• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.170-170
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• 2004

박막의 접착강도를 측정하기 위하여 수직력과 수평력을 동시에 측정할 수 있는 0.1∼100 N 용량의 2축 로드셀에 기반을 둔 스크레치 테스터를 개발하였다. 반도체용 Si wafer 기판 위에 Au나 Al 등의 금속이 관은 박막으로 증착된 제품을 table에 고정시킨 후, 2축 로드셀(x, z)이 장착된 하중센서의 선단에 Diamond Tip을 장착하여 기판과 박막에 하중(z-axis)을 증가시키면서 동시에 wafer를 x축 방향으로 이동시킨다. 이런 방식으로 시료의 표면을 긁으면 박막이 벗겨져 나가 Diamond Tip이 기판에 닿을 때 서로 다른 경도차에 의해 진동이 발생하게 되고, 이 진동을 Acoustic Emission 센서에서 감지하여 Crack 발생 시점의 Load와 Stroke를 찾아내게 된다.(중략)

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.75-75
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• 1999

100nm 공간 분해능을 갖는 NSOM 장치를 자체 제작하고 computer를 이용하여 측정을 자동화 하였다. 압전소자의 인가된 전압에 대한 이동거리를 x, y, z 축에 따라 측정 및 보정하고 NSOM topography 사진을 얻는데 성공하였다. 이때 이동거리는 x, y 축은 약 20nm/V이고, z 축은 2.5nm/V 이었다. 하지만 압전소자의 인가된 전압에 따른 이동거리의 비선형성에 대한 보정 및 feedback 제어의 안정화 등은 앞으로 해결해야할 문제로 남아 있다. 자체제작된 NSOM을 이용하여 GaAs/AlGaAs MQWs와 InAs/GaAs QDs 시료에 대한 PL, photocurrent 및 reflectance 등 분광 실험을 성공적으로 수행하였다. PL 실험의 경우 첨예한 광 섬유에 보내진 레이저 광의 세기가 매우 미약하기 (수십 nW) 때문에 탐침 크기가 약 500nm 일 때 측정되었다. 하지만 photocurrent 실험에서는 시료를 검출기로 사용하기 때문에 신호대 잡음비가 PL에 비하여 100배 이상 좋아지는 것을 발견하였다. 따라서 NSOM을 이용한 photocurrent 방법은 앞으로 NSOM의 공간 분해능을 높이는데 하나의 돌파구를 마련해 줄 것으로 기대된다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1993.10a
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• pp.423-427
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• 1993

An efficient 3-axis NC milling simulator is presented. The geometric simulation of milling is based on z-map structure and voxels. For the graphic simulation,dimetric projection is adopted. As a result, two faces of a voxel are exposed and they are overlapped. Visible faces are determined by using z-butter method. The simulation system is developed in IBM-PC compatible with satisfactory result.

• Proceedings of the KSME Conference
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• 2001.06c
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• pp.116-121
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• 2001

Verification of tool collision is an important issue in die and mold machining. In this paper three functions of verification are schematically explained based on Z-Map model. The first function is getting a collision-free region when a tool assembly and a part surface model are given. The second function estimates the shortest length of cutter shank with that the tool cuts all of a region without collision. The last one is cutting simulation considering all parts of tool assembly as well as cutter blade. Those functions can be easily implemented by using several basic operators of Z-Map model which are explained also. Proposed approaches have enough accuracy to verify collision in reasonable computing time.

• Journal of the Korean Society of Fisheries and Ocean Technology
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• v.31 no.2
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• pp.166-171
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• 1995

Recently, various navigational instruments are being composed into a total navigational system. This system requires accurate ship's heading in digital form. The authors have been studying about an electromagnetic compass with a three - axis magnetic sensor in order to provide an accurate ship's magnetic heading which the compass deviations can automatically compensated in the compass itself. In this pater describe on the theory how to derive the poisson's coefficients from ship's magnetism measured with three axis magnetic sensor and the results obtained by the simulation using deviascope, and that results practically coincident with the value observed by bearing on a distant object with magnetic compass.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.1
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• pp.15-16
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• 1997

공작기계의 기본은 POSITION ACCURACY이다. XYZ 3축 직선운동 복합으로 거의 모든 형태를 표현할 수 있다. 3축 각각의 직선운동만 정확하면 정밀한 절삭가공이 된다는 뜻이다. 직선운동의 정확도를 기하기 위하여 볼스크류 를 쓰고 기아도 그라인딩을 한다. POSITION ACCURACY는 NC-CONTROLLER를 사용하면서 극대로 증가한다. 이것이 공작기계의 원리이다. 항공기의 조립은 공작기계가 갖고 있는 X Y Z 3축의 복합만으로는 STROKE가 짧아 표현할 수 없는 상당히 긴 STROKE이면서 공간의 위치가 요구된다. 이를 찾는 방법은 지극히 정밀한 LENS를 동원한 OPTICAL TOOL을 쓰는 것이 가장 용이하다. 항곡부품의 위치도 OPTICAL TOOL을 사용하는 것이 가장 용이하다. 물론 건축용 OPTICAL TOOL보다 항공용은 몇배 더 정밀하다.

• 한국초전도학회:학술대회논문집
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• v.9
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• pp.256-259
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• 1999

The effects of Pr doping on structural and superconducting properties of (Pb$_{0.5}$V$_{0.5}$)Sr$_2$(Ca$_{1-x}$Pr$_x$)Cu$_2$O$_z$ have been studied. We have observed systematic variation of lattice parameters with increasing Pr content. A maximum Tc of about40 K has been observed in this system. The correlation between the crystal structure and superconductivity has been addressed.

• Journal of Astronomy and Space Sciences
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• v.9 no.2
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• pp.203-212
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• 1992

Geomagnetic data from 3-axis magnetometer and the IGRF model (tilite - eccentric dipole model) were used to determine the attitude of a satellite. We compared the values of the geomagnetic model with the magnetometer data and two attitude angles, called $\alpha$ -angle and $\beta$-angle respectively, were calculated. From these angles we calculated simple bounds, $\gamma1$ and $\gamma2$, on the true attitude angle $\gamma$, which is used to detemine attitude, between the z-axis and the local vertical. And then we investigated conditions of attitudes of UoSAT-11, 14, 22.

• Proceedings of the Korean Operations and Management Science Society Conference
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• 2000.04a
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• pp.389-392
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• 2000

Gouge-free tool-path generation is an important issue in mold & die machining and researches on cutter interference avoidance can be found in many articles. One of the various methods is construction of tool-offlet surface or cutter-location (CL) surface on which the cutter-center point (CL-point) locates. Provided that the CL surface is represented in a suitable form, cutter-interference avoidance can be performed without the burden of computing CL data for every cutter-contact (CC) point. In the paper, various methods of constructing a CL surface in the z-map form are presented, where z-map is a special form of discrete nonparametric representation in which the height values at grid points on the xy-plane are stored as a 2D array z［i,j］.

• Proceedings of the Korea Crystallographic Association Conference
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• 2002.11a
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• pp.36-36
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• 2002

To Establish of standard technique of length measurent in 2D plane, we develope AFM system. The XY scanner scans the sample only in XY plane, while the Z scanner scans the specimen only in Z-direction. Cantilever tip is controlled to has constant height relative to speciman surface by feedback of PSPD signal. To acquire high accuracy, Z-axis measuring sensor will be added.(COXI or others). In this paper we design XYZ stage suitable for this AEM system. For XY stage, single module parallel-kinnematic flexure stage is used which has high orthogonality and minimum out-of-plane motion. To obtain best performance optimal design is performed. For XY stage, to be robust about parasitic motion optimal design of maximizing Z and tilt stiffness is performed under the constraint of motion range and stage size. And for Z stage, optimal design of maximizing 1st resonant frequency is performed. Because if resonant frequency is get higher, scan speed is improved. So it makes reduce the error by sensor drift. Resultly XYZ stage each have 1st natural frequency of 115㎐, 201㎐, 2.66㎑ and range 109㎛, 110㎛, 12㎛.