• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.216-216
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• 2009

$(Ni_{1-x-y}Zn_xCu_y)Fe_2O_4(x=0.45,\;0{\leq}y{\leq}0.3)$ was synthesized by conventional ceramic processing, and the sintering behavior and the magnetic properties of which were studied as functions of CuO content and sintering temperature. Both the densification and the grain growth rates were significantly enhanced with the increase of CuO content, while abnormal grain growth occurred when the samples of $y{\geq}0.2$ were sintered above $950^{\circ}C$. Saturation magnetization and coercive field were mainly influenced by the densification and grain growth of the specimens, respectively.

• Journal of information and communication convergence engineering
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• v.3 no.3
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• pp.131-136
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• 2005

The effects of the deposition temperature on the growth characteristics of the ZnO films were studied for film bulk acoustic wave resonator (FBAR) device applications. All films were deposited using a radio frequency (RF) magnetron sputtering technique. It was found that the growth characteristics of the ZnO films have a strong dependence on the deposition temperature from 25 to $350^{\circ}C$. The ZnO films deposited below $200^{\circ}C$ exhibited reasonably good columnar grain structures with a highly preferred c-axis orientation while those above 200°C showed very poor columnar grain structures with a mixed-axis orientation. This study seems very useful for the future FBAR device applications.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2013.05a
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• pp.138-139
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• 2013

본 연구는 ZnO-TFT 소자에 Hf의 첨가에 따른 소자 특성 및 게이트 바이어스 스트레스에 대한 특성에 대해 분석을 하였다. Hf-Zn-O 박막은 Hf의 조성이 증가함에 따라 작아지는 grain size로 인해 TFT 소자의 전계효과 이동도와 게이트 바이어스 스트레스에서의 문턱전압의 변화가 더 커지는 것을 확인하였다. 한편, Hf이 14at% 함유된 HZO-TFT에서는 이동도는 현저히 저하되었지만, 게이트 바이어스 스트레스에서의 문턱전압의 변화가 현저히 개선되는 것을 확인하였는데, 이는 Hf의 조성이 증가함에 따라 비정질화 되어 grain boundaries에 의한 trap의 영향이 줄어든 결과를 확인하였다. 또한, 전계효과 이동도와 소자의 안정성을 확보하기 위해, poly-ZnO와 amorphous-HZO로 구성된 다중층 채널 구조를 이용한 TFT소자에서는 전계효과 이동도과 소자의 안정성이 개선된 결과를 보였다. 이는 채널과 게이트 산화물의 interface charge trap의 감소와 back-channel effect가 감소한 결과임을 확인하였다.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.16 no.2
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• pp.59-65
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• 2006

Al-doped and F-doped ZnO (ZnO : Al & ZnO : F) thin films were coated onto glass substrate by sol-gel method. These films showed c-axis orientation in common, but different I(002)/[I(002) + I(101)] and FWHM (full width at half-maximum). In particular, the grain size of the ZnO : Al films decreased with the increase in the Al-doping concentration, while for the ZnO : F films the grain siae increased up to F 3 at% and then decreased. For the electrical properties, Hall effect measurement was used. The resistivity of the ZnO : Al films and the ZnO : F films were, respectively, $2.9{\times}10^{-2}{\Omega}cm$ at Al 1 at% and $3.3{\times}10^{-1}{\Omega}cm$ at F 3 at%. Moreover compared with ZnO:Al films, ZnO:F films have lower carrier concentration (ZnO : Al $4.8{\times}10^{18}cm^{-3}$, ZnO : F $3.9{\times}10^{16}cm^{-3}$) and higher mobility (ZnO : Al $45cm^2/Vs$, ZnO : F $495cm^2/Vs$). For average optical transmittances, ZnO : Al thin films have $86{\sim}90%$ and ZnO : F films have $77{\sim}85%$ comparatively low.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.419-422
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• 2001

The electrical properties of Pr$_{6}$O$_{11}$-based ZnO varistors composed of ZnO-Pr$_{6}$O$_{11}$-CoO-Cr$_2$O$_3$-Dy$_2$O$_3$- based ceramics were investigated with CoO content in the range of 0.5~5.0 mol%. As CoO content is increased, the average grain size and the density were increased in the range of 9.86~27.22 $\mu$m and in the range of 5.25-5.55 g/cm$^3$, respectively. The varistor voltage was decreased in the range of 235.32~86.01 V/mm due to the increase of average grain size with CoO content. The varistors doped with CoO in the rage of 1.0~2.0 mol% exhibited a high nonlinearity, in which is above 55 in the nonlinear exponent and below 1.5 $\mu$A in the leakage current. Increasing CoO content further greatly decreased the nonlinearity.ity.ity.

• Korean Journal of Crystallography
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• v.4 no.2
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• pp.92-99
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• 1993

ZnO thin films were depositsd by Plasma enhanced CVD (PUW) using Diethylzinc and N2O gas, and micro-structue of ZnO thin films were investigated ZnO thin films composed of micro-crystallites was deposited at the substrate of loot. However, highly c-axis oriented ZnO thin films were deposited on the glass substrates above 200℃. TEM analysis revealed that an epitaxial (002) ZnO thin film was deposited on c-plane sapphire substrate at the substrate temperature of 350℃, and More patterns showing partial dislocation were observed at the grain boundary.

• Journal of the Korean Ceramic Society
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• v.40 no.5
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• pp.441-446
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• 2003

Fine powders of ZnO were synthesized by the sol-gel method. The shape of gel powders with calcination temperatures changed into the sheet structure, the needle shape, and the spherical grain. The growth rate of grain size was slow to 700$^{\circ}C$ but high above 700$^{\circ}C$. The bigger the grain size is, the higher the degree of crystallization is. The organic element in gel powders evaporated below 300$^{\circ}C$. Temperature dependence of conductances showed the sigmoidal shape, but the temperature range of the constant conductances narrowed with the decrement of the calcination temperature of gel powders. The optimum sensing property for CO gas were observed with the specimen calcined at 500$^{\circ}C$ and degraded with the increment of calcination temperature.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.262.1-262.1
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• 2013

ZnO 나노구조는 전기적 성질과 화학적인 안정성 때문에 가스센서, 투명 전극 및 태양전지와 같은 전자소자와 광소자에 널리 사용되고 있다. ZnO 박막을 증착하는 방법은 Physical Vapor Deposition과 Chemical Vapor Deposition이 있으나 나노 구조를 가진 SnO2를 형성하기 어렵다. 전기 화학적 증착(Electrochemical Deposition: ECD)은 낮은 온도에서 진공 공정이 필요하지 않기 때문에 경제적이며 빠른 성장 속도를 가지고 있기 때문에 ZnO 나노 구조를 효과적으로 형성 할 수 있다. 본 연구에서는 Indium Tin Oxide (ITO) 기판 위에 ZnO 나노 구조를 형성시켜 전기적 및 구조적 특성을 관찰하였다. 0.1 M zinc nitrate와 0.1 M potassium chloride를 용매에 각각 용해하여 ZnO 나노구조를 성장하였다. ZnO 나노구조를 성장하기 위하여 인가전압을 -0.75 V부터 -2.5 V까지 0.5 V 간격으로 변화하였다. X-선 회절 분석결과에서 ZnO의 피크의 크기가 큰 전기화적적 성장 전압구간과, 주사전자현미경 분석결과에서 나노 구조가 가장 잘 나타난 성장 전압구간을 다시 0.1 V 간격으로 세분화하여 최적화 조건을 분석하였다. X-선 회절 실험으로 형성한 ZnO 나노구조의 피크가 (110) (002)로 나타났다. X-선 회절 분석의 intensity의 값이 (002)방향이 가장 크게 나타났으므로 우선적으로 (002) 방향으로 ZnO 나노구조가 성장됨을 알 수 있었다. 주사전자현미경상은 grain size가 200~300 nm 사이의 ZnO 나노구조가 형성되며, grain size가 전기화학적 증착 장치의 성장전압이 커짐에 따라 커지는 것을 알 수 있었다.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.112-112
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• 2010

Zinc Oxide (ZnO) thin-films were deposited according to the magnetron sputtering method. The deposited ZnO films were annealed with RTA equipment at various annealing temperatures in an vacuum ambient. The influence of the annealing temperature on the structural, electrical, and optical properties of the ZnO films was experimentally investigated, and the effect of conductivity of the ZnO active layer on the device performance of the oxide-TFT was tested. As a result, an increase of the annealing temperature was attributed to improvements of crystallinity in ZnO films. The grain size was found to lead to an increase of conductivity in the ZnO films. Fabricated ZnO TFTs with annealed ZnO active layer provided good performance in the TFT devices. Consequently, the performance of the TFT was determined by the conductivity of the ZnO film, which was related to the structural properties of the ZnO film.

• Korean Journal of Materials Research
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• v.15 no.11
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• pp.741-744
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• 2005

Atomic layer deposition (ALD) is a very promising deposition technique for ZnO thin films. However, there have been very few reports on ZnO grown by ALD. Effects of substrate temperature in both ALD and post annealing on the microstructure and PL properties of ZnO thin films were investigated using X-ray diffraction, photoluminescence, and scanning electron microscopy. The temperature window of ALD is found to be between $130-180^{\circ}C$. The growth rate of ZnO thin film increases as the substrate temperature increases in the temperature range except the temperature window. The crystal quality depends most strongly on the substrate temperature among all the growth parameters of ALD. The crystallinity of the film is improved by increasing the growth thine per ALD cycle or doing post-annealing treatment. The grain size of the film tends to increase and the grain shape tends to change from a worm-like longish shape to a round one as the annealing temperature increases from $600^{\circ}C\;to\;1,000^{\circ}C$.