ}C$), and self-aligned hemisphere dots formed at an annealing temperature of $800^{\circ}C$. Those dots became smaller with a bimodal distribution as the annealing temperature increased. After stripping the Ni layers, etch pits and trigons formed with annealing temperatures above $400^{\circ}C$ on the surface of the diamonds. However, surface graphite layers existed above $1000^{\circ}C$. The B-H loop results showed that the coercivity of the samples increased to 320 Oe (from 37 Oe) when the annealing temperature increased to $600^{\circ}C$ and then, decreased to 150 Oe with elevated annealing temperatures. This result indicates that the coercivity was affected by magnetic domain pinning at temperatures below $600^{\circ}C$ and single domain behavior at elevated temperatures above $800^{\circ}C$ consistent with the microstructure results. Thus, the results of this study show that the surface of diamonds can be etched.

• 한국자기학회:학술대회 개요집
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• 한국자기학회 2003년도 하계학술연구발표회 및 한.일 공동심포지엄
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• pp.60-61
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• 2003

Theoretical considerations on a giant magneto-impedance (GMI) effect in amorphous ribbons (i.e., thin films) have been made in terms of the expressions of effective permeability and impedance derived in the frame of classical electrodynamics and ferromagnetism. The dependence of GMI effect on the external do magnetic field (H$\_$ext/) and the frequency of alternating current are simulated and discussed in the knowledge of energy conversion consisting of the current energy loss, the ferromagnetic energy consumption, and the magnetic energy storage in the film. The obtained results are summarized as follow: (a) As frequency f< 20 ㎒, the real part of effective permeability (${\mu}$′) changes slightly. The peak of the ${\mu}$′curve always locates at H$\_$ext/=H$\_$ani/ - the anisotropy field. However, the peak value of ${\mu}$′ tends to increase with increasing frequency in the frequency range of 11-20 ㎒. (b) In the frequency range, f= 21-23 ㎒, a negative peak additionally appears. Meanwhile, both the positive and negative peak values rapidly increase with increasing frequency and their peak positions shift towards a high H$\_$ext/. (c) The positive peak value of ${\mu}$′ starts to decrease at f= 29 ㎒ and its negative peak does so at about 35 ㎒. Then, both peaks keep such a tendency and their peak positions move to high H$\_$ext/, as increasing frequency. (d) The dependence of the imaginary part of effective permeability (${\mu}$") on the external dc magnetic field and the frequency of the alternating field indicates that there is only one peak involved in ${\mu}$" for the whole frequency range. (e) The impedance vs. magnetic field curves at various frequencies show that there is a critical value of frequency around f= 18-19 ㎒ where the transition between two frequency regimes occurs; the one (low frequency) in which ${\mu}$′ predominantly contributes to the GMI effect and the other (high frequency) in which ${\mu}$" determines the GMI effect.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.88-89
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• 2013

A variety of influenza A viruses from animal hosts are continuously prevalent throughout the world which cause human epidemics resulting millions of human infections and enormous industrial and economic damages. Thus, early diagnosis of such pathogen is of paramount importance for biomedical examination and public healthcare screening. To approach this issue, here we propose a fully integrated Rotary genetic analysis system, called Rotary Genetic Analyzer, for on-site detection of influenza A viruses with high speed. The Rotary Genetic Analyzer is made up of four parts including a disposable microchip, a servo motor for precise and high rate spinning of the chip, thermal blocks for temperature control, and a miniaturized optical fluorescence detector as shown Fig. 1. A thermal block made from duralumin is integrated with a film heater at the bottom and a resistance temperature detector (RTD) in the middle. For the efficient performance of RT-PCR, three thermal blocks are placed on the Rotary stage and the temperature of each block is corresponded to the thermal cycling, namely $95^{\circ}C$ (denature), $58^{\circ}C$ (annealing), and $72^{\circ}C$ (extension). Rotary RT-PCR was performed to amplify the target gene which was monitored by an optical fluorescent detector above the extension block. A disposable microdevice (10 cm diameter) consists of a solid-phase extraction based sample pretreatment unit, bead chamber, and 4 ${\mu}L$ of the PCR chamber as shown Fig. 2. The microchip is fabricated using a patterned polycarbonate (PC) sheet with 1 mm thickness and a PC film with 130 ${\mu}m$ thickness, which layers are thermally bonded at $138^{\circ}C$ using acetone vapour. Silicatreated microglass beads with 150~212 ${\mu}L$ diameter are introduced into the sample pretreatment chambers and held in place by weir structure for construction of solid-phase extraction system. Fig. 3 shows strobed images of sequential loading of three samples. Three samples were loaded into the reservoir simultaneously (Fig. 3A), then the influenza A H3N2 viral RNA sample was loaded at 5000 RPM for 10 sec (Fig. 3B). Washing buffer was followed at 5000 RPM for 5 min (Fig. 3C), and angular frequency was decreased to 100 RPM for siphon priming of PCR cocktail to the channel as shown in Figure 3D. Finally the PCR cocktail was loaded to the bead chamber at 2000 RPM for 10 sec, and then RPM was increased up to 5000 RPM for 1 min to obtain the as much as PCR cocktail containing the RNA template (Fig. 3E). In this system, the wastes from RNA samples and washing buffer were transported to the waste chamber, which is fully filled to the chamber with precise optimization. Then, the PCR cocktail was able to transport to the PCR chamber. Fig. 3F shows the final image of the sample pretreatment. PCR cocktail containing RNA template is successfully isolated from waste. To detect the influenza A H3N2 virus, the purified RNA with PCR cocktail in the PCR chamber was amplified by using performed the RNA capture on the proposed microdevice. The fluorescence images were described in Figure 4A at the 0, 40 cycles. The fluorescence signal (40 cycle) was drastically increased confirming the influenza A H3N2 virus. The real-time profiles were successfully obtained using the optical fluorescence detector as shown in Figure 4B. The Rotary PCR and off-chip PCR were compared with same amount of influenza A H3N2 virus. The Ct value of Rotary PCR was smaller than the off-chip PCR without contamination. The whole process of the sample pretreatment and RT-PCR could be accomplished in 30 min on the fully integrated Rotary Genetic Analyzer system. We have demonstrated a fully integrated and portable Rotary Genetic Analyzer for detection of the gene expression of influenza A virus, which has 'Sample-in-answer-out' capability including sample pretreatment, rotary amplification, and optical detection. Target gene amplification was real-time monitored using the integrated Rotary Genetic Analyzer system.

• 전기화학회지
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• 제3권1호
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• pp.44-48
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• 2000

상온에서 DC-magnetron sputtering으로 증착한 비정질의 $V_2O_5$ 박막을 양극물질로 하여 $V_2O_5/LIPON/Li$으로 구성된 박막형 리튬이차전지를 제작하였다. $V_2O_5$의 양극특성은 액체전해질을 이용한 half cell 구조에서 평가하였으며, $Ar/O_2$ 분압비의 변화에 따라 제작된 $V_2O_5$ 양극은 분압비 80/20에서 가장 좋은 특성을 보였다. 자체 제작한 $Li_3PO_4$ 타겟을 사용하여 RF-sputtering으로 순수한 질소 분위기 하에서 양극 위에 고체전해질 LIPON 박막을 형성하였으며, 1.2-4.0V vs. Li 구간에서 리튬에 대해 반응성이 없는 안정한 화합물임을 확인하였다. 음극으로 쓰인 약 $2{\mu}m$두께의 금속리튬박막은 진공 열 증착법으로 제조하였으며, $V_2O_5/LIPON/Li$의 박막형 리튬이차전지는 $1.2\~3.5V$ 구간에서 초기에 약 $150{\mu}A/cm^2{\mu}m$의 높은 방전용량을 나타내었다.

• 한국분말재료학회지
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• 제19권6호
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• pp.451-457
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• 2012

Nowadays, research and development on quantum dot have been intensively and comprehensively pursued worldwide in proportion to concurrent breakthrough in the field of nanotechnology. At present, quantum dot technology forms the main interdisciplinary basis of energy, biological and photoelectric devices. More specifically, quantum dot semiconductor is quite noteworthy for its sub-micro size and possibility of photonic frequency modulation capability by controlling its size, which has not been possible with conventionally fabricated bulk or thin film devices. This could lead to realization of novel high performance devices. To further understand related background knowledge of semiconductor quantum dot at somewhat extensive level, a review paper is presently drafted to introduce basics of (semiconductor) quantum dot, its properties, applications, and present and future market trend and prospect.

• 한국표면공학회지
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• 제38권4호
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• pp.150-155
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• 2005

Highly conductive and transparent in the visible region tin-doped indium oxide(ITO) thin films were deposited on Corning glass by r.f sputtering. To achieve high transmittance and low resistivity, we examined various parameters such as r.f power and deposition time. The films crystallinity shifted from (222) to (400) and (440) orientation as deposition time and r.f power increased. Surface roughness RMS value increased proportionally with deposition time. The lowest resistivity was $5.36{\times}10^{-4}{\Omega}{\cdot}cm$ at 750 nm thickness, $200^{\circ}C$ substrate temperature and 125 w r.f power. All of the films showed over $85\%$ transmittance in the visible wavelength range.

• 한국식품저장유통학회지
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• 제14권1호
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• pp.24-29
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• 2007

월동배추의 저장방법에 따른 특성과 김치를 위해 절였을 경우 특성을 조사하여 배추의 효과적인 저장방법을 구명하고자 하였다. 저장방법(PE 필름백, 플라스틱 컨테이너, 망저장, 움저장)에 따른 배추의 특성을 3개월 동안 조사한 결과, PE 필름백에 저장한 배추가 겉잎이 부패하는 단점이 있으나 다른 처리에 비해 감모율, 정선 손실율, 외관 등에서 비교적 좋은 결과를 보여주었다. 그러나 저장방법을 달리하여 배추를 절였을 경우에 처리별로 절임특성이 큰 영향을 보이지 않았다. 본 실험 결과로 월동배추의 저장 방법이 절임 특성에는 큰 영향이 없지만 저장방법에 따라서 중량 감모 및 정선손실 정도에 영향을 미치므로 배추는 저장중의 이러한 손실을 줄이고 신선도를 유지할 수 있는 방법에 대한 연구가 보다 필요할 것으로 생각된다.

• 센서학회지
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• 제3권1호
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• pp.40-45
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• 1994

SAW 가스센서의 기판으로 $112^{\circ}$ rot. x-cut $LiTaO_{3}$ 기판을 사용하였고, 사진식각법으로 reference delay line과 sensing delay line으로 구성된 dual delay line SAW소자를 제작하였다. 각각의 IDT는 전극의 폭이 $10{\mu}m$이고, 10 개의 전극쌍을 갖는다. 각각 두개의 delay line 중에서 reference delay line은 감지막을 증착시키지 않고, sensing delay line은 유기물 반도체의 일종인 Pb-프탈로시아닌을 shadow mask로써 $10^{-5}$torr의 진공하에서 선택적으로 증착시켰다. 제작된 SAW소자로 rf amp.와 AGC(Auto Gain Control)를 사용하여 dual delay line oscillator를 만들었다. 이때 발진주파수는 $87{\sim}$89 MHz였다. 온도와 $NO_{2}$ 가스농도의 변화에 따른 발진주파수의 변화를 조사하였다.

• 생물환경조절학회지
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• 제28권4호
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• pp.429-437
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• 2019

본 연구는 '매향' 딸기 런너의 삽목번식시 차광 및 가습에 따른 효과를 확인하기 위하여 수행하였다. 런너 삽수를 2017년 11월 23일에 삽목한 후 대조구(무가습+무차광, C), 무가습+흰색 한랭사 차광 55%(W55), 무가습+검은색 차광막 55%(B55), 무가습+멀칭비닐 차광 100%(B100), 가습+무차광(CH), 가습+흰색 한랭사 차광 55%(W55H), 가습+검은색 차광막 55%(B55H) 및 가습+멀칭비닐 차광 100%(B100H)를 처리하였다. 대조구(무가습+무차광, Control), 무가습+멀칭비닐 100% 차광(Shading), 가습+무차광(Fogging)의 처리를 두고 육묘하였다. 지상부의 생육은 처리간 유의적인 차이가 없었다. 전반적인 지하부의 생육에 있어 가습 처리가 무가습 처리에 비해 우수하였다. 삽목 26일 후 지하부의 생체중과 건물중의 경우 가습+무차광 처리에서 가장 우수하였다. 삽목 26일 후 근장의 경우 가습+흰색 한랭사 차광 55% 처리구 및 가습+검은색 차광막 55% 처리구에서 가장 우수하였다. 이상의 결과를 종합하면 딸기 '매향'의 삽목 번식시 가습 및 차광 유무에 따라 삽목묘의 형태형성에 영향을 주는 것으로 판단된다. 또한 이러한 결과는 삽목번식 방법을 수행하는 다른 작물에도 응용될 수 있을 것으로 판단된다.