Thermoelectric and electrical properties of In-Sn-Zn-O thin films deposited by magnetron co-sputtering (이원 동시 마그네트론 스퍼터링법을 이용하여 증착한 In-Sn-Zn-O 박막의 열전 특성)
-
- Proceedings of the Korean Institute of Surface Engineering Conference
- /
- 2015.11a
- /
- pp.297-298
- /
- 2015