• Title/Summary/Keyword: ZnO-precursor

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Effects of Physico-chemical Factors of Sol on the Degree of Preferred Orientation in $Pb(Mg, Zn)_{1/3}Nb_{2/3}O_3$ Thin Films (Sol의 물리화학적 변수들이 $Pb(Mg, Zn)_{1/3}Nb_{2/3}O_3$ 박막의 우선 배향성에 미치는 효과)

  • 조문규;장현명;김광수
    • Journal of the Korean Ceramic Society
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    • v.32 no.3
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    • pp.305-312
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    • 1995
  • Thin films of Pb(Mg, Zn)1/3Nb2/3O3 were fabricated by spin coating the Pb-Mg-Zn-Nb-O complex alkoxide sols on(111) Pt-coated MgO (100) planes. It was observed that the content of H2O and the rheological characteristics of sol greatly influenced the orientation of perovskite grains after thin-film formation. A strong preferential orientation of (100)-type planes of the perovskite grains was obtained for the sol aged for 15 days with the molar ratio of H2O to total metal alkoxides=2. As small angle X-ray scattering experiment in the Porod region was performed to correlate the observed preferential orientation with the network structure of precursors at various stage of aging. It was shown that the degree of branching of the Pb-Mg-Zn-Nb-O precursor chain had a direct effect on the preferred oreintation, and weakly branched precursor systems led to highly oriented grains after thin-film formation.

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A Study on the Growth Pattern of ZnO Particles in Chemical Solutions (용액상에서 합성된 ZnO 입자의 생성과정에 관한 연구)

  • Kim Hak-Soo;Kim Donghwan
    • Korean Journal of Materials Research
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    • v.15 no.10
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    • pp.678-682
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    • 2005
  • We studied the possibility of $Zn_4O(Ac)_2(OH)$ formation as a precursor for ZnO nano particles in sol-gel method. Four different additives such as tetra methyl ammonium hydroxide, mono ethanol amine (MEA), LiOH, and $H_2O$ were used for zinc acetate dissolved in 2-methoxy ethanol. ZnO particles of 5-6 nm in size were observed. Existence of $Zn_4O(Ac)_6$ was not verified. $Zn_4O(Ac)_2(OH)$ molecules were observed and they were believed to be the precursors of ZnO. A peak at 275nm in UV-Vis analysis was observed In the case of MEA and $H_2O$ but no ZnO particles were detected in transmission electron microscopy.

Morphological and Electrical Characteristics of nc-ZnO/ZnO Thin Films Fabricated by Spray-pyrolysis for Field-effect Transistor Application (전계효과트랜지스터 기반 반도체 소자 응용을 위한 스프레이 공정을 이용한 nc-ZnO/ZnO 박막 제작 및 특성 분석)

  • Cho, Junhee
    • Journal of the Semiconductor & Display Technology
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    • v.20 no.4
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    • pp.1-5
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    • 2021
  • Field-effect transistors based on solution-processed metal oxide semiconductors has attracted huge attention due to their intrinsic characteristics of optical and electrical characteristics with benefits of simple and low-cost process. Especially, spray-pyrolysis has shown excellent device performance which compatible to vacuum-processed Field-effect transistors. However, the high annealing temperature for crystallization of MOS and narrow range of precursors has impeded the progress of the technology. Here, we demonstrated the nc-ZnO/ZnO films performed by spray-pyrolysis with incorporating ZnO nanoparticles into typical ZnO precursor. The films exhibit preserving morphological properties of poly-crystalline ZnO and enhanced electrical characteristics with potential for low-temperature processability. The influence of nanoparticles within the film was also researched for realizing ZnO films providing good quality of performance.

Study the Effects of Precursor Concentration on ZnO Nanorod Arrays by Hydrothermal Method (수열합성 법으로 성장된 산화 아연 나노로드의 전구체 농도에 따른 구조적, 광학적 특성 연구)

  • Ryu, H.
    • Journal of the Korean Vacuum Society
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    • v.18 no.1
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    • pp.73-78
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    • 2009
  • Zinc Oxide (ZnO) nanorods arrays were deposited on ZnO buffered p-Si(100) substrates by hydrothermal method. The ZnO buffer layer with a thickness of 30 nm was deposited by metal oxide chemical vapor deposition at $500^{\circ}C$. The structural and optical properties of ZnO nanorods arrays controlled by precursor concentrations from 0.06 to 0.5 M were studied by FE-SEM(field emission scanning electron microscopy), XRD(X-ray diffraction), and PL(photoluminescence), respectively. It was found that the structural and optical properties of ZnO nanorods arrays are changed significantly with increase of precursor concentration. The sizes of diameter and length of nanorods were increased as the concentration increase, and good optical property was shown with the concentration of 0.3 M.

Fabrication of Nano-sized ZnO Colloids from Spray Combustion Synthesis (SCS) (분무연소합성(SCS)법에 의한 나노크기 산화아연(ZnO) 콜로이드의 제조)

  • Lee, Sang-Jin;Lee, Sang-Won;Jun, Byung-Sei
    • Journal of the Korean Ceramic Society
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    • v.41 no.1
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    • pp.76-80
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    • 2004
  • Nano-sized ZnO colloids were prepared by use of spray combustion method. for combustion reaction, $Zn(NO_3)_2{\cdot}6H_2O$ and $CH_6N_4O$ were employed as an oxidizer and a fuel. Exothermic peak was shown at $230^{\circ}C$ by DTA/TGA, and it was considered as a combustion reaction followed by ignition of the precursor mixture. In case of spray combustion method, because insufficient contents of molecules and radicals generated from precursor droplets may lead an incomplete igmition, the ignition temperature of combustion chamber was chosen at $500^{\circ}C$. For diminishing aerosol coagulation, the droplet number concentration was reduced by filter media. The fluid was laminar with 2.5 seconds of aerosol residence time. The synthesized colloids had spherical shape with 180 nanometer size, and the crystalline phase was ZnO with hexagonal structure.

Self-Limiting Growth of ZnO Thin Films and Substrate-Temperature Effects on Film Properties (자기제한적 표면반응에 의한 ZnO 박막성장 및 기판온도에 따른 박막특성)

  • Lee, D.H.;Kwon, S.R.;Lee, S.K.;Noh, S.J.
    • Journal of the Korean Vacuum Society
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    • v.18 no.4
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    • pp.296-301
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    • 2009
  • An inductively coupled plasma assisted atomic layer deposition(ICP-ALD) system has been constructed for the deposition of ZnO thin films, and various experiments of ZnO thin films on p-type Si(100) substrates have been carried out to find the self-limiting reaction conditions for the ICP-ALD system under non-plasma circumstances. Diethyl zinc[$Zn(C_2H_5)_2$, DEZn] was used as the zinc precursor, $H_2O$ as the oxidant, and Ar as the carrier and purge gas. At the substrate temperature of $150^{\circ}C$, atomic layer deposition conditions based on self-limiting surface reaction were successfully obtained by series of experiments through the variation of exposure times for DEZn, $H_2O$, and Ar. ZnO deposition was repeated at different substrate temperatures of $90{\sim}210^{\circ}C$. As a result, the thermal process window(ALD window) for ZnO thin films was observed to be $110{\sim}190^{\circ}C$ and the average growth rate was measured to be constant of 0.29 nm/cycle. Properties of the film's microstructure and composition(Zn, O, etc.) were also studied. As the substrate temperature increases, the crystallinity was improved and ZnO(002) peak became dominant. The films deposited at all temperatures were high purity, and the films deposited at high temperatures had the composition ratio between Zn and O closer to one of a stable hexagonal wurtzite structure.

The Instability Behaviors of Spray-pyrolysis Processed nc-ZnO/ZnO Field-effect Transistors Under Illumination (스프레이 공정을 이용한 nc-ZnO/ZnO 전계효과트랜지스터의 광학적 노출에 대한 열화 현상 분석)

  • Junhee Cho
    • Journal of the Semiconductor & Display Technology
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    • v.22 no.1
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    • pp.78-82
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    • 2023
  • Metal oxide semiconductor (MOS) adapting spray-pyrolysis deposition technique has drawn large attention based on their high quality of intrinsic and electrical properties in addition to simple and low-cost processibility. To fully utilize the merits of MOS field-effect transistors (FETs) , transparency, it is important to understand the instability behaviors of FETs under illumination. Here, we studied the photo-induced properties of nc-ZnO/ZnO field-effect transistors (FETs) based on spray-pyrolysis under illumination which incorporating ZnO nanocrystalline nanoparticles into typical ZnO precursor. Our experiments reveal that nc-ZnO in active layer suppressed the light instabilities of FETs.

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Application of ZnO-based ALD processes for photovoltaic devices (ALD를 이용한 ZnO 기반 박막물질의 광전소자로의 응용)

  • Lee, U-Jae;Yun, Eun-Yeong;Gwon, Jeong-Dae;Gwon, Se-Hun
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2015.05a
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    • pp.47-47
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    • 2015
  • Atomic layer deposition (ALD) 방법으로 증착시킨 ZnO 기반의 박막물질들을 다양한 종류의 태양전지에서 TCO, Buffer Layer 등으로 활용하기 위한 노력이 최근 이루어지고 있다. 본 발표에서는 ALD를 이용한 ZnO 기반 박막물질들의 광전소자로의 적용을 위한 요구물성을 맞추기 위한 precursor/reactant의 selection을 포함한 공정 parameter가 박막의 물성에 미치는 영향 및 생산성 향상을 위한 ALD 공정장치 개발 예를 소개하고, 광전소자 특성에 미치는 영향을 살펴보았다.

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Characterization of ZnO/TiO2 Nanocomposites Prepared via the Sol-Gel Method

  • Hellen, Nalumaga;Park, Hyun;Kim, Kyung-Nam
    • Journal of the Korean Ceramic Society
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    • v.55 no.2
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    • pp.140-144
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    • 2018
  • $ZnO/TiO_2$ nanocomposites were synthesized via a modified sol-gel technique by incorporating 30 and 70 wt% $TiO_2$ nanopowder into a ZnO sol-gel matrix. Zinc acetate dihydrate was used as the ZnO precursor and de-ionized water as the solvent, while titanium oxysulfate was employed for the synthesis of $TiO_2$ nanopowder. The synthesized $ZnO/TiO_2$ nanocomposites were characterized by x-ray diffraction, UV-vis spectroscopy, scanning electron microscopy, and transmission electron microscopy. The $ZnO/TiO_2$ nanocomposites showed both the ZnO (wurtzite) and $TiO_2$ (anatase) phases. The average ZnO crystallite size of the $ZnO/TiO_2$ nanocomposites was found to be about 26.3 nm. The TEM results confirmed that spherical $TiO_2$ particles were embedded in the ZnO matrix. $TiO_2$ particles attached onto the rod-like ZnO particles were also observed. The $ZnO/TiO_2$ nanocomposites exhibited optical absorption properties superior to those of pure ZnO and $TiO_2$.

Synthesis of the Water Dispersible L-Valine Capped ZnS:Mn Nanocrystal and the Crystal Structure of the Precursor Complex: [Zn(Val)2(H2O)]

  • Hwang, Cheong-Soo;Lee, Na-Rae;Kim, Young-Ah;Park, Youn-Bong
    • Bulletin of the Korean Chemical Society
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    • v.27 no.11
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    • pp.1809-1814
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    • 2006
  • The L-Valinate anion coordinating zinc complex, [$Zn(val)_2(H-2O)$], was isolated and structurally characterized by single crystal X-ray crystallography. The crystal possess orthorhombic symmetry with a space group $P2_12_12_1$, Z = 4, and a = 7.4279(2)$\AA$, b = 9.4342(2)$\AA$, c =20.5862(7)$\AA$ respectively. The compound features a penta-coordinate zinc ion in which the two valine anion molecules are directly coordinating the central zinc metal ion via their N (amine) and O (carboxylate) atoms, and an additional coordination to zinc is made by water molecule (solvent) to form a distorted square pyramidal structure. In addition, further synthesis of the valine capped ZnS:Mn nanocrystal from the reaction of [$Zn(val)_2(H-2O)$] precursor with $Na_2S$ and 1.95 weight % of $Mn^{2+}$ dopant is described. Obtained valine capped nanocrystal was water dispersible and was optically characterized by UV-vis and solution PL spectroscopy. The solution PL spectrum for the valine capped ZnS:Mn nanocrystal showed an excitation peak at 280 nm and a very narrow emission peak at 558 nm respectively. The measured and calculated PL efficiency of the nanocrystal in water was 15.8%. The obtained powders were characterized by XRD, HR-TEM, and EDXS analyses. The particle size of the nanocrystal was also measured via a TEM image. The measured average particle size was 3.3 nm.