• Proceedings of the KSME Conference
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• 2001.06a
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• pp.865-870
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• 2001

A sensing element for tri-axial force measurement, unit sensor of tactile sensor, was designed and evaluated by using finite element method (ANSYS). The sensor has a maximum force range of ${\pm}10$ N in the x, y, and z direction. Optimal cell structures and piezoresistor positions were determined by the strain distribution obtained from finite element analysis. Finally three Wheatstone birdge circuits were arranged and verified by $F_x$, $F_y$, and $F_z$ loading conditions. In addition, in case of sensing element subjected to thermal loading, the outputs of three bridge circuits were also evaluated.