• Asian Journal of Atmospheric Environment
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• 제7권3호
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• pp.161-168
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• 2013

In this study, an investigation was conducted to assess the washout mechanism of Asian dust particles through both laboratory-scale experiment and model calculation. To artificially simulate Asian dust particle, $CaCO_3$ particles were generated inside an experimental chamber. They were then scavenged by the artificial rain drops. The abundant $CaCO_3$ particles scavenged on a rain drop were successively identified by SEM observation. The concentrations of Ca in residual $CaCO_3$ particles on individual droplet were quantified by PIXE analysis. There was a tendency toward a high accumulation of Ca on a relatively small drop (e.g., <1.0 mm diameter). It is thus suggested that smaller rain drops can effectively scavenge a significant amount of Asian dust particles in ambient atmosphere. The numerical estimation can account for 92.1% and 83.2% of Ca that were measured in small (<1.0 mm diameter) and large (>2.0 mm diameter) size drops, respectively.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 하계학술대회 논문집
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• pp.347-350
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• 2001

A typical Mold method is to form a gate electrode, a gate oxide, and emitter tip after fabrication of mold shape using wet-etching of Si substrate. In this study, however, new Mold method using a side wall space structure is used in order to make sharper emitter tip with a gate electrode. Using LPCVD(low pressure chemical vapor deposition), a gate oxide and electrode layer are formed on a Si substrate, and then BPSG(Boro phospher silicate glass) thin film is deposited. After, the BPSG thin film is flowed into a mold as high temperature in order to form a sharp mold structure. Next TiN thin film is deposited as a emitter tip substance. The unfinished device with a glass substrate is bonded by anodic bonding techniques to transfer the emitters to a glass substrate, and Si substrate is etched using KOH-deionized water solution. Finally, we made sharp field emitter array with gate electrode on the glass substrate.

• 수산해양교육연구
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• 제19권3호
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• pp.366-372
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• 2007

This paper presents the fabrication techniques of microcooling fins for microelectronics applications. The various types of cooling fins have been fabricated on the surface of a silicon wafer (4inch-N type) by using wet etching technique. The designed micro fins and micro channels are considered as an effective method for cooling microelectronics devices generating high heat flux. Further we extensively investigate the design processes fabricating micro fins and channels which can cool the heat generated from high density electronics devices.

• 한국초전도학회:학술대회논문집
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• 한국초전도학회 1999년도 High Temperature Superconductivity Vol.IX
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• pp.138-141
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• 1999

For the enhancement of communication system performance, high quality filters are required. Conventional metal filters made of copper can be substituted by high quality high temperature superconductivity(HIS) flms for better performance. In order to reduce the size of the filter for the integration of device in the limited area, we have fabricated hairpin type filters using pulsed laser deposition(PLD) technique. The superconducting YBCO thin films have been grown on MgO substrates by PLD with Nd:YAC laser. The YBCO films were patterned by conventional wet-etching process. We have compared YBCO filters and copper filters which were made with the same spec. Simulated and measured frequency responses reveal that HIS YBCO hairpin type bandpass filters show better performance than copper filters.

• 한국결정성장학회지
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• 제5권4호
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• pp.400-407
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• 1995

전극함몰형 태양전지는 19% 이상의 변환효율을 갖는 고효율 실리콘 태양전지이다. 본 논문은 전극 함몰형 태양전지의 제조공정과 특성에 대하여 조사하였다. 전극함몰형 태양전지의 제조공정은 세 번의 고온과정, 한번의 진공증착과정, 한번의 레이저 응용과정 및 다른 화학공정들로 구성되어 있다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 하계학술대회 논문집 D
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• pp.1546-1548
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• 1998

Dual mode ring resonators(DMRR) have been fabricated using laser ablated $YBa_2Cu_3O_{7-x}$ superconducting thin films. The transition temperature of YBCO thin films were 85 - 88 K and the film thicknesses were about 5,000 $\AA$. Dual mode ring resonators were patterned by standard photolithography process and wet-etching. Then two-layer metal thin films (Ti/Ag) have been deposited for the ground plane on the back side of substrate by e-beam and thermal evaporation. The input/output feedline angles of each resonator were $60^{\circ}$, $100^{\circ}$, $180^{\circ}$. A network analyzer was used for testing the performance of the resonators in the frequency range of 6-13 GHz at 77 K.

• 전자공학회논문지D
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• 제35D권2호
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• pp.60-69
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• 1998

Polysilicon surface mdoification tecnique is developed to reduce the sticking of microstructures fabricated by micromachining. Modified anti-sticking grain holes are simply formed by two-step dry eth without additional photolithography nor deposition of thin films. Both process-induced sticking and in-use sticking are successfully reduced more than two times by adopting grain holed polysilicon substrate. A sticking model for cantilever beam is derived. This model includes bending moment stems from stress gradient along the thickness directionof structural polysilicon. Because the surface tension of rinse liquid and the surface energy of the solids to be stuk tend to decrease in recently developed anti-sticking techniques, the effect of stress gradient will play an important role to analyze the sticking phenomena. Effect of the temperature during post-release rinse and dry is modelled and verified experimentally. Based on developed anti-sticking polysilicon structure and the sticking model, sticking of microstructure, fabricated by simple wet process including sacrificial layer etch and rinse with deionized water without special equimpment for post-release rinse and dry was alleviated more than 3.5 times.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1997년도 추계학술대회 논문집 학회본부
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• pp.288-290
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• 1997

Pulsed laser ablation has been used to fabricate superconducting $YBa_2Cu_3O_{7-x}$(YBCO) thin films on MgO substrates. The epitaxial YBCO thin films were grown at $750^{\circ}C$ and oxygen partial pressure of 200 mTorr. The electrical property and the characteristics of the YBCO thin films have been studied by R-T measurement. scanning electron microscopy (SEM) and X-ray diffraction (XRD). A microstrip line resonator has been fabricated using YBCO superconducting thin films by photolithography and wet-etch process. The resonator has linear microstrip line separated by a gap of 0.278 mm. We observed a fundamental resonance peak at the frequency of 10.007 GHz.

• 한국대기환경학회:학술대회논문집
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• 한국대기환경학회 2000년도 춘계학술대회 논문집
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• pp.85-86
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• 2000

80년대 초기 연구에서는 강수의 산성화 문제가 산업활동이 집중된 서울이나 도시지역에서 대부분 수행되었고 인력과 연구비등의 제한으로 인하여 관측지점이 한정적이어서 산성강하물의 전체적인 특징을 파악할 수 있는 전국적인 감시망을 구성하지 못하고 각 연구기관들의 관심이나 여건에 따라 특정지역에 편중되어 있었다(이보경, 1999). 최근 우리 나라를 비롯한 동아시아 지역은 높은 인구밀도와 급속한 산업발전으로 인해 대기오염 문제가 심각한 지역으로 주목받고 있으며, 대기오염물질 장거리 이동과 관련하여 한반도 강수 산성화 현상 및 추세파악, 원인 규명 및 대책 수립을 위한 지속적인 정밀 관측이 요구되고 있다. (중략)

• 한국대기환경학회:학술대회논문집
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• 한국대기환경학회 2001년도 추계학술대회 논문집
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• pp.197-198
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• 2001

대기 중 인위적 자연적 발생원에 기인하는 SO$_2$, NOx 및 HCs는 균일반응(homogeneous reaction)과 불균일반응(heterogenous reaction)을 통해서 산화되어 산성가스와 에어로졸을 형성한다. 대부분의 산성물질은 대기 중 구름, 안개, 에어로졸 액적중에서 균일반응을 통해 생성되며, 입자표면에서 가스상 물질의 불균일반응은 에어로졸농도가 높은 배출원 근처에서 국한된다. 이와 같은 반응을 통해 생성된 산성오염물질 및 전구물질은 건성 및 습성침적(dry and wet deposition)을 통해 지표면에 침강되어 생태계에 직ㆍ간접적인 영향을 줄 뿐만 아니라 산성우 및 동식물의 호흡기질환에 중요한 영향을 미친다.(Petros et al., 1989) (중략)