• 한국재료학회:학술대회논문집
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• 한국재료학회 2003년도 춘계학술발표강연 및 논문개요집
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• pp.37-37
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• 2003

Ferroelectric random acess memories (FeRAMs) 재료로 주목받고 있는 강유전 물질은 이미 여러 해 전부터 많은 물질들에 대해 연구가 진행되어 왔다. 그 중 낮은 공정 온도를 가지며 큰 remanent polarization 값을 갖는 lead zirconium titanate (PZT) 박막에 대해 많은 연구가 진행되고 있다. 하지만 Pt 기판위에 증착된 PZT 박막은 높은 피로 현상을 보이는 문제가 있다. 최근 Pulsed laser deposition이나 metal-organic vapor phase epitaxy (MOVPE) 등의 방법에 의해 epitaxial substituted-$Bi_4Ti_3O_{12}$ (La, Nd) 박막에 대해 보고가 되고 있다. 본 연구에서는 높은 remanent polarization 값을 갖는 $(Bi,Ce)_4Ti_3O_{12}$ (BCT) 박막을 pulsed laser deposition 방법을 사용하여 증착하였다. 또한 Bismuth의 양을 변화시켜 Bismuth의 양에 따른 remanent polarization의 변화를 확인하여 보았다. 사용된 기판은 Pt/$TiO_2$/$SiO_2$/Si 기판을 사용하였다.

• 한국인쇄학회지
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• 제14권1호
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• pp.1-15
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• 1996

In this paper, the preparation of lead zirconium titanate(PZT) thin film by sol-gel processing was descried. Thin film coated with thickness of 4${\mu}{\textrm}{m}$ on the stainless steel substrates using the multiple spin-coating process. The crystalline phases of PZT powder and film were investigated by X-ray diffraction pattern and PZT thin film has perovskite structure over 600 C annealing temperature. Corona charging characteristics of the ferroelectric PZT thin film at 600 C were investigated by electrophotographic measurement. A difference in the charging characteristics between positive and negative corona charging was found. The charge acceptance depended in the polarity of corona and the poling of film. According to the D-E hysteresis measurment, PZT thin film can be poled by corona charging without use of top electrode. The remnant polarization in the PZT thin film is generally in the order of 48$\mu$C/$\textrm{cm}^2$. From this results, the ferroelectric PZT thin film will be possible to apply for the add-on type imaging formation.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.223-224
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• 2006

In this study, we have investigated the micromachining of PZT to fabricate interdigitated electrodes of electro active material actuator using Nd:YAG laser We have observed groove shapes of PZT with changing beam power, scanning speed, gas, and so on to find optimum conditions of the laser processing for PZT grooves. As a result, this method has been applied to the laser micromachining for grooves in PZT surface, and we could have optimum parameters of Nd:YAG laser Finally it was shown that the laser micromachining of PZT can substitute fer bonding, etching and deposition processes in fabricating electro active material actuator embedded with interdigitated electrodes.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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• pp.155-158
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• 2002

Eu-doped lead zirconium titanate $Pb_{1.1}(Zr_{0.3}Ti_{0.7})O_{3}$ thin films on the Pt/Ti/$SiO_2$/Si substrates prepared by a metalorganic decomposition (MOD) method. The effect on the structural and electrical properties of the films measured according to Eu content. Eu-doping altered significantly the dielectric and ferroelectric properties. The remanent polarization and coercive field decreased with increasing the concentration of Eu content. The dielectric constant and dielectric loss of the film decreased with increasing Eu contents. The 3 mol% of Eu-doped PZT thin film showed large remanent polarization and the fatigue characteristic of the film did not change up to $10^9$ switching cycles.

• 대한화장품학회지
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• 제13권1호
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• pp.15-28
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• 1987

Silica spheres were prepared by interfacial reaction method. Factors in-fluencing to the mean particle size and specific surface area of silica spheres were investigated. The experiment about the surface modification of silica spheres was carried out. It was observed that silica spheres have characteristics of the spherical shape with the vacancy in the inner side, high surface area, and reaction tendency by many silanol group. The mean particle size of silica spheres is dependent on the surfactant concentration and W/O ratio. The specific surface area is influenced by SiO2/Na2O mole ratio in sodium silicate. Silica spheres coated with titanium dioxide or zirconium dioxide improve the UV protection effect. Titanate and silane coupling agent make chemical bond with silica surface and improve the organophile and the dispersibility of silica spheres.

• 한국산학기술학회논문지
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• 제6권6호
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• pp.457-460
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• 2005

금속 알콕사이드의 가수분해법인 졸-겔 공정을 이용하여 일차로 $TiO_2$와 $ZrO_2$ 나노 입자를 합성하고 난 후 $TiO_2$ 나노입자와 PbO를 혼합하여 $PbTiO_3$의 나노 입자를 얻었다. 2차 공정으로 나노입자 크기의 $ZrO_2$와 혼합하여 최종적으로 $PbZrTiO_3(PZT)$ 분말을 합성하였다. 소결된 압전체의 결정상을 분석하기 위하여 X-선 회절분석을 시행하였으며, 소결전 합성분말의 모양과 크기를 투과전자현미경을 이용하여 관찰하였으며 $900^{\circ}C$의 저온에서 소결한 $PbZrTiO_3$시편의 미세조직을 관찰하기 위하여 주사전자현미경을 이용하였다. 합성된 입자들의 크기는 각각 $TiO_2$는 약 20 ${\~}$ 30nm, $ZrO_2$는 15${\~}$30nm이였으며, $900^{\circ}C$ 저온에서 소결한 PZT 시편의 SEM 관찰결과 평균 입경은 $2{\~}4{\mu}m$의 페로 브스카이트 결정으로 치밀한 조직을 나타내었으며, 우수한 압전 특성도 나타내었다.

• Transactions on Electrical and Electronic Materials
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• 제11권5호
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• pp.206-211
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• 2010

Piezoelectric energy harvesting uses piezoelectric, which is able to convert unused mechanical vibration energy to electrical energy, such as with motor and machinery. The piezoelectric energy harvester was constructed with a cantilever made of lead zirconate titanate with a metal plate. The primary material was soft lead zirconium titanate (PZT-5H) due to the large strain availability, acceptable mechanical strength and high piezoelectric constant. This technique's drawback is that the energy efficiency is lower than the other energy harvesting methods, but this study increases the output electric power efficiency by analyzing a finite element method for the structure of the piezoelectric energy harvester. We manufactured two cantilever types as follows: the L-60 and L-33 bimorph piezoelectric energy harvesters. Their resulting energy harvesters were able to obtain high voltage values as follows: 27.4 mV and 40.6 mV. Moreover, these results have a similar band of resonance frequency it comparison to the simulation. Consequently, this study was confirmed with validity. The output electric powers of the L-60 and L-33 types have 3.1 mW/s and 5.8 mW/s with 47 Hz and 148 Hz of resonance frequency and then, the load resistivities were $100k\Omega$ and $10k\Omega$, respectively.

• International Journal of Aeronautical and Space Sciences
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• 제12권1호
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• pp.69-77
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• 2011

A peristaltic micropump with lightweight piezo-composite actuator (LIPCA) membrane valves is presented. The micropump contained three cylinder chambers that were connected by microchannels and two active membrane valves. A circular miniature LIPCA was developed and manufactured to be used as actuating diaphragms. The LIPCA diaphragm acted as an active membrane valve that alternate between open and closed positions at the inlet and outlet in order to produce high pumping pressure. In this LIPCA, a lead zirconium titanate ceramic with a thickness of 0.1 mm was used as an active layer. The results confirmed that the actuator produced a large out-of-plane deflection. During the design process, a coupled field analysis was conducted in order to predict the actuating behavior of the LIPCA diaphragm; the behavior of the actuator was investigated from both a theoretical and experimental perspective. The active membrane valve concept was introduced as a means for increasing pumping pressure, and microelectromechanical system techniques were used to fabricate the peristaltic micropump. The pumping performance was analyzed experimentally in terms of the flow rate, pumping pressure and power consumption.

• The Korean Journal of Ceramics
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• 제4권4호
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• pp.382-386
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• 1998

titanate and a silicon carbide/zirconium diboride particulate composite have each been blended with thermoplastic of aqueous binders and extruded. The green extrudates have diameters ranging between 50 and 150 ㎛ and polyethylene-base 150 ${\mu}m$ diameter fibers can be drawn down at elevated temperature to approximately 40 ${\mu}m$ diameter. Hollow fibers with 150${\mu}m$ outer and 90 ${\mu}m$ inner diameter can also be fabricated. Green fibers have been processed into chopped fiber felts for use as gas distributors/current collectors in an experimental solid oxide fuel cell (SOFC) and the first attempts at producing simple textile structures have been successful. The fibers, tubes and felts have been successfully debound and sintered and characterization of the sintered PSZ fibers, for example, has revealed a density in excess of 99% and tensile failure stresses up to 1.0 GPa for 78 ${\mu}m$ diameter fibers.

• Bulletin of the Korean Chemical Society
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• 제18권6호
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• pp.588-594
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• 1997

Gelation time, gel structure and volatility of by-products during gelation of PZT sol-gel processing were investigated by FT-IR spectroscopy. FT-IR spectroscopic study was performed on PZT gels with the various H₂O contents (1, 2 and 3 mol) and the several types (HNO₃, NH₄OH) and amounts (0.1, 0.2 mol) of catalysts, monitoring temporal (0, 1, 3, 10 weeks, 3 months and 3 years) and thermal (100-700 ℃) changes of FT-IR spectra. The interpretation of temporal change of the spectra revealed two trends. One is under the condition of 1 mol H₂O, 1 mol H₂O+0.1 mol HNO₃, 3 mol H₂O and the other is for 1 mol H₂O+0.1 mol NH₄OH, 2 mol H₂O, 1 mol H₂O+0.2 mol HNO₃. The gel structures and the gelation times for these conditions were discussed in comparison with the reported results of SiO₂, and we suggested the reaction mechanisms for these structural characteristics. Thermal variation of FT-IR spectra was interpreted as the evolution processes of gel by investigating the evaporation of solvent and the decomposition of organic residues.