• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.1380-1383
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• 2004

The scanning type XY stage is frequently used these days as precision positioning system in equipment for semiconductor or display element. It is requested higher velocity and more precise accuracy for higher productivity and measuring performance. The position accuracy of general stage is primarily affected by the geometric errors caused by parasitic motion of stage, misalignments such as perpendicular error, and thermal expansion of structure. In the case of scanning type stage, H type frame is usually used as base stage which is driven by two actuators such as linear motor. In the point view of scanning process, the stage is used in moving motion. Therefore, dynamic variation is added as significant position error source with other parasitic motion error. Because the scanning axis is driven by two actuators with two position detectors, 2 dimensional position errors have different characteristic compared to general tacked type XY stage. In this study 2D position error of scanning stage is analyzed by 1D heterodyne interferometer calibrator, which can measure 1D linear position error, straightness error, yaw error and pitch error, and perpendicular error. The 2D position error is evaluated by diagonal measurement (ISO230-6). The yaw error and perpendicular error are compensated on the base stage of scanning axis. And, the horizontal straightness error is compensated by cross axis compensation. And, dynamic motion error in scanning motion is analyzed.

• 한국해양공학회지
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• 제35권2호
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• pp.99-112
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• 2021

The prediction of maneuverability is very important in the design process of an underwater vehicle. In this study, we predicted the steady turning ability of a symmetrical underwater vehicle while considering interactions between the yaw rate and drift/rudder angle through a simulation-based methodology. First, the hydrodynamic force and moment, including coupled derivatives, were obtained by computational fluid dynamics (CFD) simulations. The feasibility of CFD results were verified by comparing static drift/rudder simulations to vertical planar motion mechanism (VPMM) tests. Turning motion simulations were then performed by solving 2-degree-of-freedom (DOF) equations with CFD data. The turning radius, drift angle, advance, and tactical diameter were calculated. The results show good agreement with sea trial data and the effects on the turning characteristics of coupled interaction terms, especially between the yaw rate and drift angle.

• 한국항해항만학회:학술대회논문집
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• 한국항해항만학회 2000년도 추계학술대회논문집
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• pp.185-195
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• 2000

This pacer studied on the lateral motion and yaw motion of the gantry crane which is used for the automated container terminal with two driving wheel types. Though several problems are occcurred in driving of gantry crane, they are solved by the motion by the operators. But, if the gantry crane is unmanned, it is automatically controlled without any operation. There are two types, cone and flat t y pin driving wheel shape. In cone type, lateral vibration and yaw motion of crane are issued. In flat type, the collision between wheel-flange and rail or the fitting between wheel-flanges and rail is issued. Especially, the collision between wheel-flange and rail is a very critical problem in driving of unmanned gantry crane. To bring a solution to the problems, the lateral and yaw dynamic equations of the driving mechanism of gantry crane with two driving wheel types are derived. Then, we investigate the driving characteristics of gantry crane. And this study used PD(Proportional-Derivative) Controller to control the lateral displacement and yaw angle of the gantry crane. The simulation result of the driving mechanism using the Runge-Kutta Method is presented in this paper.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.545-550
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• 2001

This paper studied on the lateral motion and yaw motion of the gantry crane that is used for the automated container terminal. Though several problems are occurred in driving of the gantry crane, they are solved by the motion by the operators. But, if the gantry crane is unmanned, it is automatically controlled without any operator. There are two types, cone and flat type in driving wheel shape. In cone type, the lateral vibration and yaw motion of crane are issued. In flat type, the collision between wheel-flange and rail or the fitting between wheel-flanges and rail is issued. Especially, the collision between wheel-flange and rail is a very critical problem in driving of unmanned gantry crane. To bring a solution to the problems, the lateral and yaw dynamic equations of the driving mechanism of two driving wheels are derived. Then, we investigate the driving characteristics of gantry crane. In this study, the proposed controller, based on Model Based Controller, is used to control the lateral displacement and yaw angle of the gantry crane. And the availability of the proposed controller is showed through the comparison with the result of the proposed controller and PD controller. The simulation results of the driving mechanism, using the Runge-Kutta Method that is one of the numerical analysis methods, are presented in this paper.

• 한국산학기술학회논문지
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• 제21권11호
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• pp.554-560
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• 2020

평판 디스플레이 제조 공정에서 대상물의 위치 결정을 위해 고정밀 평면 모션 스테이지를 사용한다. 이 유형의 스테이지는 일반적으로 마찰이 없는 선형 모터와 에어 베어링을 사용하며, 고정밀 위치 센서로 레이저 간섭계를 사용한다. 스테이지의 불가피한 기생 운동에 의해 야기되는 요 모션 오차는 위치 결정 대상체의 향 변화를 의미하므로, 스테이지의 성능과 공정 정밀도 향상을 위해 요 모션 오차의 실시간 동적 보정은 매우 중요하다. 요 모션 오차 보상에는 갠트리 제어가 일반적이며, 이 방법을 공기베어링 가이드를 사용하는 스테이지에 적용하기 위해서 회전 모션을 허용하는 유연기구가 스테이지에 적용된다. 본 논문은 공기베어링과 유연기구를 갖춘 H형 XY 스테이지의 정속 구동 성능을 개선하는 방법을 제안한다. 유연기구를 포함한 스테이지의 갠트리 제어 시 선형 모터로부터 발생하는 상호 리플의 발생 원인을 분석하고, 이러한 상호 리플을 보상하는 방안으로 적응 학습 제어를 제시한다. 제시 방안의 검증을 위해 시뮬레이션을 수행하여, 보상 제어를 통해 속도 리플이 약 22 % 수준으로 감소함을 확인하였다. 그리고 요 모션 오차가 발생하는 스테이지 상태를 가정하여 리플 저감 효과를 검증하였다.

• 한국자동차공학회논문집
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• 제15권6호
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• pp.120-127
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• 2007

This paper describes the development of a nonlinear observer for four wheel steer (4WS) vehicle. An observer is designed to estimate the vehicle variables difficult to measure directly. A brake yaw motion controller (BYMC), which uses a PID control method, is also proposed for controlling the brake pressure of the rear and inner wheels to enhance lateral stability. It induces the yaw rate to track the reference yaw rate, and it reduces a slip angle on a slippery road. The braking and steering performances of the anti-lock brake system (ABS) and BYMC are evaluated for various driving conditions, including straight, J-turn, and sinusoidal maneuvers. The simulation results show that developed ABS reduces the stopping distance and increases the longitudinal stability. The observer estimates velocity, slip angle, and yaw rate of 4WS vehicle very well. The results also reveal that the BYMC improves vehicle lateral stability and controllability when various steering inputs are applied.

• 한국정보통신학회:학술대회논문집
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• 한국해양정보통신학회 2010년도 춘계학술대회
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• pp.725-727
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• 2010

선박의 운동을 시뮬레이터 하기 위해서는 Pitch, Roll, Yaw의 세가지 선박 운동 요소를 시뮬레이터 할 수 있어야 한다. 이를 위해 선박의 운동을 시뮬레이터 할 수 있는 6축의 자유도를 가지는 모션 시뮬레이터를 설계 개발 하였다. Gyro Sensor based Servo Motion Control 알고리즘은 선박의 6자유도운동을 분석하여 그에 대응 할 수 있는 Motion Control 동요안정화 제어장치를 개발하였다.

• Journal of Mechanical Science and Technology
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• 제14권8호
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• pp.836-844
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• 2000

In this research any abnormal motion of a vehicle is detected by utilizing the difference between the reference and actual yaw velocities as sell as the information on vehicle slip angle and slip angular velocity. This information is then used as a criterion for execution of the yaw moment control. A yaw moment control algorithm based on the brake control is proposed for improving the directional stability of the vehicle. The controller executes brake controls to provide each wheel with adequate brake pressures, which generate the needed yaw moment. It is shown that the proposed yaw moment control logic can provide excellent cornering capabilities even on low friction roads. This active control scheme can prevent a vehicle from behaving abnormally, and can assist normal drivers in coping with dangerous situations as well as experienced drivers.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2000년도 춘계학술대회논문집A
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• pp.487-492
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• 2000

Yaw moment control algorithm for improving stability of a vehicle in cornering is presented in this paper. A change of the yaw moment according to an increment in brake ship at each wheel is examined and reflected in the control algorithm. This control algorithm computes the target yaw velocity as the vehicle motion desired by the driver for directional stability control in cornering and it makes the actual yaw velocity follow the target one. The yaw moment control was achieved by brake slip control and simple brake slip control logic was introduced in this paper.

• International Journal of Automotive Technology
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• 제8권1호
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• pp.49-57
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• 2007

This paper proposes a traction control system (TCS) that uses a sliding mode wheel slip controller and a PID throttle valve controller. In addition, a yaw motion controller (YMC) is also developed to improve lateral stability using a PID rear wheel steering angle controller. The dynamics of a vehicle and characteristics of the controllers are validated using a proposed full-car model. A driver model is also designed to steer the vehicle during maneuvers on a split ${\mu}$ road and double lane change maneuver. The simulation results show that the proposed full-car model is sufficient to predict vehicle responses accurately. The developed TCS provides improved acceleration performances on uniform slippery roads and split ${\mu}$ roads. When the vehicle is cornering and accelerating with the brake or engine TCS, understeer occurs. An integrated TCS eliminates these problems. The YMC with the integrated TCS improved the lateral stability and controllability of the vehicle.