• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.35-39
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• 2005

This paper presents a method to reduce hysteresis in multilayer ceramic actuator by connecting the actuator with a capacitor in a series circuit. The change in hysteresis with respect to the capacitor was examined. $0.2Pb(Mg_{1/3}Nb_{2/3})O_3-0.8Pb(Zr_{0.475}Ti_{0.525})O_3$ ceramic material was used as a piezoelectric material for the actuator. Displacement of the actuator was measured in a capacitive gap sensor measuring system. In case of inserting a capacitor in a total circuit, hysteresis became dramatically decreased, and then finally the hysteresis value can be reduced below $0.2\%$. It was found in this present study that reducing the hysteresis in the actuator is dependent upon the characteristics of the capacitor in total circuit and also operating frequency.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1997.11a
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• pp.158-162
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• 1997

In this paper, the electrical and dielectrical properties were investigated in Pb(Zr,Ti)O$_3$-Pb(Mn,Nb)O$_3$ ceramics which are manufactured with the substitution of Ba in site Pb. In older to increase the del and Kp , Ba was substitued to site Pb from 0 to 0.1 by 0.02 mol%. As the Ba substitution is increased, dielectric constant is increased and electricmachanical coupling factor showed the maximum value at Ba 0.06mol% and the mechanical qualify factor is decreased and the tetragonality and the grain size are decreased as the Ba substitution.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.11a
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• pp.251-254
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• 2000

This paper was to measure the structure, electric characteristics of 0.05Pb($(Al_{0.5}Nb_{0.5})$) - 0.95Pb$(Zr_{0.52}Ti_{0.48})O_3$ ceramics dopped with Cr+Fe. The results of this paper were gotten such as follows; The dielectric constants were decreased with Cr+Fe. The dielectric loss was minimum value of 1.008[%], dopped with Cr+Fe O.9[wt%] at 1200[$^{\circ}C$], In case of sintering at 1150[$^{\circ}C$], electromechanical factodkp) was maximum value of kp 42.73[%], at Cr+Fe 0.9[wt%]. The mechanical quality factor(Qm) was maximum value at Cr+Fe 1.2 [wt%], Also, in case of dopped with Cr+Fe, it make a improvement in temperature coefficient of resonant frequency at 0.3[wt%], 1150[$^{\circ}C$].

• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1368-1369
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• 2006

In this thesis, the minuteness structure, piezoelectric, and dielectric characteristics of Pb[(Co0.5 W0.5) 0.03 (Ni1/3 Nb2/3) 0.07(Zr0.52 Ti0.48)0.9]O3+0.5Wt% MnO2 ceramics has been systematically investigated as a function of the sintering temperature after manufacturing the specimens with a general method. The electromechanical coupling coefficient (Kp) showed its maximum of 31.116[%] in the sintered specimens at $1050[^{\circ}C]$, and its minimum of 20.220[%] in the sintered specimens at $1150[^{\circ}C]$. The mechanical quality coefficient (Qm) marked the maximum of 139.526 at the sintering temperature of $1150[^{\circ}C]$.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.27 no.12
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• pp.863-865
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• 2014

Energy problem has been issued in worldwide because fossil fuel has being almost exhausted. A lot of renewable energy have been received attention to replace the energy from fossil fuel. Among them, piezoelectric energy harvester is one of excellent candidates. In general, micro scaled small sized energy harvesters were usually based on the lithography process. However, these lithography process require complicated process and high cost. In this paper, a new process has been proposed for micro-scaled piezoelectric energy harvester. $0.2Pb(Mg_{1/3}Nb_{2/3})O_3-0.8Pb(Zr_{0.52}Ti_{0.48})O_3$ composition was used as piezoelectric material due to excellent piezoelectric properties and also can be easily prepared by mixed oxide method.

• Journal of the Semiconductor & Display Technology
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• v.21 no.3
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• pp.57-62
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• 2022

The plasma resistance of multi-component glasses containing La, Gd, Ti, Zn, Y, Zr, Nb, and Ta was analyzed in this study. The plasma etching was performed via inductively coupled plasma-reactive ion etching (ICP-RIE) using CF₄/O₂/Ar mixed gas. After the reaction, the glass with a low fluoride sublimation temperature and high content of P, Si, and Ti elements showed a high etching rate. On the other hand, the glass containing a high fluoride sublimation temperature component such as Ca, La, Gd, Y, and Zr exhibited high plasma resistance because the etch rate was lower than that of sapphire. Glass with low plasma resistance increased surface roughness after etching or nanoholes were formed on the surface, but glass with high plasma resistance showed little change in surface microstructure. Thus, the results of this study demonstrate the potential for the development of plasma-resistant glasses (PRGs) with other compositions besides alumino-silicate glasses, which are conventionally referred to as plasma-resistant glasses.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.972-975
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• 2001

The effect of Cr$_2$O$_3$(0 to 0.5 wt%) doping on the microstructure and electrical properties of ternary Pb(Zr,Ti)O$_3$-Pb(Ni,Nb)O$_3$piezoelectric ceramic has been investigated. Abnormal grain growth (grain size 3.3 to 11.2 $\mu$m) and densification are found. Minor additives of $\leq$0.1 wt% improve the mechanical coupling factor, but with more additives of $\geq$0.2 wt% electrical properties deteriorate. Thus, these phenomna can be ascribed mainly to anomalous developed microstructure. The large grains were composed of a core region that is free of Cr and a surrounding shell region rich in Cr. The interfaces between the core and the shell were composed of misfit dislocations. The mechanical properties of the specimens were strongly influenced by this microstructural change. The microstrutural and compositonal evolution of the specimens containing different amounts of Cr$_2$O$_3$were monitored. Electrical properties were measured and related to the variations in the microstructure.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.28 no.9
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• pp.577-580
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• 2015

In this paper, in order to develop the composition ceramics with the outstanding piezoelectric properties, $Pb(Mg_{1/2}W_{1/2})_{0.03}(Ni_{1/3}Nb_{2/3})_{0.09}(Zr_{0.5}Ti_{0.5})_{0.88}O_3$ ceramics substituted with $BiFeO_3$ were prepared by the conventional solid-state reaction method. The addition of small amount of $Li_2CO_3$ and $CaCO_3$ as sintering aids decreased the sintering temperature of the ceramics. The effects of $BiFeO_3$ substitution on their piezoelectric and dielectric properties were investigated. when 0.015 mol $BiFeO_3$ was substituted, the optimal physical properties of $d_{33}=590pC/N$, $E_c=8.78kV/mm$ were obtained.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.38 no.7
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• pp.473-478
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• 2001

Ferroelectric P $b_{0.99}$［(Z $r_{0}$ 6S $n_{0.4}$)/0.9/ $Ti_{0.1}$］0.98/N $b_{0.02}$ $O_3$(PNZST) thin films were deposited by a RF magnetron sputtering on L $a_{0.5}$S $r_{0.5}$Co $O_3$(LSCO)/Pt/Ti/ $SiO_2$/Si substrate using a PNZST target with excess PbO of 10 mole%. The crystallinity and electrical properties of the thin films annealed at various temperature and time were investigated. The thin films deposited at the substrate temperature of 500 $^{\circ}C$ and the power of 80 W were crystallized to a perovskite phase after rapid thermal annealing(RTA). The thin films annealed at 650 $^{\circ}C$ for 10 seconds in air exhibited the good crystal structures. The remanent polarization and coercive field of the PNZST capacitor were about 20 $\mu$C/$\textrm{cm}^2$ and 50 kV/cm, respectively. The reduction of the polarization after 2.2$\times$10$^{9}$ switching cycles was less than 10 %..10 %......

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.28 no.3
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• pp.160-164
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• 2015

In this study, $(1-x)Pb(Mg_{1/2}W_{1/2})_{0.03}(Ni_{1/3}Nb_{2/3})_{0.09}(Zr_{0.5}Ti_{0.5})_{0.88}O_3+xCeMnO_3$ (x= 0~0.02) ceramics were prepared by Columbite precursor method. The phase structure, ferroelectric and piezoelectric properties were systematically investigated. It was found that PMW-PNN-PZT possessed superior electrical properties due to its composition close to the MPB (morphotropic phase boundary). Coercive electric field of 10.05 [kV/cm] and density of 7.88 [$g/cm^3$] were obtained when the substitution amount of $CeMnO_3$ is x=0.02. In contrast, specimens with x=0.01 showed the mechanical quality factor($Q_m$) of 1,091 and the electromechanical coupling factor($k_p$) of 0.613.