• E2M - 전기 전자와 첨단 소재
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• 제16권9호
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• pp.65.1-65
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• 2003

The interface of zirconium oxide thin films on silicon is analyzed in detail for their potential applications in the microelectronics. The formation of an interfacial layer of ZrSi$\sub$x/O$\sub$y. with graded Zr concentration is observed by the x-ray photoelectron spectroscopy and secondary ion mass spectrometry analysis. The as-deposited ZrO$_2$/ZrSi$\sub$x/O$\sub$y//Si sample is thermally stable up to 880$^{\circ}C$, but is less stable compared to the ZrO$_2$/SiO$_2$/Si samples. Post-deposition annealing in oxygen or ammonia improved the thermal stability of as-deposited ZrO$_2$/ZrSi$\sub$x/O$\sub$y/Si to 925$^{\circ}C$, likely due to the oxidation/nitridation of the interface. The as-deposited film had an equivalent oxide thickness of∼13 nm with a dielectric constant of ∼21 and a leakage current of 3.2${\times}$10e-3 A/$\textrm{cm}^2$ at 1.5V. Upon oxygen or ammonia annealing, the formation of SiO$\sub$x/ and SiH$\sub$x/N$\sub$y/O$\sub$z/ at the interface reduced the overall dielectric constants.

• 대한화학회지
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• 제31권4호
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• pp.322-327
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• 1987

$ZrO_2$의 표면을 $H_2SO_4$로 처리하거나 $SO_2,\;H_2S,\;CS_2$로 처리한 후 산화시킴으로 개질하였다. 처리된 황화합물의 산화종과 산화상태를 적외선분광법과 X-선광전자분광법으로 조사하였다. 처리된 황화합물을 산화시킨 후에는 사용된 황화합물의 종류에는 관계없이 개질된 $ZrO_2$는 모두 강한 산성질을 나타내었다. 개질된 $ZrO_2$가 초강산의 성질을 나타내는 것은 가장 높은 산화상태의 황($SO_4{^{2-}}$)에 기인하였다.

• 한국원자력학회:학술대회논문집
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• 한국원자력학회 2001년도 추계학술발표회요약집
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• pp.149-149
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• 2001

• 한국세라믹학회지
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• 제33권2호
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• pp.143-148
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• 1996

• Korean Chemical Engineering Research
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• 제51권3호
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• pp.319-324
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• 2013

합성가스를 생산하기 위한 메탄의 부분산화반응 특성을 $Ni/CeO_2-ZrO_2$, $Ni-Ru/CeO_2-ZrO_2$와 $Ni-Pd/CeO_2-ZrO_2$ 촉매체를 이용하여 조사하였다. 메탄의 부분 산화 개질 반응에서 촉매의 높은 활성과 안정성을 위하여 허니컴 구조의 금속모노리스 촉매 체를 적용하였다. 촉매분석은 XRD와 FE-SEM을 사용하였으며, 제조된 촉매들의 합성가스 제조 특성은 반응물 비(O/C), GHSV와 온도를 변화시키면서 연구하였다. 개질 실험에서 사용된 촉매 중에서 $Ni-Pd/CeO_2-ZrO_2$ 촉매 체가 가장 높은 활성을 보여 주었으며, $900^{\circ}C$, GHSV=10,000 $h^{-1}$과 O/C=0.55에서 99%의 메탄 전환율을 얻었다. O/C 비가 증가함에 따라 수소 yield는 증가되고, 반면에 CO yield는 거의 일정하게 유지됨을 확인할 수 있었다. 또한 GHSV가 증가할수록 메탄의 전환율은 감소하였으며, 높은 메탄의 전환율을 얻을 수 있는 GHSV의 범위는 10,000 $h^{-1}$ 이하임을 알 수 있었다.

• 한국세라믹학회지
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• 제22권2호
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• pp.17-24
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• 1985

In the composition of $Pb(Mg_{0.15} W_{0.15})Ti_{0.35}-Zr_{0.35}O_3$ the effect of particle size on PbO vaporization were measured, . The initial step of discontinuous vaporization of unreated PbO during the calcining process was depended on the particle size. All additives $La_2O_3Nb_2O_5$ and $Al_2O_3$ inhibited the grain growth of the composition $Pb(Mg_{0.15} W_{0.15})Ti_{0.35}-Zr_{0.35}O_3$ +2wt% excess PbO. The dielectric and piezoelectric properties of the composition $Pb(Mg_{0.15} W_{0.15})Ti_{0.35}-Zr_{0.35}O_3$ were improved by the addition of 2wt% excess PbO and proper additive. The electromechanical planar coupling factor of 0.65 and mechnical quality factor of 390 could be obtained by adding 5wt% $Nb_2O_5$ to the composition 2wt% excess PbO+$Pb(Mg_{0.15} W_{0.15})Ti_{0.35}-Zr_{0.35}O_3$.

• Bulletin of the Korean Chemical Society
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• 제28권9호
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• pp.1463-1466
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• 2007

Single phases of multi-component oxides films, ZrTiO4 and Ta2Zr6O17, could be synthesized by using the combinatorial approach through surface sol-gel route, coating the appropriate mole ratio of 100 mM zirconium butoxide, tantalum butoxide and titanium butoxide precursors on Pt/Ti/SiO2/Si (100) substrate, following pyrolysis at 450 oC, and annealing them at 770 oC. Both the films and bulks of ZrTiO4 and Ta2Zr6O17 showed very stable dielectric properties in temperature range, ?140 to 60 oC, and frequency range, 100 Hz to 1 MHz, promising their applications in wide range of temperatures and frequencies. The dielectric constants of the films were lower and a little more dependent on frequency than those of the bulks. The reduction of dielectric property in the film was mainly due to the interfacial effects that worked as series and parallel-connected capacitances toward the substantial film capacitance.

• Bulletin of the Korean Chemical Society
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• 제21권9호
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• pp.913-918
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• 2000

Vanadium oxide catalyst supported on TiO2-ZrO2 has been prepared by adding Ti(OH)4-Zr(OH)4 powder to an aqueous solution of ammonium metavanadate followed by drying and calcining at high temperatures. The char-acterization ofthe prepared catalysts was performed using solid-state 51V NMR and FTIR.In thecase ofcalci-nation temperature at 773 K, vanadium oxide was in a highly dispersed state for the samples containing low loading V2O5 below 25 wt %, but for samplescontaining high loading V2O5 equal to or above 25 wt %, vana-dium oxidewas well crystallized due to the V2O5 loading exceeding the formation of monolayer on the surface of TiO2-ZrO2.The ZrV2O7 compound was formed through the reactionof V2O5 and ZrO2 at 773-973 K, where-as the V3Ti6O17 compound was formedthrough the reaction of V2O5 and TiO2 at 973-1073 K. The V3Ti6O17 compound decomposed to V2O5 and TiO2 at 1173 K, which were confirmed by FTIR and 51V NMR.

• 한국재료학회지
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• 제24권1호
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• pp.53-59
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• 2014

The corrosion resistance of submerged entry nozzle (SEN) materials were investigated for high-class steel manufacturing. Composite samples were fabricated by mixing $ZrO_2$, $Al_2O_3$, MgO, mullite, spinel, and carbon. The raw materials were mixed with attrition milling, compacted in a uniaxial pressure of 200MPa and calcined at $1000^{\circ}C$ for 3 h in $N_2$ atmosphere. The bulk density and apparent porosity of the calcined samples were measured by the liquid displacement method in water using Archimedes's principle. The corrosion resistance of the samples were measured by cup test with mold powder at $1550^{\circ}C$ for 2 h. The microstructure and elemental analysis of samples were observed by scanning electron microscopy (SEM), energy dispersive spectrum (EDS), and X-ray diffraction pattern (XRD). The XRD result shows that the starting raw materials were crystalline phase. The microstructure of fabricated specimen was investigated before and after corrosion tests at $1000^{\circ}C$ and $1550^{\circ}C$ for 2h. $ZrO_2$-C composite showed good resistance in the slag corrosion test. Among the composite oxide materials, $ZrO_2-Al_2O_3$-C and $ZrO_2$-MgO-C showed better resistance than $ZrO_2$-C in the slag corrosion test. The diameter variation index of $ZrO_2$-C refractory was 16.1 at $1000^{\circ}C$ for 2 h. The diameter variation index of the $ZrO_2-Al_2O_3$-C refractory was larger than that of the $ZrO_2$-C refractory at $1550^{\circ}C$ for 2 h.

• 한국원자력학회:학술대회논문집
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• 한국원자력학회 2001년도 춘계학술발표회요약집
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• pp.388.1-388
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• 2001