The Effect of Hydrogenation on the Elecrical Property and the Surface Roughness of Poly-$\textrm{Si}_{1-x}\textrm{Ge}_{x}$ Thin Film
(수소화처리가 다결정 $\textrm{Si}_{1-x}\textrm{Ge}_{x}$ 박막의 전기적특성 및 표면거칠기에 미치는 영향)
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- Korean Journal of Materials Research
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- v.8 no.1
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- pp.71-79
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- 1998