• 제목/요약/키워드: Working Gas

검색결과 705건 처리시간 0.03초

The improvement of Cu metal film adhesion on polymer substrate by the low-power High-frequency ion thruster

  • Jung Cho;Elena Kralkina;Yoon, Ki-Hyun;Koh, Seok-Keun
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2000년도 제18회 학술발표회 논문개요집
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    • pp.60-60
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    • 2000
  • The adhesion interface formation between copper and poly(ethylene terephthalate)(PET), poly(methyl methacrylate)(PMMA) and Polyimide films was treated using Ion assisted reaction system to sequential sputter deposition by High-Frequency ion source. The ion beam modification system used a new type of low power HF ion thruster for space application as new low thruster electric propulsion system. Low power HF ion thruster with diameter 100mm gives the opportunity to obtain beams of Ar+ with currents 20~150 mA (current density 0.5~3.5 mA/cm2) and energy 200~2500eV at HF power level 10~150 W. Using Ar as a working gas it is possible to obtain thrust within 3~8 mN. Contact angles for untreated films were over 95$^{\circ}$ and 80 for Pet, 10o for PMMA and 12o for PI samples as a condition of ion assisted reaction at the ion dose of 10$\times$1016 ions/cm2, the ion beam potential of 1.2 keV and 4 ml/min for environmental gas flow rate. 900o peel tests yielded values of 15 to 35 for PET, 18 to 40 and 12 to 36 g/min. respectively. High resolution X-ray photoelectron spectrocopy is the Cls region for Cu metal on these polymer substrates showed increases in C=O-O groups for polymide, whereas PET and PMMA treated samples showed only C=O groups with increase the ion dose. Finally, unstable polymer surface can be changed from hydrophobic to hydrophilic formation such as C-O and C=O that were confirmed by the XPS analysis, conclusionally, the ion assisted reaction is very effective tools to attach reactive ion species to form functional groups on C-C bond chains of PET, PMMA and PI.

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Plasma Effects on Nucleation of the RPCVD/MOCVD Copper Films

  • 이종현;이정환;손승현;박병남;배성찬;최시영
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2000년도 제18회 학술발표회 논문개요집
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    • pp.132-132
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    • 2000
  • Cu는 Al에 비하여 낮은 저항(1.8 $\mu$$\Omega$-cm)과 높은 EM 저항성을 가지고 있어 미래의 고속 ULSI 배선물질로 그 중요성이 더욱 증가되고 있으며, 현재까지 많은 연구가 진행되고 있다. 따라서, 본 논문에서는 이러한 방법들을 고려하여 CVD Cu의 문제점인 낮은 성장률의 개선과 Cu 박막의 특성을 향상하고자 수소 플라즈마 공정을 이용하여 plasma 전처리가 초기 Cu 핵생성에 미치는 영향에 대하여 연구하였다. 본 실험에 사용된 장비는 Cu RPCVD/MOCVD이다. 초기 Cu 핵의 생성에 있어서의 수소 플라즈마의 효과를 조사하기 위하여 다음과 같은 3가지의 방법으로 행하였다. 첫 번째는 Cu 박막 형성에서 플라즈마를 사용하지 않은 방법, 두 번째는 플라즈마 전처리공정을 행한 뒤, Cu 박막 증착시 플라즈마는 사용하지 않은 방법, 세 번재는 플라즈마 전처리공저을 행한 뒤 Cu 증착시에도 플라즈마를 사용한 방법이다. 이 세가지 방법의 핵생성 차이를 분석하기 위해서 각각 10초, 20초, 40초 증착시킨 후 grain의 크기와 개수를 비교하였다. 또한 플라즈마의 power에 따른 Cu 핵생성율도 조사하였다. 수소 전처리동안 working pressure는 10분 동안 1 torr로 유지되었으며 substrate의 온도는 20$0^{\circ}C$, r.f.power는 100watt로 설정하였다. Cu RPCVD의 증착조건은 r.f.power는 10watt, substrate의 온도는 20$0^{\circ}C$, gas pressure는 1 torr, Ar carrier gas는 50sccm, hydrogen processing gas는 100sccm, bubbler 온도는 4$0^{\circ}C$, gas line의 온돈느 6$0^{\circ}C$, shower head의 온도는 $65^{\circ}C$로 설정하였다. 증착된 Cu 박막은 SEM, XRD, AFM를 통해 제작된 박막의 특성을 비교.분석하였다. 초기 plasma 처리를 한 경우에는 그림 1에서와 같이 현저히 증가한 초기 구리 입자들이 관측되었으며, 이는 도상 표면에 활성화된 catalytic site의 증가에 기인한다고 보여진다. 이러한 특성은 Cu films의 성장률을 향상시키고, 또한 voids를 줄여 전기적 성질 및 surface morphology를 향상시키는 것으로 나타났다.

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가스발생기 연료개폐밸브의 동적 거동 (Dynamic Characteristics for Fuel Shutoff Valve of a Gas Generator)

  • 이중엽;허환일
    • 한국추진공학회지
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    • 제14권4호
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    • pp.1-9
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    • 2010
  • 가스발생기용 연료개폐밸브는 파일롯 공압으로 포핏을 열고 스프링 힘에 의해 닫음으로써 로켓엔진의 연료 유량을 제어한다. 현재 개발 중인 가스발생기 연료개폐밸브는 액추에이터에서 압력이 제거되더라도 유로부에 해당 압력이 존재한다면 스스로 열림을 유지하는 방식으로 설계되어 있다. 밸브의 성능을 평가하기 위해 밸브가 열리고 닫히는 특성에 따라 힘 평형 상태를 분석할 필요가 있다. 이를 위하여 밸브의 포핏이 열리기 위한 파일롯 압력과 닫히기 위한 유로부 압력을 힘 평형에 의해 조절되도록 설계하였다. 또한, 사용 소프트웨어 인 AMESim을 이용하여 동적 모델을 구성하였고 Fluent CFD 해석을 통해 밸브의 고유유량계수를 구해보았다. 예측과 해석을 통해 획득 된 결과들은 실험 결과와 비교하였고, 밸브의 동적 거동을 실험을 통해 확인하였다.

경기도 자살사망자의 자살방법에 영향을 미치는 요인 -5개년(2016~2020년) 자살사망자 자료 분석을 바탕으로- (Factors Influencing Suicide Methods in Gyeonggi-do Suicide Deceased: Based on the 5-year (2016~2020) Suicide Death Data Analysis)

  • 김정숙;선민정;천유진
    • 동서간호학연구지
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    • 제29권2호
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    • pp.129-140
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    • 2023
  • Objectives: Suicide rate in South Korea is one of the major public health concerns. This study examined the factors influencing the suicide methods of people who committed suicide in Gyeonggi-do, which accounts for one-fourth of the population of South Korea. Methods: This study analyzed the data of a total of 13,945 suicide deaths in Gyeonggi-do over a five-year period (2016-2020) provided by the Statistics Korea and the influence of social and demographic characteristics on the analyzed suicide methods. The differences in suicide methods according to the social and demographic characteristics of suicide victims were compared and analyzed through chi-squared, and items with significant differences in univariate tests were analyzed by multiple logisitic regression analysis. Results: Among suicide deaths, the most common method of suicide was hanging (52.4%). In particular, women, were employed, and stayed at home were higher risk of being hanged. The second most common method of suicide was leaping (17.7%). Women under the age of 30, those with a college degree or higher, those who were not working, time of death (6-12), and those outside the home were more likely to choose to take the leap. The third most common method of suicide was gas poisoning (15.8%). Young people under the age of 65, college graduates or higher, without a spouse, were employed, and spring season were at increased risk of choosing gas poisoning. Conclusions: The results highlight the need for policies that consider risk factors such as gender, age, education, marital status, employments status, time of suicide, and place of suicide in order to block access to suicide methods for suicide victims in Gyeonggi-do.

Assessment of Questionnaire of Physical Activity at Workplace Based on the Social Cognitive Theory (PAWPQ-SCT): A Psychometric Study in Iranian Gas Refinery Workers

  • Kamel Ghobadi;AhmadAli Eslami;Asiyeh Pirzadeh;Seyed Mohammad Mazloomi;Fatemeh Hosseini
    • Safety and Health at Work
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    • 제14권4호
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    • pp.358-367
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    • 2023
  • Background: This study aimed to develop and assess the psychometric features of the Physical Activity at Workplace Questionnaire (PAWPQ) based on the Social Cognitive Theory (SCT) to evaluate employees' physical activity (PA) behaviors at the workplace. Methods: This psychometric cross-sectional study was conducted on 455 employees working in one of the gas refineries in Iran. The participants were selected using the proportional stratified sampling method in 2019. The data collection tools were a demographic information questionnaire, the short form of the International Physical Activity Questionnaire (IPAQ), and a questionnaire developed based on the SCT, whose psychometric features were confirmed in terms of validity and reliability. Data were analyzed using SPSS22 and AMOS20 software. Results: The first version of PAWPQ-SCT had 74 items. After evaluating content and face validity, nine items were removed. The results of the content validity index (0.98), content validity ratio (0.86), and impact score (3.62) were acceptable for the whole instrument. In exploratory factor analysis, after removing seven items-58-item final version of the scale-six factors could explain 73.54% of the total variance. The results of structural equation modeling showed the acceptable fit of the model into the data (RMSEA = 0.052, CFI = 0.917, NFI = 0.878, TLI = 0.905, IFI = 0.917, CMIN/DF = 2.818). Cronbach's alpha coefficient and Intraclass Correlation were 0.90 and 0.86, respectively. Conclusion: This study confirmed that the psychometric features of the 58-item final version of PAWPQSCT constructs were acceptable in a sample of Iranian employees. This questionnaire can be used as a valid and reliable tool to evaluate Iranian employees' PA behaviors and develop effective educational interventions for workers and managers.

200kW ORC 터빈 개발 및 구성 (Design and Configuration of 200kW Organic Rankine Cycle Turbine)

  • 한상조;서종범
    • 대한기계학회논문집B
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    • 제38권12호
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    • pp.1057-1064
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    • 2014
  • 최근 전세계적으로 재생에너지의 관심이 증가하고 있다. 그 중 많은 관심을 받고 있는 것이 상대적으로 낮은 온도의 폐열을 사용하는 유기랭킨사이클(ORC)이다. 유기랭킨사이클은 기존의 증기터빈사이클과 유사한 기술을 사용하지만 낮은 온도의 폐열을 사용하기 위해서 증기대신 냉매를 작동유체로 사용한다. 작동유체를 냉매로 사용함으로 인해 이상기체 가정을 사용할 수 없고, 이는 ORC 시스템에 이용되는 터빈의 설계를 좀 더 복잡하게 만든다. 또, 냉매의 큰 분자량과 복잡한 분자구조로 인하여 낮은 음속을 가지게 되고 이로 인해서 쉽게 초킹 조건에 접근하게 된다. 본 연구에서 R245fa를 작동유체로 하여 입구온도 $124^{\circ}$에 팽창비 9 의 조건에서 터빈의 효율을 증가시키기 위해 다단으로 설계된 아음속 ORC 터빈을 설계하는 과정과 터빈의 성능에 대하여 설명하고자 한다. 설계된 터빈은 200kW 급의 ORC 발전 시스템에 사용될 예정이다.

배기의 유속분포가 CDPF의 재생 시 비정상적 열적 거동에 미치는 영향 (The Effect of Flow Distribution on Transient Thermal Behaviour of CDPF during Regeneration)

  • 정수진;이점주;최창호
    • 한국자동차공학회논문집
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    • 제17권2호
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    • pp.10-19
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    • 2009
  • The working of diesel particulate filters(DPF) needs to periodically burn soot that has been accumulated during loading of the DPF. The prediction of the relation between an uniformity of gas velocity and soot regeneration efficiency with simulations helps to make design decisions and to shorten the development process. This work presents a comprehensive combined 'DOC+CDPF' model approach. All relevant behaviors of flow fluid are studied in a 3D model. The obtained flow fields in the front of DPF is used for 1D simulation for the prediction of the thermal behavior and regeneration efficiency of CDPF. Validation of the present simulation are performed for the axial and radial direction temperature profile and shows goods agreement with experimental data. The coupled simulation of 3D and 1D shows their impact on the overall regeneration efficiency. It is found that the flow non-uniformity may cause severe radial temperature gradient, resulting in degrading regeneration efficiency.

Electro-Optical Characteristics of the Ion-Beam-Aligned FFS-LCD on a Diamond-like-Carbon Thin Film

  • Hwang, J.Y.;Park, C.J.;Seo, D.S.;Jeong, Y.H.;Kim, K.C.;Ahn, H.J.;Baik, H.K.
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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    • pp.1132-1136
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    • 2004
  • In this paper, we intend to make FFS mode cell with LC alignment used non-rubbing method, ion beam alignment method on the a-C:H thin film, to analyze electro-optical characteristics in this cell. We studied on the suitable inorganic thin film for FFS-LCD and the aligning capabilities of nematic liquid crystal (NLC) using the new alignment material of a-C:H thin film as working gas at rf bias condition. A high pretilt angle of about 5$^{\circ}$ by ion beam(IB) exposure on the a-C:H thin film surface was measured. An excellent voltage-transmittance (V-T) and response time curve of the ion-beam-aligned FFS-LCD was observed with oblique ion beam exposure on the DLC thin films.

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SIMULATION OF UNIT CELL PERFORMANCE IN THE POLYMER ELECTROLYTE MEMBRANE FUEL CELL

  • Kim, H.G.;Kim, Y.S.;Shu, Z.
    • International Journal of Automotive Technology
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    • 제7권7호
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    • pp.867-872
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    • 2006
  • Fuel cells are devices that convert chemical energy directly into electrical energy. Owing to the high efficiency of the fuel cells, a large number of research work have been done during these years. Among many kinds of the fuel cells, a polymer electrolyte membrane fuel cell is such kind of thing which works under low temperature. Because of the specialty, it stimulated intense global R&D competition. Most of the major world automakers are racing to develop polymer electrolyte membrane fuel cell passenger vehicles. Unfortunately, there are still many problems to be solved in order to make them into the commercial use, such as the thermal and water management in working process of PEMFCs. To solve the difficulites facing the researcher, the analysis of the inner mechanism of PEMFC should be implemented as much as possible and mathematical modeling is an important tool for the research of the fuel cell especially with the combination of experiment. By regarding some of the assumptions and simplifications, using the finite element technique, a two-dimensional electrochemical mode is presented in this paper for the further comparison with experimental data. Based on the principals of the problem, the equations of electronic charge conservation equation, gas-phase continuity equation, and mass balance equation are used in calculating. Finally, modeling results indicate some of the phenomenon in a unit cell, and the relationships between potential and current density.

신너사용 작업장의 유기용제 노출 및 $TiO_2$ 광촉매를 이용한 BTX처리에 관한 연구 (Organic Solvent Exposure of Thinner-Using Occupation and Its Treatment by Means of $TiO_2$ Photocatalyst)

  • 양원호;김현용;손부순;박종안
    • 환경위생공학
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    • 제17권2호
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    • pp.26-33
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    • 2002
  • Ultimate objective of industrial hygiene is the prevention of health impairment that may result from exposure to chemicals at workplace. Workers in solvent thinner-using occupation environment may be highly exposed to VOCs (volatile organic compounds) because solvent thinner has been used extensively such as painting, spraying, degreasing, coating and so on in Korea. The purpose of this study was to recognize, evaluate, and propose the control methods of VOCs from solvent thinner-using workplace. Five target volatile organic compounds (benzene, toluene, ethylbenzene, o-xylene, and m-xylene) were monitored in H company of Shiwa Industrial Complex and analyzed in perosnal, occupational indoor and outdoor during working hours simultaneously. Engineering control such as local ventilation should be made in considering the long-term exposure, though measured VOCs concentration did not exceed the workplace exposure standards. In addition, air cleaning device should be installed in local ventilation because Shiwa Industrial Complex has had the serious ambient air pollution. Currently, environmental purification using $TiO_2$ photocatalyst have attracted a great deal of attention with increasing number of recent environmental problems. In this study, $TiO_2$ sol coated on the ceramic bead was prepared by sol-gel method and the photodegradation of target compounds was investigated in gas phase by the exposure to UV-A lamp(365nm) in a batch system.