• 한국진공학회지
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• 제4권S1호
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• pp.28-33
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• 1995

TiN 박막은 저온(<$500^{\circ}C$), 저압(1Torr)에서 Tetrakis(diethylamido)titanium[TDEAT, Ti(NEt2)4]single precursor를 사용하여 증착하였다. 증차고딘 박막은 SEM(Scanning Electron Microscopy)으로 surface morphology와 step coverage를 측정하였고, TEM(Transmission Electron Microscopy)분석결과 microcrystalline의 TiN을 확인하였다. XPS(X-ray Photoelectron Spectroscopy)분석결과에 따르면 $200-500^{\circ}C$구간에서는 $\beta$-hydogen elimination에 의한 반응이 일어나고 $600-700^{\circ}C$구간에서는 thermal decomposition에 의한 반응이 일어나고 있음을 알 수 있다. Carbon과 oxygen의 농도는 AES(Auger Electron Spectroscopy)를 사용하여 측정하였으며 온도가 감소할수록 carbon의 농도가 감소하는 경향을 보여주고 있다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.60-60
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• 2010

CO2 reforming of methane (CRM) based on Ni catalysts was studied using temperature programmed reaction (TPR). The onset temperature of the CRM reaction was increased in a repeated TPR experiments. X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy showed formation of graphite structures on Ni during CRM reaction, which deactivate Ni-surfaces. Attempts were made for inhibiting deactivation of Ni surfaces and reducing onset-temperature of the CRM reaction by various surface modification techniques, which will be presented in this poster.

• 한국진공학회지
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• 제5권1호
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• pp.6-13
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• 1996

The kinetics of native oxide formation on the (Al, Ga)As and (Cd, Mn)Te have been studied by X-ray photoelectron spectroscopy(XPS) and Auger electron spectroscopy(AES). The regrowth of native oxide after 3keV Ar ion sputter etch and deionized water etch has been studied. The previous report exhibited that the native oxide on CdTe and GaAs can be removed completely by deionzied(DI) water only[1]. On the other hand, the airgrown native oxide on (Al, Ga)As become nonhomogeneous and the regrown native oxide on (Cd,Mn)Te can be partially removed.

• 청정기술
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• 제18권4호
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• pp.432-439
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• 2012

백금(Pt)과 루테늄(Ru)의 조성비가 일산화탄소(CO) 산화반응에 미치는 영향을 조사하고자 탄소를 지지체(support)로 사용한 20 wt% 백금과 백금-루테늄 시리즈 촉매(Pt : Ru = 7 : 3, 5 : 5, 3 : 7)를 콜로이드 방법(colloidal method)으로 합성하였다. 다양한 물리 화학적 분석장비인 투과전자현미경(transmission electron microscopy, TEM)과 X-선 회절(X-ray diffraction, XRD), 에너지 분산형 X-선 분석기(energy dispersive X-ray spectroscopy, EDS)를 이용하여 구조 화학적 특성을 분석하고, X-선 광전자 분광법(X-ray photoelectron spectroscopy, XPS)을 통해 전자적 특성 변화를 확인하였다. 더불어 일산화탄소 벗김 전압전류실험(CO stripping voltammetry)을 이용하여 전기화학적 거동을 분석하였다. 합성된 촉매들 중 $Pt_5Ru_5/C$가 가장 낮은 개시 전위(vs. Ag/AgCl)와 가장 큰 일산화탄소의 전기화학적 활성화 표면적(CO EAS) 값을 나타냈으며 이를 통해 $Pt_5Ru_5/C$이 일산화탄소의 전기화학적 산화반응에 있어 가장 효과적인 촉매임을 확인하였다. $Pt_5Ru_5/C$의 격자상수 변화를 통한 구조적 특성변화 및 백금 d-밴드의 페르미 레벨 변화를 통한 전자적 특성변화 그리고 이작용기(bifunctional)의 효과가 일산화탄소의 전기화학적 산화반응에 대한 활성을 증진시켰다고 사료된다.

• 한국전자파학회논문지
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• 제26권1호
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• pp.101-112
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• 2015

II~VI족 화합물 반도체 $Zn_xCd_{1-x}S$ 박막을 Indium-tin-oxide(ITO)가 도포된 유리기판 상에 열증발법을 사용하여 증착하였다. 박막의 합성비(molar ratio) x($0{\leq}x{\leq}1$)는 CdS(x=0) 박막과 ZnS(x=1) 박막을 포함하여, 삼원화합물 $Zn_xCd_{1-x}S$ 박막을 제조하기 위하여 변화시켰다. 또한, 증착한 박막의 결정성을 높이기 위하여 진공전기로에서 열처리 하였으며, 분광학적 특성조사를 위해서는 $400^{\circ}C$에서 열처리한 $Zn_xCd_{1-x}S$ 박막이 최적임을 알았다. $Zn_xCd_{1-x}S$ 박막의 합성비(x)와 전자적 구조를 조사하기 위하여 X-선 광전자 분광법(XPS)을 사용하였고, 박막시료의 광학적 에너지 띠 간격 $E_g$는 자외선-가시광-근접 적외선(UV-Vis-NIR) 분광법으로 측정하였으며, 합성비(x)값이 0에서 1까지 변화함에 따라 2.44~3.98 eV 범위의 값을 보여주었다. 끝으로, THz-TDS(Time Domain Spectroscopy) 시스템을 사용하고 $Zn_xCd_{1-x}S$ 박막의 THz파 특성을 측정하여 테라헤르츠(THz) 영역용 전자 및 광학 소자로서 응용가능성을 확인하였다.

• Bulletin of the Korean Chemical Society
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• 제31권2호
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• pp.309-314
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• 2010

The surface modified $LiMn_2O_4$ materials with Li-Fe composites were prepared by a sol-gel method to improve the electrochemical performance of $LiMn_2O_4$ and were characterized by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), scanning electron microscopy-energy dispersive spectroscopy (SEM-EDS), and transmission electron microscopy (TEM)-EDS. XRD results indicate that all the samples (modified and pristine samples) have cubic spinel structures, and XRD, XPS, and TEM-EDS data reveal the formation of $Li(Li_xFe_xMn_{2-2x})O_4$ solid solution on the surface of particles. For the electrochemical properties, the modified material demonstrated dramatically enhanced reversibility and stability even at elevated temperature. These improvements are attributed to the formation of the solid solution, and thus-formed solid solution phase on the surface of $LiMn_2O_4$ particle reduces the dissolution of Mn ion and suppresses the Jahn-Teller effect.

• 한국펄프종이공학회:학술대회논문집
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• 한국펄프종이공학회 1999년도 Pre-symposium of the 10th ISWPC Recent Advances in Paper Science and Technology
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• pp.239-244
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• 1999

aluminum sulfate (alum) as a representative retention aid in papermaking processes was added to pulp suspensions, and the aluminum components adsorbed on the pulp were investigated quantitatively by two types of X-ray elementary analyses with regard to simultaneous changes of their surface charges. X-ray photoelectron spectroscopy (XPS) and X-ray fluorescence analysis (XFA) were applied to determine the aluminum components retained in pulp pads up to ca. 10 nm and 100${\mu}$m depth, respectively. In other words, XPS was utilized to analyze the outermost surface layers of the samples, and XFA was available for measurement of their extensive regions. A particle charge detector (PCD) was used to monitor streaming potentials at various pHs of the pulp mixtures under moderate sharing conditions. At pH 4.5 of pulp suspensions containing alum, surface charges of pulp fibers varied from negative to slight negative (approximately neutral) according to adsorption of aluminum components onto the pulp fibers. Subsequently, when a dilute NaOH solution in limited amounts was added to pulp mixtures, both streaming potentials and surface aluminum content of the pulp fibers increased distinctly although little total aluminum retention increased. Further addition of alkali solutions brought drastic decreases of the surface charges and surface aluminum content, while total aluminum content, on the contrary, increased gradually under neutral conditions. These results indicate that residual aluminum ions remained in pulp suspensions are predominantly adsorbed on surfaces of pulp fibers by adequate alkali additions and they must sufficiently cationize the fiber surfaces with increases of somewhat cationic aluminum complexes formed on the surfaces. On the other hand, aluminum components formed in higher pH ranges have nearly no contribution to improvement of charge properties of the pulp fiber surfaces, even though aluminum retention in pulp pads increases. XPS and XFA analyses combined with streaming potential measurement using a PCD suggest close relationships between aluminum content on the pulp fiber surfaces and their charge properties.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.384-384
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• 2010

Zirconium oxynitride films were obtained by r.f. reactive magnetron sputtering of a zirconium target with nitrogen flow rate ranging from 0 to 60 sccm. The phases present in the films were determined by X-ray diffraction (XRD). Measurements of the oxidation state $ZrON_x$ films were investigated by X-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES). Thickness of these samples was estimated by spectroscopic ellipsometry (SE) and scanning electron microscopy (SEM). We found that the surface morphology of $ZrON_x$ films measured by atomic force microscopy (AFM) was also depended on the nitrogen gas flow.

• 한국진공학회지
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• 제10권3호
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• pp.328-334
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• 2001

초박막 게이트 유전막 및 비휘발성 기억소자의 게이트 유전막으로 연구되고 있는 NO/$N_2$O 질화산화막 및 재산화질화산화막의 특성을 D-SIMS(dynamic secondary ion mass spectrometry), ToF-SIMS(time-of-flight secondary ion mass spectrometry), XPS(x-ray Photoelectron spectroscopy)으로 조사하였다. 시료는 초기산화막 공정후에 NO 및 $N_2$O 열처리를 수행하였으며, 다시 재산화공정을 통하여 질화산화막내 질소의 재분포를 형성토록 하였다. D-SIMS 분석결과 질소의 중심은 초기산화막 계면에 존재하며 열처리 공정에서 NO에 비해서 $N_2$O의 경우 질소의 분포는 넓게 나타났다. 질화산화막내 존재하는 질소의 상태를 조사하기 위하여 ToF-SIMS 및 XPS 분석을 수행한 결과 SiON, $Si_2$NO의 결합이 주도적이며 D-SIMS에서 조사된 질소의 중심은 SiON 결합에 기인한 것으로 예상된다. 재산화막/실리콘 계면근처에 존재하는 질소는 $Si_2$NO 결합형태로 나타나며 이는 ToF-SIMS로 얻은 SiN 및 $Si_2$NO 결합종의 분포와 일치하였다.

• 한국전기전자재료학회논문지
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• 제15권1호
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• pp.15-23
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• 2002

In this study, metal/ZnO contacts were thermally annealed at different temperatures (as-dep., 400$^{\circ}C$, 600$^{\circ}C$, 800$^{\circ}C$, 1000$^{\circ}C$) for the investigation of electrical properties, and surface and interface characteristics. The analysis of the element composition and the chemical bonding state of the surface was made by the XPS(X-ray photoelectron spectroscopy). An attempt was made to establish the electrical property-microstructure relationship for the (Ti, Au)/ZnO. The Ti/ZnO contact exhibits an ohmic characteristics with a relatively high contact resistance of 4.74${\times}$10$\^$-1/ $\Omega$$\textrm{cm}^2$ after an annealing at 400$^{\circ}C$. The contact showed a schottky characteristics when the samples were annealed at higher temperature than 400$^{\circ}C$. The transition from the ohmic to schottky characteristics was contributed from the formation of the oxide layers as was confirmed by the peaks for O-O and Ti-O bondings in XPS analysis. For the Au/ZnO contact the lowest contact resistance was obtained from the as-deposited sample. The resistance was slowly increased with annealing temperature up to 600$^{\circ}C$. The ohmic characteristics were maintained eden fort 600$^{\circ}C$ annealing. The XPS analysis showed that the Au-O intensity was dramatically decreased with temperature above 600$^{\circ}C$.