• Title/Summary/Keyword: ZnO on $SiO_2$

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InSnZnO 산화물 반도체 박막의 열처리 영향에 따른 박막 트랜지스터의 전기적 분석

  • Lee, Jun-Gi;Han, Chang-Hun;Choe, Byeong-Deok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.245-245
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    • 2012
  • 차세대 디스플레이로 각광받고 있는 AMOLED에 대한 관심이 높아짐에 따라 구동 소자의 연구가 활발히 이루어지고 있다. 산화물 반도체 박막 트랜지스터는 비정질 실리콘 박막 트랜지스터에 비해 100 $cm^2$/Vs 이하의 높은 이동도와 우수한 전기적 특성으로 AMOLED 구동 소자로서 학계에서 입증되어왔고, 현재 여러 기업에서 산화물 반도체를 이용한 박막 트랜지스터 제작 연구가 활발히 이루어지고 있다. 본 연구는 열처리 조건을 가변하여 제작한 산화물 반도체 박막 트랜지스터의 전기적 특성 분석을 목적으로 한다. 실리콘 기판에 oxidation 공정을 이용하여 SiO2 100 nm, DC스퍼터링을 이용하여 ITZO (Indium-Tin-Zinc Oxide) 산화물 반도체 박막 50 nm, 증착된 산화물 반도체 박막의 열처리 후, evaporation을 이용하여 source/drain 전극 Ag 150 nm 증착하여 박막 트랜지스터를 제작하였다. 12 sccm의 산소유량, 1시간의 열처리 시간에서 열처리 온도 $400^{\circ}C$, $200^{\circ}C$의 샘플은 각각 이동도 $29.52cm^2/V{\cdot}s$, $16.15cm^2/V{\cdot}s$, 문턱전압 2.61 V, 6.14 V, $S{\cdot}S$ 0.37 V/decade, 0.85 V/decade, on-off ratio 5.21 E+07, 1.10 E+07이었다. 30 sccm의 산소유량, 열처리 온도 $200^{\circ}C$에서 열처리 시간 1시간, 1시간 30분 샘플은 각각 이동도 $12.27cm^2/V{\cdot}s$, $10.15cm^2/V{\cdot}s$, 문턱전압 8.07 V, 4.21 V, $S{\cdot}S$ 0.89 V/decade, 0.71 V/decade, on-off ratio 4.31 E+06, 1.05 E+07이었다. 산화물 반도체의 열처리 효과 분석을 통하여 높은 열처리 온도, 적은 산소의 유량, 열처리 시간이 길수록 이동도, 문턱전압, $S{\cdot}S$의 산화물 박막 트랜지스터 소자의 전기적 특성이 개선되었다.

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Study on Separation of Heavy Metal Ions in A Neutral Macrocycle-Mediated Emulsion Liquid Membrane System

  • Moon-Hwan Cho;Hea-Suk Chun;Jin-Ho Kim;Chang-Hwan Rhee;Si-Joong Kim
    • Bulletin of the Korean Chemical Society
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    • v.12 no.5
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    • pp.474-477
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    • 1991
  • The preferential transport phenomena of neutral cation-anion moieties in neutral macrocycle-facilitated emulsion liquid membrane were described in this study. Emulsion membrane systems consisting of (1) aqueous source phase containing 0.001 M M($NO_3$)$_2(M=Mn^{2+},\;Co^{2+},\;Ni^{2+},\;Cu^{2+},\;Zn^{2+},\;Sr^{2+},\;Cd^{2+},\;and\;Pb^{2+})$ (2) a toluene membrane containing 0.01 M ligand $(DBN_3O_2$, DA18C6, DT18C6, TT18C6, HT18C6) and the surfactant span 80 (sorbitan monooleate) (3% v/v) and (3) an aqueous receiving phase containing $Na_2S_2O_3$ or $NaNO_3$ were studied with respect to the disappearence of transition metal ions from the source phase as a function of time. Cation transports for various two component or three component equimolar mixture of transition metal and $Cu^{2+}$ in a emulsion membrane system incorporating macrocyclic ligand (HT18C6) as carrier were determinded. $Cu^{2+}$ was transported higher rates than the other $M^{2+}$ in the mixture solution. Equilibrium constants for cation-source phase co-anion, cation macrocycle and cation-receiving phase reagent interaction are examined as parameters for the prediction of cation transport selectivities.

A Study on Properties of Domestic Fly Ash and Utilization as an Insulation material (국산 Fly Ash의 특성 및 단열재로의 이용에 관한 연구)

  • 박금철;임태영
    • Journal of the Korean Ceramic Society
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    • v.20 no.2
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    • pp.135-146
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    • 1983
  • This study is to investigate the properties of domestic fly ash for utilization as data in regard to fly ash which is by-product of domestic coal powder plants and the possibility of utilization as insulation material of domestic fly ash. Composition refractoriness size distribution density contents of hollow particles and crystalline phase were examined as the properties of domestic fly ash. As to the fired test pieces of fly ash by itself that varied contents of hollow particles with four kinds and of the fly ash-clay-saw dust system linear shrinkage bulk density app. porosity compressive strength thermal conductivity and structures were investigated for the possibility of utilization as an insulation material. The results are as follows : 1. The properties of the fly ash I) The constituent particle of the fly ash is spherical and it contains not a few hollow particles (floats by water 0.30-0.50 floats by $ZnCl_2$ aq.(SpG=1.71) 6.97-16.72%). ii) The chemical compositions of fly ash are $SiO_243.9-54.1%$ , $Al_2O_321.0-30.7%$ Ig loss is 7.4-24.1% and the principal of Ig loss is unburned carbon. iii) Fly ash was not suitable to use for mortar and concrete mixture because Ig. loss value is higher than 5% 2. Utilization as insulation material I) The test pieces of original fly ash floats by water floats by ZnCl2 aq(SpG=1.71) p, p t by ZnCl2 aq.(SpG=1.71) that were fired at 110$0^{\circ}C$ represented 0.11-0.18 kcal/mh$^{\circ}$ C as thermal conductivity value. ii) The test pieces which (76.5-85.5) wt% fly ash-(8.5, 9.5) wt% clay-(5.0-15.0) wt% saw dust system(68.0-72.0) wt% fly ash -(17.0-18.0)wt% clay-(10.0-15.0) wt% saw dust system and 59.5 wt% fly ash-25.5 wt% clay-15.0wt% saw dust system were fired at 110$0^{\circ}C$ the thermal conductivity was less than 0.1Kcal/mh$^{\circ}$ C. iii) In view of thermal conductivity and economic aspect insulation materials which added saw dust as blowing agent and clay as inorganic binder are better than that of fly ash as it is or separated hollow fly ash particles. iv) When the saw dust contents increased in the (59.5-90.0) wt% saw dust system and when amount of clay de-creased and firing temperature decreased under the condition of equal addition of saw dust app. porosity increased but bulk density compressive strength and thermal conductivity decreased.

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Shape-Selective Catalysis over Zeolite. An Attempt in the Alkylation of Biphenyl

  • Sugi, Yoshihiro;Komura, Kenichi;Kim, Jong Ho
    • Applied Chemistry for Engineering
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    • v.17 no.3
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    • pp.235-242
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    • 2006
  • Liquid phase alkylation of biphenyl (BP) was studied over large pore zeolites. Selective formation of the least bulky products, 4,4'-diisopropylbiphenyl (4,4'-DIPB) occurred only in the isopropylation of BP over some large pore molecular sieves. H-mordenites (MOR) gave the highest selectivity among them. The dealumination of MOR enhanced catalytic activity and the selectivity of 4,4'-DIPB because of the decrease of coke-deposition. Non-selective catalysis occurs on external acid sites over MOR with the low $SiO_2/Al_2O_3$ ratio because severe coke-deposition deactivates the acid sites inside the pores by blocking pore openings. The selectivity of DIPB isomers was changed with reaction temperature. Selective formation of 4,4'-DIPB was observed at moderate temperatures such as $250^{\circ}C$, whereas the decrease of the selectivity of 4,4'-DIPB occurred at higher temperatures as $300^{\circ}C$. However, 4,4'-DIPB was almost exclusive isomer in the encapsulated DIPB isomers inside the pores even at high temperatures. These decreases of the selectivity of 4,4'-DIPB are due to the isomerization of 4,4'-DIPB on the external acid sites. Some 12-membered molecular sieves, such as SSZ-24, MAPO-5 (M:Mg, Zn, Si), SSZ-31, and ZSM-12, which have straight channels, gave 4,4'-DIPB with moderate to high selectivity; however; SSZ-55, SSZ-42, and MAPO-36 (M: Mg, Zn) gave lower selectivity because of cages in 12-membered one dimensional channels. Three dimensional H-Y and Beta zeolites also yield 4,4'-DIPB in low yield because of their wide circumstances for the isopropylation of BP. The increasing the size of alkylating agent enhanced the shape-selective alkylaiton even for the zeolites, such as UTD-1. The ethylation of BP to ethylbiphenyls (EBPs) and diethylbiphenyls (DEBPs) over MOR was non-selective. The ethylation of BP to EBPs was controlled kinetically. However, there was difference in reactivity of EBPs and DEBPs for their further ethylation. 4-EBP was ethylated preferentially among the isomers, although the formation of 4,4'-DEBP was less selective. The least bulky 4-EBP and 4,4'-DEBP have the highest reactivity among EBPs and DEBPs for the ethylation to polyethylbiphenyls (PEBPs). These results show that the environments of MOR pores are too loose for shape selective formation of the least bulky isomers, 4-EBP and 4,4'-DEBP in the ethylation of BP, and that MOR pores have enough space for the further ethylation of 4,4'-DEBP.

Agricultural Methods for Toxicity Alleviation in Metal Contaminated Soils: A Review

  • Arunakumara, Kkiu;Walpola, Buddhi Charana;Yoon, Min-Ho
    • Korean Journal of Soil Science and Fertilizer
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    • v.46 no.2
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    • pp.73-80
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    • 2013
  • Due to the fact that possible risk associated with soil-crop-food chain transfer, metal contamination in croplands has become a major topic of wide concern. Accumulation of toxic metals in edible parts of crops grown in contaminated soils has been reported from number of crops including rice, soybean, wheat, maize, and vegetables. Therefore, in order to ensure food safety, measures are needed to be taken in mitigating metal pollution and subsequent uptake by crop plants. Present paper critically reviewed some of the cost effective remediation techniques used in minimizing metal uptake by crops grown in contaminated soils. Liming with different materials such as limestone ($CaCO_3$), burnt lime (CaO), slaked lime [$Ca(OH)_2$], dolomite [$CaMg(CO_3)_2$], and slag ($CaSiO_3$) has been widely used because they could elevate soil pH rendering metals less-bioavailable for plant uptake. Zn fertilization, use of organic amendments, crop rotation and water management are among the other techniques successfully employed in reducing metal uptake by crop plants. However, irrespectively the mitigating measure used, heterogeneous accumulation of metals in different crop species is often reported. The inconsistency might be attributed to the genetic makeup of the crops for selective uptake, their morphological characteristics, position of edible parts on the plants in respect of their distance from roots, crop management practices, the season and to the soil characteristics. However, a sound conclusion in this regard can only be made when more scientific evidence is available on case-specific researches, in particular from long-term field trials which included risks and benefits analysis also for various remediation practices.

Characterization of Size Distribution and Water Solubility of 15 Elements in Atmospheric Aerosols

  • Park, Jeong-Ho;Sun, Jeong-Min;Park, Kum-Chan
    • Journal of Korean Society for Atmospheric Environment
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    • v.17 no.E1
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    • pp.1-7
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    • 2001
  • The elemental characteristics of atmospheric aerosols were investigated as a function of particle size and water solubility. The aerosol particles were samples at 12 individual size ranges between 0.01 and 30㎛. Collected aerosol particles were separated into both soluble and insoluble components. The concentrations of 15 elements in both components were determined by a PIXE analysis using a 2.0 MeV-proton beam. In general, the mass size distribution of particulate matter was represented as a bimodal distribution. The maximum rations of S in July and December were 5.5 and 3.8 %, and they appeared in the size range of 0.47∼1.17㎛(stage No. 6 or 7) . The ratios of a S at non-separated size were 3.1 and 2.2 % in July and December, respectively, On the other hand, the maximum rations of Si in July and December were 7.0 and 5.4% and they appeared in the size range of 5.1∼30㎛(stage No. 0∼2). The ratios of Si at the non-separated size were 2.1 and 1.8% in July and December, respectively, The mass diameter of 12 elements ranged between 0.59㎛ of S and 3.20 of Fe. More than 90% of atmospheric aerosols consisted of the light elements such as C, N, O, H and Al. The soluble component was dominant in the smaller size range and the insoluble component in the larger size range. Large portions of Si. Ti and Fe existed in insoluble state. By contrast, S, Cl, Ca, Zn and Br were dissolved in water.

Source Identification of Ambient PM-10 Using the PMF Model (PMF 모델을 이용한 대기 중 PM-10 오염원의 확인)

  • 황인조;김동술
    • Journal of Korean Society for Atmospheric Environment
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    • v.19 no.6
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    • pp.701-717
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    • 2003
  • The objective of this study was to extensively estimate the air quality trends of the study area by surveying con-centration trends in months or seasons, after analyzing the mass concentration of PM-10 samples and the inorganic lements, ion, and total carbon in PM-10. Also, the study introduced to apply the PMF (Positive Matrix Factoriza-tion) model that is useful when absence of the source profile. Thus the model was thought to be suitable in Korea that often has few information about pollution sources. After obtaining results from the PMF modeling, the existing sources at the study area were qualitatively identified The PM-10 particles collected on quartz fiber filters by a PM-10 high-vol air sampler for 3 years (Mar. 1999∼Dec.2001) in Kyung Hee University. The 25 chemical species (Al, Mn, Ti, V, Cr, Fe, Ni, Cu, Zn, As, Se, Cd, Ba, Ce, Pb, Si, N $a^{#}$, N $H_4$$^{+}$, $K^{+}$, $Mg^{2+}$, $Ca^{2+}$, C $l^{[-10]}$ , N $O_3$$^{[-10]}$ , S $O_4$$^{2-}$, TC) were analyzed by ICP-AES, IC, and EA after executing proper pre - treatments of each sample filter. The PMF model was intensively applied to estimate the quantitative contribution of air pollution sources based on the chemical information (128 samples and 25 chemical species). Through a case study of the PMF modeling for the PM-10 aerosols. the total of 11 factors were determined. The multiple linear regression analysis between the observed PM-10 mass concentration and the estimated G matrix had been performed following the FPEAK test. Finally the regression analysis provided source profiles (scaled F matrix). So, 11 sources were qualitatively identified, such as secondary aerosol related source, soil related source, waste incineration source, field burning source, fossil fuel combustion source, industry related source, motor vehicle source, oil/coal combustion source, non-ferrous metal source, and aged sea- salt source, respectively.ively.y.

Effects of Iron, Silicon and Zinc Contained in Molten Aluminum on Aluminizing of Cast Iron (주철 소지상에 용융알루미늄 도금시 철 규소 및 아연의 영향)

  • Choi, Chong-Sool;Moon, Sung-Wuck
    • Journal of the Korean institute of surface engineering
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    • v.20 no.4
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    • pp.144-153
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    • 1987
  • In the case of dipping the Ni-Resist cast iron into molten aluminum with iron content, the thickness of intermetallic compound was remarkably increased with increasing iron content. The thickness was shown by following equation in the range of 1-3% iron content; $x=22.5t^{1/2}+4.47{\cdot}t{\cdot}(Fe%)$. where, x is thickness(${\mu}m$), t the time (minute), Fe% the iron w/o. When the Ni-Resist cast iron was dipped into the molten aluminum containing zinc content, the intermetallic compound thickness was also increased with increasing zinc contents. And thickness was represented by the following equation in the range of 2-10% zinc content; $x=3.46t^{1/2}+0.27{\cdot}t{\cdot}(Zn%)$. However, in the case of dipping the Ni-resist cast iron into molten aluminum with silicon content, the thickness of intermetallic compound was decreased with increasing silicon content, as shown in the following equation; $x=7.17t^{1/2}-0.15{\cdot}t{\cdot}(Si%)$. The intermetallic compound formed onto Ni-Resist cast iron was identified to be $FeAl_3\;and\;Fe_3Al$. As the result of hardness measurement, the peak hardness appeared in the intermetallic compound at near interface of the cast iron and the compound.

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Two-dimensional numerical simulation study on the nanowire-based logic circuits (나노선 기반 논리 회로의 이차원 시뮬레이션 연구)

  • Choi, Chang-Yong;Cho, Won-Ju;Chung, Hong-Bay;Koo, Sang-Mo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.82-82
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    • 2008
  • One-dimensional (1D) nanowires have been received much attention due to their potential for applications in various field. Recently some logic applications fabricated on various nanowires, such as ZnO, CdS, Si, are reported. These logic circuits, which consist of two- or three field effect transistors(FETs), are basic components of computation machine such as central process unit (CPU). FETs fabricated on nanowire generally have surrounded shapes of gate structure, which improve the device performance. Highly integrated circuits can also be achieved by fabricating on nano-scaled nanowires. But the numerical and SPICE simulation about the logic circuitry have never been reported and analyses of detailed parameters related to performance, such as channel doping, gate shapes, souce/drain contact and etc., were strongly needed. In our study, NAND and NOT logic circuits were simulated and characterized using 2- and 3-dimensional numerical simulation (SILVACO ATLAS) and built-in spice module(mixed mode).

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Theoretical Analysis of Bragg-Reflector Type FBAR with Resonance Mode (공진 모드에 따른 Bragg-Reflector Type FBAR 의 이론적 분석)

  • 조문기;윤영섭
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.40 no.11
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    • pp.9-18
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    • 2003
  • Two configurations of Film Bulk Acoustic Wave Resonators with acoustic quater-wave bragg reflector layers are theoretically analyzed using equivalent circuits and the difference of their characteristics are discussed. We compare the characteristics of λ/2 mode to those of ideal FBAR with top and bottom electrode contacting air and the characteristics of λ/4 mode to those of ideal FBAR with top electrode contacting air and bottom electrode clamped. We assume that the piezoelectric film is ZnO, the electrode is A1 and the substrate is Si, ABCD parameters are extracted and input impedance is calculated by converting the equivalent circuit from Mason equivalent circuits to the simplified equivalent circuits that ABCD parameters are extracted possible, From the variation of resonance frequency due to the change of thickness of reflector layers and the variation of electrical Q due to the change of mechanical Q of reflector layers, it is confirmed that the reflector layer just under the bottom electrode have the greatest effect on the varation of resonance frequency and electrical Q. It is shown that the number of reflector layers required for the saturation of electrical Q decreases with the increase of the impedance ratio of reflector layers and electrical Q of λ/2 mode is larger than that of λ/4 mode, Electromechanical coupling factor is independent of the number of layers, The impedance ratio of reflector layers becomes larger as the electromechanical coupling factor becomes larger, The electromechanical coupling factor of the two mode are smaller than those of ideal FBARs because of the trapping of acoustic energy in the reflector layers, The insertion loss of the ladder filter decreases with the increase of the number of reflector layers but the bandwidth is not affected much by the number of reflector layers, As the impedance ratio of reflector layers becomes larger the insertion loss becomes smaller and the bandwidth becomes wider, In our analysis of the two mode, characteristics of λ/2 mode appear to be slightly more favorable than that of λ/4 mode