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Investigation of the residue formed on the silicon exposed to $C_4$F$_8$ helicon wave plasmas (고선택비 산화막 식각공정시 $C_4$F$_8$ 헬리콘 웨이브 플라즈마에 노출된 실리콘 표면의 잔류막 관찰)

  • 김현수;이원정;염근영
    • Journal of Surface Science and Engineering
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    • v.32 no.2
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    • pp.93-99
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    • 1999
  • Surface polymer layer formed on the silicon wafer during the oxide overetching using $C_4F_8$/ helicon wave plasmas and their characteristics were investigated using spectroscopic elipsometry, X-ray photoelectron spectroscopy, and secondary ion mass spectrometry. Overetch percentage and dc-self bias voltage were varied to investigate the effects on the characteristics of the polymers remaining on the overetched silicon surface. The increase of bias voltage from -80 volts to -120 volts increased the C/F ratio and carbon bondings such as C-C, $C-CF_x$/, and C-Si in the polymer while reducing the thickness of the polymer layer. However, the increase of the overetch percentage from 50% to 100% did not change the composition of the polymer layer and the carbon bondings in the polymer layer remained same even though it increased the polymer thickness. The polymer layer formed at the higher dc-self bias voltage was more difficult to be removed by the following various post-etch treatments compared to that formed at the longer overetch percentage.

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Dielectric properties of $BiNbO_4$ dielectric ceramics for multilayer microwave device (적층형 마이크로파 소자용 $BiNbO_4$ 유전체 세라믹스의 유전특성)

  • 박정흠;장낙원;윤광희;최형욱;박창엽
    • Electrical & Electronic Materials
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    • v.9 no.9
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    • pp.900-905
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    • 1996
  • We have investigated dielectric properties of low fired ceramics BiNbO$_{4}$ containing 0.05[wt%] V$_{2}$O$_{5}$ and x[wt%l Cr$_{2}$O$_{3}$ (x=0, 0.2, 0.4, 0.8, 1.2). By substituting Cr for Bi, dielectric constant .epsilon.$_{r}$ and quality factor Q.f increased and temperature coefficient of resonant frecquency .tau.$_{f}$ changed to positive value. In the composition of BiNbO$_{4}$+0.05 [Wt%] V$_{2}$O$_{5}$+0.8[wt%]Cr$_{2}$O$_{3}$ sintered at 960[.deg. C], we could obtain microwave dielectric properties of .epsilon.$_{r}$=49, Q.f.simeq.3000[GHz](at 4.8[GHz]), .tau.$_{f}$.simeq.0[ppm/.deg. C]. As the above ceramics can be sintered near 960[.deg. C], it is applicable to multilayer microwave device with Ag conductor.tor.tor.tor.

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The Structural properties of $BaTiO_3+Nb_2O_5$ ceramics with sintering temperature (소결온도에 따른 $BaTiO_3+Nb_2O_5$ 세라믹스 구조적 특성)

  • Lee, Sang-Chul;Kim, Ji-Heon;Kim, Kang;Ryu, Ki-Won;Lee, Young-Hie
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.05c
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    • pp.127-130
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    • 2001
  • The $BaTiO_3+xNb_2O_5$(x=6, 8, 10wt%) ceramics were prepared by conventional mixed oxide method. The structural properties of the $BaTiO_3+Nb_2O_5$ ceramics with the sintering temperature and addition of $Nb_2O_5$ were investigated by XRD and SEM. Increasing the sintering temperature, the $2{\theta}$ value of BT(110) peak was shifted to the lower degree and intensity of the $Ba_6Ti_2Nb_8O_{30}$ (133) peak was increased. Increasing the addition of $Nb_2O_5$, the intensity of $BaTiNb_4O_{13}$ (201) peak was decreased and $Ba_6Ti_2Nb_8O_{30}$ (133) peak was increased. The grain size of the $BaTiO_3+Nb_2O_5$ ceramics sintered at $1500^{\circ}C$ were almost uniform.

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Effect of $MnO_2$ Additives on the Thermal Properties of Infrared Radiator of Cordierite System Fabricated by Slurry Casting Method (주입성형법으로 제조된 Cordierite계 적외선 방사체의 열적특성에 미치는 $MnO_2$의 영향)

  • 신용덕
    • Journal of the Korean Ceramic Society
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    • v.32 no.7
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    • pp.769-776
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    • 1995
  • Infrared radiators of a cordierite system [cordierite (2MgO.2Al2O3.5SiO2)+30wt% clay+X wt% MnO2 (X=0, 0.1, 0.25, 0.5, 1.0, 1.5, 2.0, 2.5)] were manufactured by a slurry casting method. Thermal and physical properties of these infrared radiators were studied by the measurement of spectra emissivity, thermal expansion coefficient and apparent density, SEM and EPMA analyses were also carried out. The thermal expansion coefficient and apparent density were decreased with increasing amouonts of MnO2 additives. On the other hand, the spectral emissivity was increased in the wavelength below 4.5${\mu}{\textrm}{m}$. Also, infrared radiators of the cordierite system, of which the spectral emisivity was 0.8, could be attainable in the wavelength above 4.5${\mu}{\textrm}{m}$. The infrared radiator of the cordierite system with 2.0wt% MnO2, of which the spectral emissivity was approximately 1.0, could be attainable in the wavelength between 4.5${\mu}{\textrm}{m}$ and 8${\mu}{\textrm}{m}$. The spectral emissivity of the specimen containing 2.0wt% MnO2 was higher than others in the wavelength between 8${\mu}{\textrm}{m}$ and 14${\mu}{\textrm}{m}$.

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Studies on the Soil Microoganisms and Physiochemical Properties in Kwangju area (광주지역의 토양미생물과 물리화학적 특성에 관한 연구)

  • 김상문
    • Korean Journal of Plant Resources
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    • v.4 no.2
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    • pp.51-58
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    • 1991
  • With the soil samples collected from 33 locations in Kwangju area, the physiochemical properties of soil and soil microorganisms have been studied and the results of'the analysis were as follows ;1 . Tlle temperatilre, pH, moisture and organic matter of sampling s'tes were measured in the range of 21.O~28.O$^{\circ}C$, 4.0"6.6, 2.1"24.0% and 2.8~22.0% respectively.and that showed wide range distribution in moisture and organio mattrr particulary.and averase was 24.$^{\circ}C$ of temperature, 4.9 of pH, 11.9% of moisture and 8.9% of'organic matter.2. The general bacterial number, cellulolytic bacterial number, general fungal number and cellulolytic fungal number were measured in tile range of 23$\times$10$^{[-995]}$ _1548x10$^{[-995]}$ , 8.0$\times$10$^{[-995]}$ ~412.0$\times$10$^{[-995]}$ , 0.3$\times$10$^{[-994]}$ ~56.4$\times$10$^{[-994]}$ and 0.Ix10$^{[-994]}$ ~17.2x10$^{[-994]}$ , respectivelyand average was 378.4$\times$10$^{[-995]}$ of general bacteria, 102.5$\times$10$^{[-995]}$ of cellulolytic bacteria.13.OX10$^{[-994]}$ of general fungi and 4.3$\times$10$^{[-994]}$ of cellulolytic fungi.tic fungi.

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An X-Ku Band Distributed GaN LNA MMIC with High Gain

  • Kim, Dongmin;Lee, Dong-Ho;Sim, Sanghoon;Jeon, Laurence;Hong, Songcheol
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.14 no.6
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    • pp.818-823
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    • 2014
  • A high-gain wideband low noise amplifier (LNA) using $0.25-{\mu}m$ Gallium-Nitride (GaN) MMIC technology is presented. The LNA shows 8 GHz to 15 GHz operation by a distributed amplifier architecture and high gain with an additional common source amplifier as a mid-stage. The measurement results show a flat gain of $25.1{\pm}0.8dB$ and input and output matching of -12 dB for all targeted frequencies. The measured minimum noise figure is 2.8 dB at 12.6 GHz and below 3.6 dB across all frequencies. It consumes 98 mA with a 10-V supply. By adjusting the gate voltage of the mid-stage common source amplifier, the overall gain is controlled stably from 13 dB to 24 dB with no significant variations of the input and output matching.

Effect of La3+ and Ce3+ Ions on Photoluminescence Behavior of YBO3: Tb Phosphors (YBO3: Tb 형광체의 광특성에 대한 La3+ 및 Ce3+ 이온의 영향)

  • On, Ji-Won;Lee, Jeong-Baek;Kim, You-hyuk
    • Korean Journal of Materials Research
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    • v.13 no.8
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    • pp.509-513
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    • 2003
  • In the present investigation, $La^{3+}$ and $Ce^{V}$ ions were substituted for $Y^{3+}$ in the $YBO_3$: Tb in various concentrations. It has been found that these phosphors form solid solutions within limited concentration ranges Excitation and emission spectra under 254 nm and 147 nm were investigated for these phosphors to evaluate influences of $La^{3+}$ and $Ce^{3+}$ ions on brightness and CIE color coordinates. It has been observed that brightness of $(Y, La)BO_3$: Tb under 254 nm and 147 nm when $La^{3+}$ ions are added show an increase of 2.7 times and 1.25 times, respectively. On the other hand, emission intensities of peaks in $Y_{0.8-x}$ $BO_3$: $Tb_{0.2}$ , $Ce_{x}$ show continuos decrease as $Ce^{3+}$ / content is increased from 0 to 0.4. CIE color coordinates of prepared phosphors show yellowish green which is needed to be improved to be used for display applications.

Current Leads Fabrication of High $T_c$ Bi System Superconductor Using Rapid Cooling Method (급속응고법을 이용한 Bi 계 고온초전도체 전류도입선 제조)

  • 박용민;한진만;류운선;류운선
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.13 no.3
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    • pp.254-258
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    • 2000
  • Current leads of high $T_{c}$ superconductor were fabricated with Bi excess B $i_{2.2}$/S $r_{1.8}$/C $a_{1}$/C $u_{2}$/ $O_{x}$ composition by rapid cooling method. The dimensions of final samples were fixed 3 mm and 8 mm diameter with 50 mm length each To control uniform density the samples were preformed by CIP(Cold Isostatic Press) process and followed by partial or full melting process after raising up to 90$0^{\circ}C$ for 30min. Plate shaped microstructure was clearly observed adjacent to the Ag tube wall and the size of plate was about 100$\mu$m. However the severe destruction of growth orientation was shown in the inner growth part. critical temperature ( $T_{c}$) was about 53~71K after directional growth while Tc was decreased about 77~80 K before directional growth. After directional growth critical current( $I_{c}$) and critical current density( $J_{c}$) in the specimen of 8 mm diameter at 50 K were about 110 A and 280 A/c $m^2$ respectively.pectively.ely.

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Utilization of Seawater in the Production of Artificial Zeolite from Fly Ash (석탄회 이용 인공제올라이트 제조시 바닷물 활용효과)

  • Lee, Deog-Bae;Lee, Kyung-Bo;Henmi, Teruo
    • Korean Journal of Soil Science and Fertilizer
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    • v.31 no.4
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    • pp.334-341
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    • 1998
  • Sodium hydroxide concentrations were adjusted to 2.0, 2.5, 3.0 and 3.5M by dissolution in seawater. The fly ash was hydrothermally reacted with sodium hydroxide solutions (1:8, W:V) at $100^{\circ}C$ under the closed system. X-ray diffractogram proved that Na-P1 type zeolite was produced from bituminous coal fly ash. It is different from the X-ray of artificial zeolite produced by using sodium hydroxide solution dissolving in distilled water. Solid sieve structure was developed well by hydrothermal reaction with the ash and 3.0M sodium hydroxide. However chinks were observed in the structure of the product by 3.5M sodium hydroxide. CEC of the artificial zeolite was $244.5cmol^+\;kg^{-1}$ at 2.0M, 259.8 at 3.0M, 263.4 at 3.0M and 179.8 at 3.5M after 24 hours hydrothermal reaction; Artificial zeolite having high CEC, above $244.5cmol^+\;kg^{-1}$ could produce by using lower concentration of NaOH prepared in seawater than other production methods.

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Thermoelectric Properties of P-type (Ce1-zYbz)0.8Fe4-xCoxSb12 Skutterudites

  • Choi, Deok-Yeong;Cha, Ye-Eun;Kim, Il-Ho
    • Korean Journal of Metals and Materials
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    • v.56 no.11
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    • pp.822-828
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    • 2018
  • P-type Ce/Yb-filled skutterudites were synthesized, and their charge transport and thermoelectric properties were investigated with partial double filling and charge compensation. In the case of $(Ce_{1-z}Yb_z)_{0.8}Fe_4Sb_{12}$ without Co substitution, the marcasite ($FeSb_2$) phase formed alongside the skutterudite phase, but the generation of the marcasite phase was inhibited by increasing Co concentration. The electrical conductivity decreased with increasing temperature, exhibiting degenerate semiconductor behavior. The Hall and Seebeck coefficients were positive, which confirmed that the specimens were p-type semiconductors with holes as the major carriers. The carrier concentration decreased as the concentration of Ce and Co increased, which led to decreased electrical conductivity and increased Seebeck coefficient. The thermal conductivity decreased due to a reduction in electronic thermal conductivity via Co substitution, and due to decreased lattice thermal conductivity via double filling of Ce and Yb. $(Ce_{0.25}Yb_{0.75})_{0.8}Fe_{3.5}Co_{0.5}Sb_{12}$ exhibited the greatest dimensionless figure of merit (ZT = 0.66 at 823 K).