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Microstructure Characterization on Nano-thick Nickel Cobalt Composite Silicide on Polycrystalline Substrates (다결정 실리콘 기판 위에 형성된 나노급 니켈 코발트 복합실리사이드의 미세구조 분석)

  • Song, Oh-Sung
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.8 no.2
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    • pp.195-200
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    • 2007
  • We fabricated thermally-evaporated 10 nm-Ni/70 w-Poly-Si/200 $nm-SiO_2/Si$ and $10nm-Ni_{0.5}Co_{0.5}/70$ nm-Poly-Si/200 $nm-SiO_2/Si$ structures to investigate the microstructure of nickel monosilicide at the elevated temperatures required fur annealing. Silicides underwent rapid anneal at the temperatures of $600{\sim}1100^{\circ}C$ for 40 seconds. Silicides suitable for the salicide process formed on top of the polycrystalline silicon substrate mimicking the gates. A four-point tester was used to investigate the sheet resistances. A transmission electron microscope and an Auger depth profile scope were employed for the determination of cross sectional microstructure and thickness. 20nm thick nickel cobalt composite silicides on polycrystalline silicon showed low resistance up to $900^{\circ}C$, while the conventional nickle silicide showed low resistance below $900^{\circ}C$. Through TEM analysis, we confirmed that the 70nm-thick nickel cobalt composite silicide showed a unique silicon-silicide mixing at the high silicidation temperature of $1000^{\circ}C$. We identified $Ni_3Si_2,\;CoSi_2$ phase at $700^{\circ}C$ using an X-ray diffractometer. Auger depth profile analysis also supports the presence of this mixed microstructure. Our result implies that our newly proposed NiCo composite silicide from NiCo alloy films process may widen the thermal process window for the salicide process and be suitable for nano-thick silicides.

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A Comparison of Physical Health, Anxiety and Depression between the Dan-Jeon Breathing Trained group and non-trained group (단전호흡 수련인과 비수련인의 신체건강, 불안, 우울정도 비교)

  • Hyun, Kyung Sun;Kang, Hyun Sook;Ahn, Dong Hwan
    • Korean Journal of Adult Nursing
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    • v.12 no.2
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    • pp.245-255
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    • 2000
  • The purpose of this study is to compare the physical health, anxiety and depression of the Dan-Jeon Breathing trained group with those of a non-trained group and to analyze the relationship between the training period of Dan-Jeon Breathing method and physical health, anxiety, and depression. The number of people in the Dan-Jeon Breathing trained group over 3 months was 149 and in the non-trained group 142. Data were collected from August to October 1999. As tools, 35 physical symptom questions were chosen from The Cornell Medical Index modified by Nam(1965) and from the Symptom Checklist-90-Revision(SCL-90-R) by Kim(1984); 10 questions on anxiety and 13 questions on depression were used in the study. The statistics of the study were gathered by using SPSS Window; the analysis was made by applying $X^2$-test, t-test, Pearson correlation, ANOVA and Scheffe tests. The results were as follows. 1. The Dan-Jeon Breathing trained group had lower physical symptom score and showed less anxiety and depression than the non-trained group, which supported the 1st, 2nd, 3rd hypotheses. 2. The longer the training period of Dan-Jeon Breathing, the lower the physical symptom score, which supports the 4th hypothesis, but the 5th and, 6th hypotheses were not supported because anxiety and depression did not get lower as the training period of Dan-Jeon Breathing got longer. 3. The physical symptom score, anxiety and depression that were made by the general characteristics of Dan-Jeon Breathing trained group were analyzed. As a result, the physical symptom score of women was greater than that of men. Physical symptoms score and the rate of anxiety and depression were different by education levels. The degree of anxiety was different by age. Those who have a religion have a higher physical symtoms score than people who have no religion. There was no difference in physical health score, anxiety and depression according to marital status, economic status and occupations. The results suggest that the physical and mental health status of Dan-Jeon Breathing trained group is better than that of the non-trained group. Physical symptoms scores gets lower as the training period of Dan-Jeon Breathing gets longer which results in the improvement of physical health status.

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Formulation of a reference coordinate system of three-dimensional (3D) head & neck images: Part I. Reproducibility of 3D cephalometric landmarks (3차원 두부영상의 기준좌표계 설정을 위한 연구: 1부 CT영상에서 3차원 계측점의 재현성)

  • Park, Jae-Woo;Kim, Nam-Kug;Chang, Young-Il
    • The korean journal of orthodontics
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    • v.35 no.5 s.112
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    • pp.388-397
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    • 2005
  • The purpose of this study was to redefine the cephalometric landmarks in three-dimensional (3D) images, which are used in orthodontic cephalometric radiography, and to evaluate the reproducibility of each landmark for 3D cephalometric analysis. Eighteen CT scans were taken at the Department of Diagnostic Radiology at Seoul National University Dental Hospital and manipulated with V works 4.0(Cybermed Inc., Seoul, Korea). The coordinate system was established using 7 reference points, with no more than 4 points on the same plane. These 7 points were generated as a volume model, the voxel size of which was 4 by 4 by 2 (threshold value=639). The cephalometric landmarks were selected at the multiplanar reformation (MPR) window on the volume mode of V works 4.0. The selected landmarks were exported to V surgery (Cybermed Inc., Seoul, Korea) for the calculation of coordinate values. All the data were taken twice with a lapse of 2 weeks by one investigator The reproducibility of each landmark was $0.17\~1.21mm$ in the x axis, $0.30\~1.53mm$. In the y axis, and $0.27\~1.81mm$ in the z axis. In all three axes, the range of error was similar. These error ranges were acceptable with regards to the pixel space and slice thickness. The most reproducible points were 1 points which were selected on the basis of the volume model. The least reproducible points were J points that were defined by sutures.

Thermal Stability Enhancement of Nickel Monosilicides by Addition of Pt and Ir (Pt와 Ir 첨가에 의한 니켈모노실리사이드의 고온 안정화)

  • Yoon, Ki-Jeong;Song, Oh-Sung
    • Journal of the Microelectronics and Packaging Society
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    • v.13 no.4
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    • pp.27-36
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    • 2006
  • We fabricated thermally evaporated 10 nm-Ni/(poly)Si, 10 nm-Ni/l nm-Ir/(poly)Si and 10 nm-Ni/l nm-Pt/(poly)Si films to investigate the thermal stability of nickel monosilicides at the elevated temperatures by rapid annealing them at the temperatures of $300{\sim}1200^{\circ}C$ for 40 seconds. Silicides of 50 nm-thick were formed on top of both the single crystal silicon actives and the polycrystalline silicon gates. A four-point tester was used to examine sheet resistance. A scanning electron microscope and field ion beam were employed for thickness and microstructure evolution characterization. An X-ray diffractometer and an Auger depth profiler were used for phase and composition analysis, respectively. Nickel silicides with platinum have no effect on widening the NiSi stabilization temperature region. Nickel silicides with iridium farmed on single crystal silicon showed a low resistance up to $1200^{\circ}C$ while the ones formed on polycrystalline silicon substrate showed low resistance up to $850^{\circ}C$. The grain boundary diffusion and agglomeration of silicides lowered the NiSi stable temperature with polycrystalline silicon substrates. Our result implies that our newly proposed Ir added NiSi process may widen the thermal process window for nano CMOS process.

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Seismic Data Processing For Gas Hydrate using Geobit (Geobit을 이용한 가스 하이드레이트 탐사자료 처리)

  • Jang Seong-Hyung;Suh Sang-Yong;Chung Bu-Heung;Ryu Byung-Jae
    • Geophysics and Geophysical Exploration
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    • v.2 no.4
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    • pp.184-190
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    • 1999
  • A study of gas hydrate is a worldwide popular interesting subject as a potential energy source. A seismic survey for gas hydrate have performed over the East sea by the KIGAM since 1997. General indicators of natural submarine gas hydrates in seismic data is commonly inferred from the BSR (Bottom Simulating Reflection) that occurred parallel to the see floor, amplitude decrease at the top of the BSR, amplitude Blanking at the bottom of the BSR, decrease of the interval velocity, and the reflection phase reversal at the BSR. So the seismic data processing for detecting gas hydrates indicators is required the true amplitude recovery processing, a accurate velocity analysis and the AVO (Amplitude Variation with Offset) analysis. In this paper, we had processed the field data to detect the gas hydrate indicators, which had been acquired over the East sea in 1998. Applied processing modules are spherical divergence, band pass filtering, CDP sorting and accurate velocity analysis. The AVO analysis was excluded, since this field data had too short offset to apply the AVO analysis. The accurate velocity analysis was performed by XVA (X-window based Velocity Analysis). This is the method which calculate the velocity spectrum by iterative and interactive. With XVA, we could determine accurate stacking velocity. Geobit 2.9.5 developed by the KIGAM was used for processing data. Processing results say that the BSR occurred parallel to the sea floor were shown at $367\~477m$ depths (two way travel time about 1800 ms) from the sea floor through shot point 1650-1900, the interval velocity decrease around BSR and the reflection phase reversal corresponding to the reflection at the sea floor.

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Characteristics of ferroelectric $YMnO_3$ thin film with low dielectric constant for NDRO FRAM (비파괴 판독형 메모리 소자를 위한 저유전율 강유전체 $YMnO_3$박막의 특성 연구)

  • 김익수;최훈상;최인훈
    • Journal of the Korean Vacuum Society
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    • v.9 no.3
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    • pp.258-262
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    • 2000
  • $YMnO_3$thin films are deposited on Si(100) and $Y_2O_3/Si(100)$ substrate by radio frequency sputtering. The deposition condition of oxygen partial pressure and annealing temperature have significant influences on the preferred orientation of $YMnO_3$film and the size of memory window. The results of x-ray diffraction show that the film deposited in the oxygen partial pressure of 0% is highly oriented along c-axis after annealing at $870^{\circ}C$ for 1 hr in oxygen ambient. However, the films deposited on Si and $Y_2O_3/Si$ in the oxygen partial pressures of 20% show $Y_2O_3$ peak, the excess $Y_2O_3$ in the $YMnO_3$film suppresses the c-axis oriented crystallization. Especially memory windows of the $Pt/YMnO_3/Y_2O_3/Si$ capacitor are 0.67~3.65 V at applied voltage of 2~12 V, which is 3 times higher than that of the film deposited on $Y_2O_3/Si$ in 20% oxygen (0.19~1.21 V) at the same gate voltage because the film deposited in 0% oxygen is well crystallized along c-axis.

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The Relationship between the Stage of Exercise Behavior Change and Physical Self-Concept and Self-Efficacy of Casino Security Employees (카지노 시큐리티 종사자의 운동변화단계에 따른 신체적 자기개념과 자기 효능감의 관계)

  • Chun, Yong-Tae;Oh, Jung-Il
    • Korean Security Journal
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    • no.21
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    • pp.95-120
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    • 2009
  • This study was designed to investigate the relationship between the stages of exercise behavior change and physical self-concept and self-efficacy of security employees in hotel casinos. The sampling was drawn from employees at 8 casinos which had more than 30 employees. Participants were selected by convenience sampling method and they completed questionnaires about Physical Self-Concept and Self- Efficacy by self-administration method under supervision of trained researchers SPSS 16.0 (Statistical Package for the Social Science) was used for data analysis in the present study. Reliability and validity were examined for the present study. The principle component factor analysis and varimax rotation were used for the present study. Eigen value 1.0 was the criterion for selecting factors. Chi-square (X) 2 test was utilized for measuring the difference in gender and types of job duties at the stages of exercise behavior change. One-way ANOVA was employed to examine the relationship between the stages of exercise behavior change as an independent variable and physical self-concept and self-efficacy as dependent variables. The Scheffe method was used to determine mean differences of groups as a follow-up test. Multiple regression analysis was utilized to test the difference of physical self-concept as dependent variable and self-efficacy as independent variable. To verify hypothesis for the study, a statistical significance level of $\alpha$=.05 was used. The results were as follow: first, there were differences found for gender and types of job responsibilities in the stages of exercise behavior change. Secondly, as security employees progressed through the stages of exercise behavior change, their physical self-concept and self-efficacy improved. Finally, physical activity and body fat had significant main effects on self-efficacy.

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Development of JPEG2000 Viewer for Mobile Image System (이동형 의료영상 장치를 위한 JPEG2000 영상 뷰어 개발)

  • 김새롬;정해조;강원석;이재훈;이상호;신성범;유선국;김희중
    • Progress in Medical Physics
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    • v.14 no.2
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    • pp.124-130
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    • 2003
  • Currently, as a consequence of PACS (Picture Archiving Communication System) implementation many hospitals are replacing conventional film-type interpretations of diagnostic medical images with new digital-format interpretations that can also be saved, and retrieve However, the big limitation in PACS is considered to be the lack of mobility. The purpose of this study is to determine the optimal communication packet size. This was done by considering the terms occurred in the wireless communication. After encoding medical image using JPGE2000 image compression method, This method embodied auto-error correction technique preventing the loss of packets occurred during wireless communication. A PC class server, with capabilities to load, collect data, save images, and connect with other network, was installed. Image data were compressed using JPEG2000 algorithm which supports the capability of high energy density and compression ratio, to communicate through a wireless network. Image data were also transmitted in block units coeded by JPEG2000 to prevent the loss of the packets in a wireless network. When JPGE2000 image data were decoded in a PUA (Personal Digital Assistant), it was instantaneous for a MR (Magnetic Resonance) head image of 256${\times}$256 pixels, while it took approximately 5 seconds to decode a CR (Computed Radiography) chest image of 800${\times}$790 pixels. In the transmission of the image data using a CDMA 1X module (Code-Division Multiple Access 1st Generation), 256 byte/sec was considered a stable transmission rate, but packets were lost in the intervals at the transmission rate of 1Kbyte/sec. However, even with a transmission rate above 1 Kbyte/sec, packets were not lost in wireless LAN. Current PACS are not compatible with wireless networks. because it does not have an interface between wired and wireless. Thus, the mobile JPEG2000 image viewing system was developed in order to complement mobility-a limitation in PACS. Moreover, the weak-connections of the wireless network was enhanced by re-transmitting image data within a limitations The results of this study are expected to play an interface role between the current wired-networks PACS and the mobile devices.

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Development of Acquisition and Analysis System of Radar Information for Small Inshore and Coastal Fishing Vessels - Suppression of Radar Clutter by CFAR - (연근해 소형 어선의 레이더 정보 수록 및 해석 시스템 개발 - CFAR에 의한 레이더 잡음 억제 -)

  • 이대재;김광식;신형일;변덕수
    • Journal of the Korean Society of Fisheries and Ocean Technology
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    • v.39 no.4
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    • pp.347-357
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    • 2003
  • This paper describes on the suppression of sea clutter on marine radar display using a cell-averaging CFAR(constant false alarm rate) technique, and on the analysis of radar echo signal data in relation to the estimation of ARPA functions and the detection of the shadow effect in clutter returns. The echo signal was measured using a X -band radar, that is located on the Pukyong National University, with a horizontal beamwidth of $$3.9^{\circ}$$, a vertical beamwidth of $20^{\circ}$, pulsewidth of $0.8 {\mu}s$ and a transmitted peak power of 4 ㎾ The suppression performance of sea clutter was investigated for the probability of false alarm between $l0-^0.25;and; 10^-1.0$. Also the performance of cell averaging CFAR was compared with that of ideal fixed threshold. The motion vectors and trajectory of ships was extracted and the shadow effect in clutter returns was analyzed. The results obtained are summarized as follows;1. The ARPA plotting results and motion vectors for acquired targets extracted by analyzing the echo signal data were displayed on the PC based radar system and the continuous trajectory of ships was tracked in real time. 2. To suppress the sea clutter under noisy environment, a cell averaging CFAR processor having total CFAR window of 47 samples(20+20 reference cells, 3+3 guard cells and the cell under test) was designed. On a particular data set acquired at Suyong Man, Busan, Korea, when the probability of false alarm applied to the designed cell averaging CFAR processor was 10$^{-0}$.75/ the suppression performance of radar clutter was significantly improved. The results obtained suggest that the designed cell averaging CFAR processor was very effective in uniform clutter environments. 3. It is concluded that the cell averaging CF AR may be able to give a considerable improvement in suppression performance of uniform sea clutter compared to the ideal fixed threshold. 4. The effective height of target, that was estimated by analyzing the shadow effect in clutter returns for a number of range bins behind the target as seen from the radar antenna, was approximately 1.2 m and the information for this height can be used to extract the shape parameter of tracked target..

H-T-P reaction Study on differences between the juvenile delinquents groups classified by the family system type for Creative happy Education management (창의적 행복학교 교육경영을 위한 HTP 검사 반응 연구)

  • Park, Soon Marn;Choi, Chong Myoung;Kim, Jin Nyo;Byun, Sang Hae
    • Asia-Pacific Journal of Business Venturing and Entrepreneurship
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    • v.8 no.3
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    • pp.157-163
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    • 2013
  • This study is to notify differences of H-T-P reactions between Juvenile delinquents groups classified by family system type. This study aims to know reaction of 'House' on each juvenile delinquents and apply to creative school education administration. The research was performed as below: First, Measuring and descriptive statistical analysis were performed. One hundred and twenty subjects who were youths disposed of Seoul nambu youth alternative education center. Data were collected from July to October in 2012. Then There were classified Two groups following subjects; 'parents family' and 'single parent family'. Second, Questionaries assessing demographic and H-T-P by Buck, N. Third, statistical analysis was done by SPSS for Window 18.0. To Verify the reliability of the measures and correlations between two groups, and to find out the difference of the reaction of 'House', were used frequency analysis and Pearson Chi-Square. The results of this is significant personality types of juvenile delinquents are followings; The Juvenile delinquents living 'Single parent family' have frustrations for their past and current family. Also they have mental conflicts for their family better than another group.

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