• Title/Summary/Keyword: XRD analysis

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원자층 증착 방법에 의한 $Ta_2O_5$ 박막의 전기적 특성 (The Electrical Properties of $Ta_2O_5$ Thin Films by Atomic Layer Deposition Method)

  • 이형석;장진민;장용운;이승봉;문병무
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 춘계학술대회 논문집 유기절연재료 전자세라믹 방전플라즈마 일렉트렛트 및 응용기술
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    • pp.41-46
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    • 2002
  • In this work, we studied electrical characteristics and leakage current mechanism of Au/$Ta_2O_5$/Si metal-oxide-semiconductor (MOS) devices. $Ta_2O_5$ thin film (63nm) was deposited by atomic layer deposition (ALD) method at temperature of $235^{\circ}C$. The structures of the $Ta_2O_5$ thin films were examined by X-Ray Diffraction (XRD). From XRD, the structure of $Ta_2O_5$ was single phase and orthorhombic. From capacitance-voltage (C-V) analysis, the dielectric constant was 19.4. The temperature dependence of current-voltage (I-V) characteristics of $Ta_2O_5$ thin film was studied from 300 to 423 K. In ohmic region (<0.5 MVcm${-1}$), the resistivity was $2.4056{\times}10^{14}({\Omega}cm)$ at 348 K. The Schottky emission is dominant in lower temperature range from 300 to 323 K and Poole-Frenkel emission dominant in higher temperature range from 348 to 423 K.

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솔-젤 합성에 의한 직접 메탄올 연료전지용 고분산 Pt-Ru/C 음극 촉매의 제조 (A Study on Sol-gel Preparation of Pt-Ru/C Anode Catalysts for Direct Methanol Fuel Cells)

  • 이강희;김일곤;박태진;서동진
    • 전기화학회지
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    • 제6권1호
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    • pp.13-17
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    • 2003
  • 직접 메탄을 연료전지의 음극 촉매로 사용되는 Pt-Ru/C를 솔-젤법을 이용하여 크라이오젤 및 에어로젤 형태로 제조하였다. 탄소의 원료가 되는 유기물의 종류에 따라 B종의 촉매를 제조하였으며 XRD분석에 의해 금속이 탄소담체 위에 고분산되어 있음을 확인하였다. 초임계건조, 탄화. 환원 공정을 거쳐 완성된 에어로젤 촉매의 전극 활성은 Cyclic voltametry를 이용한 half cell test를 통하여 평가하였다. 그 중 Phloroglucinol-Formaldehyde(PF) 형의 촉매가 가장 우수한 활성을 보였으며 내구성 또한 양호하였다.

Poly(lactic acid)/Wood Flour/Montmorillonite Nanocomposites (I) : Tensile and Morphological Properties

  • Kim, Jin-Sung;Lee, Sun-Young;Doh, Geum-Hyun;Kang, In-Aeh;Yoon, Ho-Gyu
    • Journal of the Korean Wood Science and Technology
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    • 제37권5호
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    • pp.426-433
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    • 2009
  • This study investigates the tensile and morphological properties of nanocomposites prepared from poly(lactic acid) (PLA), wood flour (WF) and montmorillonite (MMT) by melt compounding with a twin screw extruder. In order to enhance the mechanical properties of PLA/WF composites, maleic anhydride grafted PLA (MAPLA) is synthesized as a compatibilizer. MAPLA prepared in the laboratory is characterized using FT-IR (Fourier transformed infrared spectroscopy). From the results of X-ray diffraction (XRD) and transmission electron microscopy (TEM) analysis for nanocomposites, we confirmed that silicate layers of MMT are intercalated and partially exfoliated. When 2 wt% MAPLA is added, the tensile strength and modulus of PLA/WF/MAPLA composites were higher than those of the PLA/WF composite. The addition of MMT increases the tensile modulus of PLA/WF/MAPLA composites but decreases the tensile strength.

플라즈마 용사용 산화크롬/몰리브덴 복합분말 제조와 용사코팅의 마찰.마멸 특성 (Fabrication of Cr$_2$O$_3$/Mo Composite Powders and Tribological Properties of Plasma-sprayed Coatings)

  • 여인웅;안효석;김충현
    • Tribology and Lubricants
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    • 제15권2호
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    • pp.184-192
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    • 1999
  • Various compositions of$ Cr_2$$O_3$/Mo composite powders were fabricated using spray-drying method and plasma-spray coatings of these powders were prepared to understand their tribological properties. Experiments were conducted using a reciprocal type tribo-tester at room temperature under dry sliding condition. The worn surface of coated specimens were observed using SEM (Scanning Electron Microscopy) and chemical compositions were analyzed using XRD (X-ray Diffractometry) and XPS (X-ray Photoelectron Spectroscopy). The results showed that friction coefficient of the Mo added specimens were lower than that of $Cr_2$$O_3$specimen. However $Cr_2$$O_3$specimen showed the lowest wear loss. Wear protecting layer were observed at the worn surface of coated specimens with Mo addition. From the XPS analysis, the mixed phases of $Cr_2$$O_3$ $CrO_3$and $MoO_3$were founded in the wear protecting layer.

대형 컨테이너선의 해치 코밍 FCA 맞대기 용접부의 횡 방향 잔류응력 예측에 관한 연구 (A Study on the Predicting Transverse Residual Stress at the Ultra Thick FCA Butt Weldment of Hatch Coaming in a Large Container Vessel)

  • 신상범;이동주;이주성
    • Journal of Welding and Joining
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    • 제28권4호
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    • pp.33-40
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    • 2010
  • The purpose of this study is to establish a predictive equation of transverse residual stress at the thick FCA butt weldment of large container vessel. The variables used were restraint degree, yield strength of base material, thickness of weldment and welding heat input. Restraint degree at the thick weldment of container ship having the various welding sequence was calculated using FEA. From the result, the H-type specimen was designed to reproduce the level of restraint degree at the actual weldment of containership. Based on the results, the predictive equations of the mean value and the distribution of transverse residual stress at each location of the weldment were established using dimensional analysis and multiple-regression method. The predictive equations were verified by comparing with those measured by XRD in the actual weldment of the ship.

Thermal Stability of Self-formed Barrier Stability Using Cu-V Thin Films

  • 한동석;문대용;김웅선;박종완
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.188-188
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    • 2011
  • Recently, scaling down of ULSI (Ultra Large Scale Integration) circuit of CMOS (Complementary Meta Oxide Semiconductor) based electronic devices, the electronic devices, become much faster and smaller size that are promising property of semiconductor market. However, very narrow interconnect line width has some disadvantages. Deposition of conformal and thin barrier is not easy. And metallization process needs deposition of diffusion barrier and glue layer for EP/ELP deposition. Thus, there is not enough space for copper filling process. In order to get over these negative effects, simple process of copper metallization is important. In this study, Cu-V alloy layer was deposited using of DC/RF magnetron sputter deposition system. Cu-V alloy film was deposited on the plane SiO2/Si bi-layer substrate with smooth surface. Cu-V film's thickness was about 50 nm. Cu-V alloy film deposited at $150^{\circ}C$. XRD, AFM, Hall measurement system, and AES were used to analyze this work. For the barrier formation, annealing temperature was 300, 400, $500^{\circ}C$ (1 hour). Barrier thermal stability was tested by I-V(leakage current) and XRD analysis after 300, 500, $700^{\circ}C$ (12 hour) annealing. With this research, over $500^{\circ}C$ annealed barrier has large leakage current. However vanadium-based diffusion barrier annealed at $400^{\circ}C$ has good thermal stability. Therefore thermal stability of vanadium-based diffusion barrier is desirable for copper interconnection.

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Synthesis and Characterization of ZnAl2O4 Nanopowders by a Reverse Micelle Processing

  • Hoon, Son-Jung;Sohn, Jeongho;Shin, Hyung-Sup;Bae, Dong-Sik
    • 한국재료학회지
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    • 제25권11호
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    • pp.598-601
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    • 2015
  • Using reverse micelle processing, $ZnAl_2O_4$ nanopowders were synthesized from a mixed precursor(consisting of $Zn(NO_3)_2$ and $Al(NO_3)_3$). The $ZnAl_2O_4$ was prepared by mixing the aqueous solution at a molar ratio of Zn : Al = 1 : 2. The average size and distribution of the synthesized powders with heat treatment at $600^{\circ}C$ for 2 h were in the range of 10-20 nm and narrow, respectively. The average size of the synthesized powders increased with increasing water to surfactant molar ratio. The XRD diffraction patterns show that the phase of $ZnAl_2O_4$ was spinel(JCPDS No. 05-0669). The synthesized and calcined powders were characterized using a thermogravimetric - differential scanning calorimeter(TG-DSC), X-ray diffraction analysis (XRD), and high resolution transmission electron microscopy(HRTEM). The effects of the synthesis parameter, such as the molar ratio of water to surfactant, are discussed.

인산을 전처리한 활성탄소섬유에 칼륨 처리효과 (Potassium loading effects for activated carbon fiber pre-treated with phosphoric acid)

  • 오원춘;배장순
    • 분석과학
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    • 제18권4호
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    • pp.355-361
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    • 2005
  • 본 연구는 인산의 전처리에 의한 두 종류의 활성탄소섬유의 특성 변화와 여기에 칼륨을 처리하여 표면 특성을 비교하고자 하였다. X-선 회절 패턴은 인산을 전처리함에 따라 칼륨종을 포함하는 활성탄소섬유에 대한 금속과 금속염의 존재에 대한 좋은 결과를 나타내었다. 인산을 처리한 후에 표면특성과 비표면적 변화에 차이의 원인을 나타내기 위하여, 동공구조와 표면 모폴로지를 흡착분석과 SEM에 의하여 연구하였다. 인산을 가지고 전처리한 활성탄소섬유의 칼륨 처리효과에 대한 화학적 구성에 대한 원소분석을 위하여 EDX를 사용하였다. 최종적으로, 산소를 포함하는 기능기의 형태와 정성분석은 Boehm에 의하여 제안된 방법으로 부터 결정하였다.

환원추출에 의한 장수명핵종과 희토류 원소의 분리 연구 (A Study on the Separation of Long-lived Radionuclides and Rare Earth Elements by a Reductive Extraction Process)

  • 권상운;안병길;김응호;유재형
    • 한국방사성폐기물학회:학술대회논문집
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    • 한국방사성폐기물학회 2003년도 가을 학술논문집
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    • pp.421-425
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    • 2003
  • 환원추출 공정은 소멸처리로의 연료를 제조하는 과정에서 전해분리된 TRU 성분을 추가로 정제하기 위해 이용된다. 본 연구에서는 용융염과 Bi 금속사이의 환원추출되는 과정에 대하여 조사하였다. TRU의 대체연구물인 지르코늄과 희토류 원소들이 용질로 이용되었으며, 환원제인 Li은 Bi와 미리 합금을 만들어 사용하였다. 모든 실험은 아르곤 가스가 채워진 글로브박스내에서 수행되었으며, 분석을 위해 ICP, XRD 및 EPMA 등이 이용되었다 Li 투입 후 3시간 이내에 환원추출 반응이 평형에 도달하였다. 세가지 용융염 시스템의 비교실험에서 3가지 용융염 시스템 모두에서 지르코늄이 희토류 원소들로부터 잘 분리되었다.

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KOH 활성화처리된 메조기공 탄소를 이용한 실내 포름알데히드 제거 (Removal of Indoor Formaldehyde Using Mesoporous Carbon Activated with KOH)

  • 유미진;박성훈;전종기;박영권
    • 공업화학
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    • 제23권1호
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    • pp.42-46
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    • 2012
  • 본 연구에서는 메조기공 탄소(CMK-3)를 KOH로 활성화 하여 실내공기 오염물질인 포름알데히드 흡착에 사용하였다. 활성화는 KOH 처리한 CMK-3를 $700^{\circ}C$의 반응기에서 질소분위기로 수행하였다. 활성화된 시료의 특성은 BET, XRD, XPS, FT-IR을 통해 분석하였다. 포름알데히드의 흡착능은 활성화에 의해 향상되었으며, 이는 활성화에 의해 메조기공 탄소의 산소작용기와 질소 작용기의 생성에 기인하는 것으로 판단된다.