• Title/Summary/Keyword: Working Gas

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NH3 Sensing Properties of SnO Thin Film Deposited by RF Magnetron Sputtering

  • Vu, Xuan Hien;Lee, Joon-Hyung;Kim, Jeong-Joo;Heo, Young-Woo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.272-272
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    • 2014
  • SnO thin films, 100 nm in thickness, were deposited on glass substrates by RF magnetron sputtering. A stack structure of $SnO_2/SnO$, where few nanometers of $SnO_2$ were determined on the SnO thin film by X-ray photoelectron spectroscopy. In addition, XPS depth profile analysis of the pristine and heat treated thin films were introduced. The electrical behavior of the as-sputtered films during the annealing was recorded to investigate the working conditions for the SnO sensor. Subsequently, The NH3 sensing properties of the SnO sensor at operating temperature of $50-200^{\circ}C$ were examined, in which the p-type semiconducting sensing properties of the thin film were noted. The sensor shows good sensitivity and repeatability to $NH_3$ vapor. The sensor properties toward several gases like $H_2S$, $CH_4$ and $C_3H_8$ were also introduced. Finally, a sensing mechanism was proposed and discussed.

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Characteristics of ZnO Thin Film for SMR-typed FBAR Fabrication (FBAR 소자제작을 위한 ZnO 박막 증착 및 특성)

  • Shin, Young-Hwa;Kwon, Sang-Jik;Kim, Hyung-Jun
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.18 no.2
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    • pp.159-163
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    • 2005
  • This paper gives characterization of ZnO thin film deposited by RF magnetron sputtering method, which is concerned in deposition process and device fabrication process, to fabricate solidly mounted resonator(SMR)-type film bulk acoustic resonator(FBAR). A piezoelectric layer of 1.1${\mu}{\textrm}{m}$ thick ZnO thin films were grown on thermally oxidized SiO$_2$(3000 $\AA$)/Si substrate layers by RF magnetron sputtering at the room temperature. The highly c-axis oriented ZnO thin film was obtained at the conditions of 265 W of RF power, 10 mtorr of working pressure, and 50/50 of Ar/O$_2$ gas ratio. The piezoelectric-active area was 50 ${\mu}{\textrm}{m}$${\times}$50${\mu}{\textrm}{m}$, and the thickness of ZnO film and Al-3 % Cu electrode were 1.4 ${\mu}{\textrm}{m}$ and 180${\mu}{\textrm}{m}$, respectively. Its series and parallel frequencies appeared at 2.128 and 2.151 GHz, respectively, and the qualify factor of the resonator was as high as 401.8$\pm$8.5.

Some properties of ZnO:Al Transparent Conducting Films by DC Magnetron Sputtering Method (DC 마그네트론 스퍼터법에 의한 ZnO:Al 투명전도막 특성)

  • Park, Kang-Il;Kim, Byung-Sub;Kim, Hyun-Su;Lim, Dong-Gun;Park, Gi-Yub;Lee, Se-Jong;Kwak, Dong-Joo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.07a
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    • pp.143-146
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    • 2003
  • Al doped Zinc Oxide(ZnO:Al) films, which is widely used as a transparent conductor in optoelectronic devices such as solar cell, liquid crystal display, plasma display panel, thermal heater, and other sensors, were prepared by using the capacitively coupled DC magnetron sputtering method. The influence of the substrate temperature, working gas pressure and discharge power on the electrical, optical and morphological properties were investigated experimentally. The consideration on the effect of doping amounts of Al on the electrical and optical properties of ZnO thin film were also carried out. ZnO:Al films with the optimum growth conditions showed resistivity of $9.42{\times}10^{-4}\;{\Omeg}-cm$ and transmittance of 90.88% for 840nm in film thickness in the wavelength range of the visible spectrum.

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Analysis of Agricultural Working Load Experiments for Reduction Gear Ratio Design of an Electric Tractor Powertrain (전기구동 파워트레인의 감속기어비 설계를 위한 농용 트랙터의 작업 부하 분석)

  • Kim, Jung-Yun;Park, Yeong-Il
    • Transactions of the Korean Society of Automotive Engineers
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    • v.20 no.5
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    • pp.138-144
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    • 2012
  • Recent environmental issues such as exhaust gas and greenhouse effect make the agricultural machinery market takes into account the hybrid and electric propulsion technology used in automotive engineering. Generally the agricultural machinery, particularly an agricultural tractor, needs large load capacity and long continuous operating time comparing with conventional vehicles. In case of a pure electric tractor, it is necessary for considering large capacity batteries and long charging time. Therefore we take an AER extended PHEV (All Electric Range extended Plug-in Hybrid Electric Vehicle) power transmission system in developing an electric tractor in this study. First we propose a PHEV powertrain structure in order to substitute the conventional diesel engine equipped tractor. And we performed the road tests using a conventional mechanical tractor with various load conditions, which were classified and statistically treated real agricultural works. The test results were analysed with respect to the power characteristics of the power source. Finally using the test result, we designed two-stepped reduction gear ratios in the proposed an electric tractor powertrain for carrying out typical agricultural works.

Numerical Visualization of the Unsteady Shock Wave Flow Field in Micro Shock Tube

  • Arun, Kumar R.;Kim, Heuy-Dong
    • Journal of the Korean Society of Visualization
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    • v.10 no.1
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    • pp.40-46
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    • 2012
  • Recently micro shock tube is extensively being used in many diverse fields of engineering applications but the detailed flow physics involved in it is hardly known due to high Knudsen number and strong compressibility effects. Unlike the macro shock tube, the surface area to volume ratio for a micro shock tube is very large. This unique effect brings many complexities into the flow physics that makes the micro shock tube different compared with the macro shock tube. In micro shock tube, the inter- molecular forces of working gas can play an important role in specifying the flow characteristics of the unsteady shock wave flow which is essentially generated in all kinds of shock tubes. In the present study, a CFD method was used to predict and visualize the unsteady shock wave flows using the unsteady compressible Navier-Stokes equations, furnished with the no-slip and slip wall boundary conditions. Maxwell's slip equations were used to mathematically model the shock movement at high Knudsen number. The present CFD results show that the propagation speed of the shock wave is directly proportional to the initial pressure and diameter of micro shock tube.

Development of Heat-treatment Furnace with Maximum Uniform Zone using Gas-phase Condensing Heat Exchange (기상응축 열교환을 이용한 고정밀 등온 가열로 개발)

  • Hong, Hyun-Seon;Kong, Man-Seek;Kang, Hwan-Kook
    • Journal of the Korean Society for Heat Treatment
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    • v.22 no.3
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    • pp.162-168
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    • 2009
  • A horizontal tube furnace with a wide uniform-temperature zone was developed using isothermal characteristics of a heat pipe. The heat pipe heating system consists of a concentric annular shaped stainless-steel container, sodium as a working fluid and a screen mesh wick structure. The performance test of the heat pipe revealed that temperature changes along seven consecutive positions of the heat pipe outer wall were less than${\pm}0.1^{\circ}C$, thereby ensuring the high isothermal property. The isothermal property of the heat pipe-adapted tube fumace was investigated and compared to a conventional non-heat pipe type tube furnace. The temperature distribution measurement showed that the uniform temperature zone, in which temperature change is less than${\pm}$1$^{\circ}$C, of the heat pipe employed tube furnace system was about three times longer compared to the conventional tube furnace system.

Numerical Simulation and Experimental Study on an Ejector System for VOC Recovery (VOC 회수를 위한 이젝터 시스템에 관한 수치모사 및 실험적 연구)

  • Kim, Hyun-Dong;Lee, Dong-Yeop;Kim, Yoon-Kee;Jeong, Won-Taek;Ahn, Joo-Ha;Kim, Kyung-Chun
    • Journal of the Korean Society of Visualization
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    • v.9 no.2
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    • pp.54-60
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    • 2011
  • This paper is a basic study on volatile organic compounds(VOC) recovery system in a crude oil carrier. VOC is easily evaporated in cargo tankers during loading and transportation of crude oil, causes serious environmental contamination and a huge economic loss. An ejector system is designed to mix VOC gas into crude oil flow to reduce VOC concentration. Detail two-phase flow inside the ejector is simulated using a commercial CFD code. To verify the numerical prediction, a scale-down experiment is conducted. Instead of crude oil and VOC, water and air are used as the working fluids. Flow characteristics and main parameters are obtained by two-phase flow visualization and PIV measurements. Air volume flow rate induced by the ejector is compared with respect to the volume flow rate of water using experimental and numerical results. Overall performance of the two-phase ejector predicted by the CFD simulation agrees well with that of the experiment.

Heteroepitaxial Structure of ZnO Films Deposited on Graphene, $SiO_2$ and Si Substrates

  • Pak, Sang-Woo;Cho, Seong-Gook;Kim, Eun-Kyu
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.309-309
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    • 2012
  • Heteroepitaxial growth remains as one of the continuously growing interests, because the heterogeneous crystallization on different substrates is a common feature in the fabrication processes of many semiconductor materials and devices, such as molecular beam epitaxy, pulsed laser deposition, sputtering, chemical bath deposition, chemical vapor deposition, hydrothermal synthesis, vapor phase transport and so on [1,2]. By using the R.F. sputtering system, ZnO thin films were deposited on graphene 4 and 6 mono layers, which is grown on 400 nm and 600 nm $SiO_2$ substrates, respectively. The ZnO thin layer was deposited at various temperatures by using a ZnO target. In this experimental, the working power and pressure were $3{\times}10^{-3}$ Torr and 50 W, respectively. The base pressure of the chamber was kept at a pressure around $10^{-6}$ Torr by using a turbo molecular pump. The oxygen and argon gas flows were controlled around 5 and 10 sccm by using a mass flow controller system, respectively. The structural properties of the samples were analyzed by XRD measurement. The film surface and carrier concentration were analyzed by an atomic force microscope and Hall measurement system. The surface morphologies were observed using field emission scanning electron microscope (FE-SEM).

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Thermomechanical Properties of Thermal-Stress Relief Type of Functionally Gradient Materials

  • Watanabe, Ryuzo
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 1993.11a
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    • pp.2-2
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    • 1993
  • The present status of the thennomechanica1 evaluation of functionally gradient materials(FGMs) for space plane application was reviewed, in which research activities and the cooperation of the national project team organized to study FGM science were demonstrated. The project team was divided into three working groups; de singing, processing and evaluation, each of which had their own tasks in the project cooperation. The testings details of the various thennomechanical tests for the FGM samples fabricated by the processing groups were described, along with their corresponding heating conditions of the real environments in the space plane application. For small-sized samples, laser beam heating test and burner heating test were well applied to study the heat shielding and heat resisting properties. Arc-heated wind tunnel test and high temperature!high velocity gas flow test were used for large-sized panel assemblies having cooling structures. The criteria for the evaluation of the heat shielding and heat resisting properties of the FGMs, as well as a crack activation mechanism in their differential temperature heating, were proposed on the basis of the observation in the burner heating test.

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Influence of surface morphology on H2S sensing property of Cu2O thin film deposited by RF magnetron sputtering

  • Hien, Vu Xuan;You, Jae-Lok;Jo, Kwang-Min;Kim, Se-Yun;Lee, Joon-Hyung;Kim, Jeong-Joo;Heo, Young-Woo
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2014.11a
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    • pp.250-251
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    • 2014
  • This study introduces a simple deposition of $Cu_2O$ thin films with surface morphologies composed of columns, submicron-rods and submicron-branches on glass substrate from metallic Cu targets by tailoring the $Ar/O_2$ ratios during the sputtering. The obtained samples were used to fabricate gas sensor. The $H_2S$ sensing properties of the sensors at working temperatures from $100^{\circ}C$ to $300^{\circ}C$ were studied, in which $Cu_2O$ submicron-branches performed the best sensing property comparing with the rest morphologies. A transformation of $Cu_2O$ to $Cu_2S$ and CuS was consider as a main factor to the sensing mechanism of the sensors.

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