• 제목/요약/키워드: X-ray microscope

검색결과 1,431건 처리시간 0.026초

Organic additive effects in physical and electrical properties of electroplated Cu thin film

  • 이연승;이용혁;강성규;주현진;나사균
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2010년도 춘계학술발표대회
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    • pp.48.1-48.1
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    • 2010
  • Cu has been used for metallic interconnects in ULSI applications because of its lower resistivity according to the scaling down of semiconductor devices. The resistivity of Cu lines will affect the RC delay and will limit signal propagation in integrated circuits. In this study, we investigated the characteristics of electroplated Cu films according to the variation of concentration of organic additives. The plating electrolyte composed of $CuSO_4{\cdot}5H_2O$, $H_2SO_4$ and HCl, was fixed. The sheet resistance was measured with a four-point probe and the material properties were investigated with XRD (X-ray Diffraction), AFM (Atomic Force Microscope), FE-SEM (Field Emission Scanning Electron Microscope) and XPS (X-ray Photoelectron Spectroscopy). From these experimental results, we found that the organic additives play an important role in formation of Cu film with lower resistivity by EPD.

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저압 분전반의 화염에 의한 소손패턴 분석 (Damage Pattern Analysis of Low Voltage Cabinet Panel due to Flame)

  • 김동욱;이기연;김동우;길형준;김향곤
    • 한국화재소방학회:학술대회논문집
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    • 한국화재소방학회 2008년도 춘계학술논문발표회 논문집
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    • pp.269-272
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    • 2008
  • This paper deals with damage patterns of cabinet panel for low voltage deteriorated by flame. In order to analyze damage patterns, we used Metallurgical Microscope, x-ray system, and Fourier Transform Infrared spectroscopy. Firstly, Metallurgical microscope was used for analysis of electrical causes, such as electric short and overload. Secondly, X-ray system was used for analysis of internal characteristics of circuit breakers. Lastly, Fourier Transform Infrared spectroscopy was used for analysis of damage direction by flame. The following results were obtained.

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Competition between Phase Separation and Crystallization in a PCL/PEG Polymer Blend Captured by Synchronized SAXS, WAXS, and DSC

  • Chuang Wei-Tsung;Jeng U-Ser;Sheu Hwo-Shuenn;Hong Po-Da
    • Macromolecular Research
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    • 제14권1호
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    • pp.45-51
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    • 2006
  • We conducted simultaneous, small-angle, X-ray scattering/differential scanning calorimetry (SAXS/DSC) and simultaneous, wide-angle, X-ray scattering (WAXS)/DSC measurements for a polymer blend of poly($\varepsilon$-caprolactone)/poly(ethylene glycol)(PCL/PEG). The time-dependent SAXS/DSC and WAXS/DSC results, measured while the system was quenched below the melting temperature of PCL from a melting state, revealed the competitive behavior between liquid-liquid phase separation and crystallization in the polymer blend. The time-dependent structural evolution extracted from the SAXS/WAXS/DSC results can be characterized by the following four stages in the PCL crystallization process: the induction (I), nucleation (II), growth (III), and late (IV) stages. The influence of the liquid-liquid phase separation on the crystallization of PCL was also observed by phase-contrast microscope and polarized microscope with 1/4$\lambda$ compensator.

Microstructural and Magnetic Characterization of Fe Nanosized Powder Synthesized by Pulsed Wire Evaporation

  • Kim, Deok Hyeon;Lee, Bo Wha
    • Journal of Magnetics
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    • 제22권1호
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    • pp.100-103
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    • 2017
  • We studied the microstructure and magnetic properties of Fe nanosized powder synthesized by the pulsed wire evaporation method. The x-ray diffraction spectrum confirmed that this powder had a pure ${\alpha}$-Fe phase. Scanning electron microscope and transmission electron microscope measurements indicated that the prepared powder had uniform spherical shape with core-shell structure. The mean powder size was about 35 nm and the thickness of the surface passivation layer was about 5 nm. Energy dispersive X-ray spectroscopy measurement indicated that the surface passivation layer was iron oxide. Magnetic field dependent magnetization measurement at room temperature showed that the maximum magnetization of the prepared powder was 177.1 emu/g at 1 T.

고형 폐기물 소각재를 이용한 alinite 시멘트의 합성 (Synthesis of Alinite Cement Using Combustion Ash of Solid Wastes)

  • 강현주;홍성수;임계규;오희갑;김정석;민경소
    • 한국세라믹학회지
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    • 제37권8호
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    • pp.768-773
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    • 2000
  • Alnite clinker, which is based on CaO-SiO2-CaCl2 system, was synthesized by recycling Cl-containing waste, and its hydraulic properties were onvestigated. Alinite coinkers with two different chemical compositions were burned for 10∼30 minutes in the range of temperature, 1350∼1450$^{\circ}C$. The microstructures of those clinkers were characterized by powder X-ray diiffracuion analysis, optical microscope, and scanning electronic microscope and heat of hydration of alinite cements which was measured in order to investigate hydraulic properties. X-ray analysis shwoed that f-CaO in both clinkers with different compositions significantly was decreased with transforming C2S(belite) to C3S(alite). From the results of microscopy and scanning electron microscopy(SEM), crystal of synthesized alite(C3S) was larger and better crystallinity than that of ordinary portland cement.

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DC 마그네트론 스파터링의 비대칭 자석강조에 의한 ITO 박막 제조 및 물성에 관한 연구 (A Study on Material Properties and Fabrication of ITO Thin Films by Unbalanced-Magnet Structure in Magnetron Sputtering)

  • 신성호;김현후;박광자
    • E2M - 전기 전자와 첨단 소재
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    • 제10권7호
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    • pp.700-705
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    • 1997
  • Transparent conducting indium tin oxide (TC-ITO) thin films are deposited on soda lime glass by a dc magnetron sputtering technique having the unbalanced-magnet structure in order to improve the electrical/material characteristics and to avoid the surface damages. The material properties are measured by the x-ray diffractometer (XRD) and atomic force microscope (AFM). The (400) peak as the preferred orientation of <100> direction for ITO thin films is stabilized with the increase of substrate temperature. The surface roughness estimated by AFM 3D image at the substrate temperature of 40$0^{\circ}C$ is extremely uniform. The best resistivity of ITO films (5500 $\AA$ thick) at 40$0^{\circ}C$ is about 1.3$\times$10$^{-4}$ $\Omega$cm on the position of 4 cm from substrate center.

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X-선 회절법에 의한 철-질소 화합물층의 ε과 γ'상 분율 해석 (Fraction Analysis of ε and γ'-iron Nitride in Compound Layer Using X-ray Diffraction)

  • 김윤기
    • 한국재료학회지
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    • 제16권2호
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    • pp.85-91
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    • 2006
  • The fraction of $\varepsilon\;and\;\gamma$'-iron nitride in compound layer is predicted by x-ray diffraction using direct comparison method. The validity of formulation models was checked by comparing calculated results with metallographic analysis of iron nitride compound layer grown on steel S45C by gas nitriding. The fraction of $\varepsilon$ calculated by the three phase model, porous-$Fe_3N$/ dense-$Fe_3N$/ mixed layer with $Fe_3N\;and\;Fe_4N$, is 80 percent of that analyzed by etching technique. The $\varepsilon$ fraction predicted by mixed layer model is 122 percent of that measured by microscope.

$BaO-B_2O_3-Nd_2O_3-Al_2O_3$계 고온 용액으로부터 성장된 $NdAl_3(BO_3)_4$ 단결정의 표면구조와 X-선 Topography (Surface Structure and X-ray Topography of $NdAl_3(BO_3)_4$ Single Crystals Grown from High Temperature Solution of $BaO-B_2O_3-Nd_2O_3-Al_2O_3$ System)

  • 정선태;강진기;김정환;정수진
    • 한국세라믹학회지
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    • 제31권3호
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    • pp.249-256
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    • 1994
  • By surface structure and X-ray topographic observation, growth mechanism of NAB single crystal grown by TSSG technique using a BaB4O7 flux was studied. Surface structure of grown crystals were investigated by optical microscope. Growth history and crystal defects included within grown crystal were investigated using X-ray topography. The {001} faces were grown by 2-D nucleation growth. As decreasing cooling rate, growth mechanism of {111} and {11} was changed from 2-D nucleation growth to the growth by screw dislocation. Only surface striations developed parallel to a-axis were observed on {010} faces. Growth sector of NAB crystals were divided into {001}, {111}, {010}, {021}, {11}. The inclusion which was usually trapped between {001} faces was investigated.

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Stochastic nature of magnetic processes studied by full-field soft X-ray microscopy

  • Im, Mi-Young
    • Current Applied Physics
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    • 제18권11호
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    • pp.1174-1181
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    • 2018
  • In nanomagnetism, one of the crucial scientific questions is whether magnetic behaviors are deterministic or stochastic on a nanoscale. Apart from the exciting physical issue, this question is also of paramount highest relevance for using magnetic materials in a wealth of technological applications such as magnetic storage and sensor devices. In the past, the research on the stochasticity of a magnetic process has been mainly done by macroscopic measurements, which only offer ensemble-averaged information. To give more accurate answer for the question and to fully understand related underlying physics, the direct observation of statistical behaviors in magnetic structures and magnetic phenomena utilizing advanced characterization techniques is highly required. One of the ideal tools for such study is a full-field soft X-ray microscope since it enables imaging of magnetic structures on the large field of view within a few seconds. Here we review the stochastic behaviors of various magnetic processes including magnetization reversal process in thin films, magnetic domain wall motions in nanowires, and magnetic vortex formations in nanodisks studied by full-field soft X-ray microscopy. The origin triggering the stochastic nature witnessed in each magnetic process and the way to control the intrinsic nature are also discussed.

Electric current control of creation and annihilation of sub-100 nm magnetic bubbles examined by full-field transmission soft X-ray microscopy

  • Je, Soong-Geun;Jung, Min-Seung;Im, Mi-Young;Hong, Jung-Il
    • Current Applied Physics
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    • 제18권11호
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    • pp.1201-1204
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    • 2018
  • The effect of electric current pulses on a sub-100 nm magnetic bubble state in a symmetric Pt/Co multilayer was directly observed using a full-field transmission soft X-ray microscope (MTXM). Field-induced evolution of the magnetic stripe domains into isolated bubbles with their sizes down to 100 nm was imaged under varying external magnetic fields. Electric current pulses were then applied to the created magnetic bubbles, and it was observed that the bubbles could be either created or annihilated by the current pulse depending on the strength of applied magnetic field. The results suggest that the Joule heating plays a critical role in the formation and/or elimination of the bubbles and skyrmions. Finally, the schematic phase diagram for the creation and annihilation of bubbles is presented, suggesting an optimized scheme with the combination of magnetic field and electric current necessary to utilize skyrmions in the practical devices.