• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.211-211
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• 2010

지난 수년간 비휘발성 메모리는 휴대용 전자기기 시장의 증가로 인해 많은 주목을 받아왔다. 그러나 현재 주로 쓰이고 있는 다결정 실리콘을 부유게이트층을 이용한 소자는 한계점을 보이고 있다. 이러한 이유로 최근에는 반도체 나노점이나 금속 나노점을 이용하는 비휘발성 메모리가 각광을 받고 있다. 이 메모리들은 빠른 쓰기/지우기 속도, 긴 저장시간, 낮은 구동전압 등의 이점을 지니고 있다. 본 연구에서는 이온빔 스퍼터링 방법을 이용해 $SiO_2$/Zr nanodots (ND)/$SiO_2$ trilayer 구조를 제작하였다. tunnel oxide와 control oxide의 두께는 각각 3nm, 15nm 이며 Zr의 양을 변화시키며 그에 따른 Zr ND과 메모리 효과의 변화를 관찰하였다. 고분해능 전자현미경과 광전자 분광기를 이용해 Zr ND의 형성을 확인하였고 열처리 후 $ZrO_2$ ND로 상이 변화함을 관찰하였다. -10 ~ +10V의 측정 조건 하에서 Zr의 양이 증가함에 따라 메모리 폭은 최대 5.8V까지 증가하였다. 또한 쓰기 상태에서 메모리 폭과 전하 손실비율은 열처리 후가 감소하였고 이는 $SiO_2$와 Zr ND의 계면에서 생성되는 $ZrO_2$의 영향인 것으로 생각된다.

• Journal of the Korean Ceramic Society
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• v.44 no.6 s.301
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• pp.291-296
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• 2007

Porous $Al_2O_3-(m-ZrO_2)$ composites were fabricated by pressureless sintering, using different volume percentages (40% - 60%) of poly methyl methacrylate (PMMA) powders as a pore-forming agent. The pore-forming agent was successfully removed, and the pore size and shape were well-controlled during the burn-out and sintering processes. The average pore size in the porous $Al_2O_3-(m-ZrO_2)$ bodies was about $200\;{\mu}m$ in diameter. The values of relative density, bending strength, hardness, and elastic modulus decreased as the PMMA content increased; i.e., in the porous body (sintered at $1500^{\circ}C$) using 55 vol % PMMA, their values were about 50.8%, 29.8 MPa, 266.4 Hv, and 6.4 GPa, respectively. To make the $Al_2O_3-(m-ZrO_2)$/polymer hybrid composites, a bioactive polymer, such as PMMA, was infiltrated into the porous $Al_2O_3-(m-ZrO_2)$ composites. After infiltration, most of the pores in the porous $Al_2O_3-(m-ZrO_2)$ composites, which were made using 60 vol % PMMA additions, were infiltrated with PMMA, and their values of relative density, bending strength, hardness, and elastic modulus remarkably increased.

• Journal of the Korean Ceramic Society
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• v.23 no.4
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• pp.23-26
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• 1986

The synthetic conditions of $ ZrSiO_4-Cd(S_xS_{1-x})$ stains from CdS, Se, $SiO_2$ , 4ZrO_2$ and Lif were investigated and the colors were examined. Colors of the stains prepared were yellow orange red pink ruby and violet in relation to both the content of CdS-Se in $ZrSiO_4$ and firing temperature. Colors of these series stains were thermally stabilized probably by the structural stability of zirconium silicate. Furthermore by the result of X-ray diffraction analysis it is assumed that color of the zircon cadmium sulphoselenide $ ZrSiO_4-Cd(S_xS_{1-x})$ stain is developed by neither the coloring ions in $ZrSiO_4$ lattice nor the solid solution of $ZrSiO_4$ and $Cd(S_xS_{1-x})$ but by the small crystals of $Cd(S_xS_{1-x})$ being occluded by the zirconium silicate during sintering process.

• Journal of the Korean Ceramic Society
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• v.34 no.3
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• pp.330-336
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• 1997

1:1 복합 페로스카이트 물질인 La(Mg1/2Ti1/2)O3 and La(Mg1/2Zr1/2)O3의 양이온 규칙 존재와 고주파 유전특성을 x선 회절과 회로망분석기를 사용하여 조사하였다. 기존의 연구에서는 두 물질 모두 양이온 규칙이 없으며 입방정 구조를 갖는다고 보고되었지만, 본 연구에서의 x선 분석에서는 양이온 규칙을 나타내는 초격자회절선과 비입방정 구조를 의미하는 기본회절선의 split이 발견되었다. 고주파 영역에서의 유전율은 La(Mg1/2Ti1/2)O3의 경우 29,La(Mg1/2Zr1/2)O3는 24, 품질계수(Q*f)는 각각 73000, 49000이다. 공진주파수 온도계수는 La(Mg1/2Ti1/2)O3의 경우 - 65ppm/$^{\circ}$C,La(Mg1/2Zr1/2)O3는 -80ppm/$^{\circ}$C로 음의 값을 가진다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.11a
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• pp.169-170
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• 2005

본 연구에서는 초음파 센서에 응용 가능한 $0.4Pb(Ni_{1/3}Nb_{2/3})O_3-0.6Pb(Zr_xTi_{1-x})O_3+0.5Wt%$ $MnO_2$ 세라믹스에 Zr/(Ti+Zr)비를 0.37에서 0.41로 변화시킨 조성을 1175 $\sim$ 1200$^{\circ}C$ 온도에서 소결하여 이의 결정구조 및 미세조직을 분석하였고, 압전, 유전 특성을 고찰하였다. 본조성에서 x=0.385 조성에서 최대 유전상수 값 3490 이 나타났으며, 그 이상의 첨가에서는 감소하였다. 상경계 영역인 x=0.385 조성에서 $\varepsilon$r, $K_p$, $d_{33}$ 값이 최대값을 나타내었다. $0.4Pb(Ni_{1/3}Nb_{2/3})O_3-0.6Pb(Zr_xTi_{1-x})O_3+0.5Wt%$ $MnO_2$, 세라믹스에서는 kp 와 $d_{33}$ 는 Zr/(Ti+Zr)비 0.385조성까지 증가하였다가 그 이상 조성에서 감소하였다. $1175^{\circ}C$에서 2시간 소결한 x=0.385조성에서 $\varepsilon$r=3490, kp=0.71, Qm=476의 우수한 압전 특성을 나타내었다.

• Proceedings of the KIEE Conference
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• 1991.11a
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• pp.325-328
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• 1991

In this study, $0.085Ba(La_{1/2}Nb_{1/2})O_3-0.915Pb(Zr_yTi_{1-y})O_3$(y=0.45, 0.50, 0.55, 0.60, 0.65[mol]) transparent electrooptic ceramics were fabricated by two-stage sintering method. Increasing the $PbZrO_3$ contents, dielectric constant was increased and Curie temperature was decreased. In the composition of 0.55[mol] $PbZrO_3$, electromechanical coupling factor was 0.43. From the results of ferroelectric hysteresis loop and transmitted light intensity with electric field, the compositions of 0.65, 0.60, 0.55[mol] $PbZrO_3$ was applicable to electroopticmemory device and the compositions of 0.50, 0.45[mol] $PbZrO_3$ was applicable to linear electrooptic device.

• 한국태양에너지학회:학술대회논문집
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• 2012.03a
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• pp.260-266
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• 2012

Syngas and hydrogen from the $CeO_2/ZrO_2$ coated foam devices were investigated under simulated solar radiation. The $CeO_2/ZrO_2$ coated SiC, Ni and Cu foam device were prepared using drop-coating method. Syngas production step was performed at $900^{\circ}C$, and hydrogen production process was performed for ten repeated cycles to compare the CeO2 conversion in syngas production step, $H_2$ yield in hydrogen production step and cycle reproducibility. The produced syngas had the $H_2$/CO ratio of 2, which was suitable for methanol synthesis or Fischer-Tropsch synthesis process. In addition, syngas and hydrogen production process is one of the promising chemical pathway for storage and transportation of solar heat by converting solar energy to chemical energy. After ten cycles of redox reaction, the $CeO_2/ZrO_2$ was analyzed using XRD pattern and SEM image in order to characterize the physical and chemical change of metal oxide at the high temperature.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.9
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• pp.808-812
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• 2006

In this dissertation, Ru-Zr metal gate electrode deposited on two kinds of dielectric were formed for MOS capacitor. Sample co-sputtering method was used as a alloy deposition method. Various atomic composition was achieved when metal film was deposited by controlling sputtering power. To study the characteristics of metal gate electrode, C-V(capacitance-voltage) and I-V(current-voltage) measurements were performed. Work function and equivalent oxide thickness were extracted from C-V curves by using NCSU(North Carolina State University) quantum model. After the annealing at various temperature, thermal/chemical stability was verified by measuring the variation of effective oxide thickness and work function. This dissertation verified that Ru-Zr gate electrodes deposited on $SiO_{2}\;and\;ZrO_{2}$ have compatible work functions for NMOS at the specified atomic composition and this metal alloys are thermally stable. Ru-Zr metal gate electrode deposited on $SiO_{2}\;and\;ZrO_{2}$ exhibit low sheet resistance and this values were varied with temperature. Metal alloy deposited on two kinds of dielectric proposed in this dissertation will be used in company with high-k dielectric replacing polysilicon and will lead improvement of CMOS properties.

• Nuclear Engineering and Technology
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• v.45 no.5
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• pp.683-688
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• 2013

Candidate coating materials for re-usable metallic nuclear fuel crucibles, TaC, TiC, ZrC, $ZrO_2$, and $Y_2O_3$, were plasmasprayed onto a niobium substrate. The microstructure of the plasma-sprayed coatings and thermal cycling behavior were characterized, and U-Zr melt interaction studies were carried out. The TaC and $Y_2O_3$ coating layers had a uniform thickness, and high density with only a few small closed pores showing good consolidation, while the ZrC, TiC, and $ZrO_2$ coatings were not well consolidated with a considerable amount of porosity. Thermal cycling tests showed that the adhesion of the TiC, ZrC, and $ZrO_2$ coating layers with niobium was relatively weak compared to the TaC and $Y_2O_3$ coatings. The TaC and $Y_2O_3$ coatings had better cycling characteristics with no interconnected cracks. In the interaction studies, ZrC and $ZrO_2$ coated rods showed significant degradations after exposure to U-10 wt.% Zr melt at $1600^{\circ}C$ for 15 min., but TaC, TiC, and $Y_2O_3$ coatings showed good compatibility with U-Zr melt.

• Journal of the Korean Ceramic Society
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• v.41 no.5
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• pp.349-352
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• 2004

Organic-inorganic hybrid sol based on ZrO$_2$-SiO$_2$ system was prepared by sol-gel process. Firstly, ZrO$_2$ non-aqueous precursor sol was synthesized and then organosilane compounds which include epoxy silane (GPTS; 3-g1ycidoxypropyl tri-methoxysilane) and acryl silane (ACS; (3-(tri-methoxysilyl)propylmethacrylate)) were added to ZrO$_2$precursor sol for hybridization. Finally, com-mercial silica sol was added to improve the mechanical properties. Synthesized organic-inorganic Zr-hybrid sol was coated on polycarbonate substrate for enhancing it’s mechanical properties, especially hardness. Vicker’s hardness of polycarbonate sub strate was increased from 13.6 to 17.8 MPa and its pencil hardness was increased from 2 to 7 H, respectively, after coating and drying at 10$0^{\circ}C$ for 30 min.