• Journal of Electrical Engineering and Technology
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• 제6권1호
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• pp.119-122
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• 2011

A new high speed AFM probe has been proposed and fabricated. The probe is integrated with PZT actuated cantilever realized in bulk silicon wafer using heavily boron doped silicon as an etch stop layer. The cantilever thickness can be accurately controlled by the boron diffusion process. Thick SCS cantilever and integrated PZT actuator make it possible to be operated at high speed for fast imaging. The resonant frequency of the fabricated probe is 92.9 kHz and the maximum deflection is 5.3 ${\mu}m$ at 3 V. The fabricated probe successfully measured the surface of standard sample in an AFM system at the scan speed of 600${\mu}m$/sec.

• Journal of Astronomy and Space Sciences
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• 제14권2호
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• pp.269-274
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• 1997

Langmuir probe was housed in the sounding rocket to test the probe's performance and to find the environmental parameters at the F layer of the ionosphere. The gold plated cylindrical probe had a length of 14㎝ and a diameter of 0.096 ㎝. The applied voltage to the probe consisted of 0.9 sec fixed positive bias followed by 0.1 sec of down/up sweep. This ensured that the probe swept through the probe's current-voltage characteristic at least once during 1 second quiescent periods enabling the electron temperature to be measured during the undisturbed times of the flight. The experimental results showed good agreement of the temperature distribution with IRI model at the lower F layer. In the upper layer, the experimental temperatures were 100-200K lower than the IRI model's because of the different geomagnetic conditions: averaged conditions were used in IRI model and specific conditions were reflected in the experiment.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.202-202
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• 2011

Diagnostics of plasma density is a key factor for monitoring plasma processing. Various probes are invented to measure plasma density and cut-off probe is a one of the most promising diagnostics tool for measuring plasma density. However, at the low density or high pressure the cut-off probe cannot clearly resolve the cut-off peak. Several reasons make this problem: Cut-off likes peaks caused by cavity resonances and weaken transmission spectrum signal at high pressure. Recently, You et al., have researched mechanism of cut-off probe and we improve the cut-off reliability and sensitivity base on that research. Modified cut-off antenna is adapted and bias cut-off probe method is tried. These experiment results have good agreement with the previous study and show good measurement characteristics.

• 전기학회논문지
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• 제60권7호
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• pp.1434-1437
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• 2011

Precision measurement of silicon wafer resistivity has been using single-configuration Four-Point Probe(FPP) method. This FPP method have to applying sample size, shape and thickness correction factor for a probe pin spacing to precision measurement of silicon wafer. The deference for resistivity measurement values applied correction factor and not applied correction factor was about 1.0 % deviation. The sample size, shape and thickness correction factor for a probe pin spacing have an effects on precision measurement for resistivity of silicon wafer.

• 전기학회논문지P
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• 제59권4호
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• pp.423-427
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• 2010

Portable sheet resistance-measuring instrument using the dual-configuration Four-Point Probe method is developed for the purpose of precisely measuring the sheet resistance of conducting thin films. While single-configuration Four-Point Probe method has disadvantages of applying sample size, shape and thickness corrections for a probe spacing, the developed instrument has advantages of no such corrections, little edge effects and measuring simply and accurately the sheet resistance between $0.2\Omega/sq$ and $2k\Omega/sq$.

• Clinical and Experimental Reproductive Medicine
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• 제27권4호
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• pp.405-415
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• 2000

Objective: The present study was undertaken to synthesize a human Y chromosome specific probe and to confirm the usefulness of the probe for fluorescence in situ hybridization (FISH) in various types of human cells. Methods: An approximately 400 bp DNA fragment of the DYZ1 sequences was synthesized by PCR using digoxigenin labeled dUTP (dig-PCR). The fidelity of probe was tested by FISH for cultured and uncultured human lymphocytes, amniocytes, chorionic villus cells, embryos, sperms, and germ cells of seminiferous tubule. Results: The human Y chromosome specific probe hybridized specifically to Y chromosome of the cells that had been tested. This probe assigned to the Yq12 region where the DYZ1 repetitive sequence is concentrated. Conclusion: We have identified a human Y chromosome specific probe that hybridized specifically to the Y chromosome by FISH for various types of uncultured as well as cultured cells. Therefore FISH technique using human Y chromosome specific probe should be useful for clinical application as a diagnostic tool for the detection of human Y chromosome.

• 대한토목학회논문집
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• 제31권1D호
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• pp.43-50
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• 2011

택시 프로브(Probe)를 이용한 구간통행속도 모니터링체계는 지능형교통체계(ITS)의 핵심적인 하부시스템 중 하나이다. 택시 프로브기법을 통해 수집되는 구간통행속도는 도시가로망의 교통상태 모니터링과 통행시간 정보제공에 널리 활용되고 있다. 그러나 택시 Probe기법은 표본수가 적고 교통혼잡으로 인하여 구간통행시간이 자료수집 주기보다 큰 경우, 실시간으로 자료가 수집되지 않는 누락상태가 발생하게 된다. 이러한 누락상태는 단일시간대에서 다중시간대에 걸쳐 발생하게 되며, 기존의 단일시간대 예측기법으로는 다중시간대의 상태를 예측하지 못하는 단점이 있다. 따라서 다중시간대 누락상태에서 실시간 구간통행속도를 예측하기위한 기법이 요구된다. 본 연구에서는 기존의 단일시간대 예측기법의 한계를 극복하면서 단일 및 다중시간대 통행속도를 예측하기위한 기법을 개발하였다. 개발된 모형은 비모수회귀(NPR)을 기반으로 개발되었으며, 다중시간대 예측에도 불구하고 기존의 단일시간대 예측기법보다 우수한 정확도를 보였다.

• 한국진공학회지
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• 제17권3호
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• pp.189-194
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• 2008

플라즈마 진단법 중 손쉽고 구동이 용이한 장점으로 인해 범용 플라즈마 진단 장치로 사용되는 랑뮤어 (Langmuir) 탐침법은 탐침이 직접 플라즈마 내에 삽입됨으로써 플라즈마를 간섭하기 때문에 플라즈마 고유의 특성을 변형시키는 약점이 있다. 본 연구에서는 대기압 아르곤 자유 연소 아크 (free-burning arc)에 삽입된 랑뮤어 탐침에 의한 교란 영향을 고찰하기 위하여 탐침 유무에 따른 열플라즈마 상태를 수치계산 하였고, 온도장과 속도장이 왜곡된 정도를 비교 분석하였다. 열플라즈마를 모델링하기 위하여 열유동장과 전자기장에 관한 두 종류의 지배방정식을 상용 CFD 프로그램과 자체 제작한 서브루틴을 이용하여 연계 계산하였다. 삽입된 탐침에 의해 열플라즈마 온도장은 탐침의 앞뒤에서 모두 플라즈마 축의 수직 방향으로 큰 변화를 나타내는 열적 교란이 발생되었다. 속도장에서는 탐침 선단의 정체 영역과 후단 후류 영역에서 유동 교란이 발생되었으며, 삽입 된 탐침의 영향이 국부적인 것이 아닌 플라즈마 유동장 대부분 영역에 영향을 미침을 확인할 수 있었다. 따라서 탐침법의 신뢰성을 높이기 위해서는 탐침 삽입에 의한 플라즈마의 열유체역학적 교란을 고려해야 한다.

• Smart Structures and Systems
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• 제16권4호
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• pp.683-699
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• 2015

Time Domain Reflectometry (TDR) has been extensively applied for various laboratory and field studies. Numerous different TDR probes are currently available for measuring soil moisture content and detecting interfaces (i.e., due to landslides or structural failure). This paper describes the development of an innovative spiral-shaped TDR probe that features much higher sensitivity and resolution in detecting interfaces than existing ones. Finite element method (FEM) simulations were conducted to assist the optimization of sensor design. The influence of factors such as wire interval spacing and wire diameter on the sensitivity of the spiral TDR probe were analyzed. A spiral TDR probe was fabricated based on the results of computer-assisted design. A laboratory experimental program was implemented to evaluate its performance. The results show that the spiral TDR sensor featured excellent performance in accurately detecting thin water level variations with high resolution, to the thickness as small as 0.06 cm. Compared with conventional straight TDR probe, the spiral TDR probe has 8 times the resolution in detecting the water level changes. It also achieved 3 times the sensitivity of straight TDR probe.

• 전기학회논문지
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• 제65권10호
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• pp.1706-1711
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• 2016

Electromagnetic wave simulation was performed to predict characteristics of manufactured cutoff probe at low temperature magnetized plasma medium. Microwave cutoff probe is designed for research the properties of magnetized inductively coupled plasma. It was shown that the cutoff probe method can safely be used for weakly magnetized high density plasma sources. Cutoff probe system with two port network analyzer has been prepared and applied to measure electron density distributions in large area, 13.56MHz driven weakly magnetized inductively coupled plasma source. The results shown that, the plasma frequency confirmed cut-off characteristics in low temperature plasma. Especially, cut-off characteristics was found at upper hybrid resonance frequency in the environment of the magnetic field. In case of a induced weak magnetic field in inductively coupled plasma, plasma density estimated from the cutoff frequency in the same way at unmagnetized plasma due to nearly same plasma frequency and upper hybrid resonance frequency. The plasma density is increased and uniformity is improved by applying a induced weak magnetic field in inductively coupled plasma.