• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.262.1-262.1
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• 2013

ZnO 나노구조는 전기적 성질과 화학적인 안정성 때문에 가스센서, 투명 전극 및 태양전지와 같은 전자소자와 광소자에 널리 사용되고 있다. ZnO 박막을 증착하는 방법은 Physical Vapor Deposition과 Chemical Vapor Deposition이 있으나 나노 구조를 가진 SnO2를 형성하기 어렵다. 전기 화학적 증착(Electrochemical Deposition: ECD)은 낮은 온도에서 진공 공정이 필요하지 않기 때문에 경제적이며 빠른 성장 속도를 가지고 있기 때문에 ZnO 나노 구조를 효과적으로 형성 할 수 있다. 본 연구에서는 Indium Tin Oxide (ITO) 기판 위에 ZnO 나노 구조를 형성시켜 전기적 및 구조적 특성을 관찰하였다. 0.1 M zinc nitrate와 0.1 M potassium chloride를 용매에 각각 용해하여 ZnO 나노구조를 성장하였다. ZnO 나노구조를 성장하기 위하여 인가전압을 -0.75 V부터 -2.5 V까지 0.5 V 간격으로 변화하였다. X-선 회절 분석결과에서 ZnO의 피크의 크기가 큰 전기화적적 성장 전압구간과, 주사전자현미경 분석결과에서 나노 구조가 가장 잘 나타난 성장 전압구간을 다시 0.1 V 간격으로 세분화하여 최적화 조건을 분석하였다. X-선 회절 실험으로 형성한 ZnO 나노구조의 피크가 (110) (002)로 나타났다. X-선 회절 분석의 intensity의 값이 (002)방향이 가장 크게 나타났으므로 우선적으로 (002) 방향으로 ZnO 나노구조가 성장됨을 알 수 있었다. 주사전자현미경상은 grain size가 200~300 nm 사이의 ZnO 나노구조가 형성되며, grain size가 전기화학적 증착 장치의 성장전압이 커짐에 따라 커지는 것을 알 수 있었다.

• Korean Journal of Materials Research
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• v.9 no.12
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• pp.1222-1228
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• 1999

The effects of Sn and Nb content on the characteristics of ${\beta}$ to ${\alpha}$ phase transformation for Zr were studied by optical microscopy and transmission electron microscopy. The basketweave structures consisted of fine ${\alpha}$-laths were shown in all the air-cooled specimens. As the Nb content increased, the ${\beta}{\to}{\alpha}$+${\beta}$ transformation temperature decreased thus allowing the width of ${\alpha}$-lath, however, did not change with Sn content. While water-quenched pure Zr and Zr-xSn alloys were found to be mailny slipped martensite, water-quenched Zr-xNb alloys showed predominantly a twinned martensite. The transition of slipped martensite to twinned martensite was contributed to the decrease of Ms temperature.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1997.04a
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• pp.99-102
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• 1997

An electronic nose system is an instrument designed far mimicking human olfactory system. It consists generally of gas (odor) sensor array corresponding to olfactory receptors of human nose and artificial neural network pattern recognition technique based on human biological odor sensing mechanism. Considerable attempts to develop the electronic nose system have been made far applications in the fields of floods, drinks, cosmetics, environment monitoring, etc. A portable electronic nose system has been fabricated by using oxide semiconductor gas sensor array and pattern recognition technique such as principal component analysis (PCA) and back propagation artificial neural network The sensor array consists of six thick film gas sensors whose sensing layers are Pd-doped WO$_3$ Pt-doped SnO$_2$ TiO$_2$-Sb$_2$O$_3$-Pd-doped SnO$_2$ TiO$_2$-Sb$_2$O$_{5}$-Pd-doped SnO$_2$+Pd filter layer, A1$_2$O$_3$-doped ZnO and PdCl$_2$-doped SnO$_2$. As an application the system has been used to identify CO/HC car exhausting gases and the identification has been successfully demonstrated.d.

• Journal of the Korean Magnetics Society
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• v.12 no.3
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• pp.88-93
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• 2002

Rapidly solidified NdFeB powders were mixed with fine powders of pure metal elements before CA-press employed to obtain a fully dense isotropic precursor. Subsequently, the precursor was deformed by CA-deformation to obtain an anisotropic magnet. The CA-deformed anisotropic NdFeB magnets with 0.3 wt.% Zn or Sn exhibited the coercivities about 80% higher (11.4. and 11.2 kOe, respectively) than that (6.4 kOe) of the additive-free magnet.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.11a
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• pp.206-207
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• 2005

Display 소재로서 유전체나 격벽재 실링재로 사용되고 있는 frit는 PbO를 주성분으로 갖는 유리가 사용되고 있다. PbO 성분이 함유된(50$\sim$85%) 구성소재는 최근 RoHS 나 WEEE 등의 환경규제 실행에 직면해 있으며, 대체재료의 개발을 위한 많은 연구가 진행되고 있다 PbO 성분을 대체할 성분으로는 $Bi_2O_3$ 계, BaO-ZnO 계, $P_2O_5$ 계 등의 성분이 주요성분으로 이루어져 있으며, PbO 성분을 함유한 유리의 저융점, 저유전율, 고 투과율, 내산성, 내전압, 팽창계수 matching 등의 특성들에 부합되는 재료를 개발하기 위해 많은 노력을 기울이고 있다. 본 연구에서는 SnO-$P_2O_5$ 계 유리 조성을 선택하여 $R_2O_3$의 치환 및 용융분위기의 조절에 따른 저융점 유리로서의 특성과 효과에 대하여 고찰하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.335-335
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• 2014

Over the past several years, transparent conducting oxides have been extensively studied in order to replace indium tin oxide (ITO). Here we report on fluorine doped zinc tin oxide (FZTO) films deposited on glass substrates by radio-frequency (RF) magnetron sputtering using a 30 wt% ZnO with 70 wt% SnO2 ceramic targets. The F-doping was carried out by introducing a mixed gas of pure Ar, CF4, and O2 forming gas into the sputtering chamber while sputtering ZTO target. Annealing temperature affects the structural, electrical and optical properties of FZTO thin films. All the as-deposited FZTO films grown at room temperature are found to be amorphous because of the immiscibility of SnO2 and ZnO. Even after the as-deposited FZTO films were annealed from $300{\sim}500^{\circ}C$, there were no significant changes. However, when the sample is annealed temperature up to $600^{\circ}C$, two distinct diffraction peaks appear in XRD spectra at $2{\Theta}=34.0^{\circ}$ and $52.02^{\circ}$, respectively, which correspond to the (101) and (211) planes of rutile phase SnO2. FZTO thin film annealed at $600^{\circ}C$ resulted in decrease of resistivity $5.47{\times}10^{-3}{\Omega}cm$, carrier concentration ~1019 cm-3, mobility~20 cm2 V-1s-1 and increase of optical band gap from 3.41 to 3.60 eV with increasing the annealing temperatures and well explained by Burstein-Moss effect. Change of work function with the annealing temperature was obtained by ultraviolet photoemission spectroscopy. The increase of annealing temperature leads to increase of work function from ${\phi}=3.80eV$ (as-deposited FZTO) to ${\phi}=4.10eV$ ($600^{\circ}C$ annealed FZTO) which are quite smaller than 4.62 eV for Al-ZnO and 4.74 eV for SnO2. Through X-ray photoelectron spectroscopy, incorporation of F atoms was found at around the binding energy of 684.28 eV in the as-deposited and annealed FZTO up to 400oC, but can't be observed in the annealed FZTO at 500oC. This result indicates that F atoms in FZTO films are loosely bound or probably located in the interstitial sites instead of substitutional sites and thus easily diffused into the vacuum from the films by thermal annealing. The optical transmittance of FZTO films was higher than 80% in all specimens and 2-3% higher than ZTO films. FZTO is a possible potential transparent conducting oxide (TCO) alternative for application in optoelectronics.

• Restorative Dentistry and Endodontics
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• v.19 no.1
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• pp.1-26
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• 1994

The purpose of this study was to investigate the dissolution components during corrosion of amalgams and to identify surface corrosion products in the modified Fusayama artificial saliva. Four type of amalgam alloys were used: low copper lathe cut amalgam alloy (Cavex 68), low copper spherical amalgam alloy (Caulk Spherical Alloy), high copper admixed amalgam alloy (Dispersalloy) and high copper single composition amalgam alloy (Tytin). Each amalgam alloy and Hg were triturated according to the manufacturer's direction by means of mechanical amalgamator (Capmaster, S.S.White), and then the triturated mass was inserted into the cylindrical metal mold which was 10mm in diameter and 2.0mm in height and condensed with compression of 150kg/$cm^2$ using oil pressor. The specimens were removed from the mold and stored at room temperature for 7 days and cleansed with distiled water for 30 minutes in an ultrasonic cleaner. The specimens were immersed in the modified Fusayama artificial saliva for the periods of 1 month, 3 months and 6 months. The amounts of Hg, Cu, Sn and Zn dissolved from each amalgam specimen immersed in the artificial saliva for the periods of 1 month, 3 months and 6 months were measured using Inductivity Coupled Plasma Atomic Emission Spectrometry (ICPQ-1000, Shimadzu, Japan) and amount of Ag dissolved from amalgam specimen was measured using Atomic Absorption Spectrophotometry (Atomic Absorption/Flame emission spectrophotometer M-670, Shimadzu, Japan). A surface corrosion products of specimens were analysed using Electron Spectroscopy Chemical Analyser (ESCA PHI-558, PERKIN ELMER, U.S.A.). The secondary image and back scattered image of corroded surface of specimens was observed under the SEM, and the corroded surface of specimens was analysed with the EDX. The following results were obtained. 1. The dissolution amount of Cu was the most in high copper admixed amalgam(Dispersalloy) and the least in high copper single composition amalgam(Tytin). 2. Sn and Zn were dissolved during all the experiment periods, and dissolution amounts were decreased as the time elapsed. 3. Initial surface corrosion products were ZnO and SnO. 4. Corrosion of ${\gamma}$ and ${\gamma}_2$ phase in low copper amalgams was observed and Ag-Cu eutectic alloy phase was corroded in low copper spherical amalgam(Caulk Sperical Alloy). 5. Corrosion of ${\gamma}$ and $\eta$' phase in high copper amalgams was observed and Ag-Cu eutectic alloy phase was corroded in high copper admixed amalgam(Dispersalloy). 6. Sn-Cl was produced in the subsurface of low copper amalgams and high copper admixed amalgam.

• Journal of the Korean Chemical Society
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• v.30 no.5
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• pp.449-455
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• 1986

Various polymer metal complexes have been synthesized from anhydrous $AlCl_3,\;FeCl_3,\;SbCl_5,\;SnCl_4\;and\;ZnCl_2$ with cation exchange resin in carbon disulfide solvent. The forms of the surfaces and sectioned beads of these polymer metal complexes have been observed using scanning electron probe microanalyzer. To examine the catalytic activity of polymer metal complexes, the esterification of various dibasic acids with alcohols have been carried out. Polymer metal complexes were found to be the effective catalyst for esterification of dibasic carboxylic acids.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.167-167
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• 2012

Aluminium-zinc-tin oxide (AZTO) 박막 트랜지스터는 Spin-coating 방법으로 제작되었다. AZTO용액의 용매는 2-Methoxyethanol, 용질은 각각 Aluminium nitride, Zinc acetate dihydrate, Tin chloride가 사용되어 제작되었다. 용액의 안정성을 위해서 미량의 Mono ethyl amine이 첨가되었다. 용액의 Zn:Sn의 몰 비율은 1 : 1로 고정 되었으며 Al의 mole비를 다양하게 늘리면서 실험을 진행하였다. 이렇게 만들어진 AZTO용액은 3,000 rpm으로 30초간 Spin-coating하였으며 이후 Furnace system을 통하여 $500^{\circ}C$의 온도로 1시간 동안 후열처리 공정을 진행하였다. AZTO박막을 활성층으로 제작된 박막 트랜지스터는 Al의 비율이 늘어남에 따라 처음엔 이동도가 증가하였으나 이후 이동도가 낮아지며 소자특성이 나빠지는 것을 보였다. 이러한 현상의 원인을 알아보고자 물리적, 전기적, 광학적 분석을 통해서 Al양의 변화가 박막트랜지스터 구동에 미치는 영향을 해석하였다. 먼저 AZTO용액은 열중량측정/시차열분석법(Thermo Gravimetry/Differential Thermal Analysis)을 이용하여 spin-coating 이후 후 열처리 온도 결정 및 박막의 변화를 관찰하였으며, X-선 분광(X-ray photoelectron spectroscopy)을 이용하여 박막의 조성 및 전자구조의 변화를, 타원분광해석법(Spectroscopic Ellipsometry)분석을 통하여 밴드 갭과 전도대 이하 밴드 갭 내에 존재하는 결함상태변화를 관찰하였다. AZTO 박막 내의 Al양을 조절하는 것은 박막내의 에너지 준위의 변화를 야기하고 그로인해 박막트랜지스터의 특성을 변화킨다는 결과를 도출하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.206.2-206.2
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• 2015

최근 비정질 산화물 반도체 thin film transistor(TFT)는 차세대 투명 디스플레이로 많은 관심을 받고 있으며 활발한 연구가 진행되고 있다. 산화물 반도체 TFT는 기존의 비정질 실리콘 반도체에 비하여 큰 on/off 전류비, 높은 이동도 그리고 낮은 구동전압으로 인하여 차세대 투명 디스플레이 산업에 적용 가능하다는 장점이 있다. 한편 기존의 sputter나 evaporator를 이용한 증착 방식은 우수한 막의 특성에도 불구하고 많은 시간과 제작비용이 든다는 단점을 가지고 있다. 따라서 본 연구에서는 별도의 고진공 시스템이 필요하지 않을 뿐만 아니라 대면적화에도 유리한 용액공정 방식을 이용하여 박막 트렌지스터를 제작하였으며 thermal 열처리와 microwave 열처리 방식에 따른 전기적 특성을 비교 및 분석하고 각 열처리 방식의 열처리 온도 및 조건을 최적화 하였다. 제작된 박막 트렌지스터는 p-type bulk silicon 위에 산화막이 100 nm 형성된 기판에 spin coater을 이용하여 Al-Zn-Sn-O 박막을 형성하였다. 연속해서 photolithography 공정과 BOE (30:1) 습식 식각 과정을 이용해 활성화 영역을 형성하여 소자를 제작하였다. 제작 된 소자는 Pseudo-MOS FET구조이며, 프로브 탐침을 증착 된 채널층 표면에 직접 접촉시켜 소스와 드레인 역할을 대체하여 동작시킬 수 있어 전기적 특성평가가 용이하다는 장점을 가지고 있다. 그 결과, microwave를 통해 열처리한 소자는 100oC 이하의 낮은 열처리 온도에도 불구하고 furnace를 이용하여 열처리한 소자와 비교하여 subthreshold swing(SS), Ion/off ratio, field-effectmobility 등이 개선되는 것을 확인하였다. 따라서, microwave 열처리 공정은 향후 저온 공정을 요구하는 MOSFET 제작 시의 훌륭한 대안으로 사용 될 것으로 기대된다.